SEMI International Standards
Technical Committee Charter

Charter of Global Automation Technology Committee

Explore, evaluate, discuss, and create consensus-based standard measurement methods, specifications, guidelines, and practices that, through voluntary compliance, will;
promote mutual understanding and improved communication between users and suppliers of automation systems, components and capabilities, and
enhance the manufacturing efficiency and capability and shorten time-to-market so as to reduce manufacturing cost of the industry.


  • To include liaisons and synergies with other SEMI technical committees for the development of automation technology standards.
  • The automation technology standards committee scope is limited to exploring and developing standards that pertain to common criteria, guidelines, methods for control and comparison of automation systems, components and capabilities. It will seek to support the international need for increasing automation product / process yield and reducing related automation costs.
  • In addition to the above, the committee will also facilitate any industry initiatives towards product standardization needs.