4316M | Line Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22-0715, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment. Delayed Revision related to Fail-to-safe Equipment Control Systems (FECS) | See Line Items Below | Region of Action- NA |
4316M LI - 1 | Clarification/Improvement of the FECS criteria | Published 01/29/2016 | Region of Action- NA |
4449F | Line Item Revisions to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions related to Work at Elevated Locations and Design Criteria for Platforms, Steps, and Ladders | See Line Items Below | Region of Action- NA |
4449F LI - 1 | Addition of a Delayed Revisions Section Related to Work at Elevated Locations and Design Criteria for Platforms, Steps, and Ladders | Published 01/29/2016 | Region of Action- NA |
4683H | Line Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure | See Line Items Below | Region of Action- NA |
4683H LI - 1 | Delayed Revisions Related to Chemical Exposure Criteria | Failed Technical Review and Returned to TF 04/07/2016 | Region of Action- NA |
4683I | Line Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure | See Line Items Below | Region of Action- NA |
4683I LI - 1 | Delayed Revisions Related to Chemical Exposure Criteria | Failed Technical Review and Returned to TF 07/14/2016 | Region of Action- NA |
4683J | Line Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure | See Line Items Below | Region of Action- NA |
4683J LI - 1 | Revisions to SEMI S2 related to chemical exposure | Passed Technical Review - Awaiting Procedural Review 07/27/2016 | Region of Action- NA |
5110 LI - 2 | Revision to SEMI S3, Table 3 | Published 12/20/2011 | Region of Action- NA |
5110 LI - 3 | Revisions to SEMI S2 related to Process Liquid Heating | Published 12/20/2011 | Region of Action- NA |
5556A | Line Item Revisions to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Revisions Related to Section 19 Seismic Protection | See Line Items Below | Region of Action- Japan |
5556B | Line Item Revisions to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Section 19 Seismic Protection | See Line Items Below | Region of Action- Japan |
5556B LI - 1 |
Line Item 1 Revision to §19 “Seismic Protection”
Part A Revision to “§19 Seismic Protection”
Part B Revision to “Related Information 4 Seismic Protection” | Published 02/28/2017 | Region of Action- Japan |
5761A | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Failed Technical Review and Returned to TF 07/14/2016 | Region of Action- NA |
5761B | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Failed Technical Review and Returned to TF 11/09/2017 | Region of Action- NA |
5761C | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Failed Technical Review and Returned to TF 04/12/2018 | Region of Action- NA |
5761D | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Failed Technical Review and Returned to TF 11/08/2018 | Region of Action- NA |
5761E | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Published as SEMI S30-0719 07/02/2019 | Region of Action- NA |
5875 | Line Item Revisions to S26-0415: Environmental, Health, and Safety Guideline for FPD Manufacturing System | See Line Items Below | Region of Action- Japan |
5875 LI - 1 | Revision Related to Location for Table of Contents | Published 05/27/2016 | Region of Action- Japan |
5875 LI - 2 | Revision to “Appendix 6” and “Related Information 3” for Non-Ionizing Radiation (other than Laser) and Electromagnetic Fields | Published 05/27/2016 | Region of Action- Japan |
5892 | Revision to SEMI S5-0310 With Title Change From: Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves To: Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases | Published 06/30/2016 | Region of Action- NA |
5917 | Line Item Revisions to SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Addition of reference to a manual material-handling guide in SEMI-S8, Appendix 2, Lifting, Strength, and Materials Handling | See Line Items Below | Region of Action- NA |
5917 LI - 1 | Add a Definition for “hand-object coupling point” in the Terminology Section | Published 11/25/2016 | Region of Action- NA |
5917 LI - 2 | Add a reference to SEMATECH ISMI Manual Material Handling Application Guide | Published 11/25/2016 | Region of Action- NA |
5917 LI - 3 | Revisions and additions to hand/arm clearances | Failed Technical Review and Returned to TF 07/14/2016 | Region of Action- NA |
5917 LI - 4 | Add a new Related Information section to assist with determining what tasks are within the scope of an assessment to SEMI S8 | Failed Technical Review and Returned to TF 07/14/2016 | Region of Action- NA |
5917A | Line Item Revisions to SEMI S8-1116, Safety Guideline For Ergonomics Engineering Of Semiconductor Manufacturing Equipment (Revisions on Multiple Topics) | See Line Items Below | Region of Action- NA |
5917A LI - 1 | Revisions and additions to hand/arm clearances | Published 02/23/2018 | Region of Action- NA |
5917A LI - 2 | Add a new Related Information section “Z” to assist with determining what tasks are within the scope of an assessment to SEMI S8 | Published 02/23/2018 | Region of Action- NA |
5947A | Revision to SEMI S23, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment. New Scope and Small Changes | Published 12/07/2016 | Region of Action- Other |
5969 | Line Item Revisions to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Fire Protection) | See Line Items Below | Region of Action- NA |
5969 LI - 1 | Addition of criteria to determine which method of assessing fire risk is to be used. | Failed Technical Review and Returned to TF 04/07/2016 | Region of Action- NA |
5969 LI - 2 | Restructuring of portions of Section 14. | Published 10/14/2016 | Region of Action- NA |
5969A | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (pertaining to Fire) | See Line Items Below | Region of Action- NA |
5969A LI - 1 | Addition of criteria to determine which method of assessing fire risk is to be used | Published 01/24/2020 | Region of Action- NA |
5969A LI - 2 | Addition of use of the S10 ranking tables in place of the S14 ranking tables | Published 01/24/2020 | Region of Action- NA |
5970 | Line Item Revisions to SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
5970 LI - 1 | Changes to Terminology to Align with SEMI S10. | Failed Procedural Review 05/11/2016 | Region of Action- NA |
5970 LI - 1 | Changes to Terminology to Align with SEMI S10. | Failed Procedural Review 07/25/2016 | Region of Action- NA |
5970 LI - 2 | Change “Grouping” to “Group” to Align with SEMI S10. | Published 10/14/2016 | Region of Action- NA |
5970 LI - 3 | Changes to Risk Categories to Align with SEMI S10. | Published 10/14/2016 | Region of Action- NA |
5972 | Reapproval of SEMI S19-0311 Safety Guideline for Training of Manufacturing Equipment Installation, Maintenance and Service Personnel | Published 08/12/2016 | Region of Action- Japan |
6049 | Line-Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process | See Line Items Below | Region of Action- NA |
6049 LI - 1 | Changes to Appendix 1 | Failed Technical Review and Returned to TF 07/13/2017 | Region of Action- NA |
6049 LI - 2 | Addition of Related Information 6 | Failed Technical Review and Returned to TF 07/13/2017 | Region of Action- NA |
6049A | Line-Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process | See Line Items Below | Region of Action- NA |
6049A LI - 1 | Changes pertaining to Severity Groups: People | Failed Technical Review and Returned to TF 11/08/2018 | Region of Action- NA |
6049A LI - 2 | Changes pertaining to Severity Groups: Environment | Failed Technical Review and Returned to TF 11/08/2018 | Region of Action- NA |
6049A LI - 3 | Changes pertaining to Severity Groups: Equipment/Facility | Failed Technical Review and Returned to TF 11/08/2018 | Region of Action- NA |
6049A LI - 4 | Changes pertaining to Likelihood Groups | Failed Technical Review and Returned to TF 11/08/2018 | Region of Action- NA |
6049B | Line-Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process | See Line Items Below | Region of Action- NA |
6049B LI - 1 | Changes to Appendix 1: Changes pertaining to Severity Groups: People | Published 11/15/2019 | Region of Action- NA |
6049B LI - 2 | Changes to Appendix 1: Changes pertaining to Severity Groups: Property | Failed Technical Review and Returned to TF 07/11/2019 | Region of Action- NA |
6049B LI - 3 | Changes to Appendix 1: Changes pertaining to Severity Groups: Equipment/Facility | Failed Technical Review and Returned to TF 07/11/2019 | Region of Action- NA |
6049B LI - 4 | Changes to Appendix 1: Changes pertaining to Likelihood Groups | Published 11/15/2019 | Region of Action- NA |
6098 | Reapproval of SEMI S3-1211, Safety Guideline for Process Liquid Heating Systems | Published 10/20/2017 | Region of Action- NA |
6171 | Line Item Revision to SEMI S2-1016, Environmental, Health, and Safety Guideline For Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6171 LI - 1 | Revision to Section 23 Related to Oxygen Deficiency Risk Assessment | Published 08/31/2018 | Region of Action- NA |
6171 LI - 2 | Revisions Related to Oxygen Deficiency Assessment Criteria | Failed Technical Review and Returned to TF 07/12/2018 | Region of Action- NA |
6171A | Line Item Revision to SEMI S2-0818E, Environmental, Health, and Safety Guideline For Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6171A LI - 1 | Revisions Related to Oxygen Deficiency Assessment Criteria | Failed Technical Review and Returned to TF 11/07/2019 | Region of Action- NA |
6171B | Line Item Revision to SEMI S2-1016, Environmental, Health, and Safety Guideline For Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6171B LI - 1 | Revisions Related to Oxygen Deficiency Assessment Criteria | Published 08/27/2021 | Region of Action- NA |
6172 | Line Item Revision to SEMI S14-1016: Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (To correct nonconforming title) | See Line Items Below | Region of Action- NA |
6172 LI - 1 | Correct title and concomitant texts | Failed Procedural Review 05/17/2017 | Region of Action- NA |
6172A | Line item revision to SEMI S14-1016: Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment to correct nonconforming title | See Line Items Below | Region of Action- NA |
6172A LI - 1 | Correct title for conformance | Failed Technical Review and Returned to TF 11/08/2018 | Region of Action- NA |
6204 | Line Item Revisions to SEMI S6-0707E With Title Change To: Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6204 LI - 1 | Title change to align with procedure manual | Published 06/08/2018 | Region of Action- NA |
6204 LI - 2 | Add Table of Contents and remove list of sections from scope section | Published 06/08/2018 | Region of Action- NA |
6204 LI - 3 | Update retroactive clause to refer to more versions than S6-93 and align with S2 revision | Published 06/08/2018 | Region of Action- NA |
6204 LI - 4 | Clean up some references to other documents | Published 06/08/2018 | Region of Action- NA |
6288 | Line Item Revision to SEMI S21-1106E (Reapproved 0612): Safety Guideline for Worker Protection | See Line Items Below | Region of Action- Japan |
6288 LI - 1 | Addition of Table of Contents, and Removal of the list of section numbers and titles from section 2 and add a NOTE to explain replacement and relocation of the list. | Published 08/31/2018 | Region of Action- Japan |
6289 | Revision to SEMI S18-0312: ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR FLAMMABLE SILICON COMPOUNDS with title change to ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR FLAMMABLE SILICON COMPOUNDS | Published 08/31/2018 | Region of Action- Japan |
6310 | Reapproval of SEMI S28-1011 Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment | Failed Technical Review and Returned to TF 04/12/2018 | Region of Action- NA |
6354 | Line Item Revision to SEMI S2-0818, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6354 LI - 1 | Delayed Revisions related to High Pressure Gas Safety | Failed Technical Review and Returned to TF 11/08/2018 | Region of Action- NA |
6366 | Line Item Revision SEMI S2-1016b Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revision to Delayed Revision 2 on Anchorage) | See Line Items Below | Region of Action- NA |
6366 LI - 1 | Revision to Delayed Revision 2 on Anchorage | Failed Technical Review and Returned to TF 07/12/2018 | Region of Action- NA |
6366A | Line Item Revision SEMI S2-0818E Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision to Fall Protection Criteria) | See Line Items Below | Region of Action- NA |
6366A LI - 1 | Delayed Revision to Fall Protection Criteria | Drafting 02/08/2019 | Region of Action- NA |
6372 | Line Item Revision SEMI S2-1016b Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revision to Delayed Revision 3 on Seismic) | See Line Items Below | Region of Action- NA |
6372 LI - 1 | Delete the exception to section 19.1.2 | Failed Technical Review and Returned to TF 07/12/2018 | Region of Action- NA |
6372 LI - 2 | Delete the exception to section 19.1.3 | Published 08/31/2018 | Region of Action- NA |
6372 LI - 3 | Replace “facilities” with “utilities” in section 19.1.5 | Published 08/31/2018 | Region of Action- NA |
6372 LI - 4 | Modifications to section 19.4 | Published 08/31/2018 | Region of Action- NA |
6392 | Line Item Revision to SEMI S17-0113 "Safety Guideline for Unmanned Transport Vehicle (UTV) Systems" | See Line Items Below | Region of Action- Japan |
6392 LI - 1 | Revision Related to Location for Table of Contents | Published 03/29/2019 | Region of Action- Japan |
6393 | Line Item Revision to SEMI S25-0213 "Safety Guideline for Hydrogen Peroxide Storage and Handling Systems" | See Line Items Below | Region of Action- Europe |
6393 LI - 1 | Revision Related to Location for Table of Contents | Published 03/29/2019 | Region of Action- Japan |
6439 | New Standard: Practice For Restricting The Use Of PFOA, Its Related Compounds, Or Their Salts | Failed Technical Review and Returned to TF 12/17/2020 | Region of Action- NA |
6453 | Reapproval of SEMI S13-0113 “Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use With Manufacturing Equipment” | Published 08/02/2019 | Region of Action- Japan |
6515 | Line Item Revision of SEMI S23-1216 - Guide for Energy, Utilities, and Materials Use Efficiency of Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6515 LI - 1 | Changes related to process cooling water. | Published 10/22/2021 | Region of Action- NA |
6551 | Line Item Revision to SEMI S2-0818E Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment ( Re: Delayed Revision on Mechanical Design, Hinged Load Assembly) | See Line Items Below | Region of Action- NA |
6551 LI - 1 | Deletion of criteria titled Subsequently Produced Lifting Equipment as noted in Section 18.7.5 in its entirety. | Failed Technical Review and Returned to TF 11/07/2019 | Region of Action- NA |
6593 | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment ( Section 18 Mechanical Design) | See Line Items Below | Region of Action- NA |
6593 LI - 1 | Revision to section 18.7.5 | Published 04/30/2021 | Region of Action- NA |
6594 | Line Item Revision to SEMI S14-1016: Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (Risk Ranking Criteria and Title) | See Line Items Below | Region of Action- NA |
6594 LI - 1 | Changes to Title and Concomitant text | Published 05/13/2021 | Region of Action- NA |
6594 LI - 2 | Changes to Risk Assessment Criteria | Published 05/13/2021 | Region of Action- NA |
6651 | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Addition of Pressure section) | See Line Items Below | Region of Action- NA |
6651 LI - 1 | Delayed Revision Related to Pressure System | Failed Technical Review and Returned to TF 11/15/2020 | Region of Action- NA |
6651A | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Addition of Pressure section) | See Line Items Below | Region of Action- NA |
6651A LI - 1 | Delayed Revision Related to Pressure System | Failed Technical Review and Returned to TF 05/06/2021 | Region of Action- NA |
6651B | Line Item Revision to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Pressure Systems) | See Line Items Below | Region of Action- NA |
6651B LI - 1 | Delayed Revision Related to Pressure System | Failed Technical Review and Returned to TF 12/09/2021 | Region of Action- NA |
6651C | Line Item Revision to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Pressure Systems) | See Line Items Below | Region of Action- NA |
6651C LI - 1 | Delayed Revision Related to Pressure System | Published 03/24/2023 | Region of Action- NA |
6696 | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Sections 18.6.3 and 18.7.5) | See Line Items Below | Region of Action- NA |
6696 LI - 1 | Delayed Revisions related to Sections 18.6 and 18.7 | Published 08/27/2021 | Region of Action- NA |
6776 | Reapproval of SEMI S19-0311 (Reapproved 0816): Safety Guideline for Training of Manufacturing Equipment Installation, Maintenance and Service Personnel | Failed Technical Review and Returned to TF 08/26/2021 | Region of Action- Japan |
6777 | Reapproval of SEMI S26-0516: Environmental, Health, and Safety Guideline for FPD Manufacturing System | Drafting 05/25/2021 | Region of Action- Japan |
6781 | Line Item Revision of SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases | See Line Items Below | Region of Action- NA |
6781 LI - 1 | Clarification of a NOTE in the Scope section | Published 11/29/2021 | Region of Action- NA |
6781 LI - 2 | Editting §3 for Clarity | Published 11/29/2021 | Region of Action- NA |
6781 LI - 3 | Updating the Address of NFPA in a footnote. | Published 11/29/2021 | Region of Action- NA |
6781 LI - 4 | Updating the URL for GHS in a NOTE | Published 11/29/2021 | Region of Action- NA |
6781 LI - 5 | Editting §6 for Clarity and for Conformance to SEMI Style Manual | Published 11/29/2021 | Region of Action- NA |
6781 LI - 6 | Editting Table 1 Headers and ¶¶7.3, 7.4, 7.5 for Clarity | Published 11/29/2021 | Region of Action- NA |
6781 LI - 7 | Editting ¶8.1, the Headers of Table 3, ¶8.2.2 and two NOTEs for Clarity and for Conformance to SEMI Style Manual | Published 11/29/2021 | Region of Action- NA |
6781 LI - 8 | Updating the Address of CGA in a Footnote. | Published 11/29/2021 | Region of Action- NA |
6781 LI - 9 | Adding Data to Table R1-1 | Published 11/29/2021 | Region of Action- NA |
6822 | Reapproval of SEMI S12-0211E - Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination | Failed Technical Review and Returned to TF 12/09/2021 | Region of Action- NA |
6823 | Reapproval of SEMI S7 - Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications | Failed Technical Review and Returned to TF 12/09/2021 | Region of Action- NA |
6831 | Revision to SEMI S1-1015 Safety Guideline for Equipment Safety Labels | Failed Technical Review and Returned to TF 12/09/2021 | Region of Action- NA |
6831A | Revision to SEMI S1-1015 Safety Guideline for Equipment Safety Labels | Failed Technical Review and Returned to TF 03/31/2022 | Region of Action- NA |
6831B | Revision to SEMI S1-1015 Safety Guideline for Equipment Safety Labels | Failed Technical Review and Returned to TF 07/14/2022 | Region of Action- NA |
6831C | Revision to SEMI S1-1015 Safety Guideline for Equipment Safety Labels | Published 09/14/2023 | Region of Action- NA |
6884 | Line Item Revision to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions related to lifting equipment and hinged loads (§§ 5, 18.6, and 18.7)) | See Line Items Below | Region of Action- NA |
6884 LI - 1 | Delayed Revisions related to lifting equipment and hinged loads (§§ 5, 18.6, and 18.7)) | Failed Technical Review and Returned to TF 07/14/2022 | Region of Action- NA |
6884A | Line Item Revision to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6884A LI - 1 | Delayed Revisions related to lifting equipment and hinged loads (§§ 5.2, 18.6, and 18.7) | Failed Technical Review and Returned to TF 07/13/2023 | Region of Action- NA |
6884B | Line Item Revision to SEMI S2-0821Eb, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6884B LI - 1 | Delayed Revisions related to lifting equipment and hinged loads (§§ 5.2, 18.6, and 18.7) | Failed Technical Review and Returned to TF 11/09/2023 | Region of Action- NA |
6885 | Line Item Revision to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision Related to the Invocation of SEMI S12) | See Line Items Below | Region of Action- NA |
6885 LI - 1 | Delayed Revision Related to the Invocation of SEMI S12 | Failed Technical Review and Returned to TF 03/31/2022 | Region of Action- NA |
6885A | Line Item Revision to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision Related to Equipment Decommissioning) | See Line Items Below | Region of Action- NA |
6885A LI - 1 | Add Delayed Revision Section X to SEMI S02-0821 | Published 03/24/2023 | Region of Action- NA |
6887 | Revision to SEMI S10-1119, Safety Guideline for Risk Assessment and Risk Evaluation Process | Failed Technical Review and Returned to TF 03/31/2022 | Region of Action- NA |
6887A | Revision to SEMI S10-1119, Safety Guideline for Risk Assessment and Risk Evaluation Process | Published 04/13/2023 | Region of Action- NA |
6888 | Revision of SEMI S12-0211e, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination | Failed Technical Review and Returned to TF 03/31/2022 | Region of Action- NA |
6909 | Withdrawal of SEMI S26 Environmental, Health, and Safety Guideline for FPD Manufacturing System | Published 01/13/2023 | Region of Action- Japan |
6910 | Revision of SEMI S19-0311 (Reapproved 0816), Safety Guideline for Training of Manufacturing Equipment Installation, Maintenance and Service Personnel | Published 02/28/2023 | Region of Action- Japan |
6940 | Line Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision Related to the Invocation of SEMI S18 (Flammable Silicon Compounds) and S30 (Energetic Materials)) | See Line Items Below | Region of Action- NA |
6940 LI - 1 | Add Delayed Revision Section X to SEMI S02-0821 | Failed Technical Review and Returned to TF 11/10/2022 | Region of Action- NA |
6940 LI - 2 | Add Delayed Revision Section Y to SEMI S02-0821 | Drafting 07/27/2022 | Region of Action- NA |
6940A | Line Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Mention of SEMI S18 and the Invocation of SEMI S30) | See Line Items Below | Region of Action- NA |
6940A LI - 1 | Add Delayed Revision Section X to SEMI S02-0821 | Published 08/31/2023 | Region of Action- NA |
6940A LI - 2 | Add Delayed Revision Section Y to SEMI S02-0821 | Published 08/31/2023 | Region of Action- NA |
6941 | Line Item Revision to SEMI S30-0719E, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (regarding heating of piping)
| See Line Items Below | Region of Action- NA |
6941 LI - 1 | Add section 8.13 and modify paragraph 17.3.3 | Failed Technical Review and Returned to TF 11/10/2022 | Region of Action- NA |
6941 LI - 2 | Adding, as ¶17.8.8, criteria specific to managing the risks of loss of heating downstream of process chambers. | Failed Technical Review and Returned to TF 11/10/2022 | Region of Action- NA |
6941A | Line Item Revision to SEMI S30-0719E, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes (regarding heating of piping)
| See Line Items Below | Region of Action- NA |
6941A LI - 1 | Modify sections 5, 8 and 17.3.3. | Drafting 02/02/2023 | Region of Action- NA |
6941A LI - 2 | Adding, as ¶17.8.8, criteria specific to managing the risks of loss of heating downstream of process chambers. | Drafting 02/02/2023 | Region of Action- NA |
6944 | Line Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Fire Protection) | See Line Items Below | Region of Action- NA |
6944 LI - 1 | Add Delayed Revision Section X to SEMI S02-0821 | Failed Technical Review and Returned to TF 11/10/2022 | Region of Action- NA |
6944 LI - 2 | Add Delayed Revision Section Y to SEMI S02-0821 | Failed Technical Review and Returned to TF 11/10/2022 | Region of Action- NA |
6944A | Line Item Revisions to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Fire Protection) | See Line Items Below | Region of Action- NA |
6944A LI - 1 | Add Delayed Revision Section X to SEMI S02-0821 | Published 08/31/2023 | Region of Action- NA |
6944A LI - 2 | Add Delayed Revision Section Y to SEMI S02-0821 | Published 08/31/2023 | Region of Action- NA |
6980 | Line Item Revisions to SEMI S2-0821Eb, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision Related to Flammable Substances) | See Line Items Below | Region of Action- NA |
6980 LI - 1 | Delayed Revision Related to Flammable Substances | Drafting 02/07/2024 | Region of Action- NA |
7022 | Line Item Revision to SEMI S30-0719E, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | See Line Items Below | Region of Action- NA |
7022 LI - 1 | Enhancing guidance on overtemperature and undertemperature risk management. | Published 10/20/2023 | Region of Action- NA |
7022 LI - 2 | Adding, as ¶17.8.8, criteria specific to managing the risks of loss of heating downstream of process chambers. | Published 10/20/2023 | Region of Action- NA |
7022 LI - 3 | Improving the alignment of the Safety Guideline’s text with the Energetic Materials TF’s understanding of what criteria apply to which substances | Published 10/20/2023 | Region of Action- NA |
7023 | Reapproval of SEMI S6-0618, Environmental, Health, And Safety Guideline For Exhaust Ventilation Of Semiconductor Manufacturing Equipment
| Failed Technical Review and Returned to TF 07/13/2023 | Region of Action- NA |
7028 | Reapproval of SEMI S21-0818, Safety Guideline for Worker Protection | Failed Technical Review and Returned to TF 09/07/2023 | Region of Action- Japan |
7108 | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (labels) | See Line Items Below | Region of Action- NA |
7108 LI - 1 | Delayed Revision Related to Safety Labels | Failed Technical Review and Returned to TF 11/06/2023 | Region of Action- NA |
7108A | Line Item Revision to SEMI S2-0821Eb, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision Related to Safety Labels) | See Line Items Below | Region of Action- NA |
7108A LI - 1 | Delayed Revision Related to Safety Labels | Drafting 11/06/2023 | Region of Action- NA |
7109 | Line Item Revisions to SEMI S1-0923, S2-0821Eb, and S30 -0719E (Delayed Revisions Related to Risks) | See Line Items Below | Region of Action- NA |
7109 LI - 1 | Delayed Revisions Related to Risk | Published 02/09/2024 | Region of Action- NA |
7134 | Revision to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of
Semiconductor Manufacturing Equipment | Drafting 02/13/2024 | Region of Action- NA |
7158 | Line Item Revision to SEMI S2-0821Eb, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions related to lifting equipment and
hinged loads (§§ 5.2, 18)) | See Line Items Below | Region of Action- NA |
7158 LI - 1 | Delayed Revisions related to lifting equipment and hinged loads (§§ 5.2, 18.6) | Drafting 02/01/2024 | Region of Action- NA |
7159 | Reapproal of SEMI S25-0319, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems | Drafting 01/17/2024 | Region of Action- NA |
R4683J | Revisions to SEMI S2 related to chemical exposure | Published 03/24/2017 | Region of Action- NA |
R5556B | Line Item Revisions to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Revisions Related to Section 19 Seismic Protection | Published 02/28/2017 | Region of Action- Japan |
R5917A | Line Item Revisions to SEMI S8-1116, Safety Guideline For Ergonomics Engineering Of Semiconductor Manufacturing Equipment (Revisions and Additions to Hand/Arm Clearances) | See Line Items Below | Region of Action- NA |
R5917A LI - 1 | Revisions and additions to hand/arm clearances | Published 02/23/2018 | Region of Action- NA |
R5947A | Revision to SEMI S23, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment. New Scope and Small Changes | Published 12/07/2016 | Region of Action- Other |
R6204 | Line Item Revision to SEMI S6-0707E - Environmental, Health, And Safety Guideline For Exhaust Ventilation Of Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
R6204 LI - 1 | Changes to section 3.7.1 | Published 06/08/2018 | Region of Action- NA |
R6593 | Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revision related to Mechanical Design, Hinged Load Assembly) | See Line Items Below | Region of Action- NA |
R6593 LI - 1 | Delayed Revision related to Section 18.7.5 | Published 04/30/2021 | Region of Action- NA |
R6651C | Line Item Revision to SEMI S2-0821 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Delayed Revision Related to Pressure Guideline) | See Line Items Below | Region of Action- NA |
R6651C LI - 1 | Delayed Revision Related to Pressure Systems | Published 03/24/2023 | Region of Action- NA |
R6831C | Revision to SEMI S1-1015 Safety Guideline for Equipment Safety Labels | Published 09/14/2023 | Region of Action- NA |
R6887A | Revision to SEMI S10-1119, Safety Guideline for Risk Assessment and Risk Evaluation Process | Published 04/13/2023 | Region of Action- NA |