SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5070
SNARF for: Revision to SEMI M76-0710, Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International 450 mm Wafer Task Force

1. Rationale: An update of M76 to improve the edge shape design.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Improve M76 with better edge shape definition.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 09/14/2010b. 1st Draft by: 12/02/2010
c. Preballot by: d. Technical Ballot by: 01/01/2011
e. Committee Approval By:07/01/2011

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on September 14, 2010