SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

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HB-LED

5016Line Item Revision to SEMI HB3-1113, Mechanical Interface Specification for 150 mm HB-LED Load PortSee Line Items Below Region of Action- NA
5016
LI - 1
Correct the title of this Standard from “Mechanical Interface Specification for 150 mm HB-LED Load Port” to “Specification for the Mechanical Interface for 150 mm HB-LED Load Port”Published 10/28/2016Region of Action- NA
5723New Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB- LED WafersFailed Technical Review and Returned to TF 04/22/2016Region of Action- Other
5723ANew Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB- LED WafersPassed Technical Review - Awaiting Procedural Review 10/14/2016Region of Action- Other
5723BNew Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB- LED WafersFailed Technical Review and Returned to TF 12/28/2017Region of Action- Other
5723CNew Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB- LED WafersPublished as SEMI HB10-1018 10/12/2018Region of Action- Other
5775New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED WafersFailed Technical Review and Returned to TF 04/22/2016Region of Action- Other
5775ANew Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED WafersPassed Technical Review - Awaiting Procedural Review 10/14/2016Region of Action- Other
5775BNew Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED WafersFailed Technical Review and Returned to TF 12/28/2017Region of Action- Other
5775CNew Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED WafersFailed Technical Review and Returned to TF 04/18/2018Region of Action- Other
5775DNew Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED WafersPublished as SEMI HB11-0819 08/16/2019Region of Action- Other
5776New Standard: Test Method for Detecting Surface Defects of GaN based LED Epitaxial Wafer Used for Manufacturing HB-LEDFailed Technical Review and Returned to TF 04/20/2017Region of Action- Other
5776ANew Standard: Test Method and Acceptance Criteria for Visual Inspection of Surface Defects of GaN Epitaxial Wafers Used for Manufacturing HB-LEDPassed Technical Review - Awaiting Procedural Review 12/28/2017Region of Action- Other
5818Line Items Revision to SEMI HB1-XXXX, Specifications for Sapphire Wafers Intended for Use for Manufacturing High Brightness-Light Emitting Diode DevicesSee Line Items Below Region of Action- NA
5818
LI - 1
Correct the title of this standard from “Specifications” to “Specification”Published 08/26/2016Region of Action- NA
5818
LI - 2
Modify and update Table 1, 2-3,3 Flat lengthPublished 08/26/2016Region of Action- NA
5818
LI - 3
Implement r-plan direction in Table 1, Table 2 and Table R1-1, Part 2Published 08/26/2016Region of Action- NA
5916Line-iItem Revisions to HB6-0615, Test Method for Measurement of Thickness and Shape of Crystalline Sapphire Wafers by Using Optical ProbesSee Line Items Below Region of Action- NA
5916
LI - 1
Addition of the results of an MSA with a double-side polished sapphire wafer in section 16 and in Related Information 1.Published 03/04/2016Region of Action- NA
5916
LI - 2
Replace the arrow depicting the diameter of the wafer in Figure 2 by an arrow that depicts the radius.Published 03/04/2016Region of Action- NA
5916
LI - 3
Replace in R1-2.1 “site size: 1 by 1 mm” by “site size: 5 by 5 mm”.Published 03/04/2016Region of Action- NA
5945New Standard: Test Method for Determining Orientation of A Sapphire Single CrystalPublished as SEMI HB8-0217 02/24/2017Region of Action- Other
6192New Standard: Specification for Dry Etching Patterned Sapphire Substrate (DPSS)Failed Technical Review and Returned to TF 10/24/2018Region of Action- Other
6192ANew Standard: Specification for Dry-Etched Patterned Sapphire Substrates (DPSS)Published as SEMI HB12-1219 12/23/2019Region of Action- Other
6370New Standard: Specification of Susceptors for HB-LED MOCVD Equipment Communication InterfacePublished as SEMI HB13-1219 12/20/2019Region of Action- Other
6371New Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire SubstrateFailed Technical Review and Returned to TF 03/29/2019Region of Action- Other
6371ANew Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire SubstrateFailed Technical Review and Returned to TF 09/27/2019Region of Action- Other
6371BNew Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire SubstrateFailed Technical Review and Returned to TF 03/16/2020Region of Action- Other
6371CNew Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire SubstratePublished as SEMI HB14-0223 02/17/2023Region of Action- Other
6387Reapproval of SEMI HB2-0613, Specification For 150 mm Open Plastic and Metal Wafer Cassettes Intended for Use for Manufacturing HB-LED DevicesPublished 12/24/2018Region of Action- NA
6430Reapproval of SEMI HB4-0913, Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)Published 04/26/2019Region of Action- NA
6502Line Item Revision to SEMI HB11-0819, Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED WafersSee Line Items Below Region of Action- Other
6502
LI - 1
Change terminology of End Face in section 4.1.1 Published 01/08/2021Region of Action- Other
6589Revision to SEMI HB4-0913 (Reapproved 0419), Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)Published 01/13/2022Region of Action- Other
R5723CNew Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB- LED WafersPublished as SEMI HB10-1018 10/12/2018Region of Action- Other
R5775DNew Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED WafersPublished as SEMI HB11-0819 08/16/2019Region of Action- Other
R5776ANew Standard: Test Method for Detecting Surface Defects of GaN based LED Epitaxial Wafer Used for Manufacturing HB-LEDPublished as SEMI HB9-0818 08/24/2018Region of Action- Other
R6192ANew Standard: Specification for Dry-Etched Patterned Sapphire Substrates (DPSS)Published as SEMI HB12-1219 12/23/2019Region of Action- Other
R6370New Standard: Specification of Susceptors for HB-LED MOCVD Equipment Communication InterfacePublished as SEMI HB13-1219 12/20/2019Region of Action- Other
R6371CNew Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire SubstratePublished as SEMI HB14-0223 02/17/2023Region of Action- Other
R6589Revision to SEMI HB4-0913 (Reapproved 0419), Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)Published 01/13/2022Region of Action- Other