SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
07/18/2007
Revised (if Applicable):
04/07/2008
Name of Task Force (TF):
International 450 mm Physical Interfaces & Carriers
Global Technical Committee:
Physical Interfaces & Carriers
Originating Technical Committee Region:
International
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1. Charter:
(State the objective of the proposed TF.)
Preliminary Standards for 450mm factory interfaces that will enable development of 450mm tools as outlined by ISMI program and 450mm timeline in ITRS
* Enable availability of Si Shipping Box and in-fab carrier
* Enable availability of equipment interfaces
- Equipment implies Process tools, Metrology, AMHS, or any other equipment that may interface with the carrier
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2. Scope:
(Define the specific activities that the TF will conduct.)
Develop the requirements for:
* Si Shipping Box (Support activity of JA Shipping Box TF)
* In-fab Carrier
* Equipment to carrier interfaces
* Carrier (Hand-off interface, i.e., E84)
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA, JA and EU Silicon Wafer Committee
NA and JA Information & Control
EU Equipment Automation Committee
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4. Formation Date:
(TF formed on)
Task Force formed on:
07/18/2007
Task Force approved by Committee/GCS on:
09/09/2007
5. Comments
None.