| 4319A | New Standard: Guide for Interfacing Manufacturing Equipment Design and Facility System Design (Design for Facility) | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4615 | Revision to SEMI F80, TEST METHOD FOR DETERMINATION OF GAS CHANGE/PURGE EFFICIENCY OF GAS DELIVERY SYSTEM | Published 01/15/2009 | Region of Action- Japan |
| 4715 | Reapproval of SEMI F71-1102, Test Method For Temperature Cycle of Gas Delivery System | Failed Technical Review and Returned to TF 12/03/2009 | Region of Action- Japan |
| 4771 | New Standard: Test Method for Equipment Fan Filter Unit (EFFU) | Failed Technical Review and Returned to TF 03/25/2011 | Region of Action- Korea |
| 4771A | New Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal | Failed Technical Review and Returned to TF 02/09/2012 | Region of Action- Korea |
| 4771B | New Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal | Failed Technical Review and Returned to TF 06/20/2012 | Region of Action- Korea |
| 4771C | New Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal | Publication Process Started 02/27/2013 | Region of Action- Korea |
| 4922 | New Standard: Specification for Equipment Fan Filter Unit (EFFU) Performance | Failed Technical Review and Returned to TF 03/30/2011 | Region of Action- Korea |
| 4922A | New Standard: Guide for Equipment Fan Filter Unit (EFFU) | Failed Technical Review and Returned to TF 02/09/2012 | Region of Action- Korea |
| 4922B | New Standard: Guide for Equipment Fan Filter Unit | Failed Technical Review and Returned to TF 01/30/2013 | Region of Action- Korea |
| 5012 | Reapproval of SEMI F82-0304, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5013 | Reapproval of SEMI F83-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5014 | Reapproval of SEMI F84-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5015 | Reapproval of SEMI F85-0304, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5016 | Reapproval of SEMI F86-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5017 | Reapproval of SEMI F87-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5018 | Reapproval of SEMI F88-0304E, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5019 | Reapproval of SEMI F89-0304E, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5020 | Reapproval of SEMI F90-0304E, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5021 | Reapproval of SEMI F91-0304E, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5022 | Reapproval of SEMI F92-0304E, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5023 | Reapproval of SEMI F93-0304E, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5024 | Reapproval of SEMI F94-0304E, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5025 | Reapproval of SEMI F95-0304E, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/17/2010 | Region of Action- Japan |
| 5026 | Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components including Revision to Add a New Subordinate Standard, Specification for Leak Integrity of Ultra-High Purity Gas Piping Systems and Components to SEMI F1 | Failed Technical Review and Returned to TF 12/01/2010 | Region of Action- Japan |
| 5026A | Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components including Revision to Add a New Subordinate Standard, Specification for Leak Integrity of Ultra-High Purity Gas Piping Systems and Components to SEMI F1 | Failed Technical Review and Returned to TF 03/18/2011 | Region of Action- Japan |
| 5026B | Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components including Revision to Add a New Subordinate Standard, Specification for Leak Integrity of Ultra-High Purity Gas Piping Systems and Components to SEMI F1 | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5026C | Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components | Published 08/17/2012 | Region of Action- Japan |
| 5079 | Reapproval of SEMI F47-0706, Specification for Semiconductor Processing Equipment Voltage Sag Immunity | Published 08/17/2012 | Region of Action- NA |
| 5202 | Reapproval of SEMI F98-0305, Guide for Treatment of Reuse Water In Semiconductor Processing | Published 11/18/2011 | Region of Action- NA |
| 5244 | Reapproval of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments | Failed Procedural Review - Returned to Committee 12/24/2011 | Region of Action- NA |
| 5372 | Reapproval of SEMI F44-0307, Specification for Machined Stainless Steel Weld Fittings | Published 08/17/2012 | Region of Action- Japan |
| 5373 | Reapproval of SEMI F45-0307, Specification for Machined Stainless Steel Reducing Weld Fittings | Published 08/17/2012 | Region of Action- Japan |
| 5390 | Reapproval of SEMI F106-0308, Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector | Published 10/18/2012 | Region of Action- Japan |
| 5490 | Reapproval of SEMI F102-0306, Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems | Publication Process Started 02/06/2013 | Region of Action- Japan |
| 5570 | Revision of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix | Drafting 04/23/2013 | Region of Action- NA |
| 5572 | Revision of SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation | Drafting 04/23/2013 | Region of Action- NA |
| 5575 | Revision of SEMI E70-1103, Guide for Tool Accommodation Process | Drafting 04/23/2013 | Region of Action- NA |
| 5576 | Reapproval of SEMI E76-0299, Guide for 300 mm Process Equipment Points of Connection to Facility Services | Drafting 04/23/2013 | Region of Action- NA |
| 5579 | Reapproval of SEMI F49-0200 (Reapproved 1108), Guide for Semiconductor Factory Systems Voltage Sag Immunity | Drafting 04/23/2013 | Region of Action- NA |
| 5580 | Reapproval of SEMI F50-0200 (Reapproved 1108), Guide for Electric Utility Voltage Sag Performance for Semiconductor Factories | Drafting 04/23/2013 | Region of Action- NA |