SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

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Flat Panel Display (FPD) - Factory Automation

4403New Standard: Specification for Substrate Management of FPD Production (SMS-FPD)Published as SEMI D54-0709 06/01/2009Region of Action- Japan
4667Re-approval of SEMI D32-0303, Specification for Improved Information Management for Glass FPD Substrates through Orientation Corner UnificationFailed Technical Review and Returned to TF 01/31/2009Region of Action- Japan
4667ARe-approval of SEMI D32-0303, Specification for Improved Information Management for Glass FPD Substrates through Orientation Corner UnificationPublished 05/19/2009Region of Action- Japan
4668Re-approval of SEMI D11-95 (Reapproved 0703), Specification for Flat Panel Display Glass Substrate CassettesFailed Technical Review and Returned to TF 01/31/2009Region of Action- Japan
4668ARe-approval of SEMI D11-95 (Reapproved 0703), Specification for Flat Panel Display Glass Substrate CassettesPublished 05/22/2009Region of Action- Japan
4669Re-approval of SEMI D9-0303, Terminology for FPD SubstratesFailed Technical Review and Returned to TF 01/31/2009Region of Action- Japan
4669ARe-approval of SEMI D9-0303, Terminology for FPD SubstratesPublished 05/20/2009Region of Action- Japan
4670Re-approval of SEMI D3-91 (Reapproved 0703), Quality Area Specification for Flat Panel Display SubstratesFailed Technical Review and Returned to TF 01/31/2009Region of Action- Japan
4670ARe-approval of SEMI D3-91 (Reapproved 0703), Quality Area Specification for Flat Panel Display SubstratesPublished 05/20/2009Region of Action- Japan
4690New Related Information to SEMI D51-0308: Specification for Handshake Method of Single Substrate for Handling Off/On Tool in FPD ProductionAuxiliary Information Published 06/01/2009Region of Action- Japan