SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

Use the pull-down menu below to browse a particular committee.


Browse


Information & Control

4410CRevision to SEMI E87, Specification for Carrier Management (CMS). Revision for conflicts and errataSee Line Items Below Region of Action- NA
4410C
LI - 1
E87-0707 clarify section 11 Access ModePublished 05/29/2009Region of Action- NA
4410C
LI - 2
E87-0707 Add to the Related Information “R1-4 Flowcharts for Access Mode Violation”Published 05/29/2009Region of Action- NA
4506Revisions to: SEMI E142.1, XML Schema for Substrate Mapping SEMI E142.2, SECS-II Protocol for Substrate Mapping SEMI E142.3, Web Services for Substrate MappingSee Line Items Below Region of Action- NA
4506
LI - 1
E142.1-0706 – Schema Rationalization and Corrections – E142.2-0306 – Schema version update – E142.3-0706 – Independent Schema Creation – WSDL correctionsPublished 02/28/2011Region of Action- NA
4508BRevision to SEMI E94, Specification for Control Job Management. Changes to CJ State Change TriggersPublished 01/27/2009Region of Action- NA
4536BRevision to SEMI E148, Specification for Time Synchronization and Definition of the TS-Clock ObjectPublished 02/06/2009Region of Action- NA
4542Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Fault Classification and Fault Prediction EnhancementsPublished 09/24/2008Region of Action- NA
4572Revision to SEMI E54.8, Standard for Sensor/Actuator Network Communications for PROFIBUSPublished 01/29/2009Region of Action- Europe
4573Revision to SEMI E54.14, Standard for Sensor/Actuator Network Communications for PROFINETPublished 01/29/2009Region of Action- Europe
4591ANew Standard: Specification for AMHS SEM (AMHS SEM)Published as SEMI E153-1109 09/25/2009Region of Action- Japan
4593Revision to SEMI E40, Standard for Processing ManagementPublished 01/27/2009Region of Action- NA
4594Revision to SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM). Add Zone Decoding InformationPublished 01/27/2009Region of Action- NA
4595ARevision to SEMI E138, XML Semiconductor Common ComponentsPublished 01/22/2009Region of Action- NA
4596Revisions to: SEMI E128-0706E, Provisional Specification for XML Message Structures SEMI E125.1-0709, Specification for SOAP Binding for Equipment Self Description (EqSD) SEMI E132.1-1108, Specifcation for SOAP Binding for Equipment Client Authentication and Authorization (ECA) SEMI E134.1-0709, Specification for Soap Binding of Data Collection Management (DCM) SEMI E120.1-1108, XML Schema for the Common Equipment ModelPublished 02/02/2010Region of Action- NA
4613ANew Standard: Guide for Understanding Data QualityPublished as SEMI E151-0309 02/06/2009Region of Action- NA
4626ARevision to SEMI E87-0707, Specification for Carrier ManagementSee Line Items Below Region of Action- NA
4626A
LI - 1
E87 – Clarify the meaning of the CancelCarrierAtPort service.Published 05/29/2009Region of Action- NA
4637Reapproval: E98.1 Provisional Specification for SECS-II Protocol for the Object Based Equipment Model Published 01/16/2009Region of Action- Japan
4685Revisions to: * SEMI E139-1108, Specification for Recipe and Parameter Management (RaP) * SEMI E139.1-1108, XML Schema for the RaP PDE * SEMI E139.3-1108, XML/SOAP Binding for Recipe and Parameter Management * SEMI E5-1108, SEMI Equipment Communications Standard 2 Message Content (SECS-II) For Error Handling and MaintenanceSee Line Items Below Region of Action- NA
4685
LI - 1
E139-1108, E139.3-1108, and E5-1108 - ResolvePDE() Logic and Error HandlingPublished 06/01/2009Region of Action- NA
4685
LI - 2
E139-1108, E139.3, and E5-1108 – Error Condition for SendPDE()Published 06/01/2009Region of Action- NA
4685
LI - 3
E139-1108, E139.3-1108, and E5-1108 – Filters for GetPDEdirectory()Published 06/01/2009Region of Action- NA
4685
LI - 4
E139-1108 – Support for Local Recipe Management and ExecutionPublished 06/01/2009Region of Action- NA
4685
LI - 5
E139.1-1108, E139.3-1108 – Consistent Date-Time FormatPublished 06/01/2009Region of Action- NA
4685
LI - 6
E139.3-1108 – Error Code CleanupPublished 06/01/2009Region of Action- NA
4686Revisions to SEMI E40-0309, Standard for Processing Management and SEMI E5-1108, SEMI Equipment Communications Standard 2 Message Content (SECS-II)See Line Items Below Region of Action- NA
4686
LI - 1
E40 - Clarify Response of PRJobSetStartMethodPublication Process Started 05/13/2009Region of Action- NA
4693Revision to SEMI E133-1108, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide specification for wafer to wafer (W2W) control.See Line Items Below Region of Action- NA
4693
LI - 1
Provide additional specification to support Wafer-to-Wafer (W2W) controlPublished 10/02/2009Region of Action- NA
4693
LI - 2
Provide an application note describing how PCS W2W control communication could be conducted coordinating inside equipment and outside equipment capabilities.Published 10/02/2009Region of Action- NA
4709New Standard: SPECIFICATION FOR SENSOR ACTUATOR NETWORK FOR MOTIONNET COMMUNICATIONPublished as SEMI E155-0310 02/03/2010Region of Action- Japan
4729Revisions to: * SEMI E125-0308, Specification for Equipment Self Description (EqSD) * SEMI E125.1-0308, Specification for SOAP Binding for Equipment Self Description (EqSD) * SEMI E134-0308, Specification for Data Collection Management * SEMI E134.1-0308, Specification for Soap Binding of Data Collection Management (DCM) * SEMI E138-0309, XML Semiconductor Common Components Updates and Corrections.See Line Items Below Region of Action- NA
4729
LI - 1
E125, E125.1, E134, E134.1, E138 Updates to the Data Collection InterfacePublished 06/02/2009Region of Action- NA
4742 blueNew Standard: Recipe Execution TrackingDrafting 06/30/2009Region of Action- NA
4742New Standard: Specification for Recipe Execution TrackingFailed Technical Review and Returned to TF 11/04/2009Region of Action- NA
4742ANew Standard for Module Process Execution TrackingPublished as SEMI E157-0710 06/03/2010Region of Action- NA
4743AInfoNew Standard: Specification for Communication of Data QualityDrafting 06/18/2010Region of Action- NA
4743New Standard: Specification for Communication of Data QualityFailed Technical Review and Returned to TF 07/15/2009Region of Action- NA
4743ANew Standard: Specification for Communication of Data QualityPublished as SEMI E160-0211 01/27/2011Region of Action- NA
4744Revision to SEMI E148-0309, Specification for Time Synchronization and Definition of the TS-Clock ObjectSee Line Items Below Region of Action- NA
4744
LI - 1
Correct Type, Access, and Default for the TimeSyncInterval AttributePublished 10/06/2009Region of Action- NA
4744
LI - 2
DateTime Attribute Value ClarificationPublished 10/06/2009Region of Action- NA
4744
LI - 3
Clarify LastSyncTime AttributePublished 10/06/2009Region of Action- NA
4744
LI - 4
Change Data Source for Status AttributePublished 10/06/2009Region of Action- NA
4745Reapproval of SEMI E54.13-0303, Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) Failed Technical Review and Returned to TF 07/15/2009Region of Action- NA
4746Reapproval of SEMI E91-0600, Specification for Prober Specific Equipment Model (PSEM) Published 09/21/2009Region of Action- NA
4747Reapprovals for SEMI E122-0703, Standard for Tester Equipment Specific Equipment Model (TSEM) and SEMI E122.1-0703, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)Published 09/21/2009Region of Action- NA
4748Reapprovals of SEMI E123-0703, Standard for Handler Equipment Specific Equipment Model (HSEM) and SEMI E123.1-0703, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)Published 09/21/2009Region of Action- NA
4749Reapprovals of SEMI E39-0703, Object Services Standard: Concepts, Behavior, and Services and SEMI E39.1-0703, SECS-II Protocol for Object Services Standard (OSS)Published 10/01/2009Region of Action- NA
4750Withdrawal for SEMI E37.2, High-Speed SECS Message Services General Session (HSMS-GS)Published 09/25/2009Region of Action- NA
4751Withdrawals for SEMI E58, Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services and SEMI E58.1, SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and ServicesFailed Technical Review and Returned to TF 07/15/2009Region of Action- NA
4775Revision to SEMI E120-1108, Specification for the Common Equipment Model (CEM) and SEMI E120.1-1108, XML Schema for the Common Equipment ModelSee Line Items Below Region of Action- NA
4775
LI - 1
Implementer’s option to exclude ExecutionElement attributesPublished 02/03/2010Region of Action- NA
4775
LI - 2
Clarify requirements when excluding EquipmentElement attributesPublished 02/03/2010Region of Action- NA
4776Revisions to: SEMI E120-1108, Specification for the Common Equipment Model (CEM) SEMI E120.1-1108, XML Schema for the Common Equipment Model (CEM) SEMI E125-0709, Specification for Equipment Self Description (EqSD)Published 02/03/2010Region of Action- NA
4777Revisions to SEMI E139.1-0709, XML Schema for the RaP PDE and SEMI E139.3-0709, XML/SOAP Binding for Recipe and Parameter ManagementSee Line Items Below Region of Action- NA
4777
LI - 1
SEMI E139.3-0709 – Schema and WSDL CorrectionsPublished 02/04/2010Region of Action- NA
4777
LI - 2
SEMI E139.1-0709 – Schema Version UpdatePublished 02/04/2010Region of Action- NA
4802Revision to SEMI E153: Specification for AMHS SEM (AMHS SEM)See Line Items Below Region of Action- Japan
4802
LI - 1
Erase variable ‘DisabledQuantity’ and ‘EnabledQuantity’ Published 01/26/2010Region of Action- Japan
4802
LI - 2
Replace the word ‘transport unit’ to ‘TS unit’.Published 01/26/2010Region of Action- Japan
4802
LI - 3
Replace the word ‘transport unit’ to ‘vehicle’.Published 01/26/2010Region of Action- Japan
4802
LI - 4
Add a new variable ‘TSSCAvail’. Published 01/26/2010Region of Action- Japan
4802
LI - 5
Add example of value assignments for CEID’s and VID’s as a related information. Published 01/26/2010Region of Action- Japan
4802
LI - 6
Erase the word ‘IBSEM’.Published 01/26/2010Region of Action- Japan
4821Revision to SEMI E151, Guide for Understanding Data QualitySee Line Items Below Region of Action- NA
4821
LI - 1
Correct the Accuracy and Frequency Elements for Data Quality Usability Failed Technical Review and Returned to TF 03/31/2010Region of Action- NA
4821ARevision to SEMI E151, Guide for Understanding Data QualitySee Line Items Below Region of Action- NA
4821A
LI - 1
Update the NIST document reference and add a reference to SEMI standard E145Failed Technical Review and Returned to TF 07/14/2010Region of Action- NA
4821A
LI - 2
Correct the Format and Frequency Elements for Data Quality Published 09/09/2010Region of Action- NA
4821A
LI - 3
Update and Add Elements to Data Quality DefinitionsPublished 09/09/2010Region of Action- NA
4821A
LI - 4
Add Error Band Element to Data Quality DefinitionPublished 09/09/2010Region of Action- NA
4821A
LI - 5
Add Full Scale Element to Data Quality DefinitionFailed Technical Review and Returned to TF 07/14/2010Region of Action- NA
4821A
LI - 6
Add Jitter Element to Data Quality DefinitionPublished 09/09/2010Region of Action- NA
4821BRevision to SEMI E151, Guide for Understanding Data QualitySee Line Items Below Region of Action- NA
4821B
LI - 1
Update the NIST document reference and add a reference to SEMI standard E145Published 02/28/2011Region of Action- NA
4821B
LI - 2
Add Full Scale Element to Data Quality DefinitionPublished 02/28/2011Region of Action- NA
4821B
LI - 3
Modify the definition of JitterPublished 02/28/2011Region of Action- NA
4822Revisions to SEMI E125, Specification for Equipment Self Description (EqSD) and SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)See Line Items Below Region of Action- NA
4822
LI - 1
Mapping SECS Events/Alarms/Variables to EDA Metadata ElementsPublished 05/20/2010Region of Action- NA
4822
LI - 2
Representation of StateMachine Default Entry Transitions (NoState)Publication Process Started 04/30/2010Region of Action- NA
4823Revisions to SEMI E134, Specification for Data Collection Management and SEMI E134.1, Specification for SOAP Binding of Data Collection Management (DCM)See Line Items Below Region of Action- NA
4823
LI - 1
Condition-Based Trace Data CollectionPublished 05/27/2010Region of Action- NA
4823
LI - 2
Error HandlingPublished 05/27/2010Region of Action- NA
4823
LI - 3
Clarification of timeActivedPublished 05/27/2010Region of Action- NA
4823
LI - 4
PrivilegesPublished 05/27/2010Region of Action- NA
4824Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II)See Line Items Below Region of Action- NA
4824
LI - 1
SEMI E5-1108 – Add 2 New Message PairsFailed Technical Review and Returned to TF 07/14/2010Region of Action- NA
4824ARevision to SEMI E5, Equipment Communications Standard Part 2 (SECS-II). Dynamic Equipment Variable RequestSee Line Items Below Region of Action- NA
4824A
LI - 1
SEMI E5– Add 2 New Message PairsFailed Technical Review and Returned to TF 11/10/2010Region of Action- NA
4824BRevision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II)Published 07/11/2012Region of Action- Korea
4828Revision to SEMI E133-1110, Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide a virtual metrology capabilitySee Line Items Below Region of Action- NA
4828
LI - 1
PCS Event Notification and Data Collection to Provide a Virtual Metrology CapabilityPublished 02/24/2012Region of Action- NA
4829Revision to SEMI E139.3-0310, XML/SOAP Binding for Recipe and Parameter Management. SOAP 1.2 Support for SEMI E139.3See Line Items Below Region of Action- NA
4829
LI - 1
Conversion of E139.3-0310 to SOAP 1.2Published 12/20/2011Region of Action- NA
4830Reapprovals for SEMI E130, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)Published 05/20/2010Region of Action- NA
4831Reapproval for SEMI E54.2, Guide for Writing Sensor/Actuator Network (SAN) Standard BallotsPublished 05/27/2010Region of Action- NA
4851Re-approval of E99.1-1104, Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer Functional StandardPublished 05/27/2010Region of Action- Japan
4852Re-approval of E99-1104E, The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behaivior, and ServicesPublished 05/27/2010Region of Action- Japan
4853Re-approval of E107-1102, Provisional Specification of Electric Failure Link Data Format for Yield Management SystemPublished 05/27/2010Region of Action- Japan
4946Line Item Revisions to SEMI E87-0709, Specification for Carrier Management (CMS)See Line Items Below Region of Action- Korea
4946
LI - 1
Revisions related to Carrier Approaching Ready To Unload EventDrafting 09/10/2012Region of Action- Korea
4946ALine Item Revision to SEMI E87-0709, Specification for Carrier Management (CMS) and E87.1-0707 Provisional Specification for SECS-ⅡProtocol for Carrier Management (CMS)See Line Items Below Region of Action- Korea
4946A
LI - 1
Revisions related to Carrier Approaching Ready To Unload EventDrafting 01/11/2013Region of Action- Korea
4946BLine Item Revision to SEMI E87-0312, Specification for Carrier Management (CMS) and E87.1-0707, Provisional Specification for SECS-II Protocol for Carrier Management (CMS)See Line Items Below Region of Action- Korea
4946B
LI - 1
Adding Carrier Ready to Unload Prediction FeatureFailed Technical Review and Returned to TF 11/08/2013Region of Action- Korea
4947Revision to SEMI E109.1, Provisional Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)Published 10/07/2010Region of Action- NA
4948Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to remove provisional status.See Line Items Below Region of Action- NA
4948
LI - 1
Removal of Provisional StatusPublished 10/07/2010Region of Action- NA
4949Reapproval for SEMI E54.3, Specification for Sensor/Actuator Network Specific Device Model for Mass Flow DevicePublished 09/30/2010Region of Action- NA
4950Withdrawal for SEMI E54.4, Standard for Sensor/Actuator Network Communications for DeviceNetFailed Technical Review and Returned to TF 07/14/2010Region of Action- NA
4951Withdrawal for SEMI E54.13, Specification for Sensor/Actuator Network Communications for Ethernet/IPTMFailed Technical Review and Returned to TF 07/14/2010Region of Action- NA
4998Revision to SEMI E157, Specification for Module Process TrackingSee Line Items Below Region of Action- NA
4998
LI - 1
Data Variable and Status Variable ClarificationPublished 01/27/2011Region of Action- NA
4998
LI - 2
Interaction of Pause with Module Process State ModelPublished 01/27/2011Region of Action- NA
4998
LI - 3
Expansion of State DefinitionsPublished 01/27/2011Region of Action- NA
4998
LI - 4
Change "multi-threaded process module" to "multi-tasking process module"Published 01/27/2011Region of Action- NA
4998
LI - 5
Event Naming CorrectionPublished 01/27/2011Region of Action- NA
4998
LI - 6
Step Count ClarificationFailed Technical Review and Returned to TF 11/10/2010Region of Action- NA
4998ARevision to SEMI E157, Specification for Module Process TrackingSee Line Items Below Region of Action- NA
4998A
LI - 1
Recipe Step ClarificationPublished 06/10/2011Region of Action- NA
5002New Standard: Specification for EDA Common MetadataFailed Technical Review and Returned to TF 07/13/2011Region of Action- NA
5002ANew Standard: Specification for EDA Common MetadataFailed Technical Review and Returned to TF 10/26/2011Region of Action- NA
5002BNew Standard: Specification for EDA Common MetadataPublished as SEMI E164-0712 07/31/2012Region of Action- NA
5004Revision to SEMI E54.4-0704, Standard for Sensor/Actuator Network Communication Specification for DeviceNetPublished 11/18/2011Region of Action- NA
5005Revision to SEMI E54.13-0303, Standard for Sensor/Actuator Network Communication Specification for EtherNet/IPPublished 10/25/2011Region of Action- NA
5101Revisions to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) and SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM). Correcting maximum length of a data item in E5 and E30See Line Items Below Region of Action- NA
5101
LI - 1
Correct Max Item SizePublished 06/10/2011Region of Action- NA
5102New E54.x Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure GaugesFailed Technical Review and Returned to TF 03/30/2011Region of Action- Europe
5102ARevision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges to SEMI E54-0710, Sensor/Actuator Network StandardPublished as SEMI E54.22-0613 06/28/2013Region of Action- Europe
5176Revisions to SEMI E151-0211, Guide for Understanding Data Quality and SEMI E160-0211, Specification for Communication of Data QualitySee Line Items Below Region of Action- NA
5176
LI - 1
Remove the duplicate definition of “full scale” and “reporting rate” from E160 and refine the definition of “full scale” in E151Published 12/09/2011Region of Action- NA
5176
LI - 2
Clarify meaning of User and Supplier in E160Published 12/09/2011Region of Action- NA
5176
LI - 3
Refine the E160 max and min calc/verification cells and indicate how this is providedPublished 12/09/2011Region of Action- NA
5176
LI - 4
Clarify E160 ScopePublished 12/09/2011Region of Action- NA
5176
LI - 5
Update Limitations section of E160Published 12/09/2011Region of Action- NA
5177Revision to SEMI E145-0306, Classification for Measurement Unit Symbols in XMLSee Line Items Below Region of Action- NA
5177
LI - 1
Improve readability of combined unit symbolsFailed Technical Review and Returned to TF 07/13/2011Region of Action- NA
5177
LI - 2
Line Item Revision to E145: Addition of unit symbols commonly used in the semiconductor industryPublished 11/18/2011Region of Action- NA
5177ALine Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols in XMLSee Line Items Below Region of Action- NA
5177A
LI - 1
Improve readability of combined unit symbolsFailed Technical Review and Returned to TF 04/04/2012Region of Action- NA
5177A
LI - 2
Correct definition in document and XML file for bit and byte unitsFailed Technical Review and Returned to TF 04/04/2012Region of Action- NA
5177BLine Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols in XMLSee Line Items Below Region of Action- NA
5177B
LI - 1
Improve readability of combined unit symbolsFailed Technical Review and Returned to TF 07/11/2012Region of Action- NA
5177CLine Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols in XMLSee Line Items Below Region of Action- NA
5177C
LI - 1
Improve readability of combined unit symbolsPublished 03/01/2013Region of Action- NA
5178Reapproval of SEMI E121-0305, Guide for Style & Usage of XML for Semiconductor Manufacturing ApplicationsPublished 11/18/2011Region of Action- NA
5179Revision to SEMI E90.1-0706, Provisional Specification for SECS-II Protocol Substrate TrackingSee Line Items Below Region of Action- NA
5179
LI - 1
Line Item Revision to SEMI E90.1, Removal of Provisional StatusPublished 12/02/2011Region of Action- NA
5179
LI - 2
Addition of Missing Data VariablesFailed Technical Review and Returned to TF 07/13/2011Region of Action- NA
5179
LI - 3
Line Item Revision to SEMI E90.1, Remove E53 ReferencesPublished 12/02/2011Region of Action- NA
5179ARevision to SEMI E90.1-0706, Provisional Specification for SECS-II Protocol Substrate TrackingSee Line Items Below Region of Action- NA
5179A
LI - 1
Addition of Missing Data VariablesPublished 03/22/2012Region of Action- NA
5180Reapproval of SEMI E40.1-1106, SECS-II Support for Processing Management StandardPublished 11/18/2011Region of Action- NA
5181Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network to SEMI E54-0710, Sensor/Actuator Network StandardPublished as SEMI E54.23-0513 05/17/2013Region of Action- NA
5182Reapproval of SEMI E54.10-0600 (Reapproved 1106), Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor DevicePublished 12/02/2011Region of Action- NA
5183Reapproval of SEMI E54.11-1106, Specific Device Model for Endpoint DevicesPublished 12/09/2011Region of Action- NA
5184Reapproval of SEMI E54.12-0701E (Reapproved 1106), Specification for Sensor/Actuator Network Communications for CC-LinkPublished 12/09/2011Region of Action- NA
5185Reapproval of SEMI E54.16-1106, Specification for Sensor/Actuator Network Communications for LONWORKSPublished 12/09/2011Region of Action- NA
5186Reapproval of SEMI E54.18-1106, Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump DevicePublished 12/09/2011Region of Action- NA
5187Reapproval of SEMI E54.17-0706, Specification of Sensor/Actuator Network for A-LINKPublished 12/09/2011Region of Action- NA
5194Line Item Revisions to SEMI E5-0611E, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Correcting some errors.See Line Items Below Region of Action- Japan
5194
LI - 1
Line Item 1: Correct a mismatch about ALCD’s alarm set/clear usage.Published 07/11/2012Region of Action- Japan
5194
LI - 2
Line Item 2: Correct Message Detail of “S3,F21 Port Group Definition”.Published 07/11/2012Region of Action- Japan
5194
LI - 3
Line Item 3: Correct reference error between “Message Detail“ and “Data Item Dictionary”Published 07/11/2012Region of Action- Japan
5194
LI - 4
Line Item 4: Clarify usage of “S2,F37 Enable/Disable Event Report (EDER)”.Published 07/11/2012Region of Action- Japan
5227Reapproval of SEMI E82-1106, Specification for Interbay/Intrabay AMHS SEM (IBSEM)Published 06/18/2012Region of Action- Japan
5228Reapproval of SEMI E88-0307, Specification for AMHS Storage SEM (Stocker SEM)Published 06/18/2012Region of Action- Japan
5273Revisions to: SEMI E40-0709, Standard for Processing Management SEMI E40.1-1106, SECS-II Support for Processing Management Standard SEMI E87-0709, Specification for Carrier Management (CMS) SEMI E90-0707, Specification for Substrate Tracking SEMI E94-0309, Specification for Control Job Management, and SEMI E94.1-1107, Specification for SECS-II Protocol for Control Job Management (CJM) To remove References to Inactive Standards and Defects in the GEM 300 StandardsSee Line Items Below Region of Action- NA
5273
LI - 1
E40 – Remove references to E53Published 03/22/2012Region of Action- NA
5273
LI - 2
E40.1 - Remove references to E53Published 03/22/2012Region of Action- NA
5273
LI - 3
E87 – Remove references to E41 and E53Published 03/22/2012Region of Action- NA
5273
LI - 4
E90 – Remove references to SEMI E53Published 03/22/2012Region of Action- NA
5273
LI - 5
E90- Remove unused service “Change Substrate State”Published 03/22/2012Region of Action- NA
5273
LI - 6
E94 – Remove references to SEMI E53Published 03/22/2012Region of Action- NA
5273
LI - 7
E94.1 – Remove references to SEMI E53Published 03/22/2012Region of Action- NA
5273
LI - 8
E87 – Fix Related Information Table R1-20Published 03/22/2012Region of Action- NA
5274BRevision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network StandardFailed Technical Review and Returned to TF 04/02/2014Region of Action- NA
5274Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0710, Sensor/Actuator Network StandardFailed Technical Review and Returned to TF 07/11/2012Region of Action- NA
5274ARevision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0710, Sensor/Actuator Network StandardFailed Technical Review and Returned to TF 04/03/2013Region of Action- NA
5274CRevision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network StandardDrafting 08/19/2014Region of Action- NA
5274AInfoRevision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network StandardDrafting 06/16/2014Region of Action- NA
5274InfoANew SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model for Generic Equipment add-on Sensor (ADDON)Drafting 10/15/2012Region of Action- NA
5316Reapproval for SEMI E4-0699 (Reapproved 0307), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)Drafting 09/06/2011Region of Action- NA
5316Reapproval for SEMI E4-0699 (Reapproved 0307), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)Published 06/18/2012Region of Action- NA
5317Reapproval for SEMI E95-1101 (Reapproved 0307), Specification for Human Interface for Semiconductor Manufacturing EquipmentFailed Technical Review and Returned to TF 10/26/2011Region of Action- NA
5318Reapprovals for SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)Failed Technical Review and Returned to TF 10/26/2011Region of Action- NA
5320Line Item Revisions to SEMI E116-0707E, Specification for Equipment Performance TrackingSee Line Items Below Region of Action- Korea
5320
LI - 1
Add and revise Attribute name definition, Variable Data Definition and eventsDRAFTING 01/13/2012Region of Action- Korea
5320ALine Item Revision to SEMI E116-0707E, Specification for Equipment Performance TrackingFailed Technical Review and Returned to TF 01/31/2013Region of Action- Korea
5320BLine Item Revision to SEMI E116-0707E, Specification for Equipment Performance TrackingSee Line Items Below Region of Action- Korea
5320B
LI - 1
NoneDRAFTING 04/22/2013Region of Action- Korea
5320CLine Items Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT): Adding new attributes to EPTTracker object and editorial changesSee Line Items Below Region of Action- Korea
5320C
LI - 1
Add new attributes to EPTTracker objectFailed Technical Review and Returned to TF 02/13/2014Region of Action- Korea
5320C
LI - 2
Editorial ChangesFailed Technical Review and Returned to TF 02/13/2014Region of Action- Korea
5368Reapproval of SEMI E118-1104E Specification for Wafer ID Reader Communication Interface — The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E118.1-1104 Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface StandardsDocument Discontinued 04/19/2012Region of Action- Japan
5369Line-Item Revision to SEMI E54.17-0706 (Reapproved 1211): Specification of Sensor/Actuator Network for A-LINKSee Line Items Below Region of Action- Japan
5369
LI - 1
Appending the 9.5 Vacuum Pump (VPD) to 9 Specific Device Model Mappings. Published 08/31/2012Region of Action- Japan
5386Line Item Revision to SEMI E94-0312, Specification for Control Job Management, Enhancement of Material Redirection ModeSee Line Items Below Region of Action- Korea
5386
LI - 1
Enhancement of Material Redirection ModeDrafting 09/10/2012Region of Action- Korea
5386ALine Item Revisions to SEMI E94-0312, Specification for Control Job Management, Enhancement of Material Redirection ModeSee Line Items Below Region of Action- Korea
5386A
LI - 1
Revisions related to the restricted conditions of transitions to “CarrierComplete” stagePublished 07/25/2013Region of Action- Korea
5411New Standard: Specification for Equipment Energy Saving Mode (EESM)Failed Technical Review and Returned to TF 10/31/2012Region of Action- NA
5411ANew Standard: Specification for Equipment Energy Saving Mode Communications (EESM)Failed Technical Review and Returned to TF 04/03/2013Region of Action- NA
5411BNew Standard: Specification for Equipment Energy Saving Mode Communications (EESM)Published as SEMI E167-1213 12/13/2013Region of Action- NA
5422New Standard: Guide for Equipment Information System SecurityFailed Technical Review and Returned to TF 04/10/2013Region of Action- Japan
5422ANew Standard: Guide for Equipment Information System SecurityPublished as SEMI E169-0414 04/25/2014Region of Action- Japan
5423Line-item Revision to SEMI E40.1-0312, SECS-II Support for Processing Management Standard and SEMI E5-0712, SEMI Equipment Communication Standard 2 Message Content (SECS-II); Add mapping to PPID for RecIDSee Line Items Below Region of Action- Japan
5423
LI - 1
Line item #1 – Add mapping to PPID for RecIDDRAFTING 10/15/2012Region of Action- Japan
5423ALine-item Revision to SEMI E40.1-0312, SECS-II Support for Processing Management Standard and SEMI E5-0712, SEMI Equipment Communication Standard 2 Message Content (SECS-II); Add mapping to PPID for RecIDSee Line Items Below Region of Action- Japan
5423A
LI - 1
E40.1 to add PPID to RecID, and E5 to change message format of S16,F3, S16,F11 and S16,F15Published 08/09/2013Region of Action- Japan
5423A
LI - 2
Editorial Change of E5-0712Published 08/09/2013Region of Action- Japan
5452Line Item Revisions to SEMI E134-0710, Specification for Data Collection Management and SEMI E134.1-0710, Specification for SOAP Binding of Data Collection Management (DCM)See Line Items Below Region of Action- NA
5452
LI - 1
Editorial ChangesPublished 03/29/2013Region of Action- NA
5452
LI - 2
Clarify conditionValue for Start Triggers and Stop TriggersFailed Technical Review and Returned to TF 10/31/2012Region of Action- NA
5452
LI - 3
Clarify InvalidExceptionRequest for an isDuplicate special caseFailed Technical Review and Returned to TF 10/31/2012Region of Action- NA
5452ALine Item Revisions to SEMI E134-0710, Specification for Data Collection Management and SEMI E134.1-0710, Specification for SOAP Binding of Data Collection Management (DCM)See Line Items Below Region of Action- NA
5452A
LI - 1
Clarify conditionValue for Start Triggers and Stop TriggersPublished 08/09/2013Region of Action- NA
5452A
LI - 2
Clarify InvalidExceptionRequest for an isDuplicate special casePublished 08/09/2013Region of Action- NA
5453Revision to Add a New Subordinate Standard: Specification for SECS-II Protocol for Equipment Energy Saving Mode to SEMI Draft Document 5411A, New Standard: Specification for Equipment Energy Saving Mode Communications (EESM)Failed Technical Review and Returned to TF 04/03/2012Region of Action- NA
5453ARevision to Add a New Subordinate Standard: Specification for SECS-II Protocol for Equipment Energy Saving Mode Communications to SEMI Draft Document 5411B, New Standard: Specification for Equipment Energy Saving Mode Communications (EESM)Published 12/20/2013Region of Action- NA
5454Line Item Revision to SEMI E30-0611, Specification for Generic Equipment Model (GEM) Standard. Modifications to the definition of AlarmsSee Line Items Below Region of Action- NA
5454
LI - 1
Modifications to the definition of AlarmsFailed Technical Review and Returned to TF 10/31/2012Region of Action- NA
5454ALine Item Revisions to SEMI E30-0611, Generic Equipment Model (GEM) Standard and SEMI E5-0712, SEMI Equipment Communications Standard 2 Message Content (SECS-II)See Line Items Below Region of Action- NA
5454A
LI - 1
Modifications to the Definition of Alarms and Alarm Category DefinitionsFailed Technical Review and Returned to TF 04/03/2013Region of Action- NA
5454BLine Item Revisions to SEMI E30-0611, Specification for Generic Equipment Model (GEM) Standard and SEMI E5-0712, SEMI Equipment Communications Standard 2 Message Content (SECS-II)See Line Items Below Region of Action- NA
5454B
LI - 1
Modifications to the definition of alarms and alarm category definitionsFailed Technical Review and Returned to TF 07/10/2013Region of Action- NA
5454CLine Item Revision to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM) and SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)See Line Items Below Region of Action- NA
5454C
LI - 1
Modifications to the definition of alarms and alarm categoriesFailed Technical Review and Returned to TF 10/30/2013Region of Action- NA
5455Reapproval of SEMI E37.1-0702 (Reapproved 0308), High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)Published 04/19/2013Region of Action- NA
5456Reapproval of SEMI E54.1-0708, Standard for Sensor/Actuator Network Common Device ModelPublished 04/26/2013Region of Action- NA
5457Reapproval of SEMI E126-0708, Specification for Equipment Quality Information Parameters (EQIP)Published 06/12/2013Region of Action- NA
5458Reapproval of SEMI E139.2-1108, SECS-II Protocol for Recipe and Parameter Management (RaP)Published 06/07/2013Region of Action- NA
5480Line Item Revisions to SEMI E164-0712, Specification for EDA Common MetadataSee Line Items Below Region of Action- NA
5480
LI - 1
E164-0712 Conceptual DiagramsPublished 03/29/2013Region of Action- NA
5480
LI - 2
E164-0712 XML File InstructionsPublished 03/29/2013Region of Action- NA
5480
LI - 3
E164-0712 Object AttributesPublished 03/29/2013Region of Action- NA
5480
LI - 4
E164-0712 SimpleEvent NamesPublished 03/29/2013Region of Action- NA
5480
LI - 5
E164-0712 E94 PRJobStatus TypeDefinitionPublished 03/29/2013Region of Action- NA
5480
LI - 6
E164-0712 ErrataPublished 03/29/2013Region of Action- NA
5480
LI - 7
E164-0712 E94 PRJobCtrlSpec OutputRulePublished 03/29/2013Region of Action- NA
5480
LI - 8
E164-0712 MaterialStatus in Both SEMI E90 and SEMI E94Published 03/29/2013Region of Action- NA
5481Line Item Revision to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM). Addition of New MessagesSee Line Items Below Region of Action- NA
5481
LI - 1
Add new namelist request capabilities to section 4.2 Data Collection. Complete Section 7 SECS-II Message Subset. Complete Table 10 Section References for GEM Capabilities. Add these new capabilities to Table 11 GEM Compliance Statement under “ADDITIONAL CAPABILITIES”.Publication Process Started 12/20/2012Region of Action- NA
5486New Standard: Specification for Predictive Carrier LogisticsFailed Technical Review and Returned to TF 09/19/2013Region of Action- Japan
5486ANew Standard: Specification for Predictive Carrier Logistics (PCL)Publication Process Started 08/25/2014Region of Action- Japan
5507Line Item Revisions to: - SEMI E120-0310, Specification for the Common Equipment Model (CEM), - SEMI E120.1-0310, XML Schema for the Common Equipment Model (CEM), - SEMI E125-0710, Specification for Equipment Self Description (EqSD), - SEMI E125.1-0710, Specification for SOAP Binding for Equipment Self Description (EQSD), - SEMI E128-0310, Specification for XML Message Structures, - SEMI E132-0310E2, Specification for Equipment Client Authentication and Authorization - SEMI E132.1-0310, Specification for SOAP Binding for Equipment Client Authentication and Authorization (ECA), - SEMI E134-0813, Specification for Data Collection Management - SEMI E134.1-0813, Specification for SOAP Binding of Data Collection Management (DCM), - SEMI E138-0709, XML Semiconductor Common Components - SEMI E145-0213, Classification for Measurement Unit Symbols in XML - SEMI E164-0313, Specification for EDA Common MetadataSee Line Items Below Region of Action- NA
5507
LI - 1
Complementary Files and Various MaterialsPublished 04/25/2014Region of Action- NA
5507
LI - 2
E132 IssuesFailed Technical Review and Returned to TF 10/30/2013Region of Action- NA
5507
LI - 3
E128 IssuesPublished 04/25/2014Region of Action- NA
5507
LI - 4
E120 IssuesPublished 04/25/2014Region of Action- NA
5507
LI - 5
E125 IssuesPublished 04/25/2014Region of Action- NA
5507
LI - 6
E134 IssuePublished 04/25/2014Region of Action- NA
5507
LI - 7
E132 Client SessionPingPublished 04/25/2014Region of Action- NA
5507
LI - 8
E138 IssuePublication Process Started 12/23/2013Region of Action- NA
5507ALine Item Revisions to SEMI E132-0310E2, Specification for Equipment Client Authentication and AuthorizationSee Line Items Below Region of Action- NA
5507A
LI - 1
E132 Session Termination ErrorsPublication Process Started 08/25/2014Region of Action- NA
5508Line Revisions to SEMI E90-0312, Specification for Substrate Tracking; SEMI E90.1-0312, Specification for SECS-II Protocol Substrate Tracking; and SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Add Batch Object SEMI E90 & E90.1 and a New Material Format in SEMI E5See Line Items Below Region of Action- NA
5508
LI - 1
New Material Format to Allow BatchesDrafting 08/20/2014Region of Action- NA
5508
LI - 2
New Batch Object and Batch State ModelDrafting 08/20/2014Region of Action- NA
5509Line Item Revision to SEMI E94-0312, Specification for Control Job ManagementSee Line Items Below Region of Action- NA
5509
LI - 1
Clarify the entry for OutputRule in Table 2Failed Technical Review and Returned to TF 04/03/2013Region of Action- NA
5509ALine Item Revision to SEMI E94-0312, Specification for Control Job ManagementSee Line Items Below Region of Action- NA
5509A
LI - 1
Clarify the entry for OutputRule in Table 2Failed Technical Review and Returned to TF 07/10/2013Region of Action- NA
5509BLine Item Revision to SEMI E94-0713, Specification for Control Job ManagementSee Line Items Below Region of Action- NA
5509B
LI - 1
Clarify the entry for OutputRule in Table 2Published 03/28/2014Region of Action- NA
5510Line Item Revision to SEMI E157-0611, Specification for Module Process Tracking. Modifications to sections in the standard to clarify its contentSee Line Items Below Region of Action- NA
5510
LI - 1
Pre- and Post-processing RequirementFailed Technical Review and Returned to TF 04/03/2013Region of Action- NA
5511Reapproval of SEMI E54.20, Standard for Sensor/Actuator Network Communications for EtherCATPublished 07/25/2013Region of Action- NA
5512[HOLD OFF] Reapproval of SEMI E87.1, Provisional Specification for SECS-II Protocol for Carrier Management (CMS)Drafting 01/09/2014Region of Action- NA
5538New Standard: Specification for Production Recipe CacheFailed Technical Review and Returned to TF 12/06/2013Region of Action- Japan
5538ANew Standard: Specification for Production Recipe Cache (PRC)Published as SEMI E170-0714 07/31/2014Region of Action- Japan
5589Revisions to: - SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM), - SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM), - SEMI E82, Specification for Interbay/Intrabay AMHS SEM (IBSEM), - SEMI E88, Specification for AMHS Storage SEM (Stocker SEM), - SEMI E91, Specification for Prober Specific Equipment Model (PSEM), - SEMI E122.1, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM), and - SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)See Line Items Below Region of Action- NA
5589
LI - 1
Remove all references to SML and SML Notation from E30Failed Technical Review and Returned to TF 07/10/2013Region of Action- NA
5589
LI - 2
Remove all references to SML and SML Notation from additional standardsFailed Technical Review and Returned to TF 07/10/2013Region of Action- NA
5601New Standard: Specification for Wafer Object Model (WOMS)Failed Technical Review and Returned to TF 09/18/2014Region of Action- Japan
5602Reapproval for SEMI E54.19-0308, Specification for Sensor/Actuator Network for MECHATROLINKPublished 06/27/2014Region of Action- Japan
5603Line-Item Revision to SEMI E54.12-0701E (Reapproved 1211): Specification for Sensor/Actuator Network Communications for CC-LinkSee Line Items Below Region of Action- Japan
5603
LI - 1
Add SDM (specific device model) MappingPublished 06/27/2014Region of Action- Japan
5603
LI - 2
Correct existing obvious errorPublished 06/27/2014Region of Action- Japan
5618New Standard: Specification for Preservation of Recipe Integrity (PRI)Drafting 08/21/2014Region of Action- NA
5619Line Item Revision to Add New GEM Additional Capability: SECS Equipment Data Dictionary (SEDD), and Complementary Files to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM)See Line Items Below Region of Action- NA
5619
LI - 1
SECS Equipment Data DictionaryFailed Technical Review and Returned to TF 04/02/2014Region of Action- NA
5619ANew Standard: Specification for SECS Equipment Data Dictionary (SEDD)Drafting 08/21/2014Region of Action- NA
5620Line Item Revision to Add XML SECS-II Message Notation and a Complementary File to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)See Line Items Below Region of Action- NA
5620
LI - 1
SECS-II Message NotationFailed Technical Review and Returned to TF 07/09/2014Region of Action- NA
5620ANew Standard: Specification for SECS-II Message Notation (SMN)Drafting 08/21/2014Region of Action- NA
5650Line Item Revisions to SEMI E133-0212, Specification for Automated Process Control Systems InterfaceSee Line Items Below Region of Action- NA
5650
LI - 1
Abbreviation correctionPublished 10/17/2014Region of Action- NA
5650
LI - 2
Incorrect table references and placement of tablesPublished 10/17/2014Region of Action- NA
5650
LI - 3
Incorrect figure referencePublished 10/17/2014Region of Action- NA
5678Reapprovals for SEMI E39-0703 (Reapproved 1109), Object Services Standard: Concepts, Behavior, and Services and SEMI E39.1-0703 (Reapproved 1109), SECS-II Protocol for Object Services Standard (OSS)Published 06/27/2014Region of Action- NA
5679Reapproval for SEMI E91-0600 (Reapproved 1109), Specification for Prober Specific Equipment Model (PSEM)Failed Technical Review and Returned to TF 04/02/2014Region of Action- NA
5680Reapproval for SEMI E148-1109, Specification for Time Synchronization and Definition of the TS-Clock ObjectPublished 06/27/2014Region of Action- NA
5730Line Item Revision to SEMI E170-0714, Specification for Production Recipe Cache (PRC)See Line Items Below Region of Action- Japan
5730
LI - 1
Improve ConventionDRAFTING 10/17/2014Region of Action- Japan
5730
LI - 2
Delete section 9 (Section 8 in E170-0714), and add a section for ‘Conceptual Description’DRAFTING 10/17/2014Region of Action- Japan
5730
LI - 3
Add explicit expressions to the protection requirements of ‘Recipe Queue Space’ and ‘Recipe Execution Space’DRAFTING 10/17/2014Region of Action- Japan
5730
LI - 4
Add Cache Management RulesDRAFTING 10/17/2014Region of Action- Japan
5730
LI - 5
Add automatic Clear PRC function by equipment upon host communication establishmentDRAFTING 10/17/2014Region of Action- Japan
5730
LI - 6
Adjust access (R/W) definitions of attributes and variablesDRAFTING 10/17/2014Region of Action- Japan
5730
LI - 7
Improvement of wordings and explanationsDRAFTING 10/17/2014Region of Action- Japan
5731Revision to add a New Subordinate Standard “Specification for SECS-II Protocol for Production Recipe Cache” to SEMI E170-0714 “Specification for Production Recipe Cache (PRC)”Drafting 10/20/2014Region of Action- Japan
5735Line Item Revision to SEMI E171-0914: Specification for Predictive Carrier Logistics (PCL)See Line Items Below Region of Action- Japan
5735
LI - 1
Elimination of PEC while preserving Carrier Flow management capabilityDRAFTING 10/17/2014Region of Action- Japan
5735
LI - 2
Improvement of convention on optional expressions and state report clarificationsDRAFTING 10/17/2014Region of Action- Japan
5735
LI - 3
Add explanations to AppendixDRAFTING 10/17/2014Region of Action- Japan
5735
LI - 4
Rename prediction related mnemonics and add explanations as neededDRAFTING 10/17/2014Region of Action- Japan
5735
LI - 5
Improve / correct wordings and add explanations as neededDRAFTING 10/17/2014Region of Action- Japan
5735
LI - 6
Add internal buffer scenariosDRAFTING 10/17/2014Region of Action- Japan
5778Revision to add a New Subordinate Standard for Specification for SECS-II Protocol for SEMI E171-0914 Specification for Predictive Carrier LogisticsDrafting 10/20/2014Region of Action- Japan
5779Line Item Revision to SEMI E169-0414 Guide for Equipment Information System SecuritySee Line Items Below Region of Action- Japan
5779
LI - 1
Correct expressions in the sections 7.3.5.7.1 and 9.2.4.2.1.DRAFTING 10/17/2014Region of Action- Japan