SEMI International Standards
Technical Committee Charter

Charter of Global EH&S Committee

To identify and develop international environmental, health and safety (EH&S) standards fulfilling the technical needs of the semiconductor, flat panel display and other related industries. The Committee will focus on:

    • Standards that promote safe and environmentally responsible design, selection, facilitization, operation, maintenance, service, decommissioning, and disposition of equipment and materials
    • EHS issues related to the SEMI Standards Program
    • EHS support for other technical committees and SEMI divisions
    • Promoting and facilitating the use of SEMI EHS documents
    • Supporting technical educational programs on EHS-related subjects.
    • Identify and consider non-SEMI documents as they relate to SEMI EHS documents.