SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

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Gases

3383Reapproval of SEMI F27-0997 (Reapproved 1103) Test Method For Moisture Interaction And Content Of Gas Distribution Systems And Components By Atmospheric Pressure Ionization Mass Spectrometry (APIMS)Published 06/24/2011Region of Action- NA
3440CNew Standard: Test Method For Pressure Transducers In Gas Delivery SystemsPublished as SEMI F113-1116 11/30/2016Region of Action- NA
4652Revision to SEMI C3.2-0301, Specification for Arsine (AsH3) in Cylinders, 99.94% QualityFailed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4652ARevision of SEMI C3.2-0301, Specification for Arsine (AsH3) in Cylinders, 99.94% QualityPublished 06/03/2011Region of Action- NA
4653Revision to SEMI C3.6-0701, Specification for Phosphine (PH3) in Cylinders, 99.98% QualityFailed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4653ARevision of SEMI C3.6-0701, Specification For Phosphine (PH3) In Cylinders, 99.98% QualityPublished 05/14/2010Region of Action- NA
4654Revision of SEMI C3.12-1102 Specification for Ammonia (NH3) in Cylinders, 99.998% QualityPublished 09/24/2009Region of Action- NA
4657ANew Standard: Specifications for Tungsten Hexafluoride (WF6)Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4657BNew Standard: Specifications for Tungsten Hexafluoride (WF6)Published 06/03/2011Region of Action- NA
4658Reapproval of SEMI C3.27-1102, Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality Published 10/27/2011Region of Action- NA
4677Reapproval of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4677ARevision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Failed Technical Review and Returned to TF 07/14/2009Region of Action- NA
4677BRevision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Failed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4677CRevision of SEMI E66-1103, Test Method for Determining Particle Contribution by Mass Flow Controllers Published 06/03/2011Region of Action- NA
4678Reapproval of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4678ARevision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller Failed Technical Review and Returned to TF 07/14/2009Region of Action- NA
4678BRevision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller Failed Technical Review and Returned to TF 03/30/2010Region of Action- NA
4678CRevision of SEMI E67-0304, Test Method for Determining Reliability of Mass Flow Controller Published 10/24/2011Region of Action- NA
4679ARevision of SEMI F79-0703, Guide For Gas Compatibility With Silicon Used In Gas Distribution ComponentsPublished 05/20/2010Region of Action- NA
4680ARevision of SEMI E52-0309 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Published 09/24/2009Region of Action- NA
4700Line Item Revision to SEMI F32-0706, Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves See Line Items Below Region of Action- NA
4700
LI - 1
Change the constant “3905.6” to “2.95” in equation 4. Published 05/22/2009Region of Action- NA
4722Revision to SEMI F70-0302, Test Method for Determination Of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4722ARevision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 07/14/2009Region of Action- NA
4722BRevision of SEMI F70-0302 Test Method For Determination Of Particle Contribution Of Gas Delivery SystemFailed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4722CRevision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 03/30/2010Region of Action- NA
4722DRevision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 07/13/2010Region of Action- NA
4722E Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4722FRevision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System Published 06/03/2011Region of Action- NA
4734New Standard: Specifications and Guidelines for Boron Trichloride (BCl3)Failed Technical Review and Returned to TF 03/31/2009Region of Action- NA
4734ANew Standard: Specification and Guide for Boron Trichloride (BCl3)Published as SEMI C71-0611 06/03/2011Region of Action- NA
4737New Standard: Guide For Heater Jacket RequirementsFailed Technical Review and Returned to TF 07/13/2010Region of Action- NA
4737New Standard: Specification for Heating Jacket for Using in Semiconductor ProcessingDrafting 04/14/2010Region of Action- NA
4737ANew Standard: Guide For Heater Jacket RequirementsFailed Technical Review and Returned to TF 11/09/2010Region of Action- NA
4737BNew Standard: Guide For Heated Systems RequirementsFailed Technical Review and Returned to TF 03/29/2011Region of Action- NA
4737CNew Standard: Guide For Heated Systems RequirementsFailed Technical Review and Returned to TF 07/12/2011Region of Action- NA
4737DNew Standard: Guide for Heater Systems RequirementsPublished as SEMI F109-0212 02/24/2012Region of Action- NA
4754Revision of SEMI C3.32-0301 - Specification for Chlorine (Cl2), 99.996% Quality Published 09/24/2009Region of Action- NA
4755Revision of SEMI C3.34-1102 - Specification for Disilane (Si2H6) in Cylinders, 97% QualityPublished 09/24/2009Region of Action- NA
4756Revision of SEMI C3.35-1101 - Specification for Hydrogen Chloride (HCl), 99.997% QualityPublished 09/24/2009Region of Action- NA
4757Revision of SEMI C3.37-0701 -Specification for Hexafluoroethane (C2F6), 99.97% QualityPublished 09/24/2009Region of Action- NA
4769Revision of SEMI E52-1109 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Published 01/22/2010Region of Action- NA
4784Reapproval of SEMI F19-0304, Specification For The Surface Condition Of The Wetted Surface Of Stainless Steel ComponentsPublished 01/20/2010Region of Action- NA
4785Reapproval of SEMI F22-1102, Guide For Gas Distribution SystemsFailed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4785ARevision of SEMI F22-1102, Guide for Gas Distribution SystemsFailed Technical Review and Returned to TF 10/25/2011Region of Action- NA
4785BRevision of SEMI F22-1102 with title change to: Guide for Bulk and Specialty Gas Distribution SystemsPublished 08/17/2012Region of Action- NA
4786Reapproval of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder ValvesFailed Technical Review and Returned to TF 11/03/2009Region of Action- NA
4786ARevision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder ValvesFailed Procedural Review - Returned to Committee Region of Action- NA
4786BRevision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder ValvesPublished 02/03/2011Region of Action- NA
4787Reapproval of SEMI F77-0703, Test Method For Electrochemical Critical Pitting Temperature Testing Of Alloy Surfaces Used In Corrosive Gas SystemsPublished 01/20/2010Region of Action- NA
4788Reapproval of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing ApplicationsFailed Procedural Review - Returned to Committee Region of Action- NA
4788ARevision of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4788BRevision of SEMI F78-0304, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 06/10/2011Region of Action- NA
4789Reapproval of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications Failed Technical Review and Returned to TF 03/30/2010Region of Action- NA
4789ARevision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsFailed Technical Review and Returned to TF 07/13/2010Region of Action- NA
4789BRevision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4789CRevision of SEMI F81-1103, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 06/03/2011Region of Action- NA
4842Revision of SEMI F30-0298, Start-Up And Verification Of Purifier Performance Testing For Trace Gas Impurities And Particles At An Installation SitePublished 05/20/2010Region of Action- NA
4902Reapproval of SEMI F74-1103, Test Method For The Performance And Evaluation Of Metal Seal Designs For Use In Gas Delivery SystemsPublished 05/13/2010Region of Action- NA
4903Reapproval of SEMI F28-1103, Test Method For Measuring Particle Generation From Process PanelsPublished 05/13/2010Region of Action- NA
4904Reapproval of SEMI E80-1104, Test Method For Determining Attitude Sensitivity Of Mass Flow Controllers (Mounting Position)Published 05/13/2010Region of Action- NA
4905Reapproval of SEMI E77-1104, Test Method For Calculation Of Conversion Factors For A Mass Flow Controller Using Surrogate GasesPublished 05/13/2010Region of Action- NA
4906Reapproval of E29-1104, Standard Terminology For The Calibration Of Mass Flow Controllers And Mass Flow MetersPublished 05/13/2010Region of Action- NA
4907Reapproval of SEMI E28-1104, Guideline For Pressure Specifications Of The Mass Flow ControllerPublished 05/13/2010Region of Action- NA
4968Revision of SEMI E16-90 (Reapproved 1104) with title change to Guide For Determining And Describing Mass Flow Controller Leak Rates Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4968ARevision of SEMI E16-90 (Reapproved 1104) with title change from "Guideline for Determining and Describing Mass Flow Controller Leak Rates" to "Guide for Determining and Describing Mass Flow Controller Leak Rates"Published 07/01/2011Region of Action- NA
4969Revision of SEMI E18-91 (Reapproved 1104) with title change to Guide For Temperature Specifications Of The Mass Flow Controller Published 02/03/2011Region of Action- NA
4970Revision of SEMI E27-92 (Reapproved 1104) with title change to Terminology For The Linearity Of Mass Flow Controllers And Mass Flow Meters Failed Procedural Review - Returned to Committee 12/21/2010Region of Action- NA
4970ARevision of SEMI E27-92 (Reapproved 1104) with title change from "Guideline for Mass Flow Controller and Mass Flow Meter Linearity" to "Guide for Mass Flow Controller and Mass Flow Meter Linearity"Published 06/10/2011Region of Action- NA
4971Revision of SEMI E29-93 (Reapproved 0710) with title change to Terminology For The Calibration Of Mass Flow Controllers And Mass Flow Meters Published 09/30/2010Region of Action- NA
4972Reapproval of SEMI F54-1000 Test Method For Measuring The Counting Efficiency Of Condensation Nucleus CountersPublished 09/30/2010Region of Action- NA
4973Reapproval of SEMI F76-0303 Test Method For Evaluation Of Particle Contribution From Gas System Components Exposed To Corrosive GasPublished 09/30/2010Region of Action- NA
4974Revision of SEMI E28-92 (Reapproved 0710) with title change to Guide For Pressure Specifications Of The Mass Flow ControllerPublished 09/30/2010Region of Action- NA
5044Revision to SEMI F32-0709 Test Method for Determining of Flow Coefficient for High Purity Shutoff ValvesPublished 02/03/2011Region of Action- NA
5055Reapproval of SEMI C54-1103 - Specifications and Guidelines for Oxygen Published 02/03/2011Region of Action- NA
5056Reapproval of SEMI C55-1104 - Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality Published 02/03/2011Region of Action- NA
5057Reapproval of SEMI C56-0305 - Specifications and Guidelines for Dichlorosilane (SiH2Cl2) Published 02/03/2011Region of Action- NA
5058Reapproval of SEMI C57-0305 - Specifications and Guidelines for Argon Published 02/03/2011Region of Action- NA
5059Reapproval of SEMI C58-0305 - Specifications and Guidelines for Hydrogen Published 02/03/2011Region of Action- NA
5060Reapproval of SEMI C59-1104 - Specifications and Guidelines for Nitrogen Published 02/03/2011Region of Action- NA
5061Reapproval of SEMI C60-0305 - Specifications and Guidelines for Nitrous Oxide (N2O) Published 02/03/2011Region of Action- NA
5099Revision of SEMI E52-0310, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 06/10/2011Region of Action- NA
5138Reapproval of SEMI F20-0706E, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing ApplicationsPublished 07/01/2011Region of Action- NA
5139Reapproval of SEMI F29-0997 (Reapproved 1103), Test Method for Purge Efficacy of Gas Source System PanelsPublished 06/24/2011Region of Action- NA
5140Reapproval of SEMI F37-0299 (Reapproved 1104), Method for Determination of Surface Roughness Parameters for Gas Distribution System ComponentsPublished 07/01/2011Region of Action- NA
5141Reapproval of SEMI F38-0699 (Reapproved 1104), Test Method for Efficiency Qualification of Point-of-Use Gas FiltersPublished 06/24/2011Region of Action- NA
5142Reapproval of SEMI F60-0306 - Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsPublished 07/01/2011Region of Action- NA
5195Reapproval of SEMI E137-0705, Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment Published 11/14/2011Region of Action- NA
5196Reapproval of SEMI E49-1104, Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final AssembliesPublished 12/09/2011Region of Action- NA
5197Reapproval of SEMI E49.6-1103, Guide for Subsystem Assembly and Testing Procedures - Stainless Steel SystemsPublished 12/09/2011Region of Action- NA
5198Reapproval of SEMI E49.8-1103, Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing EquipmentPublished 12/09/2011Region of Action- NA
5199Reapproval of SEMI F101-1105, Test Methods for Determining Pressure Regulator Performance In Gas Distribution SystemsPublished 11/14/2011Region of Action- NA
5200Reapproval of SEMI F62-0701 (Reapproved 0307), Test Method for Determining Mass Flow Controller Performance Characterisitics from Ambient and Gas Temperature EffectsPublished 11/14/2011Region of Action- NA
5201Reapproval of SEMI F64-0701 (Reapproved 0307), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow ControllersPublished 11/18/2011Region of Action- NA
5203Revision of SEMI E17-0600 (Reapproved 0307), with title change to: Guide for Mass Flow Controller Transient Characteristics TestsPublished 10/24/2011Region of Action- NA
5206Revision of SEMI C3.39-0304, with title change to: Specification for Nitrogen Trifluoride (NF3), 99.98% QualityPublished 10/27/2011Region of Action- NA
5207Revision of SEMI C3.40-1000, with title change to: Specification for Carbon Tetrafluoride (CF4), 99.997% QualityPublished 10/27/2011Region of Action- NA
5208Revision of SEMI C3.47-1101, Specification for Hydrogen Bromide (HBr), 99.98% QualityPublished 10/27/2011Region of Action- NA
5209Withdrawal of SEMI C3.54-0200E, Gas Purity Guideline for SilanePublished 10/25/2011Region of Action- NA
5210Revision of SEMI C3.55-0200, with title change to: Specification for Silane (SiH4), Bulk, 99.994% QualityPublished 10/27/2011Region of Action- NA
5211Revision of SEMI C3.58-0303, with title change to: Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% QualityPublished 10/27/2011Region of Action- NA
5212Reapproval of SEMI C6.2-93 (Reapproved 1102), Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5213Reapproval of SEMI C6.4-90 (Reapproved 1102), Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5214Reapproval of SEMI C6.5-90 (Reapproved 1102), Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5215Reapproval of SEMI C6.6-90 (Reapproved 1102), Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas Published 12/02/2011Region of Action- NA
5216Reapproval of SEMI C6.7-93 (Reapproved 1102), Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas CylindersPublished 12/02/2011Region of Action- NA
5217Reapproval of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas MixturesFailed Technical Review and Returned to TF 07/12/2011Region of Action- NA
5217ARevision of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas MixturesPublished 02/10/2012Region of Action- NA
5218Reapproval of SEMI C15-95 (Reapproved 1102), Test Method for ppm and ppb Humidity Standards Failed Technical Review and Returned to TF 07/12/2011Region of Action- NA
5218ARevision of SEMI C15-95 (Reapproved 1102), Test Method for ppm and ppb Humidity Standards Published 02/10/2012Region of Action- NA
5219Reapproval of SEMI C6.3-89 (Reapproved 0303), Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline GasPublished 12/02/2011Region of Action- NA
5224Reapproval of SEMI C52-0301, Specification for the Shelf Life of a Specialty GasPublished 03/30/2012Region of Action- Europe
5230Revision of SEMI C3.56-0600, Specification for Diborane Mixtures Published 03/09/2012Region of Action- Europe
5231Revision of SEMI C3.57-0600, Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders Published 03/09/2012Region of Action- Europe
5243Reapproval of SEMI F53-0307, Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow ControllersPublished 04/13/2012Region of Action- NA
5244ARevision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean EnvironmentsFailed Technical Review and Returned to TF 07/10/2012Region of Action- NA
5244BRevision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean EnvironmentsPublished 10/20/2016Region of Action- NA
5245Reapproval of SEMI F55-0600 (Reapproved 0307), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersPublished 04/13/2012Region of Action- NA
5246Reapproval of SEMI F56-0600 (Reapproved 0307), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow ControllersPublished 04/13/2012Region of Action- NA
5247Withdrawal of SEMI C3.26-0301, Specification for Tungsten Hexafluoride (WF6) In Cylinders, 99.8% QualityPublished 03/28/2012Region of Action- NA
5248Withdrawal of SEMI C3.33-92 (Reapproved 0303), Standard for Boron Trichloride (BCl3) (Provisional)Published 03/30/2012Region of Action- NA
5250Withdrawal of SEMI C3.52-0200, Standard for Tungsten Hexafluoride, 99.996% QualityPublished 03/28/2012Region of Action- NA
5250Withdrawal of SEMI C3.52-0200, Standard for Tungsten Hexafluoride, 99.996% QualityDrafting 07/21/2011Region of Action- NA
5277Revision to SEMI F82-0304, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5277ARevision to SEMI F82-0312, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5278Revision to SEMI F83-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5278ARevision to SEMI F83-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5279Revision to SEMI F84-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5279ARevision to SEMI F84-0312, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5280Revision to SEMI F85-0304, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5280ARevision to SEMI F85-0312, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5281Revision to SEMI F86-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5281ARevision to SEMI F86-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5282Revision to SEMI F87-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5282ARevision to SEMI F87-0312, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5283Revision to SEMI F88-0304E, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5283ARevision to SEMI F88-0312, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5284Revision to SEMI F89-0304E, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5284ARevision to SEMI F89-0312, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5285Revision to SEMI F90-0304E, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5285ARevision to SEMI F90-0312, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5286Revision to SEMI F91-0304E, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5286ARevision to SEMI F91-0312, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5287Revision to SEMI F92-0304E, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5287ARevision to SEMI F92-0312, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5288Revision to SEMI F93-0304E, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5288ARevision to SEMI F93-0312, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5289Revision to SEMI F94-0304E, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5289ARevision to SEMI F94-0312, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5290Revision to SEMI F95-0304E, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsFailed Technical Review and Returned to TF 09/29/2011Region of Action- Japan
5290ARevision to SEMI F95-0312, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsPublished 10/18/2012Region of Action- Japan
5345Revision of SEMI C3-0699, Specifications for Gases Published 08/09/2012Region of Action- NA
5346Reapproval of SEMI F23-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Flammable Specialty Gases Published 07/31/2012Region of Action- NA
5347Reapproval of SEMI F24-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Inert Specialty GasesPublished 07/31/2012Region of Action- NA
5348Reapproval of SEMI F25-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Oxidant Specialty GasesPublished 07/31/2012Region of Action- NA
5349Reapproval of SEMI F26-0697 (Reapproved 0303), Particle Specification for Grade 10/0.2 Toxic Specialty GasesPublished 07/31/2012Region of Action- NA
5407Revision to SEMI E52-0611, Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 09/19/2012Region of Action- NA
5443Line Item Revision of SEMI C3-0812, Specifications for GasesSee Line Items Below Region of Action- NA
5443
LI - 1
Changes to section 9.2.1, 9.2.2, 9.2.3.1 and add 9.2.4 as indicated belowPublished 04/19/2013Region of Action- NA
5444Revision of SEMI F72-0309, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsPublished 02/14/2014Region of Action- NA
5445Revision of SEMI F60-0306 (Reapproved 0611), Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components Published 12/18/2014Region of Action- NA
5446New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)Published as SEMI F112-0613 06/28/2013Region of Action- NA
5504Revision of SEMI E52-0912, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersFailed Technical Review and Returned to TF 04/02/2013Region of Action- NA
5504ARevision of SEMI E52-1012, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 12/20/2013Region of Action- NA
5505Revision to SEMI C58-0305 (Reapproved 0211), Specifications and Guidelines for Hydrogen Failed Technical Review and Returned to TF 04/02/2013Region of Action- NA
5505ARevision of SEMI C58-0305 (Reapproved 0211) with Title Change to: Specifications for Hydrogen Published 12/13/2013Region of Action- NA
5516Reapproval of SEMI F43-0308, Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas FiltersPublished 06/26/2013Region of Action- NA
5517Reapproval of SEMI F59-0302 (Reapproved 1108), Test Method for Determination of Filter or Gas System Flow Pressure Drop CurvesPublished 06/26/2013Region of Action- NA
5518Reapproval of SEMI F67-1101 (Reapproved 1108), Test Method for Determining Inert Gas Purifier CapacityPublished 07/25/2013Region of Action- NA
5519Reapproval of SEMI F68-1101 (Reapproved 1108), Test Method for Determining Purifier EfficiencyPublished 07/25/2013Region of Action- NA
5520ARevision of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems Published 12/20/2013Region of Action- NA
5520infoReapproval of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems Failed Technical Review and Returned to TF 04/02/2013Region of Action- NA
5568Reapproval of SEMI C14-95 (Reapproved 0309), Test Method for Particle Shedding Performance of 25 cm Gas Filter CartridgesPublished 09/27/2013Region of Action- NA
5569Revision of SEMI E12-0303 (Reapproved 0309), with Title Change to: Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow ControllersPublished 12/20/2013Region of Action- NA
5571Reapproval of SEMI E56-0309, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers Failed Technical Review and Returned to TF 07/09/2013Region of Action- NA
5571ARevision of SEMI E56-0309 with title change to: Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers Published 03/28/2014Region of Action- NA
5573Reapproval of SEMI E68-0997 (Reapproved 0309), Test Method for Determining Warm-Up Time of Mass Flow ControllersPublished 09/27/2013Region of Action- NA
5574Reapproval of SEMI E69-0298 (Reapproved 0309), Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow ControllersPublished 09/27/2013Region of Action- NA
5577Reapproval of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution SystemsFailed Technical Review and Returned to TF 07/09/2013Region of Action- NA
5577ARevision of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution SystemsPublished 03/28/2014Region of Action- NA
5578Reapproval of SEMI F36-0299 (Reapproved 1104), Guide for Dimensions and Connections of Gas Distribution ComponentsPublished 09/27/2013Region of Action- NA
5595New Standard: Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution SystemsPublished as SEMI C88-0815 08/28/2015Region of Action- NA
5609Revision of SEMI C3.24.0309, Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% QualityPublished 04/25/2014Region of Action- NA
5610New Auxiliary Information: Codes for Referencing Gases, Gas Mixtures And Vaporizable Materials Used In Digital Mass Flow ControllersAuxiliary Information Published 01/31/2014Region of Action- NA
5611Revision of SEMI C3.20-0309, Specification for Helium (He), in Cylinders, 99.9995% QualityPublished 04/25/2014Region of Action- NA
5667New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery ComponentsFailed Technical Review and Returned to TF 03/31/2015Region of Action- NA
5667ANew Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components Published as SEMI C91-1115 11/24/2015Region of Action- NA
5668Withdrawal of SEMI E52-1213, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersPublished 07/31/2014Region of Action- NA
5669 Line Item Revisions of: SEMI E6-0303 Guide for Semiconductor Equipment Installation Documentation SEMI E54.18-1106 (Reapproved 1211) Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device SEMI E54.22-0613 Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges SEMI F79-0710 Guide for Gas Compatibility with Silicon Used in Gas Distribution Components SEMI F105-0708 Guide for Metallic Material Compatibility in Gas Distribution SystemsSee Line Items Below Region of Action- NA
5669
LI - 1
Change all instances of SEMI E52 to AUX030 as noticed.Published 09/30/2014Region of Action- NA
5671Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityFailed Technical Review and Returned to TF 04/01/2014Region of Action- NA
5671ARevision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityFailed Technical Review and Returned to TF 11/04/2014Region of Action- NA
5671BRevision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityFailed Technical Review and Returned to TF 03/31/2015Region of Action- NA
5671CRevision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityPublication Process Started 08/31/2015Region of Action- NA
5672Revision of SEMI C3.32-1109, Specification for Chlorine (Cl2), 99.996% QualityPublished 06/20/2014Region of Action- NA
5673Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityFailed Technical Review and Returned to TF 04/01/2014Region of Action- NA
5673ARevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityFailed Technical Review and Returned to TF 11/04/2014Region of Action- NA
5673BRevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityFailed Technical Review and Returned to TF 03/31/2015Region of Action- NA
5673CRevision to SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityPublication Process Started 08/31/2015Region of Action- NA
5674Revision of SEMI C3.37-1109, Specification for Hexafluoroethane (C2F6), 99.97% QualityPublished 06/27/2014Region of Action- NA
5712Revision to SEMI F73-0309, Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel ComponentsPublished 12/18/2014Region of Action- NA
5714Reapproval of SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel ComponentsFailed Technical Review and Returned to TF 07/08/2014Region of Action- NA
5714ARevision to SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel ComponentsPublished 08/07/2015Region of Action- NA
5715ARevision of SEMI F77-0703 (Reapproved 0310), with title change to: Test Method for Electrochemical Critical Pitting Temperature Testing of Stainless Steel Surfaces Used in Corrosive Gas SystemsPublished 09/24/2015Region of Action- NA
5721Revision to SEMI C71-0611, Specification and Guide for Boron Trichloride (BCI3) with title change to: Specification for Boron Trichloride (BCI3)Failed Technical Review and Returned to TF 07/08/2014Region of Action- NA
5721ALine Item Revision to SEMI C71-0611, Specification and Guide for Boron Trichloride (BCI3)See Line Items Below Region of Action- NA
5721A
LI - 1
Clarify the Ratio the Sample Solution is being DilutedPublished 08/28/2015Region of Action- NA
5722Line item revision to SEMI E56-0314, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow ControllersSee Line Items Below Region of Action- NA
5722
LI - 1
Correction to Equation 5Failed Technical Review and Returned to TF 07/08/2014Region of Action- NA
5722ALine items revision to SEMI E56-0314, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow ControllersSee Line Items Below Region of Action- NA
5722A
LI - 1
Revise definitions of Drift, Long Term and Drift, Short TermPublished 08/21/2015Region of Action- NA
5722A
LI - 2
Corrections to Equation 5Published 08/21/2015Region of Action- NA
5765Revision to SEMI C15-0212, Test Method for ppm and ppb Humidity StandardsPublished 06/30/2016Region of Action- Europe
5811Reapproval of SEMI C3.35-1109E - Specification for Hydrogen Chloride (HCI), 99.997% QualityPublished 08/21/2015Region of Action- NA
5812Reapproval of SEMI C3.6-0710 - Specification for Phosphine (PH3) in Cylinders, 99.98% QualityPublished 08/21/2015Region of Action- NA
5813Reapproval of SEMI E77-1104 (Reapproved 0710) - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate GasesPublished 08/21/2015Region of Action- NA
5814Reapproval of SEMI E80-0299 (Reapproved 0710), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)Published 09/25/2015Region of Action- NA
5815Reapproval of SEMI F28-1103 (Reapproved 0710) - Test Method for Measuring Particle Generation from Process PanelsPublished 08/14/2015Region of Action- NA
5816Reapproval of SEMI F30-0710 - Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SiteFailed Procedural Review - Returned to Committee 05/19/2015Region of Action- NA
5816ALine item Revision to SEMI F30-0710 - Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site with title change to Test Method for the Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SiteSee Line Items Below Region of Action- NA
5816A
LI - 1
Change the current title, correct reference to the actual Subtype of Standard in 1.1, and correct the Section 6 headingFailed Procedural Review 11/03/2015Region of Action- NA
5816BRevision to SEMI F30-0710: Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SitePublished 05/19/2017Region of Action- NA
5876New Standard - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used In Corrosive Gas Systems by Use of a Ferric Chloride SolutionPublished as SEMI C92-0216 02/05/2016Region of Action- NA
5963LINE ITEM REVISION TO SEMI F62-0701 (Reapproved 1111) TEST METHOD FOR DETERMINING MASS FLOW CONTROLLER PERFORMANCE CHARACTERISITICS FROM AMBIENT AND GAS TEMPERATURE EFFECTSSee Line Items Below Region of Action- NA
5963
LI - 1
Changes to formula 1, 2, 4 and modify terminology 5.3.8Failed Technical Review and Returned to TF 04/05/2015Region of Action- NA
5963ALINE ITEM REVISION TO SEMI F62-0701 (Reapproved 1111) TEST METHOD FOR DETERMINING MASS FLOW CONTROLLER PERFORMANCE CHARACTERISITICS FROM AMBIENT AND GAS TEMPERATURE EFFECTSSee Line Items Below Region of Action- NA
5963A
LI - 1
Line item change to modify terminology in Section 5.1Published 10/28/2016Region of Action- NA
5963A
LI - 2
Line item change to modify Section 15.1 as shown Published 10/28/2016Region of Action- NA
5964LINE ITEM REVISION TO SEMI E56-0314 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEAD BAND OF THERMAL MASS FLOW CONTROLLERSSee Line Items Below Region of Action- NA
5964
LI - 1
Correct Formula 1Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964
LI - 2
Correct Formula 2Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964
LI - 3
Correct Formula 6Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964
LI - 4
Correct Formula 16Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964ALINE ITEM REVISION TO SEMI E56-0815 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEAD BAND OF THERMAL MASS FLOW CONTROLLERSSee Line Items Below Region of Action- NA
5964A
LI - 1
Line item change to modify terminology in Section 5.1.Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 2
Change to Formula 1Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 3
Change to Formula 2Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 4
Change to Formula 5Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 5
Change to Formula 6Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 6
Change to Formula 8Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 7
Change to Formula 16Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964BLine Item Revision To Semi E56-0815, Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow ControllersSee Line Items Below Region of Action- NA
5964B
LI - 1
Modifications to Section 5Published 03/24/2017Region of Action- NA
5964B
LI - 2
Change to Formula 1Published 03/24/2017Region of Action- NA
5964B
LI - 3
Change to Formula 2Published 03/24/2017Region of Action- NA
5964B
LI - 4
Change to Formula 5Published 03/24/2017Region of Action- NA
5964B
LI - 5
Change to Formula 6Published 03/24/2017Region of Action- NA
5964B
LI - 6
Change to Formula 8Published 03/24/2017Region of Action- NA
5964B
LI - 7
Change to Formula 16Published 03/24/2017Region of Action- NA
5997Line Item Revision to SEMI C3-0413, Specifications for GasesSee Line Items Below Region of Action- NA
5997
LI - 1
Correct the title of this Standard from “Specifications for Gases” to “Specification for Gases”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5997ARevision to SEMI C3-0413, Specifications for GasesPublished 03/24/2017Region of Action- NA
5998Line Item Revision to SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for OxygenSee Line Items Below Region of Action- NA
5998
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Oxygen” to “Specification for Oxygen”Published 11/18/2016Region of Action- NA
5999Line Item Revision to SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2)See Line Items Below Region of Action- NA
5999
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Dichlorosilane (SiH2Cl2)” to “Specification for Dichlorosilane”Published 11/25/2016Region of Action- NA
6000Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon See Line Items Below Region of Action- NA
6000
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Argon” to “Specification and Guide for Argon”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
6000ARevision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon Published 03/17/2017Region of Action- NA
6001Line Item Revision to SEMI C58-1213, Specifications for HydrogenSee Line Items Below Region of Action- NA
6001
LI - 1
Correct the title of this Standard from “Specifications for Hydrogen” to “Specification for Hydrogen”Published 11/25/2016Region of Action- NA
6002Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for NitrogenDrafting 04/20/2016Region of Action- NA
6002
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Nitrogen” to “Specification and Guide for Nitrogen”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
6002ARevision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for NitrogenPublished 03/17/2017Region of Action- NA
6003Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)See Line Items Below Region of Action- NA
6003
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Nitrous Oxide (N2O)” to “Specification and Guide for Nitrous Oxide”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
6003ARevision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)Published 03/17/2017Region of Action- NA
6004Line Item Revision to SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6)See Line Items Below Region of Action- NA
6004
LI - 1
Correct the title of this Standard from “Specifications for Tungsten Hexafluoride (WF6)” to “Specification for Tungsten Hexafluoride”Published 11/25/2016Region of Action- NA
6050Line Item Revision to Modify the Nonconforming Title for SEMI E16-0611, Guideline for Determining and Describing Mass Flow Controller Leak RatesSee Line Items Below Region of Action- NA
6050
LI - 1
Correct the title of SEMI E16 from “Guideline for Determining and Describing Mass Flow Controller Leak Rates” to “Guide for Determining and Describing Mass Flow Controller Leak Rates”Published 05/19/2017Region of Action- NA
6054Reapproval of SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow ControllerFailed Technical Review and Returned to TF 11/08/2016Region of Action- NA
6054ALine Item Revisions to SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow ControllerSee Line Items Below Region of Action- NA
6054A
LI - 1
Modify Terminology Section 4.1.9Published 10/30/2017Region of Action- NA
6054A
LI - 2
Modify Terminology Section 4.1.10.1Published 10/30/2017Region of Action- NA
6054A
LI - 3
Modify Terminology Section 4.1.10.2Published 10/30/2017Region of Action- NA
6054A
LI - 4
Modify Terminology Section 4.1.10.3Published 10/30/2017Region of Action- NA
6055Reapproval of SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity Failed Technical Review and Returned to TF 11/08/2016Region of Action- NA
6055ALine Item Revision to SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter LinearitySee Line Items Below Region of Action- NA
6055A
LI - 1
Change “shall” to “should” throughout per Style ManualPublished 10/30/2017Region of Action- NA
6056Reapproval of SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow ControllerFailed Technical Review and Returned to TF 11/08/2016Region of Action- NA
6056ARevision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with Title Change to Guide for Pressure Parameters of the Mass Flow ControllerFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6056BRevision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with Title Change to Guide for Pressure Parameters of the Mass Flow ControllerPublished 02/23/2018Region of Action- NA
6057Reapproval of SEMI E29-1110, Terminology for the Calibration of Mass Flow Controllers and Mass Flow MetersPublished 04/21/2017Region of Action- NA
6058Reapproval of SEMI E66-0611, Test Method for Determining Particle Contribution by Mass Flow ControllersPublished 05/19/2017Region of Action- NA
6059Reapproval of SEMI F29-0997 (Reapproved 0611), Test Method for Purge Efficacy of Gas Source System PanelsPublished 05/19/2017Region of Action- NA
6060Reapproval of SEMI F70-0611, Test Method for Determination of Particle Contribution of Gas Delivery SystemPublished 05/19/2017Region of Action- NA
6106Reapproval of SEMI F13-1101, Guide for Gas Source Control EquipmentFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6107Reapproval of SEMI F14-93 (Reapproved 0699), Guide for the Design of Gas Source Equipment EnclosuresFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6108Reapproval of SEMI F20-0706E (Reapproved 0611), Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications Published 09/29/2017Region of Action- NA
6111Reapproval of SEMI F6-92, Guide for Secondary Containment of Hazardous Gas Piping SystemsFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6119Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with Title Change to Test Method for Measurement of Mass Flow Controller Transient CharacteristicsPublished 03/09/2018Region of Action- NA
6120Reapproval of SEMI E137-0705 (Reapproved 1111), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing EquipmentPublished 01/05/2018Region of Action- NA
6121Reapproval of SEMI E67-1011, Test Method for Determining Reliability of Mass Flow Controller Published 02/09/2018Region of Action- NA
6122Reapproval of SEMI F78-0611, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 09/29/2017Region of Action- NA
6123Reapproval of SEMI F81-0611, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 09/29/2017Region of Action- NA
6125Line Item Revision to Correct the Title of SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty GasesSee Line Items Below Region of Action- NA
6125
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6125ARevision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen GasPassed Technical Review - Awaiting Procedural Review 11/07/2017Region of Action- NA
6126Line Item Revision to Correct the Title of SEMI F24-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Inert Specialty GasesSee Line Items Below Region of Action- NA
6126
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualPublished 12/22/2017Region of Action- NA
6127Line Item Revision to Correct the Title of SEMI F25-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Oxidant Specialty GasesSee Line Items Below Region of Action- NA
6127
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualPublished 01/05/2018Region of Action- NA
6128Line Item Revision to Correct the Title of SEMI F26-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Toxic Specialty GasesSee Line Items Below Region of Action- NA
6128
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualPublished 01/05/2018Region of Action- NA
6137Reapproval of SEMI C55-1104 (Reapproved 0211), Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% QualityPublished 01/05/2018Region of Action- NA
6138Reapproval of SEMI C3.27-1102 (Reapproved 1011), Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% QualityPublished 01/05/2018Region of Action- NA
6139Reapproval of SEMI C3.39-1011, Specification for Nitrogen Trifluoride (NF3), 99.98%Published 01/05/2018Region of Action- NA
6140Reapproval of SEMI C3.2-0611, Specification for Arsine (AsH3) in Cylinders, 99.94% QualityPublished 02/09/2018Region of Action- NA
6141Reapproval of SEMI C3.47-1011, Specification for Hydrogen Bromide (HBr), 99.98% QualityPublished 02/09/2018Region of Action- NA
6142Reapproval of SEMI C3.55-1011, Specification for Silane (SiH4), Bulk, 99.994% QualityPublished 02/09/2018Region of Action- NA
6143Reapproval of SEMI C3.40-1011, Specification for Carbon Tetrafluoride (CF4), 99.997% QualityPublished 02/09/2018Region of Action- NA
6178Line Item Revision to Correct the Title of SEMI F37-0299 (Reapproved 0611), Method for Determination of Surface Roughness Parameters for Gas Distribution System ComponentsSee Line Items Below Region of Action- NA
6178
LI - 1
Correct nonconforming title per SEMI Standards Procedure Manual to "Test Method for Determination of Surface Roughness Parameters for Gas Distribution System Components”Published 03/09/2018Region of Action- NA
6180Reapproval of SEMI F64-0701 (Reapproved 1111), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers Published 03/09/2018Region of Action- NA
6181Reapproval of SEMI F76-0303 (Reapproved 1110), Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive GasPublished 03/09/2018Region of Action- NA
6182Reapproval of SEMI C9.1-0212, Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas MixturesPublished 03/09/2018Region of Action- NA
6186Reapproval of SEMI C3.58-1011, Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% QualityPublished 04/13/2018Region of Action- NA
6188Reapproval of SEMI F54-1000 (Reapproved 1110), Test Method for Measuring the Counting Efficiency of Condensation Nucleus CountersPublished 04/13/2018Region of Action- NA
6211Reapproval of SEMI F22-0812, Guide for Bulk and Specialty Gas Distribution SystemsPassed Technical Review - Awaiting Procedural Review 11/07/2017Region of Action- NA
6212Reapproval of SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas FiltersFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6213Reapproval of SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery SystemsFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6214Reapproval of SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow ControllersFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6215Reapproval of SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6216Reapproval of SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers Failed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6217Reapproval of SEMI C3.56-0312, Specification for Diborane MixturesPassed Technical Review - Awaiting Procedural Review 11/15/2017Region of Action- Europe
6218Reapproval of SEMI C3.57-0312, Specification for Carbon Dioxide, CO2, Electronic Grade in CylindersPassed Technical Review - Awaiting Procedural Review 11/15/2017Region of Action- Europe
6219Reapproval of SEMI C52-0301 (Reapproved 0312), Specification for the Shelf Life of a Specialty GasPassed Technical Review - Awaiting Procedural Review 11/15/2017Region of Action- Europe
6248Editorial Changes to SEMI E137-0705 (Reapproved 1111) - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing EquipmentPublished 01/05/2018Region of Action- NA
6290New Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing SystemsFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6291New Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing SystemsFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6312Reapproval of SEMI F109-0212, Guide for Heater Systems RequirementsFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6339Replacement of SEMI C6.2: Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas, C6.3: Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas, C6.4: Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.5: Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.6: Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, and C6.7: Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders, into one single document as a New Standard, Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas CylindersFailed Technical Review and Returned to TF 04/01/2018Region of Action- NA
6340Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow ControllersFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6341Revision to SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersPassed Technical Review - Awaiting Procedural Review 04/10/2018Region of Action- NA
6342Revision to SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow ControllersPassed Technical Review - Awaiting Procedural Review 04/10/2018Region of Action- NA
R3440CNew Standard: Test Method for Pressure Transducers in Gas Delivery SystemsPublished as SEMI F113-1116 11/30/2016Region of Action- NA
R5671CRevision to SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityPublished 01/22/2016Region of Action- NA
R5673CRevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityPublished 01/22/2016Region of Action- NA
R5765Revision to SEMI C15, Test Method for ppm and ppb Humidity StandardsPublished 06/30/2016Region of Action- Europe
R5816BRevision to SEMI F30-0710, Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SitePublished 05/19/2017Region of Action- NA
R5997ARevision to SEMI C3-0413, Specification for GasesPublished 03/24/2017Region of Action- NA
R6056BRevision to SEMI E28-1110, Guide for Pressure Parameters of the Mass Flow ControllerPublished 02/23/2018Region of Action- NA
R6119Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with Title Change to Test Method for Measurement of Mass Flow Controller Transient CharacteristicsPublished 03/09/2018Region of Action- NA
R6125ARevision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen GasPassed Technical Review - Awaiting Procedural Review 04/10/2018Region of Action- NA
R6341Revision to SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersDrafting 04/25/2018Region of Action- NA