SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

Use the pull-down menu below to browse a particular committee.


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Gases

3440CNew Standard: Test Method For Pressure Transducers In Gas Delivery SystemsPublished as SEMI F113-1116 11/30/2016Region of Action- NA
5244BRevision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean EnvironmentsPublished 10/20/2016Region of Action- NA
5765Revision to SEMI C15-0212, Test Method for ppm and ppb Humidity StandardsPublished 06/30/2016Region of Action- Europe
5816A
LI - 1
Change the current title, correct reference to the actual Subtype of Standard in 1.1, and correct the Section 6 headingFailed Procedural Review 11/03/2015Region of Action- NA
5816BRevision to SEMI F30-0710: Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SitePublished 05/19/2017Region of Action- NA
5876New Standard - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used In Corrosive Gas Systems by Use of a Ferric Chloride SolutionPublished as SEMI C92-0216 02/05/2016Region of Action- NA
5963LINE ITEM REVISION TO SEMI F62-0701 (Reapproved 1111) TEST METHOD FOR DETERMINING MASS FLOW CONTROLLER PERFORMANCE CHARACTERISITICS FROM AMBIENT AND GAS TEMPERATURE EFFECTSSee Line Items Below Region of Action- NA
5963
LI - 1
Changes to formula 1, 2, 4 and modify terminology 5.3.8Failed Technical Review and Returned to TF 04/05/2015Region of Action- NA
5963ALINE ITEM REVISION TO SEMI F62-0701 (Reapproved 1111) TEST METHOD FOR DETERMINING MASS FLOW CONTROLLER PERFORMANCE CHARACTERISITICS FROM AMBIENT AND GAS TEMPERATURE EFFECTSSee Line Items Below Region of Action- NA
5963A
LI - 1
Line item change to modify terminology in Section 5.1Published 10/28/2016Region of Action- NA
5963A
LI - 2
Line item change to modify Section 15.1 as shown Published 10/28/2016Region of Action- NA
5964LINE ITEM REVISION TO SEMI E56-0314 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEAD BAND OF THERMAL MASS FLOW CONTROLLERSSee Line Items Below Region of Action- NA
5964
LI - 1
Correct Formula 1Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964
LI - 2
Correct Formula 2Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964
LI - 3
Correct Formula 6Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964
LI - 4
Correct Formula 16Failed Technical Review and Returned to TF 04/05/2016Region of Action- NA
5964ALINE ITEM REVISION TO SEMI E56-0815 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEAD BAND OF THERMAL MASS FLOW CONTROLLERSSee Line Items Below Region of Action- NA
5964A
LI - 1
Line item change to modify terminology in Section 5.1.Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 2
Change to Formula 1Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 3
Change to Formula 2Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 4
Change to Formula 5Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 5
Change to Formula 6Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 6
Change to Formula 8Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964A
LI - 7
Change to Formula 16Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5964BLine Item Revision To Semi E56-0815, Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow ControllersSee Line Items Below Region of Action- NA
5964B
LI - 1
Modifications to Section 5Published 03/24/2017Region of Action- NA
5964B
LI - 2
Change to Formula 1Published 03/24/2017Region of Action- NA
5964B
LI - 3
Change to Formula 2Published 03/24/2017Region of Action- NA
5964B
LI - 4
Change to Formula 5Published 03/24/2017Region of Action- NA
5964B
LI - 5
Change to Formula 6Published 03/24/2017Region of Action- NA
5964B
LI - 6
Change to Formula 8Published 03/24/2017Region of Action- NA
5964B
LI - 7
Change to Formula 16Published 03/24/2017Region of Action- NA
5997Line Item Revision to SEMI C3-0413, Specifications for GasesSee Line Items Below Region of Action- NA
5997
LI - 1
Correct the title of this Standard from “Specifications for Gases” to “Specification for Gases”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
5997ARevision to SEMI C3-0413, Specifications for GasesPublished 03/24/2017Region of Action- NA
5998Line Item Revision to SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for OxygenSee Line Items Below Region of Action- NA
5998
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Oxygen” to “Specification for Oxygen”Published 11/18/2016Region of Action- NA
5999Line Item Revision to SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2)See Line Items Below Region of Action- NA
5999
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Dichlorosilane (SiH2Cl2)” to “Specification for Dichlorosilane”Published 11/25/2016Region of Action- NA
6000Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon See Line Items Below Region of Action- NA
6000
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Argon” to “Specification and Guide for Argon”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
6000ARevision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon Published 03/17/2017Region of Action- NA
6001Line Item Revision to SEMI C58-1213, Specifications for HydrogenSee Line Items Below Region of Action- NA
6001
LI - 1
Correct the title of this Standard from “Specifications for Hydrogen” to “Specification for Hydrogen”Published 11/25/2016Region of Action- NA
6002Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for NitrogenDrafting 04/20/2016Region of Action- NA
6002
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Nitrogen” to “Specification and Guide for Nitrogen”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
6002ARevision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for NitrogenPublished 03/17/2017Region of Action- NA
6003Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)See Line Items Below Region of Action- NA
6003
LI - 1
Correct the title of this Standard from “Specifications and Guidelines for Nitrous Oxide (N2O)” to “Specification and Guide for Nitrous Oxide”Failed Technical Review and Returned to TF 07/12/2016Region of Action- NA
6003ARevision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)Published 03/17/2017Region of Action- NA
6004Line Item Revision to SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6)See Line Items Below Region of Action- NA
6004
LI - 1
Correct the title of this Standard from “Specifications for Tungsten Hexafluoride (WF6)” to “Specification for Tungsten Hexafluoride”Published 11/25/2016Region of Action- NA
6050Line Item Revision to Modify the Nonconforming Title for SEMI E16-0611, Guideline for Determining and Describing Mass Flow Controller Leak RatesSee Line Items Below Region of Action- NA
6050
LI - 1
Correct the title of SEMI E16 from “Guideline for Determining and Describing Mass Flow Controller Leak Rates” to “Guide for Determining and Describing Mass Flow Controller Leak Rates”Published 05/19/2017Region of Action- NA
6054Reapproval of SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow ControllerFailed Technical Review and Returned to TF 11/08/2016Region of Action- NA
6054ALine Item Revisions to SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow ControllerSee Line Items Below Region of Action- NA
6054A
LI - 1
Modify Terminology Section 4.1.9Published 10/30/2017Region of Action- NA
6054A
LI - 2
Modify Terminology Section 4.1.10.1Published 10/30/2017Region of Action- NA
6054A
LI - 3
Modify Terminology Section 4.1.10.2Published 10/30/2017Region of Action- NA
6054A
LI - 4
Modify Terminology Section 4.1.10.3Published 10/30/2017Region of Action- NA
6055Reapproval of SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity Failed Technical Review and Returned to TF 11/08/2016Region of Action- NA
6055ALine Item Revision to SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter LinearitySee Line Items Below Region of Action- NA
6055A
LI - 1
Change “shall” to “should” throughout per Style ManualPublished 10/30/2017Region of Action- NA
6056Reapproval of SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow ControllerFailed Technical Review and Returned to TF 11/08/2016Region of Action- NA
6056ARevision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with Title Change to Guide for Pressure Parameters of the Mass Flow ControllerFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6056BRevision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with Title Change to Guide for Pressure Parameters of the Mass Flow ControllerPublished 02/23/2018Region of Action- NA
6057Reapproval of SEMI E29-1110, Terminology for the Calibration of Mass Flow Controllers and Mass Flow MetersPublished 04/21/2017Region of Action- NA
6058Reapproval of SEMI E66-0611, Test Method for Determining Particle Contribution by Mass Flow ControllersPublished 05/19/2017Region of Action- NA
6059Reapproval of SEMI F29-0997 (Reapproved 0611), Test Method for Purge Efficacy of Gas Source System PanelsPublished 05/19/2017Region of Action- NA
6060Reapproval of SEMI F70-0611, Test Method for Determination of Particle Contribution of Gas Delivery SystemPublished 05/19/2017Region of Action- NA
6106Reapproval of SEMI F13-1101, Guide for Gas Source Control EquipmentFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6107Reapproval of SEMI F14-93 (Reapproved 0699), Guide for the Design of Gas Source Equipment EnclosuresFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6108Reapproval of SEMI F20-0706E (Reapproved 0611), Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications Published 09/29/2017Region of Action- NA
6111Reapproval of SEMI F6-92, Guide for Secondary Containment of Hazardous Gas Piping SystemsFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6119Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with Title Change to Test Method for Measurement of Mass Flow Controller Transient CharacteristicsPublished 03/09/2018Region of Action- NA
6120Reapproval of SEMI E137-0705 (Reapproved 1111), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing EquipmentPublished 01/05/2018Region of Action- NA
6121Reapproval of SEMI E67-1011, Test Method for Determining Reliability of Mass Flow Controller Published 02/09/2018Region of Action- NA
6122Reapproval of SEMI F78-0611, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 09/29/2017Region of Action- NA
6123Reapproval of SEMI F81-0611, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsPublished 09/29/2017Region of Action- NA
6125Line Item Revision to Correct the Title of SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty GasesSee Line Items Below Region of Action- NA
6125
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualFailed Technical Review and Returned to TF 04/04/2017Region of Action- NA
6125ARevision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen GasPublished 05/25/2018Region of Action- NA
6126Line Item Revision to Correct the Title of SEMI F24-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Inert Specialty GasesSee Line Items Below Region of Action- NA
6126
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualPublished 12/22/2017Region of Action- NA
6127Line Item Revision to Correct the Title of SEMI F25-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Oxidant Specialty GasesSee Line Items Below Region of Action- NA
6127
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualPublished 01/05/2018Region of Action- NA
6128Line Item Revision to Correct the Title of SEMI F26-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Toxic Specialty GasesSee Line Items Below Region of Action- NA
6128
LI - 1
Correct nonconforming title per SEMI Standards Procedure ManualPublished 01/05/2018Region of Action- NA
6137Reapproval of SEMI C55-1104 (Reapproved 0211), Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% QualityPublished 01/05/2018Region of Action- NA
6138Reapproval of SEMI C3.27-1102 (Reapproved 1011), Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% QualityPublished 01/05/2018Region of Action- NA
6139Reapproval of SEMI C3.39-1011, Specification for Nitrogen Trifluoride (NF3), 99.98%Published 01/05/2018Region of Action- NA
6140Reapproval of SEMI C3.2-0611, Specification for Arsine (AsH3) in Cylinders, 99.94% QualityPublished 02/09/2018Region of Action- NA
6141Reapproval of SEMI C3.47-1011, Specification for Hydrogen Bromide (HBr), 99.98% QualityPublished 02/09/2018Region of Action- NA
6142Reapproval of SEMI C3.55-1011, Specification for Silane (SiH4), Bulk, 99.994% QualityPublished 02/09/2018Region of Action- NA
6143Reapproval of SEMI C3.40-1011, Specification for Carbon Tetrafluoride (CF4), 99.997% QualityPublished 02/09/2018Region of Action- NA
6178Line Item Revision to Correct the Title of SEMI F37-0299 (Reapproved 0611), Method for Determination of Surface Roughness Parameters for Gas Distribution System ComponentsSee Line Items Below Region of Action- NA
6178
LI - 1
Correct nonconforming title per SEMI Standards Procedure Manual to "Test Method for Determination of Surface Roughness Parameters for Gas Distribution System Components”Published 03/09/2018Region of Action- NA
6180Reapproval of SEMI F64-0701 (Reapproved 1111), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers Published 03/09/2018Region of Action- NA
6181Reapproval of SEMI F76-0303 (Reapproved 1110), Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive GasPublished 03/09/2018Region of Action- NA
6182Reapproval of SEMI C9.1-0212, Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas MixturesPublished 03/09/2018Region of Action- NA
6186Reapproval of SEMI C3.58-1011, Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% QualityPublished 04/13/2018Region of Action- NA
6188Reapproval of SEMI F54-1000 (Reapproved 1110), Test Method for Measuring the Counting Efficiency of Condensation Nucleus CountersPublished 04/13/2018Region of Action- NA
6211Reapproval of SEMI F22-0812, Guide for Bulk and Specialty Gas Distribution SystemsPublished 05/17/2018Region of Action- NA
6212Reapproval of SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas FiltersFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6213Reapproval of SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery SystemsFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6214Reapproval of SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow ControllersFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6215Reapproval of SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersFailed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6216Reapproval of SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers Failed Technical Review and Returned to TF 11/07/2017Region of Action- NA
6217Reapproval of SEMI C3.56-0312, Specification for Diborane MixturesPublished 06/15/2018Region of Action- Europe
6218Reapproval of SEMI C3.57-0312, Specification for Carbon Dioxide, CO2, Electronic Grade in CylindersPublished 06/15/2018Region of Action- Europe
6219Reapproval of SEMI C52-0301 (Reapproved 0312), Specification for the Shelf Life of a Specialty GasPublished 06/21/2018Region of Action- Europe
6248Editorial Changes to SEMI E137-0705 (Reapproved 1111) - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing EquipmentPublished 01/05/2018Region of Action- NA
6290New Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing SystemsFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6290ANew Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsFailed Technical Review and Returned to TF 07/10/2018Region of Action- NA
6290BNew Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsFailed Technical Review and Returned to TF 04/02/2019Region of Action- NA
6290CNew Standard: Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsPublished as SEMI F114-0220 02/21/2020Region of Action- NA
6291New Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing SystemsFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6291ANew Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsFailed Technical Review and Returned to TF 07/10/2018Region of Action- NA
6291BNew Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsFailed Technical Review and Returned to TF 04/02/2019Region of Action- NA
6291CNew Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and ComponentsPublished as SEMI F115-0220 02/21/2020Region of Action- NA
6312Reapproval of SEMI F109-0212, Guide for Heater Systems RequirementsFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6339Replacement of SEMI C6.2: Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas, C6.3: Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas, C6.4: Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.5: Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.6: Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, and C6.7: Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders, into one single document as a New Standard, Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas CylindersFailed Technical Review and Returned to TF 04/01/2018Region of Action- NA
6339AReplacement of SEMI C6.2: Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas, C6.3: Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas, C6.4: Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.5: Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.6: Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, and C6.7: Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders, into one single document as a New Standard, Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas CylindersPublished as SEMI C97-1118 11/16/2018Region of Action- NA
6340Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow ControllersFailed Technical Review and Returned to TF 04/10/2018Region of Action- NA
6340ARevision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow ControllersFailed Technical Review and Returned to TF 07/10/2018Region of Action- NA
6340BRevision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow ControllersFailed Technical Review and Returned to TF 11/06/2018Region of Action- NA
6340CRevision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow ControllersPublished 01/17/2020Region of Action- NA
6341Revision to SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersPublished 12/07/2018Region of Action- NA
6342Revision to SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow ControllersPublished 09/21/2018Region of Action- NA
6391Reapproval of SEMI F101-1105 (Reapproved 1111)E, Test Method for Determining Pressure Regulator Performance in Gas Distribution SystemsPublished 10/12/2018Region of Action- NA
6413Reapproval of SEMI C3.20-0414, Specification for Helium (He), in Cylinders, 99.9995%Published 03/08/2019Region of Action- NA
6414Reapproval of SEMI C3.24-0414, Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality Published 03/08/2019Region of Action- NA
6415Reapproval of SEMI F112-0613, Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS) Failed Technical Review and Returned to TF 11/06/2018Region of Action- NA
6441Revision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Dynamic (Pulse) Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed Technical Review and Returned to TF 04/02/2019Region of Action- NA
6441ARevision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Pulsed Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery SystemPublished as SEMI F70.1-0320 03/06/2020Region of Action- NA
6457Revision to SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas FiltersPublished 07/17/2020Region of Action- NA
6477Revision to SEMI F112-0613 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)Published 08/31/2020Region of Action- NA
6492Line Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% QualitySee Line Items Below Region of Action- NA
6492
LI - 1
Change “Specifications” section heading to “Requirements”.Published 08/30/2019Region of Action- NA
6492
LI - 2
Address trademark(s) per Regulations Section 16.4.4.Failed Procedural Review 04/02/2019Region of Action- NA
6492ALine Item Revision to SEMI C3.32-0614, Specification for Chlorine (Cl2), 99.996% QualitySee Line Items Below Region of Action- NA
6492A
LI - 1
Revision to SEMI C3.32 - Address trademark(s) per Regulations Section 16.4.4Published 09/18/2020Region of Action- NA
6493Line Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% QualitySee Line Items Below Region of Action- NA
6493
LI - 1
Change “Specifications” section heading to “Requirements”.Published 08/30/2019Region of Action- NA
6493
LI - 2
Address trademark(s) per Regulations Section 16.4.4.Failed Procedural Review 04/02/2019Region of Action- NA
6493ALine Item Revision to SEMI C3.37-0614, Specification for Hexafluoroethane (C2F6), 99.97% QualitySee Line Items Below Region of Action- NA
6493A
LI - 1
Revision to SEMI C3.37 - Address trademark(s) per Regulations Section 16.4.4Published 09/18/2020Region of Action- NA
6512Reapproval of SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers Failed Technical Review and Returned to TF 07/09/2019Region of Action- NA
6582New Standard: Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas SystemsFailed Technical Review and Returned to TF 07/13/2021Region of Action- NA
6582ANew Standard: Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas SystemsPublished as SEMI F120-0922 09/23/2022Region of Action- NA
6616Revision to SEMI E12-1213, Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow ControllersPublished 04/30/2021Region of Action- NA
6623Reapproval for SEMI F72-0214, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsPublished 02/26/2021Region of Action- NA
6643New Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT Ports in Mass Flow Controllers and Mass Flow MetersFailed Technical Review and Returned to TF Region of Action- NA
6643ANew Standard: Specification for Location and Dimensions for Power Connectors and EtherCAT ports in Mass Flow Controllers and Mass Flow MetersPublished as SEMI E186-1121 11/30/2021Region of Action- NA
6656Line Item Revision to SEMI C3.6-0710 (Reapproved 0815), Specification for Phosphine (PH3) in Cylinders, 99.98% QualitySee Line Items Below Region of Action- NA
6656
LI - 1
Update “Referenced Standards and Documents” Section.Published 04/23/2021Region of Action- NA
6656
LI - 2
Change “Specifications” section heading to “Requirements” per Procedure Manual.Published 04/23/2021Region of Action- NA
6656
LI - 3
Address trademark(s) per Regulations § 16.4.4.Published 04/23/2021Region of Action- NA
6657Line Item Revision to SEMI C3.35-1109E (Reapproved 0815), Specification for Hydrogen Chloride (HCI), 99.997% QualitySee Line Items Below Region of Action- NA
6657
LI - 1
Change “Specifications” section heading to “Requirements” per Procedure Manal.Published 04/23/2021Region of Action- NA
6657
LI - 2
Address trademark(s) per Regulations § 16.4.4.Published 04/23/2021Region of Action- NA
6658Line Item Revision to SEMI C71-0815, Specification and Guide for Boron Trichloride (BCI3)See Line Items Below Region of Action- NA
6658
LI - 1
Update “Referenced Standards and Documents” Section.Published 04/23/2021Region of Action- NA
6658
LI - 2
Address trademark(s) per Regulations § 16.4.4.Published 04/23/2021Region of Action- NA
6747Line Item to Replace Designation Letter from C to F for SEMI C88-0815, Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems, SEMI C91-115, Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components, and SEMI C92-0216, Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride SolutionSee Line Items Below Region of Action- NA
6747
LI - 1
Replace Designation Letter of SEMI C88 to SEMI FXXX.Published 11/30/2021Region of Action- NA
6747
LI - 2
Replace Designation Letter of SEMI C91 to SEMI FXXX.Published 11/30/2021Region of Action- NA
6747
LI - 3
Replace Designation Letter of SEMI C92 to SEMI FXXX.Published 11/30/2021Region of Action- NA
6813Reapproval of SEMI F28-1103 (Reapproved 0815), Test Method for Measuring Particle Generation from Process PanelsFailed Technical Review and Returned to TF 07/13/2021Region of Action- NA
6814Reapproval of SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas FiltersFailed Technical Review and Returned to TF 07/13/2021Region of Action- NA
6815Reapproval of SEMI F59-0302 (Reapproved 0613), Test Method for Determination of Filter or Gas System Flow Pressure Drop CurvesFailed Technical Review and Returned to TF 07/13/2021Region of Action- NA
6816Reapproval of SEMI F67-1101 (Reapproved 0713), Test Method for Determining Inert Gas Purifier CapacityFailed Technical Review and Returned to TF 07/13/2021Region of Action- NA
6817Reapproval of SEMI F68-1101 (Reapproved 0713), Test Method for Determining Purifier EfficiencyFailed Technical Review and Returned to TF 07/13/2021Region of Action- NA
6874Reapproval of SEMI F79-0914, Guide for Gas Compatibility with Silicon Used in Gas Distribution ComponentsPublished 09/16/2022Region of Action- NA
6875Reapproval of SEMI F105-0914, Guide for Metallic Material Compatibility in Gas Distribution SystemsPublished 09/16/2022Region of Action- NA
6876Reapproval of SEMI F60-1214, Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsFailed Technical Review and Returned to TF 03/29/2022Region of Action- NA
6877Reapproval of SEMI F73-1214, Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel ComponentsFailed Technical Review and Returned to TF 03/29/2022Region of Action- NA
6878Reapproval of SEMI E77-1104 (Reapproved 0815), Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate GasesFailed Technical Review and Returned to TF 03/29/2022Region of Action- NA
6879Reapproval of SEMI F77-0915, Test Method for Electrochemical Critical Pitting Temperature Testing of Stainless Steel Surfaces Used in Corrosive Gas SystemsFailed Technical Review and Returned to TF 03/29/2022Region of Action- NA
6880Reapproval of SEMI E80-0299 (Reapproved 0915), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)Failed Technical Review and Returned to TF 03/29/2022Region of Action- NA
6881Reapproval of SEMI C3.34-0116, Specification for Disilane (Si2H6) in Cylinders, 97% QualityPublished 09/23/2022Region of Action- NA
6882Reapproval of SEMI C3.12-0116, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityPublished 09/23/2022Region of Action- NA
6916Replacement of SEMI F109-0212, Guide for Heater Systems Requirements, as a New Standard: Guide for Material Selection for Heater SystemsFailed Technical Review and Returned to TF 11/07/2023Region of Action- NA
6916AReplacement of SEMI F109-0212, Guide for Heater Systems Requirements, as a New Standard: Guide for Material Selection for HeatersDrafting 02/12/2024Region of Action- NA
6933Line-Item Revisions to SEMI E77-1104 (Reapproved 0815), Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate GasesSee Line Items Below Region of Action- NA
6933
LI - 1
Clarify grammar in § 3 and ¶ 7.2.Published 04/28/2023Region of Action- NA
6933
LI - 2
Change “must” or "will" to “shall” or "should" as shown.Published 04/28/2023Region of Action- NA
6933
LI - 3
Move ¶ 7.6 to § 8 and ¶ 7.7 to § 12.Published 04/28/2023Region of Action- NA
6934Line-Item Revisions to SEMI E80-0299 (Reapproved 0915), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)See Line Items Below Region of Action- NA
6934
LI - 1
Clarify grammar in ¶ 3.2 and ¶ 7.2.Published 04/28/2023Region of Action- NA
6934
LI - 2
Change “must” or "will" to “shall” or "should" as shown.Published 04/28/2023Region of Action- NA
6934
LI - 3
Move ¶ 7.6 to § 13.Published 04/28/2023Region of Action- NA
7052Line-Item Revision to SEMI F20-0706, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components used in General Purpose, High Purity and Ultra-high Purity Semiconductor Manufacturing ApplicationsSee Line Items Below Region of Action- NA
7052
LI - 1
Update throughout to comply to Regs, PM and SM .Published 09/29/2023Region of Action- NA
7052
LI - 2
Update “Plate” reference per ASTM E45.Published 09/29/2023Region of Action- NA
7092Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow MetersSee Line Items Below Region of Action- NA
7092
LI - 1
“mass flow transducer” is deleted to remove confusion.Published 12/16/2023Region of Action- NA
7093Line-Item Revision to SEMI F62-1016, Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature EffectsSee Line Items Below Region of Action- NA
7093
LI - 1
Remove the flow rate limitation on mass flow controller to support the flow rate testing above 30slm.Published 11/03/2023Region of Action- NA
7093
LI - 2
Update throughout to comply to Regs, PM and SM .Published 11/03/2023Region of Action- NA
7097Line-Item Revision to SEMI C54-1116, Specification for OxygenSee Line Items Below Region of Action- NA
7097
LI - 1
Add chemical formula for oxygen in title.Passed Technical Review - Awaiting Procedural Review 11/07/2023Region of Action- NA
7097
LI - 2
Update throughout to comply to Regs, PM and SM.Yes Ratification Ballot To Be Issued 11/07/2023Region of Action- NA
7097
LI - 3
Clarify word usage and SI units in §9 through § 10 per SM.Passed Technical Review - Awaiting Procedural Review 11/07/2023Region of Action- NA
7097
LI - 3
Clarify word usage and SI units in §9 through § 10 per SM.Passed Technical Review - Awaiting Procedural Review 11/07/2023Region of Action- NA
7097
LI - 4
Change “is to”, “may”, “must”, or “should” to “shall” or “should” throughout, where appropriate.Yes Ratification Ballot To Be Issued 11/07/2023Region of Action- NA
7098Line-Item Revision to SEMI C56-1116, Specification for Dichlorosilane See Line Items Below Region of Action- NA
7098
LI - 1
Add chemical formula for dichlorosilane in title.Published 02/23/2024Region of Action- NA
7098
LI - 2
Update throughout to comply to Regs, PM and SM.Published 02/23/2024Region of Action- NA
7151Line-Item Revision to SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak RatesSee Line Items Below Region of Action- NA
7151
LI - 1
Update throughout to comply to Regs, PM and SM.Publication Process Started 02/05/2024Region of Action- NA
7151
LI - 2
Change “must” or “shall” to “should” throughout.Yes Ratification Ballot To Be Issued 11/07/2023Region of Action- NA
7152Line-Item Revision to SEMI E27-1017, Guide for Mass Flow Controller and Mass Flow Meter LinearitySee Line Items Below Region of Action- NA
7152
LI - 1
Update throughout to comply to Regs, PM and SM.Publication Process Started 02/05/2024Region of Action- NA
7202Line-Item Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery SystemsSee Line Items Below Region of Action- NA
7202
LI - 1
Update throughout to comply to Regs, PM and SM.Drafting 02/12/2024Region of Action- NA
7203Line-Item Revision to SEMI F78-0611 (Reapproved 0917), Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsSee Line Items Below Region of Action- NA
7203
LI - 1
Update throughout to comply to Regs, PM and SM.Drafting 02/12/2024Region of Action- NA
7203
LI - 2
Provide clarity to the following sections ¶¶ 8.3, 8.4, 11.1, 11.5.4.Drafting 02/12/2024Region of Action- NA
7204Line-Item Revision to SEMI F81-0611 (Reapproved 0917), Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing ApplicationsSee Line Items Below Region of Action- NA
7204
LI - 1
Update throughout to comply to Regs, PM and SM.Drafting 02/12/2024Region of Action- NA
7204
LI - 2
Add reference “AWS D18.2…” to ¶ 7.1.14 and include in Ref Stds and Docs section.Drafting 02/12/2024Region of Action- NA
R3440CNew Standard: Test Method for Pressure Transducers in Gas Delivery SystemsPublished as SEMI F113-1116 11/30/2016Region of Action- NA
R5671CRevision to SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityPublished 01/22/2016Region of Action- NA
R5673CRevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityPublished 01/22/2016Region of Action- NA
R5765Revision to SEMI C15, Test Method for ppm and ppb Humidity StandardsPublished 06/30/2016Region of Action- Europe
R5816BRevision to SEMI F30-0710, Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SitePublished 05/19/2017Region of Action- NA
R5997ARevision to SEMI C3-0413, Specification for GasesPublished 03/24/2017Region of Action- NA
R6056BRevision to SEMI E28-1110, Guide for Pressure Parameters of the Mass Flow ControllerPublished 02/23/2018Region of Action- NA
R6119Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with Title Change to Test Method for Measurement of Mass Flow Controller Transient CharacteristicsPublished 03/09/2018Region of Action- NA
R6125ARevision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen GasPublished 05/25/2018Region of Action- NA
R6340CRevision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow ControllersPublished 01/17/2020Region of Action- NA
R6341Revision to SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersPublished 12/07/2018Region of Action- NA
R6582ANew Standard: Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas SystemsPublished as SEMI F120-0922 09/23/2022Region of Action- NA
R6933Line-Item Revisions to SEMI E77-1104 (Reapproved 0815), Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate GasesSee Line Items Below Region of Action- NA
R6933
LI - 1
Clarify ¶ 3.2, ¶ 3.3 and ¶ 7.2.Published 04/28/2023Region of Action- NA
R6933
LI - 2
Clarify § 8.Published 04/28/2023Region of Action- NA
R6934Line-Item Revision to SEMI E80-0299 (Reapproved 0915), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)See Line Items Below Region of Action- NA
R6934
LI - 1
Clarify ¶ 3.2 and ¶ 7.2.Published 04/28/2023Region of Action- NA
R7092Line-Item Revision to SEMI E29-1110 (Reapproved 0417), Terminology for the Calibration of Mass Flow Controllers and Mass Flow MetersSee Line Items Below Region of Action- NA
R7092
LI - 1
“mass flow transducer” is deleted to remove confusion.Published 12/15/2023Region of Action- NA
R7097Line-Item Revision to SEMI C54-1116, Specification for OxygenSee Line Items Below Region of Action- NA
R7097
LI - 1
Clarify definitions in ¶6.2.2 and ¶6.2.3.Drafting 11/27/2023Region of Action- NA
R7097
LI - 2
Clarify NOTE 8 and 9 and change “1.379 MPa (200 psig)” to “sample pressure” or “the sample pressure” throughout, where appropriate.Drafting 11/27/2023Region of Action- NA
R7151Line-Item Revision to SEMI E16-0517, Guide for Determining and Describing Mass Flow Controller Leak RatesSee Line Items Below Region of Action- NA
R7151
LI - 1
Clarify ¶ 5.3.4.Drafting 11/27/2023Region of Action- NA