SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 10/24/2023Revised (if Applicable):

Document Number: 7179
SNARF for: Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Generic Model for Communication and Control of Manufacturing Equipment (GEM) to
SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Diagnostic Data Acquisition Task Force NA
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Currently, SEMI E164 contains all the requirements related to how EDA metadata should be organized, including metadata requirements based on other SEMI standards (e.g., SEMI E30, E87, E94, E40, etc.). These other standards are called ‘content standards’. SEMI E164 defines requirements on how EDA metadata is mapped to the variables, events and alarms defined in those content standards.

SEMI E164 is being reorganized into a primary-subordinate structure, where new subordinate standards (E164.x, E164.y, etc.) capture the common EDA metadata mapping requirements for specific content standards (e.g., E30, E40, E87, etc.) currently specified in E164. This structure will make it easier to keep the E164 suite of standards current as other referenced content standards evolve.

Finally, a secondary objective is to simplify the scope of E164 somewhat while retaining its focus on achieving consistency of equipment metadata models across process types and equipment suppliers.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: 300mm wafer fabs and factories that use EDA standards, anyone who uses SEMI E164

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Create a new subordinate standard to SEMI E164 with the metadata requirements corresponding to content standard SEMI E30. (Use existing content from SEMI E164-0414 (0721) as a starting point).

As part of this work, the Task Force will consider the following items:
· Revise the existing requirements to be consistent with changes made to other SEMI Standards in the EDA Standards Suite in preparation for EDA Freeze 3, focusing especially on required metadata model structure, common content, and naming conventions.

· Update metadata requirements to ensure all items specified by the content standard are defined. Investigate using well-known-names specified by the content standard to uniquely identify the item in this new subordinate standard.

· In an attempt to simply the requirements for this content standard, determine if there are any metadata requirements currently defined in the latest version of SEMI E164 related to this content standard that are not necessary.

· Provide a way to identify metadata that exist in specific revisions of the content standard. (for example, parameters, events or exceptions that existed in previous revisions of the content standard that were retired and removed from the current revision of the content.)

· Create new complementary files in JSON/C format (rather than XML) that
1) describe the required metadata model elements (nodes, variables, events, exceptions, etc.) related to this content standard
2) establish which elements are required and which are optional.

Note - the choice of JSON/C should be considered provisional while the technical considerations of its use for various purposes is under evaluation.

Changes to SEMI E164 to remove requirements related to this content standard and create new corresponding subordinate standards for the other content standards referenced by SEMI E164 will be described in other SNARFs.

The scope also includes any other changes to address features, defects, or Style Guide issues raised by Task Force members during the development and review of the proposed changes related to these SNARF topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations.

b: Expected result of activity
New Subordinate Standard to an existing Standard or to a new Primary Standard to be developed concurrently with this new Subordinate Standard

For a new Subordinate Standard, identify the Primary Standard here:


Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/01/2023b. 1st Draft by: 01/01/2024
c. (Optional) Informational Ballot by: d. Letter Ballot by: 05/01/2024
e. TC Chapter Approval By:07/01/2024

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Information & Control – GEM 300 Task Force

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 10/25/2023
Member Review End Date: 11/8/2023

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/08/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on