SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 01/15/2023Revised (if Applicable):

Document Number: 7173
SNARF for: Line-Item Revision to SEMI E30-0423, SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: GEM 300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
During the Japan GEM300 Task Force meeting held on June 15, 2023, improvement for SEMI E30-0423 was discussed and the Task Force agreed on the necessity of the revision to SEMI E30-0423.

SEMI E30 is one of the most applied Standards in the industry and maintaining the quality of the Document is significant for providing correct specifications to the Standard users.

Now that, the new activity of revising E30-0423 is required to improve the Document quality.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: 300mm semiconductor equipment users and suppliers who applying SEMI E30.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Line Items to correct SEMI E30-0423

Line Item 1 - Remove requirements to the host
Line Item 2 - Corrections in scenarios in section 7
Line Item 3 - Corrections in section 7.7 Process Program Management
Line Item 4 - Corrections in section 7.9 Terminal Service
Line Item 5 - Corrections in section 7.14 documentation request
Line Item 6 - Corrections in Appendixes

Details are described in the following table.


#
Reference
Issue
Comment



Line Item 1 Remove requirements to the host
1.1
6.5.10.2
Requirements to the host is specified with the phrase "host shall".
The host is not in the scope of the requirement, so the description for the host should be changed.
1.2
6.5.10.2
A requirement for equipment is listed in the section titled for host.
The requirement should be removed from the section.



Line Item 2 Corrections in scenarios in section 7
2.1
7.2.5.2
Changing "SEND" to "Send" in the scenario description is required for the consistent expression.
Editorial Change from "SEND" to "Send".
2.2
7.3.3.3
The paragraph packs multiple descriptions in one sentence, so the readers get difficulty of understanding.
Decompose definitions into one on one to improve the readability.
2.3
7.3.3.5.1
In the COMMENT, "[DO] TOTSMP REPGSZ times" is incorrect.
It should be "[DO] TOTSMP/REPGSZ times."
2.4
7.3.4.5.1
Messages are not described in the scenario.
Add descriptions of the messages.
2.5
7.3.4.5.1
The referenced section in the COMMENT(§ 7.3.1) is too generic to puzzle the readers.
Remove the reference to make the sentence just "Send enabled event report to host." There are similar notes in the other parts of the document, which should be removed as well.



Line Item 3 Corrections in section 7.7 Process Program Management
3.1
Table 7
In "Stream 7 Formatted", the description confuses the readers, because it is not expressed sufficiently.
The description should be improved.
3.2
7.7.5.2
The first sentence is kind of hard to read.
The readability should be improved.
3.3
7.7.6.2
The title "Process Program Creation, Editing, or Deletion Process Program Created, Edited, or Deleted by Operator:" is incorrect.
The title should be "Process Program Creation, Editing, or Deletion by Operator:"
3.4
7.7.6.2
The description in the COMMENT "New process program" is not true for editing and deleting.
The description should be just "process program" that is removed "New".
3.5
7.7.6.3.1
The format of E30EquipmentInitiatedPPOption equipment constant is not 51 but the structure that is defined in Table 9.
The description should be corrected referring to Table 9.
3.6
7.7.7.3
In the COMMENT, S7F1 is defined to confirm the multi-block. This is not correct. It is to confirm the resources, per E5.
Remove the description in the COMMENT about the multi-block. There are other similar descriptions in the document which should be removed.
3.7
7.7.8.5
In the COMMENT for S21F4, "Equipment acknowledges receipt of the process program." is incorrect.
The sentence should be changed to "Host acknowledges receipt of the process program." which changes "Equipment" to "Host".
3.8
7.7.11.5
In the COMMENT for S21F4, "Equipment acknowledges receipt of the process program." is incorrect.
The sentence should be changed to "Host acknowledges receipt of the process program." which changes "Equipment" to "Host".



Line Item 4 Corrections in section 7.9 Terminal Service
4.1
7.9.4.1
Optionally sending an S10F1 message to send information to the host is not an intended part of the section.
Remove the optional scenario of sending a message from the operator.
4.2
7.9.4.3
Optionally sending an S10F3 message to send information to the operator is not an intended part of the section.
Remove the optional scenario of sending a message from the host.



Line Item 5 Corrections in section 7.14 documentation request
5.1
7.14.2.1
It says that the equipment shall support Stream 21 to allow the host to request end-user GEM documentation.
(1) It can be interpreted the host is allowed to request the end user to provide the document.
(2) The GEM Documentation is not defined.
(3) The document usually has "confidential" stamps on every page and should be managed to secure confidential information.
(1) Improve the description to clarify the requirement.
(2) Define the GEM Documentation.
(3) Add note that the access control should be applied to avoid unmanaged copies of the manual.



Line Item 6 Corrections in Appendixes
6.1
A1-2.1
The COMMENT for the S13F4 should not be Send Data Set Send.
The description should be changed to Open Data Set Data.
6.2
A1-2.2
The blank cell under the COMMENT for the S6F11 is making the description difficult to read.
Shift the text “successful upload” up one cell to make the description complete.
6.3
A1-2.4
The COMMENT for the S13F6 should not be Open Data Set Data.
The description should be changed to Read Data Set Data.
6.4
A2-3
In the table for the Stream 7 messages, descriptions in the direction column are incorrect.
Correct the description referring to SEMI E5.
6.5
A3-4.3.2
The COMMENT for the S13F2 should not be Send Data Set Send Acknowledge.
The description should be changed to Send Data Set Acknowledge.
6.6
A3-4.3.4
The COMMENT for the S13F2 should not be Send Data Set Send Acknowledge.
The description should be changed to Send Data Set Acknowledge.
6.7
A3-4.3.4
The COMMENT for the S13F3 should not be Open Data Set Data.
The description should be changed to Open Data Set Request.
6.8
A3-4.3.4
The COMMENT for the S13F4 should not be Open Data Set Request.
The description should be changed to Open Data Set Data.
6.9
A3-4.4.4
(1) The section number is duplicated with the previous section,
(2) The order of S13F4 and F13F3 is incorrect.
(1) Re-number that section.
(2) Reverse the order of messages; put S13F3 first and S13F4 next.
6.10
A4-1
The codes for the PPFormat are incorrect.
Correct the codes by referencing SEMI E5. The codes start with 1 = Unformatted process program.



b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/15/2023b. 1st Draft by: 01/15/2024
c. (Optional) Informational Ballot by: d. Letter Ballot by: 02/01/2024
e. TC Chapter Approval By:01/01/2024

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Information & Control – GEM 300 Task Force

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/15/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on