3440C | New Standard: Test Method For Pressure Transducers In Gas Delivery Systems | Published as SEMI F113-1116 11/30/2016 | Region of Action- NA |
5244B | Revision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments | Published 10/20/2016 | Region of Action- NA |
5765 | Revision to SEMI C15-0212, Test Method for ppm and ppb Humidity Standards | Published 06/30/2016 | Region of Action- Europe |
5816A LI - 1 | Change the current title, correct reference to the actual Subtype of Standard in 1.1, and correct the Section 6 heading | Failed Procedural Review 11/03/2015 | Region of Action- NA |
5816B | Revision to SEMI F30-0710: Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site | Published 05/19/2017 | Region of Action- NA |
5876 | New Standard - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used In Corrosive Gas Systems by Use of a Ferric Chloride Solution | Published as SEMI C92-0216 02/05/2016 | Region of Action- NA |
5963 | LINE ITEM REVISION TO SEMI F62-0701 (Reapproved 1111)
TEST METHOD FOR DETERMINING MASS FLOW CONTROLLER PERFORMANCE CHARACTERISITICS FROM AMBIENT AND GAS TEMPERATURE EFFECTS | See Line Items Below | Region of Action- NA |
5963 LI - 1 | Changes to formula 1, 2, 4 and modify terminology 5.3.8 | Failed Technical Review and Returned to TF 04/05/2015 | Region of Action- NA |
5963A | LINE ITEM REVISION TO SEMI F62-0701 (Reapproved 1111)
TEST METHOD FOR DETERMINING MASS FLOW CONTROLLER PERFORMANCE CHARACTERISITICS FROM AMBIENT AND GAS TEMPERATURE EFFECTS | See Line Items Below | Region of Action- NA |
5963A LI - 1 | Line item change to modify terminology in Section 5.1 | Published 10/28/2016 | Region of Action- NA |
5963A LI - 2 | Line item change to modify Section 15.1 as shown | Published 10/28/2016 | Region of Action- NA |
5964 | LINE ITEM REVISION TO SEMI E56-0314 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEAD BAND OF THERMAL MASS FLOW CONTROLLERS | See Line Items Below | Region of Action- NA |
5964 LI - 1 | Correct Formula 1 | Failed Technical Review and Returned to TF 04/05/2016 | Region of Action- NA |
5964 LI - 2 | Correct Formula 2 | Failed Technical Review and Returned to TF 04/05/2016 | Region of Action- NA |
5964 LI - 3 | Correct Formula 6 | Failed Technical Review and Returned to TF 04/05/2016 | Region of Action- NA |
5964 LI - 4 | Correct Formula 16 | Failed Technical Review and Returned to TF 04/05/2016 | Region of Action- NA |
5964A | LINE ITEM REVISION TO SEMI E56-0815 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEAD BAND OF THERMAL MASS FLOW CONTROLLERS | See Line Items Below | Region of Action- NA |
5964A LI - 1 | Line item change to modify terminology in Section 5.1. | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5964A LI - 2 | Change to Formula 1 | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5964A LI - 3 | Change to Formula 2 | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5964A LI - 4 | Change to Formula 5 | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5964A LI - 5 | Change to Formula 6 | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5964A LI - 6 | Change to Formula 8 | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5964A LI - 7 | Change to Formula 16 | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5964B | Line Item Revision To Semi E56-0815, Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow Controllers | See Line Items Below | Region of Action- NA |
5964B LI - 1 | Modifications to Section 5 | Published 03/24/2017 | Region of Action- NA |
5964B LI - 2 | Change to Formula 1 | Published 03/24/2017 | Region of Action- NA |
5964B LI - 3 | Change to Formula 2 | Published 03/24/2017 | Region of Action- NA |
5964B LI - 4 | Change to Formula 5 | Published 03/24/2017 | Region of Action- NA |
5964B LI - 5 | Change to Formula 6 | Published 03/24/2017 | Region of Action- NA |
5964B LI - 6 | Change to Formula 8 | Published 03/24/2017 | Region of Action- NA |
5964B LI - 7 | Change to Formula 16 | Published 03/24/2017 | Region of Action- NA |
5997 | Line Item Revision to SEMI C3-0413, Specifications for Gases | See Line Items Below | Region of Action- NA |
5997 LI - 1 | Correct the title of this Standard from “Specifications for Gases” to “Specification for Gases” | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
5997A | Revision to SEMI C3-0413, Specifications for Gases | Published 03/24/2017 | Region of Action- NA |
5998 | Line Item Revision to SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen | See Line Items Below | Region of Action- NA |
5998 LI - 1 | Correct the title of this Standard from “Specifications and Guidelines for Oxygen” to “Specification for Oxygen” | Published 11/18/2016 | Region of Action- NA |
5999 | Line Item Revision to SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2) | See Line Items Below | Region of Action- NA |
5999 LI - 1 | Correct the title of this Standard from “Specifications and Guidelines for Dichlorosilane (SiH2Cl2)” to “Specification for Dichlorosilane” | Published 11/25/2016 | Region of Action- NA |
6000 | Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon | See Line Items Below | Region of Action- NA |
6000 LI - 1 | Correct the title of this Standard from “Specifications and Guidelines for Argon” to “Specification and Guide for Argon” | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
6000A | Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon | Published 03/17/2017 | Region of Action- NA |
6001 | Line Item Revision to SEMI C58-1213, Specifications for Hydrogen | See Line Items Below | Region of Action- NA |
6001 LI - 1 | Correct the title of this Standard from “Specifications for Hydrogen” to “Specification for Hydrogen” | Published 11/25/2016 | Region of Action- NA |
6002 | Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen | Drafting 04/20/2016 | Region of Action- NA |
6002 LI - 1 | Correct the title of this Standard from “Specifications and Guidelines for Nitrogen” to “Specification and Guide for Nitrogen” | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
6002A | Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen | Published 03/17/2017 | Region of Action- NA |
6003 | Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) | See Line Items Below | Region of Action- NA |
6003 LI - 1 | Correct the title of this Standard from “Specifications and Guidelines for Nitrous Oxide (N2O)” to “Specification and Guide for Nitrous Oxide” | Failed Technical Review and Returned to TF 07/12/2016 | Region of Action- NA |
6003A | Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) | Published 03/17/2017 | Region of Action- NA |
6004 | Line Item Revision to SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6) | See Line Items Below | Region of Action- NA |
6004 LI - 1 | Correct the title of this Standard from “Specifications for Tungsten Hexafluoride (WF6)” to “Specification for Tungsten Hexafluoride” | Published 11/25/2016 | Region of Action- NA |
6050 | Line Item Revision to Modify the Nonconforming Title for SEMI E16-0611, Guideline for Determining and Describing Mass Flow Controller Leak Rates | See Line Items Below | Region of Action- NA |
6050 LI - 1 | Correct the title of SEMI E16 from “Guideline for Determining and Describing Mass Flow Controller Leak Rates” to “Guide for Determining and Describing Mass Flow Controller Leak Rates” | Published 05/19/2017 | Region of Action- NA |
6054 | Reapproval of SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow Controller | Failed Technical Review and Returned to TF 11/08/2016 | Region of Action- NA |
6054A | Line Item Revisions to SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow Controller | See Line Items Below | Region of Action- NA |
6054A LI - 1 | Modify Terminology Section 4.1.9 | Published 10/30/2017 | Region of Action- NA |
6054A LI - 2 | Modify Terminology Section 4.1.10.1 | Published 10/30/2017 | Region of Action- NA |
6054A LI - 3 | Modify Terminology Section 4.1.10.2 | Published 10/30/2017 | Region of Action- NA |
6054A LI - 4 | Modify Terminology Section 4.1.10.3 | Published 10/30/2017 | Region of Action- NA |
6055 | Reapproval of SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity | Failed Technical Review and Returned to TF 11/08/2016 | Region of Action- NA |
6055A | Line Item Revision to SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity | See Line Items Below | Region of Action- NA |
6055A LI - 1 | Change “shall” to “should” throughout per Style Manual | Published 10/30/2017 | Region of Action- NA |
6056 | Reapproval of SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller | Failed Technical Review and Returned to TF 11/08/2016 | Region of Action- NA |
6056A | Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with Title Change to Guide for Pressure Parameters of the Mass Flow Controller | Failed Technical Review and Returned to TF 04/04/2017 | Region of Action- NA |
6056B | Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller
with Title Change to Guide for Pressure Parameters of the Mass Flow Controller | Published 02/23/2018 | Region of Action- NA |
6057 | Reapproval of SEMI E29-1110, Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters | Published 04/21/2017 | Region of Action- NA |
6058 | Reapproval of SEMI E66-0611, Test Method for Determining Particle Contribution by Mass Flow Controllers | Published 05/19/2017 | Region of Action- NA |
6059 | Reapproval of SEMI F29-0997 (Reapproved 0611), Test Method for Purge Efficacy of Gas Source System Panels | Published 05/19/2017 | Region of Action- NA |
6060 | Reapproval of SEMI F70-0611, Test Method for Determination of Particle Contribution of Gas Delivery System | Published 05/19/2017 | Region of Action- NA |
6106 | Reapproval of SEMI F13-1101, Guide for Gas Source Control Equipment | Failed Technical Review and Returned to TF 04/04/2017 | Region of Action- NA |
6107 | Reapproval of SEMI F14-93 (Reapproved 0699), Guide for the Design of Gas Source Equipment Enclosures | Failed Technical Review and Returned to TF 04/04/2017 | Region of Action- NA |
6108 | Reapproval of SEMI F20-0706E (Reapproved 0611), Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
| Published 09/29/2017 | Region of Action- NA |
6111 | Reapproval of SEMI F6-92, Guide for Secondary Containment of Hazardous Gas Piping Systems | Failed Technical Review and Returned to TF 04/04/2017 | Region of Action- NA |
6119 | Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with Title Change to Test Method for Measurement of Mass Flow Controller Transient Characteristics | Published 03/09/2018 | Region of Action- NA |
6120 | Reapproval of SEMI E137-0705 (Reapproved 1111), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment | Published 01/05/2018 | Region of Action- NA |
6121 | Reapproval of SEMI E67-1011, Test Method for Determining Reliability of Mass Flow Controller | Published 02/09/2018 | Region of Action- NA |
6122 | Reapproval of SEMI F78-0611, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications | Published 09/29/2017 | Region of Action- NA |
6123 | Reapproval of SEMI F81-0611, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications | Published 09/29/2017 | Region of Action- NA |
6125 | Line Item Revision to Correct the Title of SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases | See Line Items Below | Region of Action- NA |
6125 LI - 1 | Correct nonconforming title per SEMI Standards Procedure Manual | Failed Technical Review and Returned to TF 04/04/2017 | Region of Action- NA |
6125A | Revision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen Gas | Published 05/25/2018 | Region of Action- NA |
6126 | Line Item Revision to Correct the Title of SEMI F24-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Inert Specialty Gases | See Line Items Below | Region of Action- NA |
6126 LI - 1 | Correct nonconforming title per SEMI Standards Procedure Manual | Published 12/22/2017 | Region of Action- NA |
6127 | Line Item Revision to Correct the Title of SEMI F25-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Oxidant Specialty Gases | See Line Items Below | Region of Action- NA |
6127 LI - 1 | Correct nonconforming title per SEMI Standards Procedure Manual | Published 01/05/2018 | Region of Action- NA |
6128 | Line Item Revision to Correct the Title of SEMI F26-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Toxic Specialty Gases | See Line Items Below | Region of Action- NA |
6128 LI - 1 | Correct nonconforming title per SEMI Standards Procedure Manual | Published 01/05/2018 | Region of Action- NA |
6137 | Reapproval of SEMI C55-1104 (Reapproved 0211), Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality | Published 01/05/2018 | Region of Action- NA |
6138 | Reapproval of SEMI C3.27-1102 (Reapproved 1011), Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality | Published 01/05/2018 | Region of Action- NA |
6139 | Reapproval of SEMI C3.39-1011, Specification for Nitrogen Trifluoride (NF3), 99.98% | Published 01/05/2018 | Region of Action- NA |
6140 | Reapproval of SEMI C3.2-0611, Specification for Arsine (AsH3) in Cylinders, 99.94% Quality | Published 02/09/2018 | Region of Action- NA |
6141 | Reapproval of SEMI C3.47-1011, Specification for Hydrogen Bromide (HBr), 99.98% Quality | Published 02/09/2018 | Region of Action- NA |
6142 | Reapproval of SEMI C3.55-1011, Specification for Silane (SiH4), Bulk, 99.994% Quality | Published 02/09/2018 | Region of Action- NA |
6143 | Reapproval of SEMI C3.40-1011, Specification for Carbon Tetrafluoride (CF4), 99.997% Quality | Published 02/09/2018 | Region of Action- NA |
6178 | Line Item Revision to Correct the Title of SEMI F37-0299 (Reapproved 0611), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components | See Line Items Below | Region of Action- NA |
6178 LI - 1 | Correct nonconforming title per SEMI Standards Procedure Manual to "Test Method for Determination of Surface Roughness Parameters for Gas Distribution System Components” | Published 03/09/2018 | Region of Action- NA |
6180 | Reapproval of SEMI F64-0701 (Reapproved 1111), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers | Published 03/09/2018 | Region of Action- NA |
6181 | Reapproval of SEMI F76-0303 (Reapproved 1110), Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas | Published 03/09/2018 | Region of Action- NA |
6182 | Reapproval of SEMI C9.1-0212, Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures | Published 03/09/2018 | Region of Action- NA |
6186 | Reapproval of SEMI C3.58-1011, Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality | Published 04/13/2018 | Region of Action- NA |
6188 | Reapproval of SEMI F54-1000 (Reapproved 1110), Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters | Published 04/13/2018 | Region of Action- NA |
6211 | Reapproval of SEMI F22-0812, Guide for Bulk and Specialty Gas Distribution Systems | Published 05/17/2018 | Region of Action- NA |
6212 | Reapproval of SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas Filters | Failed Technical Review and Returned to TF 11/07/2017 | Region of Action- NA |
6213 | Reapproval of SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems | Failed Technical Review and Returned to TF 11/07/2017 | Region of Action- NA |
6214 | Reapproval of SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers | Failed Technical Review and Returned to TF 11/07/2017 | Region of Action- NA |
6215 | Reapproval of SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers | Failed Technical Review and Returned to TF 11/07/2017 | Region of Action- NA |
6216 | Reapproval of SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers | Failed Technical Review and Returned to TF 11/07/2017 | Region of Action- NA |
6217 | Reapproval of SEMI C3.56-0312, Specification for Diborane Mixtures | Published 06/15/2018 | Region of Action- Europe |
6218 | Reapproval of SEMI C3.57-0312, Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders | Published 06/15/2018 | Region of Action- Europe |
6219 | Reapproval of SEMI C52-0301 (Reapproved 0312), Specification for the Shelf Life of a Specialty Gas | Published 06/21/2018 | Region of Action- Europe |
6248 | Editorial Changes to SEMI E137-0705 (Reapproved 1111) - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment | Published 01/05/2018 | Region of Action- NA |
6290 | New Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems | Failed Technical Review and Returned to TF 04/10/2018 | Region of Action- NA |
6290A | New Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components | Failed Technical Review and Returned to TF 07/10/2018 | Region of Action- NA |
6290B | New Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components | Failed Technical Review and Returned to TF 04/02/2019 | Region of Action- NA |
6290C | New Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components | Published as SEMI F114-0220 02/21/2020 | Region of Action- NA |
6291 | New Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems | Failed Technical Review and Returned to TF 04/10/2018 | Region of Action- NA |
6291A | New Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components | Failed Technical Review and Returned to TF 07/10/2018 | Region of Action- NA |
6291B | New Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components | Failed Technical Review and Returned to TF 04/02/2019 | Region of Action- NA |
6291C | New Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components | Published as SEMI F115-0220 02/21/2020 | Region of Action- NA |
6312 | Reapproval of SEMI F109-0212, Guide for Heater Systems Requirements | Failed Technical Review and Returned to TF 04/10/2018 | Region of Action- NA |
6339 | Replacement of SEMI C6.2: Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas, C6.3: Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas, C6.4: Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.5: Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.6: Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, and C6.7: Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders, into one single document as a New Standard, Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinders | Failed Technical Review and Returned to TF 04/01/2018 | Region of Action- NA |
6339A | Replacement of SEMI C6.2: Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas, C6.3: Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas, C6.4: Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.5: Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.6: Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, and C6.7: Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders, into one single document as a New Standard, Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinders | Published as SEMI C97-1118 11/16/2018 | Region of Action- NA |
6340 | Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow Controllers | Failed Technical Review and Returned to TF 04/10/2018 | Region of Action- NA |
6340A | Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow Controllers | Failed Technical Review and Returned to TF 07/10/2018 | Region of Action- NA |
6340B | Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow Controllers | Failed Technical Review and Returned to TF 11/06/2018 | Region of Action- NA |
6340C | Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow Controllers | Published 01/17/2020 | Region of Action- NA |
6341 | Revision to SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers | Published 12/07/2018 | Region of Action- NA |
6342 | Revision to SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers | Published 09/21/2018 | Region of Action- NA |
6391 | Reapproval of SEMI F101-1105 (Reapproved 1111)E, Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems | Published 10/12/2018 | Region of Action- NA |
6413 | Reapproval of SEMI C3.20-0414, Specification for Helium (He), in Cylinders, 99.9995% | Published 03/08/2019 | Region of Action- NA |
6414 | Reapproval of SEMI C3.24-0414, Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality | Published 03/08/2019 | Region of Action- NA |
6415 | Reapproval of SEMI F112-0613, Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)
| Failed Technical Review and Returned to TF 11/06/2018 | Region of Action- NA |
6441 | Revision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Dynamic (Pulse) Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery System | Failed Technical Review and Returned to TF 04/02/2019 | Region of Action- NA |
6441A | Revision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Pulsed Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery System | Published as SEMI F70.1-0320 03/06/2020 | Region of Action- NA |
6457 | Revision to SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas Filters | Published 07/17/2020 | Region of Action- NA |
6477 | Revision to SEMI F112-0613 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS) | Published 08/31/2020 | Region of Action- NA |
6492 | Line Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% Quality | See Line Items Below | Region of Action- NA |
6492 LI - 1 | Change “Specifications” section heading to “Requirements”. | Published 08/30/2019 | Region of Action- NA |
6492 LI - 2 | Address trademark(s) per Regulations Section 16.4.4. | Failed Procedural Review 04/02/2019 | Region of Action- NA |
6492A | Line Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% Quality | See Line Items Below | Region of Action- NA |
6492A LI - 1 | Revision to SEMI C3.32 - Address trademark(s) per Regulations Section 16.4.4 | Published 09/18/2020 | Region of Action- NA |
6493 | Line Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% Quality | See Line Items Below | Region of Action- NA |
6493 LI - 1 | Change “Specifications” section heading to “Requirements”. | Published 08/30/2019 | Region of Action- NA |
6493 LI - 2 | Address trademark(s) per Regulations Section 16.4.4. | Failed Procedural Review 04/02/2019 | Region of Action- NA |
6493A | Line Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% Quality | See Line Items Below | Region of Action- NA |
6493A LI - 1 | Revision to SEMI C3.37 - Address trademark(s) per Regulations Section 16.4.4 | Published 09/18/2020 | Region of Action- NA |
6512 | Reapproval of SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers | Failed Technical Review and Returned to TF 07/09/2019 | Region of Action- NA |
6582 | New Standard: Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
6582A | New Standard: Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems | Published as SEMI F120-0922 09/23/2022 | Region of Action- NA |
6616 | Revision to SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers | Published 04/30/2021 | Region of Action- NA |
6623 | Reapproval for SEMI F72-0214, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components | Published 02/26/2021 | Region of Action- NA |
6643 | New Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT Ports in Mass Flow Controllers and Mass Flow Meters | Failed Technical Review and Returned to TF | Region of Action- NA |
6643A | New Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT ports in Mass Flow Controllers and Mass Flow Meters | Published as SEMI E186-1121 11/30/2021 | Region of Action- NA |
6656 | Line Item Revision to SEMI C3.6-0710 (Reapproved 0815), Specification for Phosphine (PH3) in Cylinders, 99.98% Quality | See Line Items Below | Region of Action- NA |
6656 LI - 1 | Update “Referenced Standards and Documents” Section. | Published 04/23/2021 | Region of Action- NA |
6656 LI - 2 | Change “Specifications” section heading to “Requirements” per Procedure Manual. | Published 04/23/2021 | Region of Action- NA |
6656 LI - 3 | Address trademark(s) per Regulations § 16.4.4. | Published 04/23/2021 | Region of Action- NA |
6657 | Line Item Revision to SEMI C3.35-1109E (Reapproved 0815), Specification for Hydrogen Chloride (HCI), 99.997% Quality | See Line Items Below | Region of Action- NA |
6657 LI - 1 | Change “Specifications” section heading to “Requirements” per Procedure Manal. | Published 04/23/2021 | Region of Action- NA |
6657 LI - 2 | Address trademark(s) per Regulations § 16.4.4. | Published 04/23/2021 | Region of Action- NA |
6658 | Line Item Revision to SEMI C71-0815, Specification and Guide for Boron Trichloride (BCI3) | See Line Items Below | Region of Action- NA |
6658 LI - 1 | Update “Referenced Standards and Documents” Section. | Published 04/23/2021 | Region of Action- NA |
6658 LI - 2 | Address trademark(s) per Regulations § 16.4.4. | Published 04/23/2021 | Region of Action- NA |
6747 | Line Item to Replace Designation Letter from C to F for SEMI C88-0815, Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems, SEMI C91-115, Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components, and SEMI C92-0216, Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution | See Line Items Below | Region of Action- NA |
6747 LI - 1 | Replace Designation Letter of SEMI C88 to SEMI FXXX. | Published 11/30/2021 | Region of Action- NA |
6747 LI - 2 | Replace Designation Letter of SEMI C91 to SEMI FXXX. | Published 11/30/2021 | Region of Action- NA |
6747 LI - 3 | Replace Designation Letter of SEMI C92 to SEMI FXXX. | Published 11/30/2021 | Region of Action- NA |
6813 | Reapproval of SEMI F28-1103 (Reapproved 0815), Test Method for Measuring Particle Generation from Process Panels | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
6814 | Reapproval of SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
6815 | Reapproval of SEMI F59-0302 (Reapproved 0613), Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
6816 | Reapproval of SEMI F67-1101 (Reapproved 0713), Test Method for Determining Inert Gas Purifier Capacity | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
6817 | Reapproval of SEMI F68-1101 (Reapproved 0713), Test Method for Determining Purifier Efficiency | Failed Technical Review and Returned to TF 07/13/2021 | Region of Action- NA |
6874 | Reapproval of SEMI F79-0914, Guide for Gas Compatibility with Silicon Used in Gas Distribution Components | Published 09/16/2022 | Region of Action- NA |
6875 | Reapproval of SEMI F105-0914, Guide for Metallic Material Compatibility in Gas Distribution Systems | Published 09/16/2022 | Region of Action- NA |
6876 | Reapproval of SEMI F60-1214, Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components | Failed Technical Review and Returned to TF 03/29/2022 | Region of Action- NA |
6877 | Reapproval of SEMI F73-1214, Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components | Failed Technical Review and Returned to TF 03/29/2022 | Region of Action- NA |
6878 | Reapproval of SEMI E77-1104 (Reapproved 0815), Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases | Failed Technical Review and Returned to TF 03/29/2022 | Region of Action- NA |
6879 | Reapproval of SEMI F77-0915, Test Method for Electrochemical Critical Pitting Temperature Testing of Stainless Steel Surfaces Used in Corrosive Gas Systems | Failed Technical Review and Returned to TF 03/29/2022 | Region of Action- NA |
6880 | Reapproval of SEMI E80-0299 (Reapproved 0915), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) | Failed Technical Review and Returned to TF 03/29/2022 | Region of Action- NA |
6881 | Reapproval of SEMI C3.34-0116, Specification for Disilane (Si2H6) in Cylinders, 97% Quality | Published 09/23/2022 | Region of Action- NA |
6882 | Reapproval of SEMI C3.12-0116, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality | Published 09/23/2022 | Region of Action- NA |
6916 | Replacement of SEMI F109-0212, Guide for Heater Systems Requirements,
as a New Standard: Guide for Material Selection for Heater Systems | Failed Technical Review and Returned to TF 11/07/2023 | Region of Action- NA |
6916A | Replacement of SEMI F109-0212, Guide for Heater Systems Requirements,
as a New Standard: Guide for Material Selection for Heaters | Drafting 02/12/2024 | Region of Action- NA |
6933 | Line-Item Revisions to SEMI E77-1104 (Reapproved 0815), Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases | See Line Items Below | Region of Action- NA |
6933 LI - 1 | Clarify grammar in § 3 and ¶ 7.2. | Published 04/28/2023 | Region of Action- NA |
6933 LI - 2 | Change “must” or "will" to “shall” or "should" as shown. | Published 04/28/2023 | Region of Action- NA |
6933 LI - 3 | Move ¶ 7.6 to § 8 and ¶ 7.7 to § 12. | Published 04/28/2023 | Region of Action- NA |
6934 | Line-Item Revisions to SEMI E80-0299 (Reapproved 0915), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) | See Line Items Below | Region of Action- NA |
6934 LI - 1 | Clarify grammar in ¶ 3.2 and ¶ 7.2. | Published 04/28/2023 | Region of Action- NA |
6934 LI - 2 | Change “must” or "will" to “shall” or "should" as shown. | Published 04/28/2023 | Region of Action- NA |
6934 LI - 3 | Move ¶ 7.6 to § 13. | Published 04/28/2023 | Region of Action- NA |
7052 | Line-Item Revision to SEMI F20-0706, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components used in General Purpose, High Purity and Ultra-high Purity Semiconductor Manufacturing Applications | See Line Items Below | Region of Action- NA |
7052 LI - 1 | Update throughout to comply to Regs, PM and SM . | Published 09/29/2023 | Region of Action- NA |
7052 LI - 2 | Update “Plate” reference per ASTM E45. | Published 09/29/2023 | Region of Action- NA |
7092 | Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters | See Line Items Below | Region of Action- NA |
7092 LI - 1 | “mass flow transducer” is deleted to remove confusion. | Published 12/16/2023 | Region of Action- NA |
7093 | Line-Item Revision to SEMI F62-1016, Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects | See Line Items Below | Region of Action- NA |
7093 LI - 1 | Remove the flow rate limitation on mass flow controller to support the flow rate testing above 30slm. | Published 11/03/2023 | Region of Action- NA |
7093 LI - 2 | Update throughout to comply to Regs, PM and SM . | Published 11/03/2023 | Region of Action- NA |
7097 | Line-Item Revision to SEMI C54-1116, Specification for Oxygen | See Line Items Below | Region of Action- NA |
7097 LI - 1 | Add chemical formula for oxygen in title. | Passed Technical Review - Awaiting Procedural Review 11/07/2023 | Region of Action- NA |
7097 LI - 2 | Update throughout to comply to Regs, PM and SM. | Yes Ratification Ballot To Be Issued 11/07/2023 | Region of Action- NA |
7097 LI - 3 | Clarify word usage and SI units in §9 through § 10 per SM. | Passed Technical Review - Awaiting Procedural Review 11/07/2023 | Region of Action- NA |
7097 LI - 3 | Clarify word usage and SI units in §9 through § 10 per SM. | Passed Technical Review - Awaiting Procedural Review 11/07/2023 | Region of Action- NA |
7097 LI - 4 | Change “is to”, “may”, “must”, or “should” to “shall” or “should” throughout, where appropriate. | Yes Ratification Ballot To Be Issued 11/07/2023 | Region of Action- NA |
7098 | Line-Item Revision to SEMI C56-1116, Specification for Dichlorosilane | See Line Items Below | Region of Action- NA |
7098 LI - 1 | Add chemical formula for dichlorosilane in title. | Published 02/23/2024 | Region of Action- NA |
7098 LI - 2 | Update throughout to comply to Regs, PM and SM. | Published 02/23/2024 | Region of Action- NA |
7151 | Line-Item Revision to SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates | See Line Items Below | Region of Action- NA |
7151 LI - 1 | Update throughout to comply to Regs, PM and SM. | Publication Process Started 02/05/2024 | Region of Action- NA |
7151 LI - 2 | Change “must” or “shall” to “should” throughout. | Yes Ratification Ballot To Be Issued 11/07/2023 | Region of Action- NA |
7152 | Line-Item Revision to SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter Linearity | See Line Items Below | Region of Action- NA |
7152 LI - 1 | Update throughout to comply to Regs, PM and SM. | Publication Process Started 02/05/2024 | Region of Action- NA |
7202 | Line-Item Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery Systems | See Line Items Below | Region of Action- NA |
7202 LI - 1 | Update throughout to comply to Regs, PM and SM. | Drafting 02/12/2024 | Region of Action- NA |
7203 | Line-Item Revision to SEMI F78-0611 (Reapproved 0917), Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications | See Line Items Below | Region of Action- NA |
7203 LI - 1 | Update throughout to comply to Regs, PM and SM. | Drafting 02/12/2024 | Region of Action- NA |
7203 LI - 2 | Provide clarity to the following sections ¶¶ 8.3, 8.4, 11.1, 11.5.4. | Drafting 02/12/2024 | Region of Action- NA |
7204 | Line-Item Revision to SEMI F81-0611 (Reapproved 0917), Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications | See Line Items Below | Region of Action- NA |
7204 LI - 1 | Update throughout to comply to Regs, PM and SM. | Drafting 02/12/2024 | Region of Action- NA |
7204 LI - 2 | Add reference “AWS D18.2…” to ¶ 7.1.14 and include in Ref Stds and Docs section. | Drafting 02/12/2024 | Region of Action- NA |
R3440C | New Standard: Test Method for Pressure Transducers in Gas Delivery Systems | Published as SEMI F113-1116 11/30/2016 | Region of Action- NA |
R5671C | Revision to SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality | Published 01/22/2016 | Region of Action- NA |
R5673C | Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality | Published 01/22/2016 | Region of Action- NA |
R5765 | Revision to SEMI C15, Test Method for ppm and ppb Humidity Standards | Published 06/30/2016 | Region of Action- Europe |
R5816B | Revision to SEMI F30-0710, Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site | Published 05/19/2017 | Region of Action- NA |
R5997A | Revision to SEMI C3-0413, Specification for Gases | Published 03/24/2017 | Region of Action- NA |
R6056B | Revision to SEMI E28-1110, Guide for Pressure Parameters of the Mass Flow Controller | Published 02/23/2018 | Region of Action- NA |
R6119 | Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with Title Change to Test Method for Measurement of Mass Flow Controller Transient Characteristics | Published 03/09/2018 | Region of Action- NA |
R6125A | Revision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen Gas | Published 05/25/2018 | Region of Action- NA |
R6340C | Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow Controllers | Published 01/17/2020 | Region of Action- NA |
R6341 | Revision to SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers | Published 12/07/2018 | Region of Action- NA |
R6582A | New Standard: Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems | Published as SEMI F120-0922 09/23/2022 | Region of Action- NA |
R6933 | Line-Item Revisions to SEMI E77-1104 (Reapproved 0815), Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases | See Line Items Below | Region of Action- NA |
R6933 LI - 1 | Clarify ¶ 3.2, ¶ 3.3 and ¶ 7.2. | Published 04/28/2023 | Region of Action- NA |
R6933 LI - 2 | Clarify § 8. | Published 04/28/2023 | Region of Action- NA |
R6934 | Line-Item Revision to SEMI E80-0299 (Reapproved 0915), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) | See Line Items Below | Region of Action- NA |
R6934 LI - 1 | Clarify ¶ 3.2 and ¶ 7.2. | Published 04/28/2023 | Region of Action- NA |
R7092 | Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters | See Line Items Below | Region of Action- NA |
R7092 LI - 1 | “mass flow transducer” is deleted to remove confusion. | Published 12/15/2023 | Region of Action- NA |
R7097 | Line-Item Revision to SEMI C54-1116, Specification for Oxygen | See Line Items Below | Region of Action- NA |
R7097 LI - 1 | Clarify definitions in ¶6.2.2 and ¶6.2.3. | Drafting 11/27/2023 | Region of Action- NA |
R7097 LI - 2 | Clarify NOTE 8 and 9 and change “1.379 MPa (200 psig)” to “sample pressure” or “the sample pressure” throughout, where appropriate. | Drafting 11/27/2023 | Region of Action- NA |
R7151 | Line-Item Revision to SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak Rates | See Line Items Below | Region of Action- NA |
R7151 LI - 1 | Clarify ¶ 5.3.4. | Drafting 11/27/2023 | Region of Action- NA |