SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5450
SNARF for: Revision to SEMI M49-0912, Guide for Specifying Geometry Measurement Systems for Silicon Wafers for the 130 nm to 22 nm Technology Generations with Title Change to: Guide for Specifying Geometry Measurement Systems for Silicon Wafers for the 130 nm to 16 nm Technology Generations


Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: International Advanced Wafer Geometry Task Force


1. Rationale: Along with progress for further wafer fabrication technology, the market needs to add the data for advanced technology. The current SEMI Standard M49 defines up to 22nm technical generation and need to add next generation technology of 16nm. The market already have consensus HVM of next generation will be started within several years.
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
This revision includes all necessary parameter data to be applied to requirements of 16nm technical generation
- Title change to “GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 nm TO 16 nm”
- Add Level3 Variability, Matching Tolerance and Bias for 16nm technology generation in Table 4 also add 16nm Scaling models in Table A!-2
- Change 200mm usage for 32nm and 22nm Technical generation at Table 4.1.1
- Change 450mm usage for 130nm, 90nm, 65nm and 45nm Technical generation at Table 3.1.3 and Table 4.1.3
- Add SEMI M80 in 3.1 SEMI Standards and Table 1-1.7 Type of Cassettes as references.
- Clean up erroneous items and add information at Reference Wafer Properties in table 3, 4 and 5.


b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/01/2012b. 1st Draft by: 07/01/2012
c. Preballot by: d. Technical Ballot by: 10/01/2012
e. Committee Approval By:12/01/2012




Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 10, 2012