| 4410C | Revision to SEMI E87, Specification for Carrier Management (CMS). Revision for conflicts and errata | See Line Items Below | Region of Action- NA |
4410C
LI - 1 | E87-0707 clarify section 11 Access Mode | Published 05/29/2009 | Region of Action- NA |
4410C
LI - 2 | E87-0707 Add to the Related Information “R1-4 Flowcharts for Access Mode Violation” | Published 05/29/2009 | Region of Action- NA |
| 4506 | Revisions to:
SEMI E142.1, XML Schema for Substrate Mapping
SEMI E142.2, SECS-II Protocol for Substrate Mapping
SEMI E142.3, Web Services for Substrate Mapping | See Line Items Below | Region of Action- NA |
4506
LI - 1 | E142.1-0706 – Schema Rationalization and Corrections – E142.2-0306 – Schema version update – E142.3-0706 – Independent Schema Creation – WSDL corrections | Published 02/28/2011 | Region of Action- NA |
| 4508B | Revision to SEMI E94, Specification for Control Job Management. Changes to CJ State Change Triggers | Published 01/27/2009 | Region of Action- NA |
| 4536B | Revision to SEMI E148, Specification for Time Synchronization and Definition of the TS-Clock Object | Published 02/06/2009 | Region of Action- NA |
| 4542 | Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Fault Classification and Fault Prediction Enhancements | Published 09/24/2008 | Region of Action- NA |
| 4572 | Revision to SEMI E54.8, Standard for Sensor/Actuator Network Communications for PROFIBUS | Published 01/29/2009 | Region of Action- Europe |
| 4573 | Revision to SEMI E54.14, Standard for Sensor/Actuator Network Communications for PROFINET | Published 01/29/2009 | Region of Action- Europe |
| 4591A | New Standard: Specification for AMHS SEM (AMHS SEM) | Published as SEMI E153-1109 09/25/2009 | Region of Action- Japan |
| 4593 | Revision to SEMI E40, Standard for Processing Management | Published 01/27/2009 | Region of Action- NA |
| 4594 | Revision to SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM). Add Zone Decoding Information | Published 01/27/2009 | Region of Action- NA |
| 4595A | Revision to SEMI E138, XML Semiconductor Common Components | Published 01/22/2009 | Region of Action- NA |
| 4596 | Revisions to:
SEMI E128-0706E, Provisional Specification for XML Message Structures
SEMI E125.1-0709, Specification for SOAP Binding for Equipment Self Description (EqSD)
SEMI E132.1-1108, Specifcation for SOAP Binding for Equipment Client Authentication and Authorization (ECA)
SEMI E134.1-0709, Specification for Soap Binding of Data Collection Management (DCM)
SEMI E120.1-1108, XML Schema for the Common Equipment Model | Published 02/02/2010 | Region of Action- NA |
| 4613A | New Standard: Guide for Understanding Data Quality | Published as SEMI E151-0309 02/06/2009 | Region of Action- NA |
| 4626A | Revision to SEMI E87-0707, Specification for Carrier Management | See Line Items Below | Region of Action- NA |
4626A
LI - 1 | E87 – Clarify the meaning of the CancelCarrierAtPort service. | Published 05/29/2009 | Region of Action- NA |
| 4637 | Reapproval: E98.1 Provisional Specification for SECS-II Protocol for the Object Based Equipment Model | Published 01/16/2009 | Region of Action- Japan |
| 4685 | Revisions to:
* SEMI E139-1108, Specification for Recipe and Parameter Management (RaP)
* SEMI E139.1-1108, XML Schema for the RaP PDE
* SEMI E139.3-1108, XML/SOAP Binding for Recipe and Parameter Management
* SEMI E5-1108, SEMI Equipment Communications Standard 2 Message Content (SECS-II)
For Error Handling and Maintenance | See Line Items Below | Region of Action- NA |
4685
LI - 1 | E139-1108, E139.3-1108, and E5-1108 - ResolvePDE() Logic and Error Handling | Published 06/01/2009 | Region of Action- NA |
4685
LI - 2 | E139-1108, E139.3, and E5-1108 – Error Condition for SendPDE() | Published 06/01/2009 | Region of Action- NA |
4685
LI - 3 | E139-1108, E139.3-1108, and E5-1108 – Filters for GetPDEdirectory() | Published 06/01/2009 | Region of Action- NA |
4685
LI - 4 | E139-1108 – Support for Local Recipe Management and Execution | Published 06/01/2009 | Region of Action- NA |
4685
LI - 5 | E139.1-1108, E139.3-1108 – Consistent Date-Time Format | Published 06/01/2009 | Region of Action- NA |
4685
LI - 6 | E139.3-1108 – Error Code Cleanup | Published 06/01/2009 | Region of Action- NA |
| 4686 | Revisions to SEMI E40-0309, Standard for Processing Management and SEMI E5-1108, SEMI Equipment Communications Standard 2 Message Content (SECS-II) | See Line Items Below | Region of Action- NA |
4686
LI - 1 | E40 - Clarify Response of PRJobSetStartMethod | Publication Process Started 05/13/2009 | Region of Action- NA |
| 4693 | Revision to SEMI E133-1108, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide specification for wafer to wafer (W2W) control. | See Line Items Below | Region of Action- NA |
4693
LI - 1 | Provide additional specification to support Wafer-to-Wafer (W2W) control | Published 10/02/2009 | Region of Action- NA |
4693
LI - 2 | Provide an application note describing how PCS W2W control communication could be conducted coordinating inside equipment and outside equipment capabilities. | Published 10/02/2009 | Region of Action- NA |
| 4709 | New Standard: SPECIFICATION FOR SENSOR ACTUATOR NETWORK FOR MOTIONNET COMMUNICATION | Published as SEMI E155-0310 02/03/2010 | Region of Action- Japan |
| 4729 | Revisions to:
* SEMI E125-0308, Specification for Equipment Self Description (EqSD)
* SEMI E125.1-0308, Specification for SOAP Binding for Equipment Self Description (EqSD)
* SEMI E134-0308, Specification for Data Collection Management
* SEMI E134.1-0308, Specification for Soap Binding of Data Collection Management (DCM)
* SEMI E138-0309, XML Semiconductor Common Components
Updates and Corrections. | See Line Items Below | Region of Action- NA |
4729
LI - 1 | E125, E125.1, E134, E134.1, E138 Updates to the Data Collection Interface | Published 06/02/2009 | Region of Action- NA |
| 4742 blue | New Standard: Recipe Execution Tracking | Drafting 06/30/2009 | Region of Action- NA |
| 4742 | New Standard: Specification for Recipe Execution Tracking | Failed Technical Review and Returned to TF 11/04/2009 | Region of Action- NA |
| 4742A | New Standard for Module Process Execution Tracking | Published as SEMI E157-0710 06/03/2010 | Region of Action- NA |
| 4743AInfo | New Standard: Specification for Communication of Data Quality | Drafting 06/18/2010 | Region of Action- NA |
| 4743 | New Standard: Specification for Communication of Data Quality | Failed Technical Review and Returned to TF 07/15/2009 | Region of Action- NA |
| 4743A | New Standard: Specification for Communication of Data Quality | Published as SEMI E160-0211 01/27/2011 | Region of Action- NA |
| 4744 | Revision to SEMI E148-0309, Specification for Time Synchronization and Definition of the TS-Clock Object | See Line Items Below | Region of Action- NA |
4744
LI - 1 | Correct Type, Access, and Default for the TimeSyncInterval Attribute | Published 10/06/2009 | Region of Action- NA |
4744
LI - 2 | DateTime Attribute Value Clarification | Published 10/06/2009 | Region of Action- NA |
4744
LI - 3 | Clarify LastSyncTime Attribute | Published 10/06/2009 | Region of Action- NA |
4744
LI - 4 | Change Data Source for Status Attribute | Published 10/06/2009 | Region of Action- NA |
| 4745 | Reapproval of SEMI E54.13-0303, Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) | Failed Technical Review and Returned to TF 07/15/2009 | Region of Action- NA |
| 4746 | Reapproval of SEMI E91-0600, Specification for Prober Specific Equipment Model (PSEM) | Published 09/21/2009 | Region of Action- NA |
| 4747 | Reapprovals for SEMI E122-0703, Standard for Tester Equipment Specific Equipment Model (TSEM) and SEMI E122.1-0703, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM) | Published 09/21/2009 | Region of Action- NA |
| 4748 | Reapprovals of SEMI E123-0703, Standard for Handler Equipment Specific Equipment Model (HSEM) and SEMI E123.1-0703, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM) | Published 09/21/2009 | Region of Action- NA |
| 4749 | Reapprovals of SEMI E39-0703, Object Services Standard: Concepts, Behavior, and Services and SEMI E39.1-0703, SECS-II Protocol for Object Services Standard (OSS) | Published 10/01/2009 | Region of Action- NA |
| 4750 | Withdrawal for SEMI E37.2, High-Speed SECS Message Services General Session (HSMS-GS) | Published 09/25/2009 | Region of Action- NA |
| 4751 | Withdrawals for SEMI E58, Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services and SEMI E58.1, SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services | Failed Technical Review and Returned to TF 07/15/2009 | Region of Action- NA |
| 4775 | Revision to SEMI E120-1108, Specification for the Common Equipment Model (CEM) and SEMI E120.1-1108, XML Schema for the Common Equipment Model | See Line Items Below | Region of Action- NA |
4775
LI - 1 | Implementer’s option to exclude ExecutionElement attributes | Published 02/03/2010 | Region of Action- NA |
4775
LI - 2 | Clarify requirements when excluding EquipmentElement attributes | Published 02/03/2010 | Region of Action- NA |
| 4776 | Revisions to:
SEMI E120-1108, Specification for the Common Equipment Model (CEM)
SEMI E120.1-1108, XML Schema for the Common Equipment Model (CEM)
SEMI E125-0709, Specification for Equipment Self Description (EqSD) | Published 02/03/2010 | Region of Action- NA |
| 4777 | Revisions to SEMI E139.1-0709, XML Schema for the RaP PDE
and SEMI E139.3-0709, XML/SOAP Binding for Recipe and Parameter Management | See Line Items Below | Region of Action- NA |
4777
LI - 1 | SEMI E139.3-0709 – Schema and WSDL Corrections | Published 02/04/2010 | Region of Action- NA |
4777
LI - 2 | SEMI E139.1-0709 – Schema Version Update | Published 02/04/2010 | Region of Action- NA |
| 4802 | Revision to SEMI E153: Specification for AMHS SEM (AMHS SEM) | See Line Items Below | Region of Action- Japan |
4802
LI - 1 | Erase variable ‘DisabledQuantity’ and ‘EnabledQuantity’ | Published 01/26/2010 | Region of Action- Japan |
4802
LI - 2 | Replace the word ‘transport unit’ to ‘TS unit’. | Published 01/26/2010 | Region of Action- Japan |
4802
LI - 3 | Replace the word ‘transport unit’ to ‘vehicle’. | Published 01/26/2010 | Region of Action- Japan |
4802
LI - 4 | Add a new variable ‘TSSCAvail’. | Published 01/26/2010 | Region of Action- Japan |
4802
LI - 5 | Add example of value assignments for CEID’s and VID’s as a related information. | Published 01/26/2010 | Region of Action- Japan |
4802
LI - 6 | Erase the word ‘IBSEM’. | Published 01/26/2010 | Region of Action- Japan |
| 4821 | Revision to SEMI E151, Guide for Understanding Data Quality | See Line Items Below | Region of Action- NA |
4821
LI - 1 | Correct the Accuracy and Frequency Elements for Data Quality Usability | Failed Technical Review and Returned to TF 03/31/2010 | Region of Action- NA |
| 4821A | Revision to SEMI E151, Guide for Understanding Data Quality | See Line Items Below | Region of Action- NA |
4821A
LI - 1 | Update the NIST document reference and add a reference to SEMI standard E145 | Failed Technical Review and Returned to TF 07/14/2010 | Region of Action- NA |
4821A
LI - 2 | Correct the Format and Frequency Elements for Data Quality | Published 09/09/2010 | Region of Action- NA |
4821A
LI - 3 | Update and Add Elements to Data Quality Definitions | Published 09/09/2010 | Region of Action- NA |
4821A
LI - 4 | Add Error Band Element to Data Quality Definition | Published 09/09/2010 | Region of Action- NA |
4821A
LI - 5 | Add Full Scale Element to Data Quality Definition | Failed Technical Review and Returned to TF 07/14/2010 | Region of Action- NA |
4821A
LI - 6 | Add Jitter Element to Data Quality Definition | Published 09/09/2010 | Region of Action- NA |
| 4821B | Revision to SEMI E151, Guide for Understanding Data Quality | See Line Items Below | Region of Action- NA |
4821B
LI - 1 | Update the NIST document reference and add a reference to SEMI standard E145 | Published 02/28/2011 | Region of Action- NA |
4821B
LI - 2 | Add Full Scale Element to Data Quality Definition | Published 02/28/2011 | Region of Action- NA |
4821B
LI - 3 | Modify the definition of Jitter | Published 02/28/2011 | Region of Action- NA |
| 4822 | Revisions to SEMI E125, Specification for Equipment Self Description (EqSD) and SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD) | See Line Items Below | Region of Action- NA |
4822
LI - 1 | Mapping SECS Events/Alarms/Variables to EDA Metadata Elements | Published 05/20/2010 | Region of Action- NA |
4822
LI - 2 | Representation of StateMachine Default Entry Transitions (NoState) | Publication Process Started 04/30/2010 | Region of Action- NA |
| 4823 | Revisions to SEMI E134, Specification for Data Collection Management and SEMI E134.1, Specification for SOAP Binding of Data Collection Management (DCM) | See Line Items Below | Region of Action- NA |
4823
LI - 1 | Condition-Based Trace Data Collection | Published 05/27/2010 | Region of Action- NA |
4823
LI - 2 | Error Handling | Published 05/27/2010 | Region of Action- NA |
4823
LI - 3 | Clarification of timeActived | Published 05/27/2010 | Region of Action- NA |
4823
LI - 4 | Privileges | Published 05/27/2010 | Region of Action- NA |
| 4824 | Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) | See Line Items Below | Region of Action- NA |
4824
LI - 1 | SEMI E5-1108 – Add 2 New Message Pairs | Failed Technical Review and Returned to TF 07/14/2010 | Region of Action- NA |
| 4824A | Revision to SEMI E5, Equipment Communications Standard Part 2 (SECS-II). Dynamic Equipment Variable Request | See Line Items Below | Region of Action- NA |
4824A
LI - 1 | SEMI E5– Add 2 New Message Pairs | Failed Technical Review and Returned to TF 11/10/2010 | Region of Action- NA |
| 4824B | Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) | Published 07/11/2012 | Region of Action- Korea |
| 4828 | Revision to SEMI E133-1110, Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide a virtual metrology capability | See Line Items Below | Region of Action- NA |
4828
LI - 1 | PCS Event Notification and Data Collection to Provide a Virtual Metrology Capability | Published 02/24/2012 | Region of Action- NA |
| 4829 | Revision to SEMI E139.3-0310, XML/SOAP Binding for Recipe and Parameter Management. SOAP 1.2 Support for SEMI E139.3 | See Line Items Below | Region of Action- NA |
4829
LI - 1 | Conversion of E139.3-0310 to SOAP 1.2 | Published 12/20/2011 | Region of Action- NA |
| 4830 | Reapprovals for SEMI E130, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300) | Published 05/20/2010 | Region of Action- NA |
| 4831 | Reapproval for SEMI E54.2, Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots | Published 05/27/2010 | Region of Action- NA |
| 4851 | Re-approval of E99.1-1104, Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer Functional Standard | Published 05/27/2010 | Region of Action- Japan |
| 4852 | Re-approval of E99-1104E, The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behaivior, and Services | Published 05/27/2010 | Region of Action- Japan |
| 4853 | Re-approval of E107-1102, Provisional Specification of Electric Failure Link Data Format for Yield Management System | Published 05/27/2010 | Region of Action- Japan |
| 4946 | Line Item Revisions to SEMI E87-0709, Specification for Carrier Management (CMS) | See Line Items Below | Region of Action- Korea |
4946
LI - 1 | Revisions related to Carrier Approaching Ready To Unload Event | Drafting 09/10/2012 | Region of Action- Korea |
| 4946A | Line Item Revision to SEMI E87-0709, Specification for Carrier Management (CMS) and E87.1-0707 Provisional Specification for SECS-ⅡProtocol for Carrier Management (CMS) | See Line Items Below | Region of Action- Korea |
4946A
LI - 1 | Revisions related to Carrier Approaching Ready To Unload Event | Drafting 01/11/2013 | Region of Action- Korea |
| 4947 | Revision to SEMI E109.1, Provisional Specification for SECS-II Protocol for Reticle and Pod Management (RPMS) | Published 10/07/2010 | Region of Action- NA |
| 4948 | Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to remove provisional status. | See Line Items Below | Region of Action- NA |
4948
LI - 1 | Removal of Provisional Status | Published 10/07/2010 | Region of Action- NA |
| 4949 | Reapproval for SEMI E54.3, Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device | Published 09/30/2010 | Region of Action- NA |
| 4950 | Withdrawal for SEMI E54.4, Standard for Sensor/Actuator Network Communications for DeviceNet | Failed Technical Review and Returned to TF 07/14/2010 | Region of Action- NA |
| 4951 | Withdrawal for SEMI E54.13, Specification for Sensor/Actuator Network Communications for Ethernet/IPTM | Failed Technical Review and Returned to TF 07/14/2010 | Region of Action- NA |
| 4998 | Revision to SEMI E157, Specification for Module Process Tracking | See Line Items Below | Region of Action- NA |
4998
LI - 1 | Data Variable and Status Variable Clarification | Published 01/27/2011 | Region of Action- NA |
4998
LI - 2 | Interaction of Pause with Module Process State Model | Published 01/27/2011 | Region of Action- NA |
4998
LI - 3 | Expansion of State Definitions | Published 01/27/2011 | Region of Action- NA |
4998
LI - 4 | Change "multi-threaded process module" to "multi-tasking process module" | Published 01/27/2011 | Region of Action- NA |
4998
LI - 5 | Event Naming Correction | Published 01/27/2011 | Region of Action- NA |
4998
LI - 6 | Step Count Clarification | Failed Technical Review and Returned to TF 11/10/2010 | Region of Action- NA |
| 4998A | Revision to SEMI E157, Specification for Module Process Tracking | See Line Items Below | Region of Action- NA |
4998A
LI - 1 | Recipe Step Clarification | Published 06/10/2011 | Region of Action- NA |
| 5002 | New Standard: Specification for EDA Common Metadata | Failed Technical Review and Returned to TF 07/13/2011 | Region of Action- NA |
| 5002A | New Standard: Specification for EDA Common Metadata | Failed Technical Review and Returned to TF 10/26/2011 | Region of Action- NA |
| 5002B | New Standard: Specification for EDA Common Metadata | Published as SEMI E164-0712 07/31/2012 | Region of Action- NA |
| 5004 | Revision to SEMI E54.4-0704, Standard for Sensor/Actuator Network Communication Specification for DeviceNet | Published 11/18/2011 | Region of Action- NA |
| 5005 | Revision to SEMI E54.13-0303, Standard for Sensor/Actuator Network Communication Specification for EtherNet/IP | Published 10/25/2011 | Region of Action- NA |
| 5101 | Revisions to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) and SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM). Correcting maximum length of a data item in E5 and E30 | See Line Items Below | Region of Action- NA |
5101
LI - 1 | Correct Max Item Size | Published 06/10/2011 | Region of Action- NA |
| 5102 | New E54.x Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges | Failed Technical Review and Returned to TF 03/30/2011 | Region of Action- Europe |
| 5102A | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges to SEMI E54-0710, Sensor/Actuator Network Standard | Publication Process Started 12/24/2011 | Region of Action- Europe |
| 5176 | Revisions to SEMI E151-0211, Guide for Understanding Data Quality and SEMI E160-0211, Specification for Communication of Data Quality | See Line Items Below | Region of Action- NA |
5176
LI - 1 | Remove the duplicate definition of “full scale” and “reporting rate” from E160 and refine the definition of “full scale” in E151 | Published 12/09/2011 | Region of Action- NA |
5176
LI - 2 | Clarify meaning of User and Supplier in E160 | Published 12/09/2011 | Region of Action- NA |
5176
LI - 3 | Refine the E160 max and min calc/verification cells and indicate how this is provided | Published 12/09/2011 | Region of Action- NA |
5176
LI - 4 | Clarify E160 Scope | Published 12/09/2011 | Region of Action- NA |
5176
LI - 5 | Update Limitations section of E160 | Published 12/09/2011 | Region of Action- NA |
| 5177 | Revision to SEMI E145-0306, Classification for Measurement Unit Symbols in XML | See Line Items Below | Region of Action- NA |
5177
LI - 1 | Improve readability of combined unit symbols | Failed Technical Review and Returned to TF 07/13/2011 | Region of Action- NA |
5177
LI - 2 | Line Item Revision to E145: Addition of unit symbols commonly used in the semiconductor industry | Published 11/18/2011 | Region of Action- NA |
| 5177A | Line Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols in XML | See Line Items Below | Region of Action- NA |
5177A
LI - 1 | Improve readability of combined unit symbols | Failed Technical Review and Returned to TF 04/04/2012 | Region of Action- NA |
5177A
LI - 2 | Correct definition in document and XML file for bit and byte units | Failed Technical Review and Returned to TF 04/04/2012 | Region of Action- NA |
| 5177B | Line Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols in XML | See Line Items Below | Region of Action- NA |
5177B
LI - 1 | Improve readability of combined unit symbols | Failed Technical Review and Returned to TF 07/11/2012 | Region of Action- NA |
| 5177C | Line Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols in XML | See Line Items Below | Region of Action- NA |
5177C
LI - 1 | Improve readability of combined unit symbols | Published 03/01/2013 | Region of Action- NA |
| 5178 | Reapproval of SEMI E121-0305, Guide for Style & Usage of XML for Semiconductor Manufacturing Applications | Published 11/18/2011 | Region of Action- NA |
| 5179 | Revision to SEMI E90.1-0706, Provisional Specification for SECS-II Protocol Substrate Tracking | See Line Items Below | Region of Action- NA |
5179
LI - 1 | Line Item Revision to SEMI E90.1, Removal of Provisional Status | Published 12/02/2011 | Region of Action- NA |
5179
LI - 2 | Addition of Missing Data Variables | Failed Technical Review and Returned to TF 07/13/2011 | Region of Action- NA |
5179
LI - 3 | Line Item Revision to SEMI E90.1, Remove E53 References | Published 12/02/2011 | Region of Action- NA |
| 5179A | Revision to SEMI E90.1-0706, Provisional Specification for SECS-II Protocol Substrate Tracking | See Line Items Below | Region of Action- NA |
5179A
LI - 1 | Addition of Missing Data Variables | Published 03/22/2012 | Region of Action- NA |
| 5180 | Reapproval of SEMI E40.1-1106, SECS-II Support for Processing Management Standard | Published 11/18/2011 | Region of Action- NA |
| 5181 | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network to SEMI E54-0710, Sensor/Actuator Network Standard | Published as SEMI E54.23-0513 05/17/2013 | Region of Action- NA |
| 5182 | Reapproval of SEMI E54.10-0600 (Reapproved 1106), Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device | Published 12/02/2011 | Region of Action- NA |
| 5183 | Reapproval of SEMI E54.11-1106, Specific Device Model for Endpoint Devices | Published 12/09/2011 | Region of Action- NA |
| 5184 | Reapproval of SEMI E54.12-0701E (Reapproved 1106), Specification for Sensor/Actuator Network Communications for CC-Link | Published 12/09/2011 | Region of Action- NA |
| 5185 | Reapproval of SEMI E54.16-1106, Specification for Sensor/Actuator Network Communications for LONWORKS | Published 12/09/2011 | Region of Action- NA |
| 5186 | Reapproval of SEMI E54.18-1106, Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device | Published 12/09/2011 | Region of Action- NA |
| 5187 | Reapproval of SEMI E54.17-0706, Specification of Sensor/Actuator Network for A-LINK | Published 12/09/2011 | Region of Action- NA |
| 5194 | Line Item Revisions to SEMI E5-0611E, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Correcting some errors. | See Line Items Below | Region of Action- Japan |
5194
LI - 1 | Line Item 1: Correct a mismatch about ALCD’s alarm set/clear usage. | Published 07/11/2012 | Region of Action- Japan |
5194
LI - 2 | Line Item 2: Correct Message Detail of “S3,F21 Port Group Definition”. | Published 07/11/2012 | Region of Action- Japan |
5194
LI - 3 | Line Item 3: Correct reference error between “Message Detail“ and “Data Item Dictionary” | Published 07/11/2012 | Region of Action- Japan |
5194
LI - 4 | Line Item 4: Clarify usage of “S2,F37 Enable/Disable Event Report (EDER)”. | Published 07/11/2012 | Region of Action- Japan |
| 5227 | Reapproval of SEMI E82-1106, Specification for Interbay/Intrabay AMHS SEM (IBSEM) | Published 06/18/2012 | Region of Action- Japan |
| 5228 | Reapproval of SEMI E88-0307, Specification for AMHS Storage SEM (Stocker SEM) | Published 06/18/2012 | Region of Action- Japan |
| 5273 | Revisions to:
SEMI E40-0709, Standard for Processing Management
SEMI E40.1-1106, SECS-II Support for Processing Management Standard
SEMI E87-0709, Specification for Carrier Management (CMS)
SEMI E90-0707, Specification for Substrate Tracking
SEMI E94-0309, Specification for Control Job Management, and
SEMI E94.1-1107, Specification for SECS-II Protocol for Control Job Management (CJM)
To remove References to Inactive Standards and Defects in the GEM 300 Standards | See Line Items Below | Region of Action- NA |
5273
LI - 1 | E40 – Remove references to E53 | Published 03/22/2012 | Region of Action- NA |
5273
LI - 2 | E40.1 - Remove references to E53 | Published 03/22/2012 | Region of Action- NA |
5273
LI - 3 | E87 – Remove references to E41 and E53 | Published 03/22/2012 | Region of Action- NA |
5273
LI - 4 | E90 – Remove references to SEMI E53 | Published 03/22/2012 | Region of Action- NA |
5273
LI - 5 | E90- Remove unused service “Change Substrate State” | Published 03/22/2012 | Region of Action- NA |
5273
LI - 6 | E94 – Remove references to SEMI E53 | Published 03/22/2012 | Region of Action- NA |
5273
LI - 7 | E94.1 – Remove references to SEMI E53 | Published 03/22/2012 | Region of Action- NA |
5273
LI - 8 | E87 – Fix Related Information Table R1-20 | Published 03/22/2012 | Region of Action- NA |
| 5274 | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0710, Sensor/Actuator Network Standard | Failed Technical Review and Returned to TF 07/11/2012 | Region of Action- NA |
| 5274A | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0710, Sensor/Actuator Network Standard | Failed Technical Review and Returned to TF 04/03/2013 | Region of Action- NA |
| 5274InfoA | New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network
Specific Device Model for Generic Equipment add-on Sensor (ADDON) | Drafting 10/15/2012 | Region of Action- NA |
| 5316 | Reapproval for SEMI E4-0699 (Reapproved 0307), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) | Drafting 09/06/2011 | Region of Action- NA |
| 5316 | Reapproval for SEMI E4-0699 (Reapproved 0307), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) | Published 06/18/2012 | Region of Action- NA |
| 5317 | Reapproval for SEMI E95-1101 (Reapproved 0307), Specification for Human Interface for Semiconductor Manufacturing Equipment | Failed Technical Review and Returned to TF 10/26/2011 | Region of Action- NA |
| 5318 | Reapprovals for SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) | Failed Technical Review and Returned to TF 10/26/2011 | Region of Action- NA |
| 5320 | Line Item Revisions to SEMI E116-0707E, Specification for Equipment Performance Tracking | See Line Items Below | Region of Action- Korea |
5320
LI - 1 | Add and revise Attribute name definition, Variable Data Definition and events | DRAFTING 01/13/2012 | Region of Action- Korea |
| 5320A | Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking | Failed Technical Review and Returned to TF 01/31/2013 | Region of Action- Korea |
| 5320B | Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking | See Line Items Below | Region of Action- Korea |
5320B
LI - 1 | None | DRAFTING 04/22/2013 | Region of Action- Korea |
| 5368 | Reapproval of SEMI E118-1104E Specification for Wafer ID Reader Communication Interface — The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E118.1-1104 Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards | Document Discontinued 04/19/2012 | Region of Action- Japan |
| 5369 | Line-Item Revision to SEMI E54.17-0706 (Reapproved 1211): Specification of Sensor/Actuator Network for A-LINK | See Line Items Below | Region of Action- Japan |
5369
LI - 1 | Appending the ¶ 9.5 Vacuum Pump (VPD) to § 9 Specific Device Model Mappings. | Published 08/31/2012 | Region of Action- Japan |
| 5386 | Line Item Revision to SEMI E94-0312, Specification for Control Job Management, Enhancement of Material Redirection Mode | See Line Items Below | Region of Action- Korea |
5386
LI - 1 | Enhancement of Material Redirection Mode | Drafting 09/10/2012 | Region of Action- Korea |
| 5386A | Line Item Revisions to SEMI E94-0312, Specification for Control Job Management, Enhancement of Material Redirection Mode | See Line Items Below | Region of Action- Korea |
5386A
LI - 1 | Revisions related to the restricted conditions of transitions to “CarrierComplete” stage | Passed Technical Review - Awaiting Procedural Review 04/19/2013 | Region of Action- Korea |
| 5411 | New Standard: Specification for Equipment Energy Saving Mode (EESM) | Failed Technical Review and Returned to TF 10/31/2012 | Region of Action- NA |
| 5411A | New Standard: Specification for Equipment Energy Saving Mode Communications (EESM) | Failed Technical Review and Returned to TF 04/03/2013 | Region of Action- NA |
| 5422 | New Standard: Guide for Equipment Information System Security | Failed Technical Review and Returned to TF 04/10/2013 | Region of Action- Japan |
| 5423 | Line-item Revision to SEMI E40.1-0312, SECS-II Support for Processing Management Standard and SEMI E5-0712, SEMI Equipment Communication Standard 2 Message Content (SECS-II); Add mapping to PPID for RecID | See Line Items Below | Region of Action- Japan |
5423
LI - 1 | Line item #1 – Add mapping to PPID for RecID | DRAFTING 10/15/2012 | Region of Action- Japan |
| 5423A | Line-item Revision to SEMI E40.1-0312, SECS-II Support for Processing Management Standard and SEMI E5-0712, SEMI Equipment Communication Standard 2 Message Content (SECS-II); Add mapping to PPID for RecID | See Line Items Below | Region of Action- Japan |
5423A
LI - 1 | E40.1 to add PPID to RecID, and E5 to change message format of S16,F3, S16,F11 and S16,F15 | Passed Technical Review - Awaiting Procedural Review 04/10/2013 | Region of Action- Japan |
5423A
LI - 2 | Editorial Change of E5-0712 | Passed Technical Review - Awaiting Procedural Review 04/10/2013 | Region of Action- Japan |
| 5452 | Line Item Revisions to SEMI E134-0710, Specification for Data Collection Management and SEMI E134.1-0710, Specification for SOAP Binding of Data Collection Management (DCM) | See Line Items Below | Region of Action- NA |
5452
LI - 1 | Editorial Changes | Published 03/29/2013 | Region of Action- NA |
5452
LI - 2 | Clarify conditionValue for Start Triggers and Stop Triggers | Failed Technical Review and Returned to TF 10/31/2012 | Region of Action- NA |
5452
LI - 3 | Clarify InvalidExceptionRequest for an isDuplicate special case | Failed Technical Review and Returned to TF 10/31/2012 | Region of Action- NA |
| 5452A | Line Item Revisions to SEMI E134-0710, Specification for Data Collection Management and SEMI E134.1-0710, Specification for SOAP Binding of Data Collection Management (DCM) | See Line Items Below | Region of Action- NA |
5452A
LI - 1 | Clarify conditionValue for Start Triggers and Stop Triggers | Passed Technical Review - Awaiting Procedural Review 04/03/2013 | Region of Action- NA |
5452A
LI - 2 | Clarify InvalidExceptionRequest for an isDuplicate special case | Passed Technical Review - Awaiting Procedural Review 04/03/2013 | Region of Action- NA |
| 5453 | Revision to Add a New Subordinate Standard: Specification for SECS-II Protocol for Equipment Energy Saving Mode to SEMI Draft Document 5411A, New Standard: Specification for Equipment Energy Saving Mode Communications (EESM) | Failed Technical Review and Returned to TF 04/03/2012 | Region of Action- NA |
| 5454 | Line Item Revision to SEMI E30-0611, Specification for Generic Equipment Model (GEM) Standard. Modifications to the definition of Alarms | See Line Items Below | Region of Action- NA |
5454
LI - 1 | Modifications to the definition of Alarms | Failed Technical Review and Returned to TF 10/31/2012 | Region of Action- NA |
| 5454A | Line Item Revisions to SEMI E30-0611, Generic Equipment Model (GEM) Standard and SEMI E5-0712, SEMI Equipment Communications Standard 2 Message Content (SECS-II) | See Line Items Below | Region of Action- NA |
5454A
LI - 1 | Modifications to the Definition of Alarms and Alarm Category Definitions | Failed Technical Review and Returned to TF 04/03/2013 | Region of Action- NA |
| 5455 | Reapproval of SEMI E37.1-0702 (Reapproved 0308), High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS) | Published 04/19/2013 | Region of Action- NA |
| 5456 | Reapproval of SEMI E54.1-0708, Standard for Sensor/Actuator Network Common Device Model | Publication Process Started 12/20/2012 | Region of Action- NA |
| 5457 | Reapproval of SEMI E126-0708, Specification for Equipment Quality Information Parameters (EQIP) | Publication Process Started 12/20/2012 | Region of Action- NA |
| 5458 | Reapproval of SEMI E139.2-1108, SECS-II Protocol for Recipe and Parameter Management (RaP) | Publication Process Started 12/20/2012 | Region of Action- NA |
| 5480 | Line Item Revisions to SEMI E164-0712, Specification for EDA Common Metadata | See Line Items Below | Region of Action- NA |
5480
LI - 1 | E164-0712 Conceptual Diagrams | Published 03/29/2013 | Region of Action- NA |
5480
LI - 2 | E164-0712 XML File Instructions | Published 03/29/2013 | Region of Action- NA |
5480
LI - 3 | E164-0712 Object Attributes | Published 03/29/2013 | Region of Action- NA |
5480
LI - 4 | E164-0712 SimpleEvent Names | Published 03/29/2013 | Region of Action- NA |
5480
LI - 5 | E164-0712 E94 PRJobStatus TypeDefinition | Published 03/29/2013 | Region of Action- NA |
5480
LI - 6 | E164-0712 Errata | Published 03/29/2013 | Region of Action- NA |
5480
LI - 7 | E164-0712 E94 PRJobCtrlSpec OutputRule | Published 03/29/2013 | Region of Action- NA |
5480
LI - 8 | E164-0712 MaterialStatus in Both SEMI E90 and SEMI E94 | Published 03/29/2013 | Region of Action- NA |
| 5481 | Line Item Revision to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM). Addition of New Messages | See Line Items Below | Region of Action- NA |
5481
LI - 1 | Add new namelist request capabilities to section 4.2 Data Collection.
Complete Section 7 SECS-II Message Subset.
Complete Table 10 Section References for GEM Capabilities.
Add these new capabilities to Table 11 GEM Compliance Statement under “ADDITIONAL CAPABILITIES”. | Publication Process Started 12/20/2012 | Region of Action- NA |
| 5509 | Line Item Revision to SEMI E94-0312, Specification for Control Job Management | See Line Items Below | Region of Action- NA |
5509
LI - 1 | Clarify the entry for OutputRule in Table 2 | Failed Technical Review and Returned to TF 04/03/2013 | Region of Action- NA |
| 5510 | Line Item Revision to SEMI E157-0611, Specification for Module Process Tracking. Modifications to sections in the standard to clarify its content | See Line Items Below | Region of Action- NA |
5510
LI - 1 | Pre- and Post-processing Requirement | Failed Technical Review and Returned to TF 04/03/2013 | Region of Action- NA |
| 5511 | Reapproval of SEMI E54.20, Standard for Sensor/Actuator Network Communications for EtherCAT | Passed Technical Review - Awaiting Procedural Review 04/03/2013 | Region of Action- NA |
| 5512 | [HOLD OFF] Reapproval of SEMI E87.1, Provisional Specification for SECS-II Protocol for Carrier Management (CMS) | Drafting 04/25/2013 | Region of Action- NA |