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SEMI International Standards
Technical Committee Charter

Charter of Global FPD Factory Automation Committee

Charter:
To develop technical standard specifications and guides related to material handling systems and equipment for FPD manufacturing.

Scope:
1) Equipment Issues
1-1) Develop specifications/guides for equipment to manufacture FPDs.
1-2) Develop specifications/guides for equipment used for test and inspection in the specification and for quality control at FPD manufacturing.
2) Material Handling Issues
2-1) The specification of hardware of material handling system at FPD manufacturing.
2-2) The specification of communication software between upper control system and material handling system at FPD manufacturing.
2-3) The specification of interface between material handling system and manufacturing equipment.
3) Composite Issues
3-1) To handle any composite issue of Equipment, and Material Handling, and so on.