SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5071
SNARF for: Revision to M76, Specification for developmental 450 mm diameter polished single crystal silicon wafers

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: International 450 mm Wafer Task Force

1. Rationale: Industry needs guidance with respect to handling of 450mm wafers before arriving at IC manufacturers. For being able to develop the appropriate handlings concept M76 should contain information about wafer back surface contamination and defectivity requirements.
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Technology generation 32nm and higher, Wafer specification, 450mm activities

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/01/2010b. 1st Draft by: 12/01/2010
c. Preballot by: d. Technical Ballot by: 03/01/2011
e. Committee Approval By:07/01/2010

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on October 20, 2010