SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

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Gases

3383Reapproval of SEMI F27-0997 (Reapproved 1103) Test Method For Moisture Interaction And Content Of Gas Distribution Systems And Components By Atmospheric Pressure Ionization Mass Spectrometry (APIMS)Published 06/24/2011Region of Action- NA
4652Revision to SEMI C3.2-0301, Specification for Arsine (AsH3) in Cylinders, 99.94% QualityFailed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4652ARevision of SEMI C3.2-0301, Specification for Arsine (AsH3) in Cylinders, 99.94% QualityPublished 06/03/2011Region of Action- NA
4653Revision to SEMI C3.6-0701, Specification for Phosphine (PH3) in Cylinders, 99.98% QualityFailed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4653ARevision of SEMI C3.6-0701, Specification For Phosphine (PH3) In Cylinders, 99.98% QualityPublished 05/14/2010Region of Action- NA
4654Revision of SEMI C3.12-1102 Specification for Ammonia (NH3) in Cylinders, 99.998% QualityPublished 09/24/2009Region of Action- NA
4657ANew Standard: Specifications for Tungsten Hexafluoride (WF6)Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4657BNew Standard: Specifications for Tungsten Hexafluoride (WF6)Published 06/03/2011Region of Action- NA
4658Reapproval of SEMI C3.27-1102, Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality Published 10/27/2011Region of Action- NA
4677Reapproval of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4677ARevision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Failed Technical Review and Returned to TF 07/14/2009Region of Action- NA
4677BRevision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Failed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4677CRevision of SEMI E66-1103, Test Method for Determining Particle Contribution by Mass Flow Controllers Published 06/03/2011Region of Action- NA
4678Reapproval of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4678ARevision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller Failed Technical Review and Returned to TF 07/14/2009Region of Action- NA
4678BRevision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller Failed Technical Review and Returned to TF 03/30/2010Region of Action- NA
4678CRevision of SEMI E67-0304, Test Method for Determining Reliability of Mass Flow Controller Published 10/24/2011Region of Action- NA
4679ARevision of SEMI F79-0703, Guide For Gas Compatibility With Silicon Used In Gas Distribution ComponentsPublished 05/20/2010Region of Action- NA
4680ARevision of SEMI E52-0309 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Published 09/24/2009Region of Action- NA
4700Line Item Revision to SEMI F32-0706, Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves See Line Items Below Region of Action- NA
4700
LI - 1
Change the constant “3905.6” to “2.95” in equation 4. Published 05/22/2009Region of Action- NA
4722Revision to SEMI F70-0302, Test Method for Determination Of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4722ARevision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 07/14/2009Region of Action- NA
4722BRevision of SEMI F70-0302 Test Method For Determination Of Particle Contribution Of Gas Delivery SystemFailed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4722CRevision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 03/30/2010Region of Action- NA
4722DRevision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 07/13/2010Region of Action- NA
4722E Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4722FRevision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System Published 06/03/2011Region of Action- NA
4734New Standard: Specifications and Guidelines for Boron Trichloride (BCl3)Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4734ANew Standard: Specification and Guide for Boron Trichloride (BCl3)Published as SEMI C71-0611 06/03/2011Region of Action- NA
4737New Standard: Guide For Heater Jacket RequirementsFailed Technical Review and Returned to TF 07/13/2010Region of Action- NA
4737New Standard: Specification for Heating Jacket for Using in Semiconductor ProcessingDrafting 04/14/2010Region of Action- NA
4737ANew Standard: Guide For Heater Jacket RequirementsFailed Technical Review and Returned to TF 11/09/2010Region of Action- NA
4737BNew Standard: Guide For Heated Systems RequirementsFailed Technical Review and Returned to TF 03/29/2011Region of Action- NA
4737CNew Standard: Guide For Heated Systems RequirementsFailed Technical Review and Returned to TF 07/12/2011Region of Action- NA
4737DNew Standard: Guide for Heater Systems RequirementsPublished as SEMI F109-0212 02/24/2012Region of Action- NA
4754Revision of SEMI C3.32-0301 - Specification for Chlorine (Cl2), 99.996% Quality Published 09/24/2009Region of Action- NA
4755Revision of SEMI C3.34-1102 - Specification for Disilane (Si2H6) in Cylinders, 97% QualityPublished 09/24/2009Region of Action- NA
4756Revision of SEMI C3.35-1101 - Specification for Hydrogen Chloride (HCl), 99.997% QualityPublished 09/24/2009Region of Action- NA
4757Revision of SEMI C3.37-0701 -Specification for Hexafluoroethane (C2F6), 99.97% QualityPublished 09/24/2009Region of Action- NA
4769Revision of SEMI E52-1109 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Published 01/22/2010Region of Action- NA
4784Reapproval of SEMI F19-0304, Specification For The Surface Condition Of The Wetted Surface Of Stainless Steel ComponentsPublished 01/20/2010Region of Action- NA
4785Reapproval of SEMI F22-1102, Guide For Gas Distribution SystemsFailed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4785ARevision of SEMI F22-1102, Guide for Gas Distribution SystemsFailed Technical Review and Returned to TF 10/25/2011Region of Action- NA
4785BRevision of SEMI F22-1102 with title change to: Guide for Bulk and Specialty Gas Distribution SystemsPublished 08/17/2012Region of Action- NA
4786Reapproval of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder ValvesFailed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4786ARevision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder ValvesFailed Procedural Review - Returned to Committee Region of Action- NA
4786BRevision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder ValvesPublished 02/03/2011Region of Action- NA
4787Reapproval of SEMI F77-0703, Test Method For Electrochemical Critical Pitting Temperature Testing Of Alloy Surfaces Used In Corrosive Gas SystemsPublished 01/20/2010Region of Action- NA
4788Reapproval of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing ApplicationsFailed Procedural Review - Returned to Committee Region of Action- NA
4788ARevision of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4788BRevision of SEMI F78-0304, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 06/10/2011Region of Action- NA
4789Reapproval of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications Failed Technical Review and Returned to TF 03/30/2010Region of Action- NA
4789ARevision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsFailed Technical Review and Returned to TF 07/13/2010Region of Action- NA
4789BRevision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4789CRevision of SEMI F81-1103, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 06/03/2011Region of Action- NA
4842Revision of SEMI F30-0298, Start-Up And Verification Of Purifier Performance Testing For Trace Gas Impurities And Particles At An Installation SitePublished 05/20/2010Region of Action- NA
4902Reapproval of SEMI F74-1103, Test Method For The Performance And Evaluation Of Metal Seal Designs For Use In Gas Delivery SystemsPublished 05/13/2010Region of Action- NA
4903Reapproval of SEMI F28-1103, Test Method For Measuring Particle Generation From Process PanelsPublished 05/13/2010Region of Action- NA
4904Reapproval of SEMI E80-1104, Test Method For Determining Attitude Sensitivity Of Mass Flow Controllers (Mounting Position)Published 05/13/2010Region of Action- NA
4905Reapproval of SEMI E77-1104, Test Method For Calculation Of Conversion Factors For A Mass Flow Controller Using Surrogate GasesPublished 05/13/2010Region of Action- NA
4906Reapproval of E29-1104, Standard Terminology For The Calibration Of Mass Flow Controllers And Mass Flow MetersPublished 05/13/2010Region of Action- NA
4907Reapproval of SEMI E28-1104, Guideline For Pressure Specifications Of The Mass Flow ControllerPublished 05/13/2010Region of Action- NA
4968Revision of SEMI E16-90 (Reapproved 1104) with title change to Guide For Determining And Describing Mass Flow Controller Leak Rates Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4968ARevision of SEMI E16-90 (Reapproved 1104) with title change from "Guideline for Determining and Describing Mass Flow Controller Leak Rates" to "Guide for Determining and Describing Mass Flow Controller Leak Rates"Published 07/01/2011Region of Action- NA
4969Revision of SEMI E18-91 (Reapproved 1104) with title change to Guide For Temperature Specifications Of The Mass Flow Controller Published 02/03/2011Region of Action- NA
4970Revision of SEMI E27-92 (Reapproved 1104) with title change to Terminology For The Linearity Of Mass Flow Controllers And Mass Flow Meters Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4970ARevision of SEMI E27-92 (Reapproved 1104) with title change from "Guideline for Mass Flow Controller and Mass Flow Meter Linearity" to "Guide for Mass Flow Controller and Mass Flow Meter Linearity"Published 06/10/2011Region of Action- NA
4971Revision of SEMI E29-93 (Reapproved 0710) with title change to Terminology For The Calibration Of Mass Flow Controllers And Mass Flow Meters Published 09/30/2010Region of Action- NA
4972Reapproval of SEMI F54-1000 Test Method For Measuring The Counting Efficiency Of Condensation Nucleus CountersPublished 09/30/2010Region of Action- NA
4973Reapproval of SEMI F76-0303 Test Method For Evaluation Of Particle Contribution From Gas System Components Exposed To Corrosive GasPublished 09/30/2010Region of Action- NA
4974Revision of SEMI E28-92 (Reapproved 0710) with title change to Guide For Pressure Specifications Of The Mass Flow ControllerPublished 09/30/2010Region of Action- NA
5044Revision to SEMI F32-0709 Test Method for Determining of Flow Coefficient for High Purity Shutoff ValvesPublished 02/03/2011Region of Action- NA
5055Reapproval of SEMI C54-1103 - Specifications and Guidelines for Oxygen Published 02/03/2011Region of Action- NA
5056Reapproval of SEMI C55-1104 - Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality Published 02/03/2011Region of Action- NA
5057Reapproval of SEMI C56-0305 - Specifications and Guidelines for Dichlorosilane (SiH2Cl2) Published 02/03/2011Region of Action- NA
5058Reapproval of SEMI C57-0305 - Specifications and Guidelines for Argon Published 02/03/2011Region of Action- NA
5059Reapproval of SEMI C58-0305 - Specifications and Guidelines for Hydrogen Published 02/03/2011Region of Action- NA
5060Reapproval of SEMI C59-1104 - Specifications and Guidelines for Nitrogen Published 02/03/2011Region of Action- NA
5061Reapproval of SEMI C60-0305 - Specifications and Guidelines for Nitrous Oxide (N2O) Published 02/03/2011Region of Action- NA
5099Revision of SEMI E52-0310, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 06/10/2011Region of Action- NA
5138Reapproval of SEMI F20-0706E, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing ApplicationsPublished 07/01/2011Region of Action- NA
5139Reapproval of SEMI F29-0997 (Reapproved 1103), Test Method for Purge Efficacy of Gas Source System PanelsPublished 06/24/2011Region of Action- NA
5140Reapproval of SEMI F37-0299 (Reapproved 1104), Method for Determination of Surface Roughness Parameters for Gas Distribution System ComponentsPublished 07/01/2011Region of Action- NA
5141Reapproval of SEMI F38-0699 (Reapproved 1104), Test Method for Efficiency Qualification of Point-of-Use Gas FiltersPublished 06/24/2011Region of Action- NA
5142Reapproval of SEMI F60-0306 - Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsPublished 07/01/2011Region of Action- NA
5195Reapproval of SEMI E137-0705, Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment Published 11/14/2011Region of Action- NA
5196Reapproval of SEMI E49-1104, Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final AssembliesPublished 12/09/2011Region of Action- NA
5197Reapproval of SEMI E49.6-1103, Guide for Subsystem Assembly and Testing Procedures - Stainless Steel SystemsPublished 12/09/2011Region of Action- NA
5198Reapproval of SEMI E49.8-1103, Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing EquipmentPublished 12/09/2011Region of Action- NA
5199Reapproval of SEMI F101-1105, Test Methods for Determining Pressure Regulator Performance In Gas Distribution SystemsPublished 11/14/2011Region of Action- NA
5200Reapproval of SEMI F62-0701 (Reapproved 0307), Test Method for Determining Mass Flow Controller Performance Characterisitics from Ambient and Gas Temperature EffectsPublished 11/14/2011Region of Action- NA
5201Reapproval of SEMI F64-0701 (Reapproved 0307), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow ControllersPublished 11/18/2011Region of Action- NA
5203Revision of SEMI E17-0600 (Reapproved 0307), with title change to: Guide for Mass Flow Controller Transient Characteristics TestsPublished 10/24/2011Region of Action- NA
5206Revision of SEMI C3.39-0304, with title change to: Specification for Nitrogen Trifluoride (NF3), 99.98% QualityPublished 10/27/2011Region of Action- NA
5207Revision of SEMI C3.40-1000, with title change to: Specification for Carbon Tetrafluoride (CF4), 99.997% QualityPublished 10/27/2011Region of Action- NA
5208Revision of SEMI C3.47-1101, Specification for Hydrogen Bromide (HBr), 99.98% QualityPublished 10/27/2011Region of Action- NA
5209Withdrawal of SEMI C3.54-0200E, Gas Purity Guideline for SilanePublished 10/25/2011Region of Action- NA
5210Revision of SEMI C3.55-0200, with title change to: Specification for Silane (SiH4), Bulk, 99.994% QualityPublished 10/27/2011Region of Action- NA
5211Revision of SEMI C3.58-0303, with title change to: Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% QualityPublished 10/27/2011Region of Action- NA
5212Reapproval of SEMI C6.2-93 (Reapproved 1102), Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5213Reapproval of SEMI C6.4-90 (Reapproved 1102), Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5214Reapproval of SEMI C6.5-90 (Reapproved 1102), Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5215Reapproval of SEMI C6.6-90 (Reapproved 1102), Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas Published 12/02/2011Region of Action- NA
5216Reapproval of SEMI C6.7-93 (Reapproved 1102), Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas CylindersPublished 12/02/2011Region of Action- NA
5217Reapproval of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas MixturesFailed Technical Review and Returned to TF 07/12/2011Region of Action- NA
5217ARevision of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas MixturesPublished 02/10/2012Region of Action- NA
5218Reapproval of SEMI C15-95 (Reapproved 1102), Test Method for ppm and ppb Humidity Standards Failed Technical Review and Returned to TF 07/12/2011Region of Action- NA
5218ARevision of SEMI C15-95 (Reapproved 1102), Test Method for ppm and ppb Humidity Standards Published 02/10/2012Region of Action- NA
5219Reapproval of SEMI C6.3-89 (Reapproved 0303), Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5224Reapproval of SEMI C52-0301, Specification for the Shelf Life of a Specialty GasPublished 03/30/2012Region of Action- Europe
5230Revision of SEMI C3.56-0600, Specification for Diborane Mixtures Published 03/09/2012Region of Action- Europe
5231Revision of SEMI C3.57-0600, Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders Published 03/09/2012Region of Action- Europe
5243Reapproval of SEMI F53-0307, Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow ControllersPublished 04/13/2012Region of Action- NA
5244ARevision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean EnvironmentsFailed Technical Review and Returned to TF 07/10/2012Region of Action- NA
5245Reapproval of SEMI F55-0600 (Reapproved 0307), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersPublished 04/13/2012Region of Action- NA
5246Reapproval of SEMI F56-0600 (Reapproved 0307), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow ControllersPublished 04/13/2012Region of Action- NA
5247Withdrawal of SEMI C3.26-0301, Specification for Tungsten Hexafluoride (WF6) In Cylinders, 99.8% QualityPublished 03/28/2012Region of Action- NA
5248Withdrawal of SEMI C3.33-92 (Reapproved 0303), Standard for Boron Trichloride (BCl3) (Provisional)Published 03/30/2012Region of Action- NA
5250Withdrawal of SEMI C3.52-0200, Standard for Tungsten Hexafluoride, 99.996% QualityDrafting 07/21/2011Region of Action- NA
5250Withdrawal of SEMI C3.52-0200, Standard for Tungsten Hexafluoride, 99.996% QualityPublished 03/28/2012Region of Action- NA
5277Revision to SEMI F82-0304, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5277ARevision to SEMI F82-0312, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5278Revision to SEMI F83-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5278ARevision to SEMI F83-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5279Revision to SEMI F84-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5279ARevision to SEMI F84-0312, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5280Revision to SEMI F85-0304, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5280ARevision to SEMI F85-0312, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5281Revision to SEMI F86-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5281ARevision to SEMI F86-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5282Revision to SEMI F87-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5282ARevision to SEMI F87-0312, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5283Revision to SEMI F88-0304E, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5283ARevision to SEMI F88-0312, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5284Revision to SEMI F89-0304E, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5284ARevision to SEMI F89-0312, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5285Revision to SEMI F90-0304E, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5285ARevision to SEMI F90-0312, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5286Revision to SEMI F91-0304E, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5286ARevision to SEMI F91-0312, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5287Revision to SEMI F92-0304E, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5287ARevision to SEMI F92-0312, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5288Revision to SEMI F93-0304E, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5288ARevision to SEMI F93-0312, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5289Revision to SEMI F94-0304E, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5289ARevision to SEMI F94-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5290Revision to SEMI F95-0304E, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5290ARevision to SEMI F95-0312, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5345Revision of SEMI C3-0699, Specifications for Gases Published 08/09/2012Region of Action- NA
5346Reapproval of SEMI F23-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Flammable Specialty Gases Published 07/31/2012Region of Action- NA
5347Reapproval of SEMI F24-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Inert Specialty GasesPublished 07/31/2012Region of Action- NA
5348Reapproval of SEMI F25-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Oxidant Specialty GasesPublished 07/31/2012Region of Action- NA
5349Reapproval of SEMI F26-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Toxic Specialty GasesPublished 07/31/2012Region of Action- NA
5407Revision to SEMI E52-0611, Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 09/19/2012Region of Action- NA
5443Line Item Revision of SEMI C3-0812, Specifications for GasesSee Line Items Below Region of Action- NA
5443
LI - 1
Changes to section 9.2.1, 9.2.2, 9.2.3.1 and add 9.2.4 as indicated belowPublished 04/19/2013Region of Action- NA
5444Revision of SEMI F72-0309, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsPublished 02/14/2014Region of Action- NA
5445Revision of SEMI F60-0306 (Reapproved 0611), Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components Publication Process Started 08/25/2014Region of Action- NA
5446New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)Published as SEMI F112-0613 06/28/2013Region of Action- NA
5504Revision of SEMI E52-0912, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersFailed Technical Review and Returned to TF 04/02/2013Region of Action- NA
5504ARevision of SEMI E52-1012, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 12/20/2013Region of Action- NA
5505Revision to SEMI C58-0305 (Reapproved 0211), Specifications and Guidelines for Hydrogen Failed Technical Review and Returned to TF 04/02/2013Region of Action- NA
5505ARevision of SEMI C58-0305 (Reapproved 0211) with Title Change to: Specifications for Hydrogen Published 12/13/2013Region of Action- NA
5516Reapproval of SEMI F43-0308, Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas FiltersPublished 06/26/2013Region of Action- NA
5517Reapproval of SEMI F59-0302 (Reapproved 1108), Test Method for Determination of Filter or Gas System Flow Pressure Drop CurvesPublished 06/26/2013Region of Action- NA
5518Reapproval of SEMI F67-1101 (Reapproved 1108), Test Method for Determining Inert Gas Purifier CapacityPublished 07/25/2013Region of Action- NA
5519Reapproval of SEMI F68-1101 (Reapproved 1108), Test Method for Determining Purifier EfficiencyPublished 07/25/2013Region of Action- NA
5520ARevision of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems Published 12/20/2013Region of Action- NA
5520infoReapproval of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems Failed Technical Review and Returned to TF 04/02/2013Region of Action- NA
5568Reapproval of SEMI C14-95 (Reapproved 0309), Test Method for Particle Shedding Performance of 25 cm Gas Filter CartridgesPublished 09/27/2013Region of Action- NA
5569Revision of SEMI E12-0303 (Reapproved 0309), with Title Change to: Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow ControllersPublished 12/20/2013Region of Action- NA
5571Reapproval of SEMI E56-0309, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers Failed Technical Review and Returned to TF 07/09/2013Region of Action- NA
5571ARevision of SEMI E56-0309 with title change to: Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers Published 03/28/2014Region of Action- NA
5573Reapproval of SEMI E68-0997 (Reapproved 0309), Test Method for Determining Warm-Up Time of Mass Flow ControllersPublished 09/27/2013Region of Action- NA
5574Reapproval of SEMI E69-0298 (Reapproved 0309), Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow ControllersPublished 09/27/2013Region of Action- NA
5577Reapproval of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution SystemsFailed Technical Review and Returned to TF 07/09/2013Region of Action- NA
5577ARevision of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution SystemsPublished 03/28/2014Region of Action- NA
5578Reapproval of SEMI F36-0299 (Reapproved 1104), Guide for Dimensions and Connections of Gas Distribution ComponentsPublished 09/27/2013Region of Action- NA
5609Revision of SEMI C3.24.0309, Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% QualityPublished 04/25/2014Region of Action- NA
5610New Auxiliary Information: Codes for Referencing Gases, Gas Mixtures And Vaporizable Materials Used In Digital Mass Flow ControllersAuxiliary Information Published 01/31/2014Region of Action- NA
5611Revision of SEMI C3.20-0309, Specification for Helium (He), in Cylinders, 99.9995% QualityPublished 04/25/2014Region of Action- NA
5668Withdrawal of SEMI E52-1213, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 07/31/2014Region of Action- NA
5669 Line Item Revisions of: SEMI E6-0303 Guide for Semiconductor Equipment Installation Documentation SEMI E54.18-1106 (Reapproved 1211) Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device SEMI E54.22-0613 Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges SEMI F79-0710 Guide for Gas Compatibility with Silicon Used in Gas Distribution Components SEMI F105-0708 Guide for Metallic Material Compatibility in Gas Distribution SystemsSee Line Items Below Region of Action- NA
5669
LI - 1
Change all instances of SEMI E52 to AUX030 as noticed.Published 09/30/2014Region of Action- NA
5671Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityFailed Technical Review and Returned to TF 04/01/2014Region of Action- NA
5671ARevision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityFailed Technical Review and Returned to TF 11/04/2014Region of Action- NA
5672Revision of SEMI C3.32-1109, Specification for Chlorine (Cl2), 99.996% QualityPublished 06/20/2014Region of Action- NA
5673Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityFailed Technical Review and Returned to TF 04/01/2014Region of Action- NA
5673ARevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityFailed Technical Review and Returned to TF 11/04/2014Region of Action- NA
5674Revision of SEMI C3.37-1109, Specification for Hexafluoroethane (C2F6), 99.97% QualityPublished 06/27/2014Region of Action- NA
5712Revision to SEMI F73-0309, Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel ComponentsPublication Process Started 08/25/2014Region of Action- NA
5714Reapproval of SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel ComponentsFailed Technical Review and Returned to TF 07/08/2014Region of Action- NA
5714ARevision to SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel ComponentsDrafting 11/24/2014Region of Action- NA
5715Reapproval of SEMI F77-0703 (Reapproved 0310), Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas SystemsFailed Technical Review and Returned to TF 07/08/2014Region of Action- NA
5721Revision to SEMI C71-0611, Specification and Guide for Boron Trichloride (BCI3) with title change to: Specification for Boron Trichloride (BCI3)Failed Technical Review and Returned to TF 07/08/2014Region of Action- NA
5722Line item revision to SEMI E56-0314, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow ControllersSee Line Items Below Region of Action- NA
5722
LI - 1
Correction to Equation 5Failed Technical Review and Returned to TF 07/08/2014Region of Action- NA