SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5446
SNARF for: New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS)


Originating Global Technical Committee: Gases
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Filters and Purifiers Task Force


1. Rationale: Cavity Ring-down Spectroscopy (CRDS) analyzers provide the user with an absolute measurement (no calibration gases required) down to ppt level detection limits. The equipment is simple to install and does not require a skilled technician to operate. The analyzers do not have any moving parts and the only “maintenance” required is a software routine
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Create a new test method. Cavity Ring-down Spectroscopy (CRDS) analyzers provide the user with an absolute measurement (no calibration gases required) down to ppt level detection limits. The equipment is simple to install and does not require a skilled technician to operate. The analyzers do not have any moving parts and the only “maintenance” required is a software routine

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/01/2012b. 1st Draft by: 10/01/2012
c. Preballot by: d. Technical Ballot by: 04/01/2013
e. Committee Approval By:07/01/2013




Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 10, 2012