| 5080B | Revision of SEMI F51-0200 - Guide for Elastometric Sealing Technology | Published 07/14/2015 | Region of Action- NA |
| 5155 | New Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
| 5155A | New Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation and Building Information Modeling | Failed Technical Review and Returned to TF 07/11/2017 | Region of Action- NA |
| 5155B | New Standard, Guide for Facilities Data Package for Semiconductor Equipment Installation | Failed Technical Review and Returned to TF 04/10/2018 | Region of Action- NA |
| 6105 | Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology | Published 09/29/2017 | Region of Action- NA |
| 6109 | Reapproval of SEMI F32-0211, Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves | Failed Technical Review and Returned to TF 04/04/2017 | Region of Action- NA |
| 6110 | Reapproval of SEMI F4-0211, Specification for Pneumatically Actuated Cylinder Valves | Failed Technical Review and Returned to TF 04/04/2017 | Region of Action- NA |
| 6210 | Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix | Failed Technical Review and Returned to TF 11/07/2017 | Region of Action- NA |
| 6313 | Reapproval of SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity | Failed Technical Review and Returned to TF 04/10/2018 | Region of Action- NA |
| 6321 | Reapproval of SEMI F45-0307, Specification for Machined Stainless Steel Reducing Weld Fittings | Published 08/31/2018 | Region of Action- Japan |
| 6322 | Reapproval to SEMI F44-0307, Specification for Machined Stainless Steel Weld Fittings of Machined Stainless Steel Weld Fittings | Published 08/31/2018 | Region of Action- Japan |
| 6323 | Reinstatement of SEMI F1-0812 Specification for Leak Integrity of High-Purity Gas Piping Systems and Components | Failed Technical Review and Returned to TF 04/24/2018 | Region of Action- Japan |
| 6395 | Revision to SEMI F1-0812, Specification for Leak Integrity of High Purity Gas Piping Systems and Components | Failed Technical Review and Returned to TF 11/30/2018 | Region of Action- Japan |
| 6395A | Revision to SEMI F1-0812, Specification for Leak Integrity of High Purity Gas Piping Systems and Components | Drafting 07/23/2019 | Region of Action- Japan |
| 6395B | Revision to SEMI F1-0812, Specification for Leak Integrity of High Purity Gas Piping Systems and Components | Published 05/28/2021 | Region of Action- Japan |
| 6628 | New Standard: Guide for Facilities Data Package for Semiconductor Manufacturing Equipment Installation and Building Information Modeling | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
| 6771 | Reapproval of SEMI E6-0914, Guide for Semiconductor Equipment Installation Documentation | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
| 6772 | Reapproval of SEMI E70-1213, Guide for Tool Accommodation Process | Published 10/28/2021 | Region of Action- NA |
| 6773 | Reapproval of SEMI E76-0299 (Reapproved 0913), Guide for 300 mm Process Equipment Points of Connection to Facility Services | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
| 6774 | Reapproval of SEMI F49-0200 (Reapproved 1213), Guide for Semiconductor Factory Systems Voltage Sag Immunity | Published 10/28/2021 | Region of Action- NA |
| 6775 | Reapproval of SEMI F50-0200 (Reapproved 1213), Guide for Electric Utility Voltage Sag Performance for Semiconductor Factories | Published 10/28/2021 | Region of Action- NA |
| 6890 | Reapproval of SEMI F80-0309(Reapproved 0914), Test Method for Determination of Gas Change/Purge efficiency of Gas Delivery System. | Failed Technical Review and Returned to TF 05/13/2022 | Region of Action- Japan |
| 7084 | Reapproval of SEMI F44-0307 (Reapproved 0818), Specification for Machined Stainless Steel Weld Fittings | Failed Technical Review and Returned to TF 10/20/2023 | Region of Action- Japan |
| 7085 | Reapproval of SEMI F45-0307 (Reapproved 0818), Specification for Machined Stainless Steel Reducing Weld Fittings | Failed Technical Review and Returned to TF 10/20/2023 | Region of Action- Japan |
| R6105 | Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology | Published 09/29/2017 | Region of Action- NA |