| 3383 | Reapproval of SEMI F27-0997 (Reapproved 1103)
Test Method For Moisture Interaction And Content Of Gas Distribution Systems And Components By Atmospheric Pressure Ionization Mass Spectrometry (APIMS) | Published 06/24/2011 | Region of Action- NA |
| 4652 | Revision to SEMI C3.2-0301, Specification for Arsine (AsH3) in Cylinders, 99.94% Quality | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4652A | Revision of SEMI C3.2-0301, Specification for Arsine (AsH3) in Cylinders, 99.94% Quality | Published 06/03/2011 | Region of Action- NA |
| 4653 | Revision to SEMI C3.6-0701, Specification for Phosphine (PH3) in Cylinders, 99.98% Quality | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4653A | Revision of SEMI C3.6-0701, Specification For Phosphine (PH3) In Cylinders, 99.98% Quality | Published 05/14/2010 | Region of Action- NA |
| 4654 | Revision of SEMI C3.12-1102
Specification for Ammonia (NH3) in Cylinders, 99.998% Quality | Published 09/24/2009 | Region of Action- NA |
| 4657A | New Standard: Specifications for Tungsten Hexafluoride (WF6) | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4657B | New Standard: Specifications for Tungsten Hexafluoride (WF6) | Published 06/03/2011 | Region of Action- NA |
| 4658 | Reapproval of SEMI C3.27-1102, Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality | Published 10/27/2011 | Region of Action- NA |
| 4677 | Reapproval of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4677A | Revision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers | Failed Technical Review and Returned to TF 07/14/2009 | Region of Action- NA |
| 4677B | Revision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers | Failed Technical Review and Returned to TF 11/03/2009 | Region of Action- NA |
| 4677C | Revision of SEMI E66-1103, Test Method for Determining Particle Contribution by Mass Flow Controllers | Published 06/03/2011 | Region of Action- NA |
| 4678 | Reapproval of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4678A | Revision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller | Failed Technical Review and Returned to TF 07/14/2009 | Region of Action- NA |
| 4678B | Revision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller | Failed Technical Review and Returned to TF 03/30/2010 | Region of Action- NA |
| 4678C | Revision of SEMI E67-0304, Test Method for Determining Reliability of Mass Flow Controller | Published 10/24/2011 | Region of Action- NA |
| 4679A | Revision of SEMI F79-0703, Guide For Gas Compatibility With Silicon Used In Gas Distribution Components | Published 05/20/2010 | Region of Action- NA |
| 4680A | Revision of SEMI E52-0309 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Published 09/24/2009 | Region of Action- NA |
| 4700 | Line Item Revision to SEMI F32-0706, Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
| See Line Items Below | Region of Action- NA |
4700
LI - 1 | Change the constant “3905.6” to “2.95” in equation 4. | Published 05/22/2009 | Region of Action- NA |
| 4722 | Revision to SEMI F70-0302, Test Method for Determination Of Particle Contribution of Gas Delivery System | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4722A | Revision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System | Failed Technical Review and Returned to TF 07/14/2009 | Region of Action- NA |
| 4722B | Revision of SEMI F70-0302 Test Method For Determination Of Particle Contribution Of Gas Delivery System | Failed Technical Review and Returned to TF 11/03/2009 | Region of Action- NA |
| 4722C | Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System | Failed Technical Review and Returned to TF 03/30/2010 | Region of Action- NA |
| 4722D | Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4722E | Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System | Failed Procedural Review - Returned to Committee 12/21/2010 | Region of Action- NA |
| 4722F | Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System | Published 06/03/2011 | Region of Action- NA |
| 4734 | New Standard: Specifications and Guidelines for Boron Trichloride (BCl3) | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4734A | New Standard: Specification and Guide for Boron Trichloride (BCl3) | Published as SEMI C71-0611 06/03/2011 | Region of Action- NA |
| 4737 | New Standard: Guide For Heater Jacket Requirements | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4737 | New Standard: Specification for Heating Jacket for Using in Semiconductor Processing | Drafting 04/14/2010 | Region of Action- NA |
| 4737A | New Standard: Guide For Heater Jacket Requirements | Failed Technical Review and Returned to TF 11/09/2010 | Region of Action- NA |
| 4737B | New Standard: Guide For Heated Systems Requirements | Failed Technical Review and Returned to TF 03/29/2011 | Region of Action- NA |
| 4737C | New Standard: Guide For Heated Systems Requirements | Failed Technical Review and Returned to TF 07/12/2011 | Region of Action- NA |
| 4737D | New Standard: Guide for Heater Systems Requirements | Published as SEMI F109-0212 02/24/2012 | Region of Action- NA |
| 4754 | Revision of SEMI C3.32-0301 - Specification for Chlorine (Cl2), 99.996% Quality | Published 09/24/2009 | Region of Action- NA |
| 4755 | Revision of SEMI C3.34-1102 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality | Published 09/24/2009 | Region of Action- NA |
| 4756 | Revision of SEMI C3.35-1101 - Specification for Hydrogen Chloride (HCl), 99.997% Quality | Published 09/24/2009 | Region of Action- NA |
| 4757 | Revision of SEMI C3.37-0701 -Specification for Hexafluoroethane (C2F6), 99.97% Quality | Published 09/24/2009 | Region of Action- NA |
| 4769 | Revision of SEMI E52-1109 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Published 01/22/2010 | Region of Action- NA |
| 4784 | Reapproval of SEMI F19-0304, Specification For The Surface Condition Of The Wetted Surface Of Stainless Steel Components | Published 01/20/2010 | Region of Action- NA |
| 4785 | Reapproval of SEMI F22-1102, Guide For Gas Distribution Systems | Failed Technical Review and Returned to TF 11/03/2009 | Region of Action- NA |
| 4785A | Revision of SEMI F22-1102, Guide for Gas Distribution Systems | Failed Technical Review and Returned to TF 10/25/2011 | Region of Action- NA |
| 4785B | Revision of SEMI F22-1102 with title change to: Guide for Bulk and Specialty Gas Distribution Systems | Published 08/17/2012 | Region of Action- NA |
| 4786 | Reapproval of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder Valves | Failed Technical Review and Returned to TF 11/03/2009 | Region of Action- NA |
| 4786A | Revision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder Valves | Failed Procedural Review - Returned to Committee | Region of Action- NA |
| 4786B | Revision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder Valves | Published 02/03/2011 | Region of Action- NA |
| 4787 | Reapproval of SEMI F77-0703, Test Method For Electrochemical Critical Pitting Temperature Testing Of Alloy Surfaces Used In Corrosive Gas Systems | Published 01/20/2010 | Region of Action- NA |
| 4788 | Reapproval of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications | Failed Procedural Review - Returned to Committee | Region of Action- NA |
| 4788A | Revision of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications | Failed Procedural Review - Returned to Committee 12/21/2010 | Region of Action- NA |
| 4788B | Revision of SEMI F78-0304, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications | Published 06/10/2011 | Region of Action- NA |
| 4789 | Reapproval of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications | Failed Technical Review and Returned to TF 03/30/2010 | Region of Action- NA |
| 4789A | Revision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4789B | Revision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications | Failed Procedural Review - Returned to Committee 12/21/2010 | Region of Action- NA |
| 4789C | Revision of SEMI F81-1103, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications | Published 06/03/2011 | Region of Action- NA |
| 4842 | Revision of SEMI F30-0298, Start-Up And Verification Of Purifier Performance Testing For Trace Gas Impurities And Particles At An Installation Site | Published 05/20/2010 | Region of Action- NA |
| 4902 | Reapproval of SEMI F74-1103, Test Method For The Performance And Evaluation Of Metal Seal Designs For Use In Gas Delivery Systems | Published 05/13/2010 | Region of Action- NA |
| 4903 | Reapproval of SEMI F28-1103, Test Method For Measuring Particle Generation From Process Panels | Published 05/13/2010 | Region of Action- NA |
| 4904 | Reapproval of SEMI E80-1104, Test Method For Determining Attitude Sensitivity Of Mass Flow Controllers (Mounting Position) | Published 05/13/2010 | Region of Action- NA |
| 4905 | Reapproval of SEMI E77-1104, Test Method For Calculation Of Conversion Factors For A Mass Flow Controller Using Surrogate Gases | Published 05/13/2010 | Region of Action- NA |
| 4906 | Reapproval of E29-1104, Standard Terminology For The Calibration Of Mass Flow Controllers And Mass Flow Meters | Published 05/13/2010 | Region of Action- NA |
| 4907 | Reapproval of SEMI E28-1104, Guideline For Pressure Specifications Of The Mass Flow Controller | Published 05/13/2010 | Region of Action- NA |
| 4968 | Revision of SEMI E16-90 (Reapproved 1104) with title change to
Guide For Determining And Describing Mass Flow Controller Leak Rates | Failed Procedural Review - Returned to Committee 12/21/2010 | Region of Action- NA |
| 4968A | Revision of SEMI E16-90 (Reapproved 1104) with title change from "Guideline for Determining and Describing Mass Flow Controller Leak Rates" to "Guide for Determining and Describing Mass Flow Controller Leak Rates" | Published 07/01/2011 | Region of Action- NA |
| 4969 | Revision of SEMI E18-91 (Reapproved 1104) with title change to
Guide For Temperature Specifications Of The Mass Flow Controller | Published 02/03/2011 | Region of Action- NA |
| 4970 | Revision of SEMI E27-92 (Reapproved 1104) with title change to
Terminology For The Linearity Of Mass Flow Controllers And Mass Flow Meters | Failed Procedural Review - Returned to Committee 12/21/2010 | Region of Action- NA |
| 4970A | Revision of SEMI E27-92 (Reapproved 1104) with title change from "Guideline for Mass Flow Controller and Mass Flow Meter Linearity" to "Guide for Mass Flow Controller and Mass Flow Meter Linearity" | Published 06/10/2011 | Region of Action- NA |
| 4971 | Revision of SEMI E29-93 (Reapproved 0710) with title change to
Terminology For The Calibration Of Mass Flow Controllers And Mass Flow Meters | Published 09/30/2010 | Region of Action- NA |
| 4972 | Reapproval of SEMI F54-1000 Test Method For Measuring The Counting Efficiency Of Condensation Nucleus Counters | Published 09/30/2010 | Region of Action- NA |
| 4973 | Reapproval of SEMI F76-0303 Test Method For Evaluation Of Particle Contribution From Gas System Components Exposed To Corrosive Gas | Published 09/30/2010 | Region of Action- NA |
| 4974 | Revision of SEMI E28-92 (Reapproved 0710) with title change to
Guide For Pressure Specifications Of The Mass Flow Controller | Published 09/30/2010 | Region of Action- NA |
| 5044 | Revision to SEMI F32-0709 Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves | Published 02/03/2011 | Region of Action- NA |
| 5055 | Reapproval of SEMI C54-1103 - Specifications and Guidelines for Oxygen | Published 02/03/2011 | Region of Action- NA |
| 5056 | Reapproval of SEMI C55-1104 - Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality | Published 02/03/2011 | Region of Action- NA |
| 5057 | Reapproval of SEMI C56-0305 - Specifications and Guidelines for Dichlorosilane (SiH2Cl2) | Published 02/03/2011 | Region of Action- NA |
| 5058 | Reapproval of SEMI C57-0305 - Specifications and Guidelines for Argon | Published 02/03/2011 | Region of Action- NA |
| 5059 | Reapproval of SEMI C58-0305 - Specifications and Guidelines for Hydrogen | Published 02/03/2011 | Region of Action- NA |
| 5060 | Reapproval of SEMI C59-1104 - Specifications and Guidelines for Nitrogen | Published 02/03/2011 | Region of Action- NA |
| 5061 | Reapproval of SEMI C60-0305 - Specifications and Guidelines for Nitrous Oxide (N2O) | Published 02/03/2011 | Region of Action- NA |
| 5099 | Revision of SEMI E52-0310, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Published 06/10/2011 | Region of Action- NA |
| 5138 | Reapproval of SEMI F20-0706E, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications | Published 07/01/2011 | Region of Action- NA |
| 5139 | Reapproval of SEMI F29-0997 (Reapproved 1103), Test Method for Purge Efficacy of Gas Source System Panels | Published 06/24/2011 | Region of Action- NA |
| 5140 | Reapproval of SEMI F37-0299 (Reapproved 1104), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components | Published 07/01/2011 | Region of Action- NA |
| 5141 | Reapproval of SEMI F38-0699 (Reapproved 1104), Test Method for Efficiency Qualification of Point-of-Use Gas Filters | Published 06/24/2011 | Region of Action- NA |
| 5142 | Reapproval of SEMI F60-0306 - Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components | Published 07/01/2011 | Region of Action- NA |
| 5195 | Reapproval of SEMI E137-0705, Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment | Published 11/14/2011 | Region of Action- NA |
| 5196 | Reapproval of SEMI E49-1104, Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies | Published 12/09/2011 | Region of Action- NA |
| 5197 | Reapproval of SEMI E49.6-1103, Guide for Subsystem Assembly and Testing Procedures - Stainless Steel Systems | Published 12/09/2011 | Region of Action- NA |
| 5198 | Reapproval of SEMI E49.8-1103, Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment | Published 12/09/2011 | Region of Action- NA |
| 5199 | Reapproval of SEMI F101-1105, Test Methods for Determining Pressure Regulator Performance In Gas Distribution Systems | Published 11/14/2011 | Region of Action- NA |
| 5200 | Reapproval of SEMI F62-0701 (Reapproved 0307), Test Method for Determining Mass Flow Controller Performance Characterisitics from Ambient and Gas Temperature Effects | Published 11/14/2011 | Region of Action- NA |
| 5201 | Reapproval of SEMI F64-0701 (Reapproved 0307), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers | Published 11/18/2011 | Region of Action- NA |
| 5203 | Revision of SEMI E17-0600 (Reapproved 0307), with title change to: Guide for Mass Flow Controller Transient Characteristics Tests | Published 10/24/2011 | Region of Action- NA |
| 5206 | Revision of SEMI C3.39-0304, with title change to: Specification for Nitrogen Trifluoride (NF3), 99.98% Quality | Published 10/27/2011 | Region of Action- NA |
| 5207 | Revision of SEMI C3.40-1000, with title change to: Specification for Carbon Tetrafluoride (CF4), 99.997% Quality | Published 10/27/2011 | Region of Action- NA |
| 5208 | Revision of SEMI C3.47-1101, Specification for Hydrogen Bromide (HBr), 99.98% Quality | Published 10/27/2011 | Region of Action- NA |
| 5209 | Withdrawal of SEMI C3.54-0200E, Gas Purity Guideline for Silane | Published 10/25/2011 | Region of Action- NA |
| 5210 | Revision of SEMI C3.55-0200, with title change to: Specification for Silane (SiH4), Bulk, 99.994% Quality | Published 10/27/2011 | Region of Action- NA |
| 5211 | Revision of SEMI C3.58-0303, with title change to: Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality | Published 10/27/2011 | Region of Action- NA |
| 5212 | Reapproval of SEMI C6.2-93 (Reapproved 1102), Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas | Published 12/02/2011 | Region of Action- NA |
| 5213 | Reapproval of SEMI C6.4-90 (Reapproved 1102), Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas | Published 12/02/2011 | Region of Action- NA |
| 5214 | Reapproval of SEMI C6.5-90 (Reapproved 1102), Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas | Published 12/02/2011 | Region of Action- NA |
| 5215 | Reapproval of SEMI C6.6-90 (Reapproved 1102), Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas | Published 12/02/2011 | Region of Action- NA |
| 5216 | Reapproval of SEMI C6.7-93 (Reapproved 1102), Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders | Published 12/02/2011 | Region of Action- NA |
| 5217 | Reapproval of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures | Failed Technical Review and Returned to TF 07/12/2011 | Region of Action- NA |
| 5217A | Revision of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures | Published 02/10/2012 | Region of Action- NA |
| 5218 | Reapproval of SEMI C15-95 (Reapproved 1102), Test Method for ppm and ppb Humidity Standards | Failed Technical Review and Returned to TF 07/12/2011 | Region of Action- NA |
| 5218A | Revision of SEMI C15-95 (Reapproved 1102), Test Method for ppm and ppb Humidity Standards | Published 02/10/2012 | Region of Action- NA |
| 5219 | Reapproval of SEMI C6.3-89 (Reapproved 0303), Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas | Published 12/02/2011 | Region of Action- NA |
| 5224 | Reapproval of SEMI C52-0301, Specification for the Shelf Life of a Specialty Gas | Published 03/30/2012 | Region of Action- Europe |
| 5230 | Revision of SEMI C3.56-0600, Specification for Diborane Mixtures | Published 03/09/2012 | Region of Action- Europe |
| 5231 | Revision of SEMI C3.57-0600, Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders | Published 03/09/2012 | Region of Action- Europe |
| 5243 | Reapproval of SEMI F53-0307, Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers | Published 04/13/2012 | Region of Action- NA |
| 5244A | Revision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments | Failed Technical Review and Returned to TF 07/10/2012 | Region of Action- NA |
| 5245 | Reapproval of SEMI F55-0600 (Reapproved 0307), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers | Published 04/13/2012 | Region of Action- NA |
| 5246 | Reapproval of SEMI F56-0600 (Reapproved 0307), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers | Published 04/13/2012 | Region of Action- NA |
| 5247 | Withdrawal of SEMI C3.26-0301, Specification for Tungsten Hexafluoride (WF6) In Cylinders, 99.8% Quality | Published 03/28/2012 | Region of Action- NA |
| 5248 | Withdrawal of SEMI C3.33-92 (Reapproved 0303), Standard for Boron Trichloride (BCl3) (Provisional) | Published 03/30/2012 | Region of Action- NA |
| 5250 | Withdrawal of SEMI C3.52-0200, Standard for Tungsten Hexafluoride, 99.996% Quality | Drafting 07/21/2011 | Region of Action- NA |
| 5250 | Withdrawal of SEMI C3.52-0200, Standard for Tungsten Hexafluoride, 99.996% Quality | Published 03/28/2012 | Region of Action- NA |
| 5277 | Revision to SEMI F82-0304, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5277A | Revision to SEMI F82-0312, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5278 | Revision to SEMI F83-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5278A | Revision to SEMI F83-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5279 | Revision to SEMI F84-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5279A | Revision to SEMI F84-0312, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5280 | Revision to SEMI F85-0304, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5280A | Revision to SEMI F85-0312, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5281 | Revision to SEMI F86-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5281A | Revision to SEMI F86-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5282 | Revision to SEMI F87-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5282A | Revision to SEMI F87-0312, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5283 | Revision to SEMI F88-0304E, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5283A | Revision to SEMI F88-0312, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5284 | Revision to SEMI F89-0304E, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5284A | Revision to SEMI F89-0312, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5285 | Revision to SEMI F90-0304E, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5285A | Revision to SEMI F90-0312, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5286 | Revision to SEMI F91-0304E, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5286A | Revision to SEMI F91-0312, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5287 | Revision to SEMI F92-0304E, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5287A | Revision to SEMI F92-0312, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5288 | Revision to SEMI F93-0304E, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5288A | Revision to SEMI F93-0312, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5289 | Revision to SEMI F94-0304E, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5289A | Revision to SEMI F94-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5290 | Revision to SEMI F95-0304E, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | Failed Technical Review and Returned to TF 09/29/2011 | Region of Action- Japan |
| 5290A | Revision to SEMI F95-0312, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | Published 10/18/2012 | Region of Action- Japan |
| 5345 | Revision of SEMI C3-0699, Specifications for Gases | Published 08/09/2012 | Region of Action- NA |
| 5346 | Reapproval of SEMI F23-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Flammable Specialty Gases | Published 07/31/2012 | Region of Action- NA |
| 5347 | Reapproval of SEMI F24-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Inert Specialty Gases | Published 07/31/2012 | Region of Action- NA |
| 5348 | Reapproval of SEMI F25-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Oxidant Specialty Gases | Published 07/31/2012 | Region of Action- NA |
| 5349 | Reapproval of SEMI F26-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Toxic Specialty Gases | Published 07/31/2012 | Region of Action- NA |
| 5407 | Revision to SEMI E52-0611, Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers | Published 09/19/2012 | Region of Action- NA |
| 5443 | Line Item Revision of SEMI C3-0812, Specifications for Gases | See Line Items Below | Region of Action- NA |
5443
LI - 1 | Changes to section 9.2.1, 9.2.2, 9.2.3.1 and add 9.2.4 as indicated below | Published 04/19/2013 | Region of Action- NA |
| 5446 | New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS) | Passed Technical Review - Awaiting Procedural Review 04/02/2013 | Region of Action- NA |
| 5504 | Revision of SEMI E52-0912, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Failed Technical Review and Returned to TF 04/02/2013 | Region of Action- NA |
| 5504A | Revision of SEMI E52-1012, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Drafting 05/17/2013 | Region of Action- NA |
| 5505 | Revision to SEMI C58-0305 (Reapproved 0211), Specifications and Guidelines for Hydrogen | Failed Technical Review and Returned to TF 04/02/2013 | Region of Action- NA |
| 5505A | Revision of SEMI C58-0305 (Reapproved 0211) with Title Change to: Specifications for Hydrogen | Drafting 04/29/2013 | Region of Action- NA |
| 5516 | Reapproval of SEMI F43-0308, Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters | Passed Technical Review - Awaiting Procedural Review 04/02/2013 | Region of Action- NA |
| 5517 | Reapproval of SEMI F59-0302 (Reapproved 1108), Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves | Passed Technical Review - Awaiting Procedural Review 04/02/2013 | Region of Action- NA |
| 5518 | Reapproval of SEMI F67-1101 (Reapproved 1108), Test Method for Determining Inert Gas Purifier Capacity | Passed Technical Review - Awaiting Procedural Review 04/02/2013 | Region of Action- NA |
| 5519 | Reapproval of SEMI F68-1101 (Reapproved 1108), Test Method for Determining Purifier Efficiency | Passed Technical Review - Awaiting Procedural Review 04/02/2013 | Region of Action- NA |
| 5520 | Reapproval of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems | Failed Technical Review and Returned to TF 04/02/2013 | Region of Action- NA |
| 5520A | Revision of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems | Drafting 04/23/2013 | Region of Action- NA |
| 5568 | Reapproval of SEMI C14-95 (Reapproved 0309), Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges | Drafting 04/23/2013 | Region of Action- NA |
| 5569 | Revision of SEMI E12-0303 (Reapproved 0309), with Title Change to: Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers | Drafting 04/24/2013 | Region of Action- NA |
| 5571 | Reapproval of SEMI E56-0309, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers | Drafting 04/23/2013 | Region of Action- NA |
| 5573 | Reapproval of SEMI E68-0997 (Reapproved 0309), Test Method for Determining Warm-Up Time of Mass Flow Controllers | Drafting 04/23/2013 | Region of Action- NA |
| 5574 | Reapproval of SEMI E69-0298 (Reapproved 0309), Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers | Drafting 04/23/2013 | Region of Action- NA |
| 5577 | Reapproval of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution Systems | Drafting 04/23/2013 | Region of Action- NA |
| 5578 | Reapproval of SEMI F36-0299 (Reapproved 1104), Guide for Dimensions and Connections of Gas Distribution Components | Drafting 04/23/2013 | Region of Action- NA |