| SEMI International Standards
Task Force Organization Form (TFOF) |
Task Force Name: International 450 mm Physical Interfaces & Carriers
| Global Technical Committee: Physical Interfaces & Carriers |
| Originating Technical Committee Region: International |
1. Charter:
Preliminary Standards for 450mm factory interfaces that will enable development of 450mm tools as outlined by ISMI program and 450mm timeline in ITRS
* Enable availability of Si Shipping Box and in-fab carrier
* Enable availability of equipment interfaces
- Equipment implies Process tools, Metrology, AMHS, or any other equipment that may interface with the carrier
2. Scope:
Develop the requirements for:
* Si Shipping Box (Support activity of JA Shipping Box TF)
* In-fab Carrier
* Equipment to carrier interfaces
* Carrier (Hand-off interface, i.e., E84)
3. Formal linkages with Task Forces in other Regions:
NA, JA and EU Silicon Wafer Committee
NA and JA Information & Control
EU Equipment Automation Committee
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4. Approval:
Task Force formed on: 07/18/2007
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