SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/17/2023Revised (if Applicable):

Document Number: 7139
SNARF for: Line Item Revisions to E40-1218, Standard For Processing Management and E40.1-1218, Specification For SECS-II Protocol For Processing Management

Originating Global Technical Committee: Information & Control
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: GEM300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
In most 300mm frontend and advanced backend factories, E90 and E40 are used together to track Substrate and Process Job status. Factory host usually checks E90 state for all materials in a job when a Process Job completes and makes decision if the job is completed successfully.

But some factories did not track E90 events, or thought the calculation should be done in equipment side, or some equipment does not have the capability to report substrate tracking events. It is difficult for factory to check the process status of materials in a Process Job.

As requirement for more straightforward data reported from many factories accumulated, many OEMs have provided the process substrate list and count for many factories. But since the requirement and implementation don’t have a standard to reference, there were various data format reported for same purpose.

There shall be a standard definition of variables for equipment to report. The required data includes:
Processed/Unprocessed/Failed substrate list and count in a process job with process job completed event;


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Frontend and Advanced Backend Manufacturing.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The revision will include:

1. Add definition of Processed, Failed and Unprocessed state for materials.
2. Add state mapping to E90 substrate processing state.
3. Add new material processing result related variables for process job events.
4. Add object attributes for material processing result of Process Job object.

Any other changes to address features or defects, or issues with the Style Guide raised by Task Force members during the development and review of the proposed changes related to these line-item topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations.

b: Expected result of activity
Publication of an existing Standard or Safety Guideline as an American National Standard

For a new Subordinate Standard, identify the Primary Standard here:


Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/17/2023b. 1st Draft by: 06/01/2024
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/01/2025
e. TC Chapter Approval By:08/01/2025

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
GEM300 TF North America.
GEM300 TF Korea;
GEM300 TF Taiwan;
GEM300 TF Japan.

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 7/11/2023
Member Review End Date: 7/25/2023

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS08/08/2023
Recorded in TC Minutes08/16/2023

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on