SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 03/26/2005

Revised (if Applicable):

Name of Task Force (TF): Terminology

Global Technical Committee: MEMS / NEMS

Originating Technical Committee Region: International

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1. Charter: (State the objective of the proposed TF.)
Assemble the various terms, abbreviations, acronyms, and symbols used in MEMS Technology into a comprehensive terminology standard.
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2. Scope: (Define the specific activities that the TF will conduct.)
Develop MEMS terminology standard(s). Cooperate with the NA Tech Editors Board to assist in eliminating essentially equivalent definitions in SEMI standards, if necessary.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
This will be an international task force with co-chairs in each region where a MEMS Committee exists and interested members worldwide. It is intended to invite all interested members of the MEMS Committee worldwide to participate in this task force, which is intended to do the bulk of its work by e-mail or other electronic communication. In each region, the members of the Terminology task force will work with members of other MEMS task forces to determine what terminology issues should be addressed at any given time.
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4. Formation Date:(TF formed on)

Task Force formed on: 03/26/2005
Task Force approved by Committee/GCS on: 04/12/2005

5. Comments
None.