SEMI International Standards
Technical Committee Charter

Charter of Global Gases Committee

To identify and develop international standards fulfilling the technical needs of the industry for bulk gases, specialty gases, components and gas distribution systems.
Gases Committee standardization includes
1) analytical methods for evaluating gases and materials used to contain and transport them,
2) specifications for bulk gases, specialty gases, and the materials used to transport them,
3) contamination related issues and analytical methods,
4) performance specifications for gas distribution systems and components,
5) physical interface specifications for sub-systems and components, and
6) guides for definition, use, handling and installation.