SEMI Standards Document Status

SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

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4946 LI - 1	Revisions related to Carrier Approaching Ready To Unload Event	Failed Technical Review and Returned to TF 11/08/2012	Region of Action- Korea
4946A LI - 1	Revisions related to Carrier Approaching Ready To Unload Event	Failed Technical Review and Returned to TF 04/19/2013	Region of Action- Korea
4946C	Line Item Revision to SEMI E87-0312, Specification for Carrier Management (CMS) and E87.1-XXXX, Specification for SECS-II Protocol for Carrier Mnagement (CMS), Adding Carrier Ready to Unload Prediction Feature	See Line Items Below	Region of Action- Korea
4946C LI - 1	Adding Carrier Ready to Unload Prediction Feautre	Failed Technical Review and Returned to TF 10/20/2017	Region of Action- Korea
4946D	Line Item Revision to SEMI E87-1017, Specification for Carrier Management (CMS) and E87.1-1017, Specification for SECS-II Protocol for Carrier Mnagement (CMS), Adding Carrier Ready to Unload Prediction Feature	See Line Items Below	Region of Action- Korea
4946D LI - 1	Add Carrier Ready To Unload Prediction Feature	Passed Technical Review - Awaiting Procedural Review 03/02/2018	Region of Action- Korea
4946E	Line Item Revision to SEMI E87-1017, Specification for Carrier Management (CMS) and E87.1-1017, Specification for SECS-II Protocol for Carrier Mnagement (CMS), Adding Carrier Ready to Unload Prediction Feature	See Line Items Below	Region of Action- Korea
4946E LI - 1	Add Carrier Ready to Unload Prediction Feature	Published 06/28/2019	Region of Action- Korea
5274G	New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model for Generic Equipment add-on Sensor (ADDON)	Published as SEMI E54.24-1116 11/25/2016	Region of Action- NA
5386A	Line Item Revisions to SEMI E94-0312, Specification for Control Job Management, Enhancement of Material Redirection Mode	See Line Items Below	Region of Action- Korea
5422A	New Standard: Guide for Equipment Information System Security	Published as SEMI E169-0414 04/25/2014	Region of Action- Japan
5481	Line Item Revision to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM). Addition of New Messages	See Line Items Below	Region of Action- NA
5481 LI - 1	Add new namelist request capabilities to section 4.2 Data Collection. Complete Section 7 SECS-II Message Subset. Complete Table 10 Section References for GEM Capabilities. Add these new capabilities to Table 11 GEM Compliance Statement under “ADDITIONAL CAPABILITIES”.	Published 04/22/2016	Region of Action- NA
5507 LI - 8	E138 Issue	Published 04/25/2014	Region of Action- NA
5549	Revision to SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Failed Technical Review and Returned to TF 07/13/2016	Region of Action- NA
5549A	Revision to SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Published 07/26/2017	Region of Action- NA
5601A	New Standard: Specification for Wafer Job Management	Published as SEMI E174-1116 11/30/2016	Region of Action- Japan
5677	Line Item Revisions to SEMI E164-0414, Specification for EDA Common Metadata	See Line Items Below	Region of Action- NA
5677 LI - 1	E164 Complementary Files & Various Materials Corrections	Published 08/10/2015	Region of Action- NA
5716	Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS)	Published 03/16/2018	Region of Action- NA
5738	Revision to E87.1-0707 Specification for SECS-II Protocol for Carrier Management (CMS)	Published 10/06/2017	Region of Action- NA
5821B	New Standard: Specification for Energy Savings Mode Communication between Semiconductor Equipment and Sub-Systems	Failed Technical Review and Returned to TF 04/06/2016	Region of Action- NA
5821C	New Standard: Specification for Energy Savings Mode Communication between Semiconductor Equipment and Sub-Systems	Published as SEMI E175-1116 11/18/2016	Region of Action- NA
5829	Line Item Revision to SEMI E171-0515 Specification for Predictive Carrier Logistics (PCL) and SEMI E171.1-0515 Specification for SECS-II Protocol for Predictive Carrier Logistics (PCL)	See Line Items Below	Region of Action- Japan
5829 LI - 1	Correct editorial errors in Table 24 ‘CLJ State Transition Table’	Published 12/18/2015	Region of Action- Japan
5829 LI - 2	Correct editorial errors in Table 16 ‘CFJ State Transition Table’	Published 12/18/2015	Region of Action- Japan
5829 LI - 5	Correct Table A2-1 ‘Transitions and States’	Published 12/18/2015	Region of Action- Japan
5829 LI - 6	Align mnemonics used in E171.1 to E171	Published 12/18/2015	Region of Action- Japan
5829 LI - 7	Remove ObjType of CLJ from CFJ Event parameters	Published 12/18/2015	Region of Action- Japan
5829A	Line Item Revision to SEMI E171-0515 “Specification for Predictive Carrier Logistics (PCL)” and SEMI E171.1-0515 “Specification for SECS-II Protocol for Predictive Carrier Logistics”	See Line Items Below	Region of Action- Japan
5829A LI - 1	Improve expression of CFJ Event definition	Published 02/19/2016	Region of Action- Japan
5829A LI - 2	Improve CLJ Event definition	Published 02/19/2016	Region of Action- Japan
5829A LI - 3	Add ‘Object’ to the reference in the section 8.1.1 of E171	Published 02/19/2016	Region of Action- Japan
5829A LI - 4	Correct editorial errors in Table 14 and Table 16 of E171	Published 02/19/2016	Region of Action- Japan
5829A LI - 5	Add CarrierFlowID and CLJLPID to Table 8 CLJ SECS-II Attribute Definitions of E171.1	Published 02/19/2016	Region of Action- Japan
5829A LI - 6	Improve definition of the response to AMHSArrivalInfo service in E171	Published 02/19/2016	Region of Action- Japan
5829B	Line Item Revision to SEMI E171-0515 “Specification for Predictive Carrier Logistics (PCL)”	See Line Items Below	Region of Action- Japan
5829B LI - 1	Rename old mnemonics left nonreplaced in Figure 9, Figure 10, Figure A1-1, Figure A1-4, Figure A1-7, Figure A2-3, and Figure A2-4 to new ones	Published 09/08/2016	Region of Action- Japan
5829B LI - 2	Rename old mnemonics left nonreplaced in Figure A1-3, Figure A1-6, and Figure A1-9 to new ones, and add columns for CLJ attributes ‘URPState’ and/or ‘LSPState’ as needed to make the table more understandable	Published 09/08/2016	Region of Action- Japan
5832	New Standard, Specification for Generic Counter Model (GCM)	Failed Technical Review and Returned to TF 02/09/2017	Region of Action- Korea
5832A	New Standard, Specification for Equipment Generic Counter Model (EGCM)	Failed Technical Review and Returned to TF 02/01/2018	Region of Action- Korea
5832B	New Standard, Specification for Equipment Generic Counter Model (EGCM)	Failed Technical Review and Returned to TF 07/17/2020	Region of Action- Korea
5833	New Standard, Specification for Maintenance Program Model (MPM)	Drafting 01/12/2016	Region of Action- Korea
5844A	Line Item Revision to SEMI E54, Sensor/Actuator Network Standard with title change to: Specification for Sensor/Actuator Network	See Line Items Below	Region of Action- NA
5844A LI - 1	Correct Nonconforming Title of SEMI E54	Published 03/25/2016	Region of Action- NA
5844A LI - 2	Correct Nonconforming Title of SEMI E54.1	Published 03/25/2016	Region of Action- NA
5844A LI - 3	Correct Nonconforming Title of SEMI E54.2	Published 03/25/2016	Region of Action- NA
5844A LI - 4	Correct Nonconforming Title of SEMI E54.4	Published 03/25/2016	Region of Action- NA
5844A LI - 5	Correct Nonconforming Title of SEMI E54.11	Published 03/25/2016	Region of Action- NA
5844A LI - 6	Correct Nonconforming Title of SEMI E54.20	Published 03/25/2016	Region of Action- NA
5872	Line Item Revisions to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)	See Line Items Below	Region of Action- NA
5872 LI - 1	Enhancement to E172	Failed Technical Review and Returned to TF 07/13/2016	Region of Action- NA
5872A	Line Item Revisions to SEMI E172: Specification for SECS Equipment Data Dictionary (SEDD)	See Line Items Below	Region of Action- NA
5872A LI - 1	Enhancement to E172	Drafting 08/25/2016	Region of Action- NA
5872B	Line Item Revision to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)	See Line Items Below	Region of Action- NA
5872B LI - 1	Enhancement to E172	Failed Technical Review and Returned to TF 04/05/2017	Region of Action- NA
5872C	Line Item Revision to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)	See Line Items Below	Region of Action- NA
5872C LI - 1	Enhancement to E172	Published 01/26/2018	Region of Action- NA
5888	Revision to SEMI E170-0815: Specification for Production Recipe Cache (PRC) with title change to Specification for Secured Foundation of Recipe Management System (SFORMS), SEMI E170.1-0815: Specification for SECS-II Protocol for Production Recipe Cache with title change to Specification for SECS-II Protocol for Secured Foundation of Recipe Management System (SFORMS)	Published 04/28/2016	Region of Action- Japan
5912	Line Item Revisions to: - SEMI E142.1 -0211, XML Schema for Substrate Mapping - SEMI E142.2-0211, SECS II Protocol for Substrate Mapping - SEMI E142.3-0211, Web Services for Substrate Mapping To correct nonconforming titles	See Line Items Below	Region of Action- NA
5912 LI - 1	Correct Nonconforming Title of SEMI E142.1-0211	Failed Technical Review and Returned to TF 04/06/2016	Region of Action- NA
5912 LI - 2	Correct Nonconforming Title of SEMI E142.2-0211	Failed Technical Review and Returned to TF 04/06/2016	Region of Action- NA
5912 LI - 3	Correct Nonconforming Title of SEMI E142.3-0211	Failed Technical Review and Returned to TF 04/06/2016	Region of Action- NA
5912A	Line Item Revisions to: - SEMI E142.1 -0211, XML Schema for Substrate Mapping - SEMI E142.2-0211, SECS II Protocol for Substrate Mapping - SEMI E142.3-0211, Web Services for Substrate Mapping To correct nonconforming titles	See Line Items Below	Region of Action- NA
5912A LI - 1	Correct Nonconforming Title of SEMI E142.1-0211	Published 10/28/2016	Region of Action- NA
5912A LI - 2	Correct Nonconforming Title of SEMI E142.2-0211	Published 10/28/2016	Region of Action- NA
5912A LI - 3	Correct Nonconforming Title of SEMI E142.3-0211	Published 10/28/2016	Region of Action- NA
5913	Reapproval for SEMI E157-0611, Specification for Module Process Tracking	Published 06/30/2016	Region of Action- NA
5914	Reapproval for SEMI E54.3-0698 (Reapproved 1110), Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device	Published 06/30/2016	Region of Action- NA
5973	Line Item Revision to SEMI E170-0416: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)	See Line Items Below	Region of Action- Japan
5973 LI - 1	Revise the format of ‘Service Message Description Table’ in SEMI E170-0416.	Published 05/04/2017	Region of Action- Japan
5973 LI - 2	Correct editorial errors in ‘Table 46 Compliance Statement’ in SEMI E170-416.	Published 05/04/0217	Region of Action- Japan
5973 LI - 3	Add a section ‘Required Items for Each Implementation Step’ which provides a checklist of required items for each implementation step in Related Information	Document Discontinued 12/16/2016	Region of Action- Japan
6005	Line Item Revision to SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Drafting 05/16/2016	Region of Action- NA
6005	Line Item Revision to SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM)	See Line Items Below	Region of Action- NA
6005 LI - 1	Enhancement to the SEMI E30 with SMN for documenting messages in an equipment supplier’s GEM documentation	Published 04/06/2018	Region of Action- NA
6020	Line Item Revision to SEMI E30.1-0309: Inspection and Review Specific Equipment Model (ISEM) to correct nonconforming title	See Line Items Below	Region of Action- NA
6020 LI - 1	Correct nonconforming title	Published 02/10/2017	Region of Action- NA
6021	Line Item Revision to SEMI E123-0703 (Reapproved 1109) - Standard for Handler Equipment Specific Equipment Model (HSEM) to correct nonconforming title	See Line Items Below	Region of Action- NA
6021 LI - 1	Correct nonconforming title	Published 02/10/2017	Region of Action- NA
6022	Line Item Revision to SEMI E138-0709 - XML Semiconductor Common Components to correct nonconforming title	See Line Items Below	Region of Action- NA
6022 LI - 1	Correct nonconforming title	Published 02/10/2017	Region of Action- NA
6023	Line Item Revision to SEMI E122-0703 (Reapproved 1109) - Standard for Tester Equipment Specific Equipment Model (TSEM) to correct nonconforming title	See Line Items Below	Region of Action- NA
6023 LI - 1	Correct nonconforming title	Published 02/10/2017	Region of Action- NA
6024	Reapproval of SEMI E30.5-0302 (Reapproved 0308) - Specification for Metrology Specific Equipment Model (MSEM)	Published 02/24/2017	Region of Action- NA
6025	Reapproval of SEMI E142-0211 - Specification for Substrate Mapping	Published 10/28/2016	Region of Action- NA
6026	Reapproval of SEMI E109-1110 - Specification for Reticle and Pod Management (RPMS)	Failed Technical Review and Returned to TF 11/09/2016	Region of Action- NA
6026A	Line Item Revision to SEMI E109-1110, Specification for Reticle and Pod Management (RPMS)	See Line Items Below	Region of Action- NA
6026A LI - 1	To correct invalid references in the current published version of the standard and make revision to various sections.	Published 10/06/2017	Region of Action- NA
6033	Line item revision to “SEMI E99-1104E (Reapproved 0710) The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services” and “SEMI E99.1-1104 (Reapproved 0710) Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer Functional Standard”	See Line Items Below	Region of Action- Japan
6033 LI - 1	To correct nonconforming titles of both SEMI E99 and SEMI E99.1	Published 03/17/2017	Region of Action- Japan
6033 LI - 2	To correct small technical errors	Published 03/17/2017	Region of Action- Japan
6034	Reapproval of SEMI E54.21-1110 Specification for Sensor Actuator Network for Motionnet Communication	Published 05/19/2017	Region of Action- Japan
6036	Reapproval of SEMI E153-0310: Specification for AMHS SEM (AMHS SEM)	Published 05/19/2017	Region of Action- Japan
6038	Reapproval of SEMI E160-1211, Specification for Communication of Data Quality	Published 03/31/2017	Region of Action- NA
6064	Reapproval for SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications	Failed Technical Review and Returned to TF 11/09/2016	Region of Action- NA
6064A	Line Item Revision to SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications	See Line Items Below	Region of Action- NA
6064A LI - 1	According to SEMI Regulations, a guide cannot have requirements. This ballot is to correct the usage of terms “shall” and “must” to a statement appropriate for a Guide and also to update any invalid references within the document.	Published 10/06/2017	Region of Action- NA
6065	Reapproval for SEMI E151-1211, Guide for Understanding Data Quality	Published 05/26/2017	Region of Action- NA
6066	Reapproval for SEMI E130, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)	Failed Technical Review and Returned to TF 11/09/2016	Region of Action- NA
6066A	Line Item Revision to SEMI E130, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)	See Line Items Below	Region of Action- NA
6066A LI - 1	Remove from SEMI E130 the reference to the “Data Types” section in Standard E30 as this section no longer exists.	Published 10/27/2017	Region of Action- NA
6066A LI - 2	SEMI E130.1 Specification is balloted for reapproval with no changes.	Failed Procedural Review 02/15/2017	Region of Action- NA
6066B	Reapproval for SEMI E130.1, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)	Failed Technical Review and Returned to TF 07/12/2017	Region of Action- NA
6067	Reapproval for SEMI E54.10-0600 (Reapproved 1111) Specification for Sensor/Actuator Network Specific Device Model for an in Situ Particle Monitor Device	Failed Technical Review and Returned to TF 11/09/2016	Region of Action- NA
6067A	Reapproval for SEMI E54.10-0600 (Reapproved 1111) Specification for Sensor/Actuator Network Specific Device Model for an in Situ Particle Monitor Device	Published 10/27/2017	Region of Action- NA
6068	Reapprovals for SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)	Failed Technical Review and Returned to TF 11/09/2016	Region of Action- NA
6068A	Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)	See Line Items Below	Region of Action- NA
6068A LI - 1	Remove the text “an Appendix of” related to E30 because this section does not exist in the current version and is expected to be renamed “Related Information” in a future version; and remove the “Provisional” name from the SEMI 101 reference.	Published 10/27/2017	Region of Action- NA
6068A LI - 2	Reapprove SEMI E116.1 as published.	Failed Procedural Review 02/15/2017	Region of Action- NA
6068B	Reapproval of SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)	Failed Technical Review and Returned to TF 07/12/2017	Region of Action- NA
6089	Line Item Revision to “SEMI E170-0416: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)”, "SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM” and "SEMI E5-0813: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)” with title change	See Line Items Below	Region of Action- Japan
6089 LI - 1	Revise the Message Mapping in SEMI E170.1 with some Parameter Changes in SEMI E170, and Add SECS message definitions in SEMI E5.	Published 12/29/2017	Region of Action- Japan
6089 LI - 2	Change nonconforming title of SEMI E5	Published 12/29/2017	Region of Action- Japan
6090	Line Item Revision to SEMI E91-0600 (Reapproved 1109), SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL (PSEM)	See Line Items Below	Region of Action- Japan
6090 LI - 1	Reflect related SEMI E30 revisions	Published 12/29/2017	Region of Action- Japan
6090 LI - 2	Delete “provisional” related expressions	Published 12/29/2017	Region of Action- Japan
6090 LI - 3	Correct some technical errors and reference error	Published 12/29/2017	Region of Action- Japan
6091	Line Item Revision to SEMI E174-1116: SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)	See Line Items Below	Region of Action- Japan
6091 LI - 1	Replace old mnemonic “WFJOBJReport” with new mnemonic “WJReport”.	Published 08/09/2017	Region of Action- Japan
6091 LI - 10	Improve expressions and explanations.	Published 08/09/2017	Region of Action- Japan
6091 LI - 2	Align terminologies and wordings with SEMI E133	Published 08/09/2017	Region of Action- Japan
6091 LI - 3	Improve Abbreviations and Acronyms.	Published 08/09/2017	Region of Action- Japan
6091 LI - 4	Improve SEMI Standards references.	Published 08/09/2017	Region of Action- Japan
6091 LI - 5	Move figure to appropriate section and add explanations on WJ and WFJ.	Published 08/09/2017	Region of Action- Japan
6091 LI - 6	Move figures to appropriate sections and improve explanations of PJG and EXG.	Published 08/09/2017	Region of Action- Japan
6091 LI - 7	Make WJFlow optional and improve explanations	Published 08/09/2017	Region of Action- Japan
6091 LI - 8	Add explanations to figures in Potential Use Cases	Published 08/09/2017	Region of Action- Japan
6091 LI - 9	Add Response Information to WFJEvent and WJReport services.	Published 08/09/2017	Region of Action- Japan
6114	Line Item Revision to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6114 LI - 1	Add new data items to the Data Item Dictionary and a new Stream with Functions (SECS-II messages) to improve the transfer of recipes (and other items) larger than 16.7 MB	Failed Technical Review and Returned to TF 07/12/2017	Region of Action- NA
6114A	Line Item Revision to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6114A LI - 1	Add new data items to the Data Item Dictionary and a new Stream with Functions (SECS-II messages) to improve the transfer of recipes (and other items)	Failed Technical Review and Returned to TF 04/11/2018	Region of Action- NA
6114B	Line Item Revision to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6114B LI - 1	E5 - Add new data items to the Data Item Dictionary and a new Stream with Functions (SECS-II messages) to improve the transfer of recipes (and other items).	Failed Technical Review and Returned to TF 07/11/2018	Region of Action- NA
6114C	Line Item Revision to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6114C LI - 1	SEMI E5: Add new data items to the Data Item Dictionary and a new Stream with Functions (SECS-II messages) to improve the transfer of recipes (and other items).	Published 02/28/2019	Region of Action- NA
6116	Reapproval for SEMI E54.17-0812: Specification of Sensor/Actuator Network for A-LINK	Failed Technical Review and Returned to TF 04/05/2017	Region of Action- NA
6135	To add R1-8 to Related Information 1 INCREMENTAL IMPLEMENTATION STEPS of SEMI E170: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS).	Published 05/04/2017	Region of Action- Japan
6183	Reapproval of SEMI E82-1106 (Reapproved 0612), Specification for Interbay/Intrabay AMHS SEM (IBSEM)	Published 03/23/2018	Region of Action- NA
6185	Line-item Revision to SEMI E4-0699 (Reapproved 0612), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) to correct nonconforming title to: Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)	See Line Items Below	Region of Action- NA
6185 LI - 1	Correct SEMI E4 nonconforming title per SEMI Standards Procedure Manual from "SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)" to "Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)"	Failed Technical Review and Returned to TF 07/12/2017	Region of Action- NA
6185A	Line-item Revision to SEMI E4-0699 (Reapproved 0612), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) to correct nonconforming title to: Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)	See Line Items Below	Region of Action- NA
6185A LI - 1	Correct SEMI E4 nonconforming title per SEMI Standards Procedure Manual, from "SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)" to "Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)"	Published 04/13/2018	Region of Action- NA
6187	Reapproval of SEMI E88-0307 (Reapproved 0612), Specification for AMHS Storage SEM (Stocker SEM)	Published 03/23/2018	Region of Action- NA
6202	Revision to: ‘SEMI E174-0817 SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)’	Published 06/29/2018	Region of Action- Japan
6236	Line-item Revision to SEMI E172-0118E, Specification for SECS Equipment Data Dictionary (SEDD)	See Line Items Below	Region of Action- NA
6236 LI - 1	SEMI E172 - Correct editorial mistakes found in the E172 complementary file	Published 03/27/2020	Region of Action- NA
6237	Reapproval of SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)	Published 05/17/2018	Region of Action- NA
6238	Reapproval of SEMI E126-0708 (Reapproved 0613), Specification for Equipment Quality Information Parameters (EQIP)	Published 05/25/2018	Region of Action- NA
6239	Reapproval of SEMI E130.1, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)	Published 06/21/2018	Region of Action- NA
6240	Reapproval of SEMI E54.23-0513, Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network	Failed Technical Review and Returned to TF 11/08/2017	Region of Action- NA
6287	Line Item Revision to: ‘SEMI E87-0312: SPECIFICATION FOR CARRIER MANAGEMENT (CMS)	See Line Items Below	Region of Action- Japan
6287 LI - 1	Add reference/introduction/explanation statements of SEMI E171 Predictive Carrier Logistics (PCL)	Failed Technical Review and Returned to TF 12/15/2017	Region of Action- Japan
6287 LI - 2	Add RELATED INFORMATION about SEMI E171 Predictive Carrier Logistics (PCL)	Published 07/27/2018	Region of Action- Japan
6300	New Standard: Guide for EDA Freeze Version	Failed Technical Review and Returned to TF 04/26/2018	Region of Action- Japan
6300A	New Standard: Guide for EDA Freeze Version	Drafting 07/30/2018	Region of Action- Japan
6300B	New Standard: Guide for EDA Freeze Version	Failed Technical Review and Returned to TF 04/17/2019	Region of Action- Japan
6300C	New Standard: Guide for EDA Freeze Version	Published as SEMI E178-0120 01/10/2020	Region of Action- Japan
6301	Line Item Revision to E142-0211(Reapproved 1016) Specification for Substrate Mapping: Adding packaging raw materials traceability method	See Line Items Below	Region of Action- Korea
6301 LI - 1	Adding packaging raw materials traceability method	Drafting 11/01/2017	Region of Action- Korea
6301A	Line Item Revision to E142-0211(Reapproved 1016) Specification for Substrate Mapping: Adding packaging raw materials traceability method	See Line Items Below	Region of Action- Korea
6301A LI - 1	Adding Packaging Raw Materials Traceability Method	Drafting 06/18/2018	Region of Action- Korea
6319	LINE ITEM REVISION TO: ‘SEMI E87-1017: SPECIFICATION FOR CARRIER MANAGEMENT (CMS)	See Line Items Below	Region of Action- Japan
6319 LI - 1	Add ‘SEMI E171 Specification for Predictive Carrier Logistics (PCL)’ to the ‘Related Documents’ section.	Published 08/31/2018	Region of Action- Japan
6330	LINE ITEM REVISIONS TO E54.17-0812 SPECIFICATION OF SENSOR ACTUATOR NETWORK FOR A-LINK	See Line Items Below	Region of Action- Japan
6330 LI - 1	Adding reference and mapping about E54.22 ‘Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauge’ to proper sections of E54.17	Published 10/05/2018	Region of Action- Japan
6330 LI - 2	Adding reference and mapping about E54.24 ‘Specification for Sensor/Actuator Network Specific Device Model of Generic Equipment Network Sensor’ to proper sections of E54.17	Published 10/05/2018	Region of Action- Japan
6331	LINE ITEM REVISIONS TO E54.19-0308 (Reapproved 0614) SPECIFICATION OF SENSOR/ACTUATOR NETWORK FOR MECHATROLINK	See Line Items Below	Region of Action- Japan
6331 LI - 1	Adding reference and mapping about E54.22 ‘Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauge’ to proper sections of E54.19	Published 10/26/2018	Region of Action- Japan
6331 LI - 2	Adding reference and mapping about E54.24 ‘Specification for Sensor/Actuator Network Specific Device Model of Generic Equipment Network Sensor’ to proper sections of E54.19	Published 10/26/2018	Region of Action- Japan
6333	Line-item Revision to SEMI E54.23, Specification for Sensor/Actuator Network communications for CC-Link IE Field Network	See Line Items Below	Region of Action- NA
6333 LI - 1	E54.23 - Minor editorial corrections: Address confusion regarding triggered data production in Table 8, Note 1.	Failed Procedural Review 05/17/2018	Region of Action- NA
6333 LI - 2	E54.23 - To specify mappings for alignment with SEMI E54.22-0914	Failed Procedural Review 05/17/2018	Region of Action- NA
6333 LI - 3	E54.23 - To specify mappings for alignment with SEMI E54.24-1116	Failed Procedural Review 05/17/2018	Region of Action- NA
6333A	Line-item Revision to SEMI E54.23-0513: Specification for Sensor/Actuator Network communications for CC-Link IE Field Network	See Line Items Below	Region of Action- NA
6333A LI - 1	E54.23 - Minor editorial corrections.	Published 07/19/2019	Region of Action- NA
6333A LI - 2	E54.23 - Specify mappings for alignment with SEMI E54.22-0914	Published 07/19/2019	Region of Action- NA
6333A LI - 3	E54.23 - Specify mappings for alignment with SEMI E54.24-1116	Published 07/19/2019	Region of Action- NA
6335	Line-Item Revision to SEMI E134: Specification for Data Collection Management	See Line Items Below	Region of Action- NA
6335 LI - 1	E134 - Change the name and unit of the DCP attribute ‘intervalInMinutes’	Published 03/29/2019	Region of Action- NA
6335 LI - 2	E134 - Add a new client interface to query the currently set alarms	Failed Technical Review and Returned to TF 07/11/2018	Region of Action- NA
6335 LI - 3	E134 - Add DCP activation and deactivation notification to consumer interface	Failed Technical Review and Returned to TF 07/11/2018	Region of Action- NA
6335A	Line-Item Revision to SEMI E134-0414: Specification for Data Collection Management	See Line Items Below	Region of Action- NA
6335A LI - 1	SEMI E134: Add a new client interface to query the currently set alarms	Published 03/29/2019	Region of Action- NA
6335A LI - 2	SEMI E134: Add DCP activation to consumer interface and change deactivation notification sending	Published 03/29/2019	Region of Action- NA
6336	Line-Item Revision to SEMI E138: Specification for XML Semiconductor Common Components	See Line Items Below	Region of Action- NA
6336 LI - 1	Modify TypeDefinition Variables	Published 03/15/2019	Region of Action- NA
6336 LI - 2	Add Units to a Structure Field	Failed Technical Review and Returned to TF 04/11/2018	Region of Action- NA
6336A	Line-Item Revision to SEMI E138: Specification for XML Semiconductor Common Components	See Line Items Below	Region of Action- NA
6336A LI - 1	E138 - Add Units to a Structure Field	Failed Technical Review and Returned to TF 07/11/0218	Region of Action- NA
6336B	Line-Item Revision to SEMI E138-0516: Specification for XML Semiconductor Common Components	See Line Items Below	Region of Action- NA
6336B LI - 1	SEMI E138: Add Units to a Structure Field	Published 03/15/2019	Region of Action- NA
6337	Line Item Revision to SEMI E132: Specification for Client Authentication And Authorization	See Line Items Below	Region of Action- NA
6337 LI - 1	SessionPing Clarification	Failed Technical Review and Returned to TF 04/11/2018	Region of Action- NA
6337 LI - 2	New Operation ChangeClientEndPoint	Published 04/29/2019	Region of Action- NA
6337 LI - 3	Remove Operation EnhancedEstablishSession	Published 04/29/2019	Region of Action- NA
6337A	Line Item Revision to SEMI E132: Specification for Equipment Client Authentication And Authorization	See Line Items Below	Region of Action- NA
6337A LI - 1	E132 - SessionPing Clarification	Failed Technical Review and Returned to TF 07/11/2018	Region of Action- NA
6337B	Line Item Revision to SEMI E132-1015, Specification for Equipment Client Authentication And Authorization	See Line Items Below	Region of Action- NA
6337B LI - 1	SEMI E132: SessionPing Clarification	Published 04/29/2019	Region of Action- NA
6344	New Standard – Specification for Protocol Buffer Semiconductor Common Components	Drafting 09/04/2019	Region of Action- NA
6344	New Standard: Specification for Protocol Buffers Common Components	Failed Technical Review and Returned to TF 07/10/2019	Region of Action- NA
6344A	New Standard: Specification for Protocol Buffers Common Components	Published as SEMI E179-0320 03/27/2020	Region of Action- NA
6345	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Self Description (EqSD) to SEMI E125-0414, Specification for Equipment Self Description (EqSD)	Failed Technical Review and Returned to TF 12/08/2021	Region of Action- NA
6345A	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Self Description (EqSD) to SEMI E125-0414, Specification for Equipment Self Description (EqSD)	Published as SEMI E125.2-1022 10/21/2022	Region of Action- NA
6346	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization	Drafting 02/13/2019	Region of Action- NA
6346	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-0419, Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 07/10/2019	Region of Action- NA
6346A	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization	Drafting 08/30/2019	Region of Action- NA
6346B	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6346C	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 07/31/2020	Region of Action- NA
6346D	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 11/27/2020	Region of Action- NA
6346E	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF	Region of Action- NA
6346F	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization	Published as SEMI E132.2-0422 04/29/2022	Region of Action- NA
6347	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414, Specification for Data Collection Management	Drafting 02/13/2019	Region of Action- NA
6347A	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414, Specification for Data Collection Management	Drafting 06/21/2019	Region of Action- NA
6347	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414, Specification for Data Collection Management	Failed Technical Review and Returned to TF	Region of Action- NA
6347A	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data Collection Management to SEMI E134-0414, Specification for Data Collection Management	Published as SEMI E134.2-1022 10/28/2022	Region of Action- NA
6348	Revision to SEMI E30-0418: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Failed Technical Review and Returned to TF 07/11/2018	Region of Action- NA
6348A	Revision to SEMI E30-0418: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Failed Technical Review and Returned to TF 04/03/2019	Region of Action- NA
6348B	Revision to E30-0418: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Published 05/08/2020	Region of Action- NA
6349	Revision to E37.1, High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS OR HSMS-SSS)	Failed Technical Review and Returned to TF 04/11/2018	Region of Action- NA
6349A	Revision to E37.1: High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS OR HSMS-SSS)	Failed Technical Review and Returned to TF 07/11/2018	Region of Action- NA
6349B	Revision of E37.1-0702: High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS OR HSMS-SSS) with title change to: Specification for High-Speed SECS Message Service Single Selected-Session Mode (HSMS-SS)	Failed Technical Review and Returned to TF 11/07/2018	Region of Action- NA
6349C	Revision to E37.1-0702 (Reapproved 0413) High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS OR HSMS-SSS), with title change to: Specification for High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)	Published 08/16/2019	Region of Action- NA
6350	Revision to E37, High-Speed SECS Message Services (HSMS) Generic Services, with title change to, Specification for High-Speed SECS Message Services (HSMS) Generic Services	Published 10/31/2018	Region of Action- NA
6374	Line Item Revisions to SEMI E54.21-1110 (Reapproved 0517) Specification For Sensor Actuator Network For Motionnet� Communication	See Line Items Below	Region of Action- Japan
6374 LI - 1	Adding reference and mapping about E54.22 ‘Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauge’ to proper sections of E54.21	Published 10/25/2019	Region of Action- Japan
6374 LI - 2	Adding reference and mapping about E54.24 ‘Specification for Sensor/Actuator Network Specific Device Model of Generic Equipment Network Sensor’ to proper sections of E54.21	Published 10/25/2019	Region of Action- Japan
6375	Revision to: ‘SEMI E170-1217: Specification for Secured Foundation of Recipe Management System (SFORMS)’, and ‘SEMI E170.1-1217: Specification for SECS-II Protocol for Secured Foundation of Recipe Management System’	Published 04/19/2019	Region of Action- Japan
6376	Line Item Revisions to SEMI E54.12-0614, Specification For Sensor/Actuator Network Communications For CC-Link	See Line Items Below	Region of Action- Japan
6376 LI - 1	Adding reference and mapping about E54.22 ‘Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauge’ to proper sections of E54.12	Published 10/25/2019	Region of Action- Japan
6376 LI - 2	Adding reference and mapping about E54.24 ‘Specification for Sensor/Actuator Network Specific Device Model of Generic Equipment Network Sensor’ to proper sections of E54.12	Published 10/25/2019	Region of Action- Japan
6377	Line Item revision to SEMI E5-1217: Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- Japan
6377 LI - 1	Make the following revisions to SECS message definitions in SEMI E5 to be compatible with the changes being done parallelly by #R6375 and former #6375 Major Revision to SEMI E170-1217 and E170.1-1217.	Failed Technical Review and Returned to TF 12/14/2018	Region of Action- Japan
6377 LI - 2	Revise the SECS message defined in SEMI E5 to be compatible with the changes that will be done to #R6375, currently in ballot process, and former #6375 Major Revision to SEMI E170-1217 and E170.1-1217.	Failed Technical Review and Returned to TF 12/14/2018	Region of Action- Japan
6377A	Line Item revision to SEMI E5-1217: Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- Japan
6377A LI - 1	Make the following revisions to SECS message definitions in SEMI E5 to be compatible with the changes being done parallelly by #R6375 and former #6375 Major Revision to SEMI E170-1217 and E170.1-1217.	Failed Technical Review and Returned to TF 04/17/2019	Region of Action- Japan
6377B	Line Item revision to SEMI E5-0219: Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- Japan
6377B LI - 1	SEMI E5 - Make the following revisions to SECS message definitions in SEMI E5 to be compatible with SEMI E170-0419 and E170.1-0419.	Published 02/14/2020	Region of Action- Japan
6378	Line Item Revision to SEMI E133-0318, Specification for Automated Process Control Systems Interface.	See Line Items Below	Region of Action- NA
6378 LI - 1	Update the schema examples in Related Information section R1-4 and delete text stating that items in italics are planned for in a future release of the document.	Published 12/21/2018	Region of Action- NA
6379	Line Item Revision to SEMI E39-0703 (REAPPROVED 0614), Object Services Standard: Concepts, Behavior, and Services to correct nonconforming title to: Specification for Object Services: Concepts, Behavior, and Services.	See Line Items Below	Region of Action- NA
6379 LI - 1	Correct SEMI E39 nonconforming title per SEMI Standards Procedure Manual, from " Object Services Standard: Concepts, Behavior, and Services" to "Specification for Object Services: Concepts, Behavior, and Services”	Published 12/21/2018	Region of Action- NA
6380	Line Item Revision to SEMI E39.1-0703 (Reapproved 0614), SECS-II Protocol for Object Services Standard (OSS) to correct nonconforming title to: Specification for SECS-II Protocol for Object Services (OSS)	See Line Items Below	Region of Action- NA
6380 LI - 1	Correct SEMI E39.1 nonconforming title per SEMI Standards Procedure Manual, from "SECS-II Protocol for Object Services Standard (OSS)”, to "Specification for SECS-II Protocol for Object Services (OSS)”	Published 12/24/2018	Region of Action- NA
6381	Line Item Revision to SEMI E40-0813, Standard for Processing Management to correct nonconforming title	See Line Items Below	Region of Action- NA
6381 LI - 1	Correct SEMI E40 nonconforming title per SEMI Standards Procedure Manual, from "Standard for Processing Management”, to "Specification for Processing Management”	Published 12/14/2018	Region of Action- NA
6382	Line Item Revision to SEMI E40.1-0813, SECS-II Support For Processing Management Standard to correct nonconforming title	See Line Items Below	Region of Action- NA
6382 LI - 1	Correct SEMI E40.1 nonconforming title per SEMI Standards Procedure Manual, from " SECS-II Support for Processing Management Standard”, to "Specification for SECS-II Protocol for Processing Management”	Published 12/14/2018	Region of Action- NA
6386	Reapproval of SEMI E90-0312, Specification For Substrate Tracking	Published 12/14/2018	Region of Action- NA
6434	Reapproval of SEMI E120-0414, Specification for the Common Equipment Model (CEM)	Published 05/30/2019	Region of Action- NA
6435	Reapproval of SEMI E128-0414, Specification for XML Message Structures	Published 05/30/2019	Region of Action- NA
6436	Reapproval of SEMI E145-0414, Classification for Measurement Unit Symbols in XML	Published 05/31/2019	Region of Action- NA
6470	Line Item Revision to SEMI E5-0219, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6470 LI - 1	SEMI E5 - Multi-Block Inquire Clarification	Published 02/14/2020	Region of Action- NA
6475	Reapproval to SEMI E94-0314, Specification for Control Job Management	Published 08/23/2019	Region of Action- NA
6476	Reapproval to SEMI E94.1-0312, Specification for SECS-II Protocol for Control Job Management (CJM)	Published 08/23/2019	Region of Action- NA
6481	Line Item Revision to SEMI E174-0618: Specification for Wafer Job Management (WJM)	See Line Items Below	Region of Action- Japan
6481 LI - 1	Eliminate PEMFlag in response to the deletion of PEMFlag from E170 SFORMS	Failed Technical Review and Returned to TF 04/17/2019	Region of Action- Japan
6481 LI - 2	Replace Figure 1 Wafer Job (WJ) and Wafer Job Management Job (WJMJ) for better understanding	Published 08/30/2019	Region of Action- Japan
6481A	Line Item Revision to SEMI E174-0618:Specification for Wafer Job Management (WJM)	See Line Items Below	Region of Action- Japan
6481A LI - 1	Eliminate PEMFlag in response to the deletion of PEMFlag from E170 SFORMS	Published 08/30/2019	Region of Action- Japan
6484	Line Item Revision to SEMI E170.1-0419: Specification for SECS-II Protocol for Secured Foundation Of Recipe Management System	See Line Items Below	Region of Action- Japan
6484 LI - 1	Revision to SEMI E170.1 - Fix a duplicated SECS-II Data Item and a missing PRC Operation Service Message.	Published 05/15/2020	Region of Action- Japan
6506	New Standard: Specification for Cybersecurity of Fab Equipment	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- Taiwan
6506A	New Standard: Specification for Cybersecurity of Fab Equipment	Failed Technical Review and Returned to TF 10/16/2020	Region of Action- Taiwan
6506B	New Standard: Specification for Cybersecurity of Fab Equipment	Failed Technical Review and Returned to TF 04/16/2021	Region of Action- Taiwan
6506C	New Standard: Specification for Cybersecurity of Fab Equipment	Published as SEMI E187-0122 01/13/2022	Region of Action- Taiwan
6527	Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)	Drafting 08/30/2019	Region of Action- NA
6527A	Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6527B	Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)	Failed Technical Review and Returned to TF 07/31/2020	Region of Action- NA
6527C	Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)	Failed Technical Review and Returned to TF 11/27/2020	Region of Action- NA
6532	Reapproval of SEMI E148-1109 (Reapproved 0614), Specification for Time Synchronization and Definition of the TS-Clock Object	Failed Technical Review and Returned to TF 07/10/2019	Region of Action- NA
6548	Line Item Revision to SEMI E170-0419: Specification for Secured Foundation Of Recipe Management System (SFORMS)	See Line Items Below	Region of Action- Japan
6548 LI - 1	Revision to SEMI E170 - Add the description of the way to get recipe body which includes ProcessLink	Published 05/15/2020	Region of Action- Japan
6548 LI - 2	Put Application Note which includes sequence diagram and transition of IDs instead of Figure 9.	Failed Technical Review and Returned to TF 09/26/2019	Region of Action- Japan
6548A	Line Item Revision to SEMI E170-0419: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)	See Line Items Below	Region of Action- Japan
6548A LI - 2	Revision to SEMI E170 - Put Application Note which includes sequence diagram and transition of IDs instead of Figure 9.	Published 05/15/2020	Region of Action- Japan
6549	Line Item Revision to SEMI E170-0419: Specification for Secured Foundation Of Recipe Management System (SFORMS) and SEMI E170.1-0419: Specification for SECS-II Protocol for Secured Foundation Of Recipe Management System	See Line Items Below	Region of Action- Japan
6549 LI - 1	Revision to SEMI E170/SEMI E170.1 - Expand and/or add return values to services and events in order to report the type of error, and add new transactions which get the result of recipe validation and are independent from PJ.	Published 05/15/2020	Region of Action- Japan
6552	Line Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6552 LI - 1	SEMI E5 - Query Interface Setup	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6552 LI - 2	SEMI E5 - Logical Naming Conventions	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6552 LI - 3	SEMI E5 - S7F17/F18 Clarification	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6552A	Line Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6552A LI - 1	Query Interface Setup	Published 08/27/2021	Region of Action- NA
6552A LI - 2	Logical Naming Conventions	Failed Technical Review and Returned to TF 07/31/2020	Region of Action- NA
6552A LI - 3	S7F17/F18 Clarification	Published 08/27/2021	Region of Action- NA
6552B	Line Item Revision to SEMI E5-0219: Specification For SEMI Equipment Communications Standard 2 Message Content (SECS-II)	See Line Items Below	Region of Action- NA
6552B LI - 1	Logical Naming Conventions	Published 08/27/2021	Region of Action- NA
6553	Revision to SEMI E134-0319 Specification for Data Collection Management	Failed Technical Review and Returned to TF 11/06/2019	Region of Action- NA
6553A	Revision to SEMI E134-0319 Specification for Data Collection Management	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6553B	Revision to SEMI E134-0319 Specification for Data Collection Management	Failed Technical Review and Returned to TF 07/31/2020	Region of Action- NA
6553C	Revision to SEMI E134-0319 Specification for Data Collection Management	Failed Technical Review and Returned to TF	Region of Action- NA
6562	Line-item Revision to SEMI E54.23: Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network	See Line Items Below	Region of Action- NA
6562 LI - 1	SEMI E54.23 - Delete "Field Network" from end of title and correct the trademark marking	Published 05/08/2020	Region of Action- NA
6562 LI - 2	SEMI E54.23 - Change referenced protocol standard to include both "Field Network" and "TSN" variants of CC-Link IE.	Published 05/08/2020	Region of Action- NA
6562 LI - 3	SEMI E54.23 - Add time synchronization services.	Published 05/08/2020	Region of Action- NA
6563	Reapproval for SEMI E54.18-0914: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device	Published 04/24/2020	Region of Action- NA
6564	Reapproval for SEMI E54.22-0914: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Preassure Gauges	Published 04/24/2020	Region of Action- NA
6566A	New Standard: Specification for Malware Free Equipment Integration	Informational Ballot Issued On	Region of Action- NA
6566	New Standard: Specification for Malware Free Equipment Integration	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6566A	New Standard: Specification for Malware Free Equipment Integration	Failed Technical Review and Returned to TF	Region of Action- NA
6566B	New Standard: Specification for Malware Free Equipment Integration	Failed Technical Review and Returned to TF 07/22/2021	Region of Action- NA
6566C	New Standard: Specification for Malware Free Equipment Integration	Published as SEMI E188-0222 02/25/2022	Region of Action- NA
6571	Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 11/06/2019	Region of Action- NA
6571A	Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6571B	Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 07/31/2020	Region of Action- NA
6571C	Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF 11/27/2020	Region of Action- NA
6572	Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Failed Technical Review and Returned to TF 12/08/2021	Region of Action- NA
6572A	Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Failed Technical Review and Returned to TF 03/30/2022	Region of Action- NA
6572B	Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6572C	Revision to SEMI E30-0418: Specification for The Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Published 04/12/2023	Region of Action- NA
6573	[To be abolished] Line Item Revision to E142-0211 (Reapproved 1016): Specification for Substrate Mapping	See Line Items Below	Region of Action- NA
6573 LI - 1	SEMI E142 - Adding packaging raw materials traceability method	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6597	Line Item Revision to SEMI E173-0415E: Specification for XML SECS-II Message Notation (SMN)	See Line Items Below	Region of Action- NA
6597 LI - 1	SEMI E173 - Minimal Logging Clarification	Published 07/09/2021	Region of Action- NA
6597 LI - 2	SEMI E173 - Element Order	Published 07/09/2021	Region of Action- NA
6598	Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services	See Line Items Below	Region of Action- NA
6598 LI - 1	SEMI E37 - Query Interface Setup	Failed Technical Review and Returned to TF 05/08/2020	Region of Action- NA
6598A	Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services and E37.1-XXYY: Specification For High-Speed Secs Message Service Single Selected-Session Mode (HSMS-SS)	See Line Items Below	Region of Action- NA
6598A LI - 1	Query Interface Setup	Failed Technical Review and Returned to TF 07/31/2020	Region of Action- NA
6598B	LINE ITEM REVISION TO SEMI E37-0819 SPECIFICATION FOR HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES	See Line Items Below	Region of Action- NA
6598B LI - 1	Clarify T8	Failed Technical Review and Returned to TF 11/27/2020	Region of Action- NA
6598C	Line Item Revision to SEMI E37-0819: Specification For High Speed Secs Message Services (HSMS) Generic Services and E37.1-0819: Specification For High-Speed Secs Message Service Single Selected-Session Mode (HSMS-SS)	See Line Items Below	Region of Action- NA
6598C LI - 1	Clarify T8	Published 02/18/2022	Region of Action- NA
6648	Line Item Revisions to E142-0211 (Reapproved 1016): Specification for Substrate Mapping	See Line Items Below	Region of Action- NA
6648 LI - 1	To add substrate types, including, but not limited to; tape and reel, panel and printed circuit board (PCB).	Published 08/28/2020	Region of Action- NA
6648 LI - 2	To add device level raw materials and process variable traceability feature to the data model and schema.	Published 08/28/2020	Region of Action- NA
6650	Line Item Revision to E87-0619, Specification for Carrier Management (CMS) and E87.1-0619 Specification for SECS-II Protocol for Carrier Management (CMS)	See Line Items Below	Region of Action- Korea
6650 LI - 1	Modify the statement of the “Carrier Ready To Unload Prediction” specification	Drafting 08/14/2020	Region of Action- Korea
6682	Line Item Revision to E142-XXXX: Specification for Substrate Mapping, E142.1-1016 XML Schema for Substrate Mapping and E142.2-1016 SECS II Protocol for Substrate Mapping	See Line Items Below	Region of Action- NA
6682 LI - 1	Add package path to the layout	Published 09/29/2021	Region of Action- NA
6682 LI - 2	Update E142 and E142.1 related information	Published 09/29/2021	Region of Action- NA
6682 LI - 3	Changes to align with the latest version of the Style Manual	Published 09/29/2021	Region of Action- NA
6683	Line Item Revision to Standard SEMI E148-1109 (Reapproved 0614) SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT	See Line Items Below	Region of Action- NA
6683 LI - 1	Logical Naming Conventions	Published 02/25/2022	Region of Action- NA
6695	Line Item Revision to E87-0619, Specification for Carrier Management (CMS) and E87.1-0619, Specification for SECS-II Protocol for Carrier Management (CMS)	See Line Items Below	Region of Action- Korea
6695 LI - 1	Modify the statement of the “Carrier Ready To Unload Prediction” specification	Published 09/28/2021	Region of Action- Korea
6718	Revision to E125 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD)	Failed Technical Review and Returned to TF	Region of Action- NA
6718A	Revision to E125 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD)	Passed Technical Review - Awaiting Procedural Review 07/22/2021	Region of Action- NA
6719	Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization	Failed Technical Review and Returned to TF	Region of Action- NA
6719A	Revision to SEMI E132-0419: Specification for Equipment Client Authentication and Authorization	Published 04/29/2022	Region of Action- NA
6720	Revision to SEMI E134-0414: Specification for Data Collection Management	Failed Technical Review and Returned to TF	Region of Action- NA
6720A	Revision to SEMI E134-0414: Specification for Data Collection Management	Published 10/28/2022	Region of Action- NA
6721	Reapproval of SEMI E164 - Specification for EDA Common Metadata	Published 07/30/2021	Region of Action- NA
6722	Reapproval of SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices	Published 07/30/2021	Region of Action- NA
6723	Reapproval of SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking	Published 09/10/2021	Region of Action- NA
6724	Reapproval of SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device	Published 07/30/2021	Region of Action- NA
6743	Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment	Failed Technical Review and Returned to TF 07/22/2021	Region of Action- NA
6743A	Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment	Failed Technical Review and Returned to TF 07/13/2023	Region of Action- NA
6743B	Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment	Failed Technical Review and Returned to TF 11/08/2023	Region of Action- NA
6744	Line Item Revision to SEMI E54.4-0316, Specification for Sensor/Actuator Network Communications for DeviceNet	See Line Items Below	Region of Action- NA
6744 LI - 1	Add support for vacuum pressure gauges	Published 04/22/2022	Region of Action- NA
6744 LI - 2	Add support for generic equipment networked sensor	Published 04/22/2022	Region of Action- NA
6744 LI - 3	Editorial update for referenced document title	Published 04/22/2022	Region of Action- NA
6744 LI - 4	Editorial updates for trademark annotation	Published 04/22/2022	Region of Action- NA
6770	Line-Item revision to E169-0615 Guide for Equipment Information System Security	See Line Items Below	Region of Action- Japan
6770 LI - 1	Fix "4 Referenced Standards and Documents"	Published 06/23/2023	Region of Action- Japan
6770 LI - 2	Delete ISMI from Terminology 5.1.10	Published 06/23/2023	Region of Action- Japan
6770 LI - 3	Change Biased Terms to Bias-Free Terms	Published 06/23/2023	Region of Action- Japan
6802	Line Item Revision to SEMI E5-0220: SPECIFICATION FOR SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)	See Line Items Below	Region of Action- NA
6802 LI - 1	New Equipment Constant to specify ItemPart Retry attempt counter	Published 06/24/2022	Region of Action- NA
6802 LI - 2	New SECS-II Message to Indicate Stream 21 Support	Published 06/24/2022	Region of Action- NA
6802 LI - 3	Clarify S21F17 Description	Published 06/24/2022	Region of Action- NA
6802 LI - 4	Updates to better support Stream 21 usage	Published 06/24/2022	Region of Action- NA
6803	LINE ITEM REVISION TO SEMI E179-0320 SPECIFICATION FOR PROTOCOL BUFFERS COMMON COMPONENTS	See Line Items Below	Region of Action- NA
6803 LI - 1	Define a standard way to throw RPC exception and report error information details with trailer gRPC metadata	Published 03/11/2022	Region of Action- NA
6804	Revision to Add a New Subordinate Standard: SPECIFICATION FOR SECS II PROTOCOL FOR SUBSTRATE MAPPING WITH ITEM TRANSFER to E142-0820: SPECIFICATION FOR SUBSTRATE MAPPING	Failed Technical Review and Returned to TF 07/22/2021	Region of Action- NA
6804A	Revision to Add a New Subordinate Standard: SPECIFICATION FOR SECS II PROTOCOL FOR SUBSTRATE MAPPING WITH ITEM TRANSFER to E142-0820: SPECIFICATION FOR SUBSTRATE MAPPING	Published as SEMI E142.4-1022 10/28/2022	Region of Action- NA
6835	LINE ITEM REVISION TO SEMI E87-XXXX SPECIFICATION FOR CARRIER MANAGEMENT (CMS) and SEMI E87.1-XXXX SPECIFICATION FOR SECS-II PROTOCOL FOR CARRIER MANAGEMENT (CMS)	Drafting 03/01/2023	Region of Action- NA
6836	Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) and SEMI E90-0921, Specification for Substrate Tracking and E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking	See Line Items Below	Region of Action- NA
6836 LI - 1	Add name-value pair attributes to SEMI E90 substrate and SEMI E87 carrier objects for additional information.	Failed Technical Review and Returned to TF 11/08/2023	Region of Action- NA
6836A	Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) and SEMI E90-0921, Specification for Substrate Tracking and E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking	See Line Items Below	Region of Action- NA
6836A LI - 1	Add name-value pair attributes to SEMI E90 substrate and SEMI E87 carrier objects for additional information.	Passed Technical Review - Awaiting Procedural Review 02/09/2024	Region of Action- NA
6837	LINE ITEM REVISION TO SEMI E179-0320 SPECIFICATION FOR PROTOCOL BUFFERS COMMON COMPONENTS	See Line Items Below	Region of Action- NA
6837 LI - 1	Change the Protocol Buffer messages representing parameter data	Published 08/26/2022	Region of Action- NA
6837 LI - 2	Clarify gRPC entities	Published 08/26/2022	Region of Action- NA
6846	Reapproval of SEMI E54.1-0316, Specification for Sensor/Actuator Network Common Device Model	Published 01/19/2023	Region of Action- NA
6847	Reapproval of SEMI E54.2-0316, Guide for Writing Sensor/Actuator Network (SAN) Letter Ballots	Published 01/19/2023	Region of Action- NA
6849	Reapproval of SEMI E54.24-1116, Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)	Published 01/19/2024	Region of Action- NA
6850	Reapproval of SEMI E109.1-1110, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)	Published 06/02/2023	Region of Action- NA
6851	Reapproval of SEMI E123.1-0703 (Reapproved 1109), Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)	Published 06/16/2023	Region of Action- NA
6859	Revision to SEMI E116-0518 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING (EPT) and E116.1-0707 (Reapproved 0518) SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT)	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6859A	Revision to SEMI E116-0518 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING (EPT) and E116.1-0707 (Reapproved 0518) SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT)	Published 06/16/2023	Region of Action- NA
6861	Line Item Revision of E99-0317 Specification for Carrier ID Reader/Writer	See Line Items Below	Region of Action- Japan
6861 LI - 1	Fix “4 Referenced Standards and Documents”	Published 06/16/2023	Region of Action- Japan
6861 LI - 2	Change Biased Terms to Bias-Free Terms	Published 06/16/2023	Region of Action- Japan
6861 LI - 3	Change “must” to correct word	Published 06/16/2023	Region of Action- Japan
6862	Line Item Revision of E99.1-0317 Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer	See Line Items Below	Region of Action- Japan
6862 LI - 1	Fix “3 Referenced Standards and Documents”	Published 06/15/2023	Region of Action- Japan
6862 LI - 2	Change Biased Terms to Bias-Free Terms	Published 06/15/2023	Region of Action- Japan
6891	LINE ITEM REVISION TO SEMI E125-0414: SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD)	See Line Items Below	Region of Action- NA
6891 LI - 1	Add a new section for SEMI E125 privileges	Published 10/21/2022	Region of Action- NA
6891 LI - 2	Clarify there are no SEMI E125 specific error codes	Published 10/21/2022	Region of Action- NA
6891 LI - 3	Updates to comply with Style Manual and switch to bias-free terminology	Published 10/21/2022	Region of Action- NA
6892	LINE ITEM REVISION TO SEMI E179-0320 SPECIFICATION FOR PROTOCOL BUFFERS COMMON COMPONENTS	See Line Items Below	Region of Action- NA
6892 LI - 1	Add a mapping of SEMI E179’s Unit Class to SEMI E145 Unit information	Published 08/26/2022	Region of Action- NA
6892 LI - 2	Updates to comply with Style Manual and switch to bias-free terminology	Published 08/26/2022	Region of Action- NA
6893	Line Item Revision to SEMI E5-0821 SPECIFICATION FOR SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)	See Line Items Below	Region of Action- NA
6893 LI - 1	Correction of the descriptions in Table 3 Data Item Dictionary, � 9.6.	Published 06/24/2022	Region of Action- NA
6893 LI - 2	Adding Format definition to LimitVariable in Table 7, �9.10.	Published 06/24/2022	Region of Action- NA
6893 LI - 3	Correction of the structure description of S3.F35 (Reticle Transfer Job Request) and adding PODID to Table 3 Data Item Dictionary.	Published 06/24/2022	Region of Action- NA
6893 LI - 4	Correct descriptions in �10 Message Details.	Published 06/24/2022	Region of Action- NA
6893 LI - 5	Add notes for the special data item expressions in the structure definitions.	Published 06/24/2022	Region of Action- NA
6893 LI - 6	SECS-II message S2F23 (Trace Initialize Send) fails to include a way to delete all traces. This makes it difficult for a host to reset trace data collection, like it can do for event reports with message S2F33.	Published 06/24/2022	Region of Action- NA
6893 LI - 7	Replace restricted terms per the Procedure Manual.	Published 06/24/2022	Region of Action- NA
6908	Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Common Equipment Model (CEM) to SEMI E120-0414 (Reapproved 0519) Specification For The Common Equipment Model (CEM)	Published as SEMI E120.2-0922 09/30/2022	Region of Action- NA
6916	Line Item Revision to SEMI E5-0821: SPECIFICATION FOR SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)	See Line Items Below	Region of Action- NA
6916 LI - 1	New Format Code for OperatorCommand	Published 03/10/2023	Region of Action- NA
6916 LI - 2	Errata Corrections	Published 03/10/2023	Region of Action- NA
6920	Line Item Revision to SEMI E171-0916: SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS(PCL) and SEMI E171.1-0216: SPECIFICATION FOR SECS-II PROTOCOL FOR PREDICTIVE CARRIER LOGISTICS	See Line Items Below	Region of Action- Japan
6920 LI - 1	Improve technical issues found through 5 years review,	Passed Technical Review - Awaiting Procedural Review 09/08/2022	Region of Action- Japan
6920 LI - 2	To comply with SEMI Regulations/Procedure Manual	Passed Technical Review - Awaiting Procedural Review 09/08/2022	Region of Action- Japan
6920 LI - 3	Improve editorial issues	Passed Technical Review - Awaiting Procedural Review 09/08/2022	Region of Action- Japan
6924	New Standard: Specification for Equipment Management of Consumables and Durables	Failed Technical Review and Returned to TF 04/05/2023	Region of Action- NA
6924A	New Standard: Specification for Equipment Management of Consumables and Durables	Passed Technical Review - Awaiting Procedural Review 07/13/2023	Region of Action- NA
6925	New Subordinate Standard: Specification for SECS-II Protocol for Equipment Management of Consumables and Durables	Failed Technical Review and Returned to TF 04/05/2023	Region of Action- NA
6925A	New Subordinate Standard: Specification for SECS-II Protocol for Equipment Management of Consumables and Durables	Passed Technical Review - Awaiting Procedural Review 07/13/2023	Region of Action- NA
6926	New Standard: Specification for Equipment Operator Access Management and Monitoring	Failed Technical Review and Returned to TF 11/08/2023	Region of Action- NA
6927	LINE ITEM REVISION TO SEMI E125-XXYY: SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD) and SEMI E125.2-WWZZ Specification for Protocol Buffers for Equipment Self Description (EqSD)	See Line Items Below	Region of Action- NA
6927 LI - 1	Change 'Session' to 'Entity' for Client Session and Consumer Session terminology.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6927 LI - 2	Clarify UnitConfig usage	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6927 LI - 3	Correct issues in SEMI E125. .proto files reported by Task Force Members.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6927 LI - 4	Clean up spelling errors and clarify how .proto files are used.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6928	LINE ITEM REVISION TO SEMI E132-XXYY SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION and SEMI E132.2-WWZZ Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)	Drafting 05/31/2022	Region of Action- NA
6928 LI - 1	Change 'Session' to 'Entity' for Client Session and Consumer Session terminology.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6928 LI - 2	Clarify definition and concepts.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6928 LI - 3	Clarify secure communication usage with SEMI E132.2	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6928 LI - 4	Clean up spelling errors and clarify how .proto files are used.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6929	LINE ITEM REVISION TO SEMI E134-XXYY Specification for Data Collection Management and SEMI E134.2-WWZZ Specification for Protocol Buffers of Data Collection Management	Drafting 05/29/2022	Region of Action- NA
6929	LINE ITEM REVISION TO SEMI E134-XXYY Specification for Data Collection Management and SEMI E134.2-WWZZ Specification for Protocol Buffers of Data Collection Management	Drafting 05/31/2022	Region of Action- NA
6929 LI - 1	Change 'Session' to 'Entity' for Client Session and Consumer Session terminology.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6929 LI - 2	Correct issues with GetObjTypeInstanceIds() operation.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6929 LI - 3	Address issues with Exception Report and Event Reports sent as collected data.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6929 LI - 4	Clean up spelling errors and clarify how .proto files are used.	Failed Technical Review and Returned to TF 07/13/2022	Region of Action- NA
6932	Reapproval for SEMI E121-1017, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications	Published 04/27/2023	Region of Action- NA
6938	New Standard: Guide for Equipment Edge Data Governance (EEDG)	Failed Technical Review and Returned to TF 08/18/2023	Region of Action- Taiwan
6938A	New Standard: Guide for Equipment Edge Data Governance	Drafting 02/15/2024	Region of Action- Taiwan
6946	Line Item Revision to SEMI E132, Specification For Equipment Client Authentication and Authorization and SEMI E132.2, Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)	See Line Items Below	Region of Action- NA
6946 LI - 1	Clarify definition and concepts	Drafting 09/12/2022	Region of Action- NA
6946 LI - 2	Rework ACL passwords and security scenarios	Drafting 09/12/2022	Region of Action- NA
6946 LI - 3	Rework EstablishSession and ChangeSessionEndpoint functionality	Drafting 09/12/2022	Region of Action- NA
6946 LI - 4	Address issues discovered during EDA Software Vendor Test Session #1	Drafting 09/12/2022	Region of Action- NA
6946 LI - 5	Clean up spelling errors and clarify how .proto files are used	Drafting 09/12/2022	Region of Action- NA
6947	Line Item Revision to SEMI E179-0320, Specification for Protocol Buffers Common Components	See Line Items Below	Region of Action- NA
6947 LI - 1	Fix message definition to properly support Array of Array data types	Published 06/23/0203	Region of Action- NA
6947 LI - 2	Clarify oneof keyword usage	Published 06/23/2023	Region of Action- NA
6947 LI - 3	Address Style Manual issues and address spelling errors and reference errors	Published 06/23/2023	Region of Action- NA
6948	Line Item Revisions to SEMI E142-0921 - Specification for Substrate Mapping, SEMI E142.1-0921 - Specification for XML Schema for Substrate Mapping, Line Item Revision to SEMI E142.2-0921 - Specification for SECS II Protocol For Substrate Mapping, Line Item Revision to SEMI E142.3-0921 - Specification for Web Services Protocol for Substrate Mapping, Line Item Revision to SEMI E142.4-0921 - Specification for Secs II Protocol For Substrate Mapping Using Item Transfer	See Line Items Below	Region of Action- NA
6948 LI - 1	Add TnR, Panel, PCB to SubstrateTypeEnum in schema	Published 02/09/2024	Region of Action- NA
6948 LI - 2	Correct capitalization for all substrate types	Publication Process Started 01/22/2024	Region of Action- NA
6948 LI - 3	Add a DeviceData map example to Related Information 1 Map Examples	Publication Process Started 01/22/2024	Region of Action- NA
6948 LI - 4	Add diagrams to help clarify E142 usage for all substrate types to related information	Publication Process Started 01/22/2024	Region of Action- NA
6951	Reapproval of SEMI E126-0708 - Specification for Equipment Quality Information Parameters (EQIP)	Published 08/04/2023	Region of Action- NA
6962	Reapproval of SEMI E30.1-0217, Specification for Inspection and Review Specific Equipment Model (ISEM)	Published 04/27/2023	Region of Action- NA
6963	Reapproval of SEMI E30.5-0217, Specification for Metrology Specific Equipment Model (MSEM)	Published 04/27/2023	Region of Action- NA
6964	Reapproval of SEMI E82-1106 (Reapproved 0318), Specification for Interbay/Intrabay AMHS SEM (IBSEM)	Published 05/18/2023	Region of Action- NA
6965	Reapproval of SEMI E88-0318, Specification for AMHS Storage SEM (Stocker SEM)	Published 05/18/2023	Region of Action- NA
6966	Reapproval of SEMI E109-1017, Specification for Reticle and Pod Management (RPMS)	Published 06/02/2023	Region of Action- NA
6967	Reapproval of SEMI E122-0217, Specification for Tester Equipment Specific Equipment Model (TSEM)	Published 06/16/2023	Region of Action- NA
6968	Reapproval of SEMI E122.1-0703 (Reapproved 1109), Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)	Published 06/16/2023	Region of Action- NA
6969	Reapproval of SEMI E123-0217, Specification for Handler Equipment Specific Equipment Model (HSEM)	Published 06/16/2023	Region of Action- NA
6991	Line Item Revision to SEMI E4-0418, Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)	See Line Items Below	Region of Action- NA
6991 LI - 1	Bias Free Terminology	Published 09/22/2023	Region of Action- NA
7001	Revision to SEMI E125-1022 Specification for Equipment Self Description (EqSD) and SEMI E125.2-1022 Specification for Protocol Buffers for Equipment Self Description (EqSD)	Published 09/29/2023	Region of Action- NA
7002	Revision to SEMI E132-0922 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0422e Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)	Published 09/29/2023	Region of Action- NA
7003	Revision to SEMI E134-1022 Specification for Data Collection Management and SEMI E134.2-1022 Specification for Protocol Buffers of Data Collection Management	Published 09/29/2023	Region of Action- NA
7004	Reapproval of E130-0618, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)	Published 07/21/2023	Region of Action- NA
7017	Line Item Revision to SEMI E120.2-0922, Specification for Protocol Buffers for Common Equipment Model (CEM)	See Line Items Below	Region of Action- NA
7017 LI - 1	Correct issues in SEMI E120.2 Protocol Buffer messages reported by Task Force Members	Published 08/31/2023	Region of Action- NA
7017 LI - 2	Fix spelling errors and clarify how .proto files are used.	Published 08/31/2023	Region of Action- NA
7018	Line Item Revision to SEMI E87-0921, Specification For Carrier Management (CMS) and E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)	See Line Items Below	Region of Action- Other
7018 LI - 1	changes to the following sections as shown	Passed Technical Review - Awaiting Procedural Review 02/14/2023	Region of Action- Other
7018 LI - 2	Added roundtrip scenarios R1-2.27 BypassReadID Scenario 1 to Related Information 1 .	Published 10/27/2023	Region of Action- Other
7018 LI - 3	From R1-2.2 to R1-2.26, removed “FOUP” from assumption to cover more carrier types.	Published 10/27/2023	Region of Action- Other
7018 LI - 4	R1-2.2 to R1-2.26, added abbreviation definition of states in table which were missing in the document.	Published 10/27/2023	Region of Action- Other
7018 LI - 5	Add CancelCarrierAtPort in Table 7	Published 10/27/2023	Region of Action- Other
7018 LI - 6	Made some minor editorial corrections.	Published 10/27/2023	Region of Action- Other
7063	Reapproval of SEMI E39-1218, Specification for Object Services: Concepts, Behavior, and Services	Published 01/31/2024	Region of Action- NA
7065	Line Item Revision to SEMI E172-0320, Specification for SECS Equipment Data Dictionary (SEDD)	See Line Items Below	Region of Action- NA
7065 LI - 1	Add Name element to help identify SEDD objects.	Published 10/20/2023	Region of Action- NA
7065 LI - 2	Add Well-Known Name element to SEDD objects.	Published 10/20/2023	Region of Action- NA
7065 LI - 3	Update Schema File so not applicable items are handled consistently	Published 10/20/2023	Region of Action- NA
7066	Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)	See Line Items Below	Region of Action- NA
7066 LI - 1	Rework Carrier Ready to Unload Prediction (CaRTUP) functionality into Carrier Complete Prediction (CCP) functionality and address gaps.	Failed Technical Review and Returned to TF 07/13/2023	Region of Action- NA
7066 LI - 2	Clarify ContentMap behavior.	Published 10/27/2023	Region of Action- NA
7066 LI - 3	Update CMS Compliance Statement to include missing information.	Published 10/27/2023	Region of Action- NA
7066A	Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)	See Line Items Below	Region of Action- NA
7066A LI - 1	Rework Carrier Ready to Unload Prediction (CaRTUP) functionality into Carrier Complete Prediction (CCP) functionality and address gaps.	Published 03/29/2024	Region of Action- NA
7067	Line Item Revision to SEMI E133-1218, Specification for Automated Process Control Systems Interface and SEMI E133.1-0318, Specification for XML Messaging for Process Control System (PCS)	See Line Items Below	Region of Action- NA
7067 LI - 1	Replace biased terminology	Passed Technical Review - Awaiting Procedural Review 02/09/2024	Region of Action- NA
7068	New Standard: Specification for Equipment Data Publication	Failed Technical Review and Returned to TF 03/27/2024	Region of Action- NA
7069	Revision to Add a New Subordinate Standard: Specification for Common Data for Etch Components to Specification for Equipment Data Publication	Failed Technical Review and Returned to TF 03/27/2024	Region of Action- NA
7114	Line Item Revision to SEMI E5-0323, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) and SEMI E30-0423, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)	See Line Items Below	Region of Action- NA
7114 LI - 1	Well-Known Names for E5, E30	Published 02/09/2024	Region of Action- NA
7114 LI - 2	E30, E5 Errata	Published 02/09/2024	Region of Action- NA
7115	Line Item Revision to SEMI E40-1218, Specification for Processing Management and SEMI E40.1-1218, Specification for SECS-II Protocol for Processing Management	See Line Items Below	Region of Action- NA
7115 LI - 1	Well-Known Names for E40	Passed Technical Review - Awaiting Procedural Review 09/11/2023	Region of Action- NA
7116	Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)	See Line Items Below	Region of Action- NA
7116 LI - 1	Well-Known Names for E87	Publication Process Started 01/10/2024	Region of Action- NA
7116 LI - 2	E87 Errata	Publication Process Started 01/10/2024	Region of Action- NA
7116 LI - 3	E87, E87.1 Technical Improvements and Clarifications	Publication Process Started 01/10/2024	Region of Action- NA
7117	Line Item Revision to SEMI E90-0921, Specification for Substrate Tracking and SEMI E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking	See Line Items Below	Region of Action- NA
7117 LI - 1	Well-Known Names for E90	Passed Technical Review - Awaiting Procedural Review 09/11/2023	Region of Action- NA
7117 LI - 2	DV Clarification for E90	Publication Process Started 02/08/2023	Region of Action- NA
7118	Line Item Revision to SEMI E94-0314 (Reapproved 0819), Specification for Control Job Management and SEMI E94.1-0312 (Reapproved 0819), Specification for SECS-II Protocol for Control Job Management (CJM)	See Line Items Below	Region of Action- NA
7118 LI - 1	Well-Known Names for E94	Passed Technical Review - Awaiting Procedural Review 09/11/2023	Region of Action- NA
7119	Line Item Revision to SEMI E116-0623, Specification for Equipment Performance Tracking and SEMI E116.1-0623, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)	See Line Items Below	Region of Action- NA
7119 LI - 1	Well-Known Names for E116	Passed Technical Review - Awaiting Procedural Review 09/11/2023	Region of Action- NA
7120	Line Item Revision to SEMI E157-0611, Specification for Module Process Tracking	See Line Items Below	Region of Action- NA
7120 LI - 1	Well-Known Names for E157	Passed Technical Review - Awaiting Procedural Review 09/11/2023	Region of Action- NA
7121	Reapproval of SEMI E39.1-1218, Specification for SECS-II Protocol for Object Services (OSS)	Published 01/31/2024	Region of Action- NA
7123	Reapproval of SEMI E54.10-0600 (Reapproved 1017), Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device	Published 01/19/2024	Region of Action- NA
7125	Reapproval of SEMI E133.1-0318 - Specification for XML Messaging for Process Control System (PCS)	Published 03/29/2024	Region of Action- NA
7126	Reapproval of SEMI E145-0414 (Reapproved 0519), Classification for Measurement Unit Symbols in XML	Published 02/23/2024	Region of Action- NA
7127	Reapproval of SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures	Published 02/23/2024	Region of Action- NA
7128	Reapproval of SEMI E138-0217, Specification for XML Semiconductor Common Components	Published 02/29/2024	Region of Action- NA
7174	Line Item Revision to SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures	See Line Items Below	Region of Action- NA
7174 LI - 1	Replace reference to depreciated SSL Protocol 3	Passed Technical Review - Awaiting Procedural Review 02/10/2024	Region of Action- NA
7175	Line Item Revision to SEMI E132-0923 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0923 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)	See Line Items Below	Region of Action- NA
7175 LI - 1	Address issues in the primary and subordinate standards and .proto files.	Failed Technical Review and Returned to TF 03/27/2024	Region of Action- NA
7175 LI - 2	Define configuration switch to treat operational message delivery error as SEMI E132 Communication Errors.	Passed Technical Review - Awaiting Procedural Review 02/11/2024	Region of Action- NA
7176	Line Item Revision to SEMI E134-0923 Specification for Data Collection Management and SEMI E134.2-0923 Specification for Protocol Buffers of Data Collection Management	See Line Items Below	Region of Action- NA
7176 LI - 1	Address issues in the primary and subordinate standards and .proto files.	Passed Technical Review - Awaiting Procedural Review 02/11/2024	Region of Action- NA
7176 LI - 2	Remove configuration switch to treat NewData message delivery error as SEMI E132 Communication Errors.	Passed Technical Review - Awaiting Procedural Review 02/11/2024	Region of Action- NA
7177	Line Item Revision to SEMI E54.20-0316 Specification for Sensor/Actuator Network Communications for EtherCAT	See Line Items Below	Region of Action- NA
7177 LI - 1	Replace Biased Terms	Passed Technical Review - Awaiting Procedural Review 02/09/2024	Region of Action- NA
7177 LI - 2	Add Mappings for Specific Device Models	Passed Technical Review - Awaiting Procedural Review 02/09/2024	Region of Action- NA
7177 LI - 3	Updates to References, Trademarks and Other Editorial Changes	Passed Technical Review - Awaiting Procedural Review 02/09/2024	Region of Action- NA
7188	Withdrawal of SEMI E54.15-1107 Sensor/Actuator Network Communication Specification for SafetyBUS p	Passed Technical Review - Awaiting Procedural Review 03/27/2024	Region of Action- NA
7189	Withdrawal of SEMI E54.16-1106 (Reapproved 1211) Specification for Sensor/Actuator Network Communications for Lonworks	Passed Technical Review - Awaiting Procedural Review 03/27/2024	Region of Action- NA
7191	Line Item Revision to SEMI E179-0623 Specification for Protocol Buffers Common Components	See Line Items Below	Region of Action- NA
7191 LI - 1	Performance improvements and clarifications.	Passed Technical Review - Awaiting Procedural Review 02/11/2024	Region of Action- NA
R5274G	New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model for Generic Equipment add-on Sensor (ADDON)	Published as SEMI E54.24-1116 11/25/2016	Region of Action- NA
R5601A	New Standard: Specification for Wafer Job Management	Published as SEMI E174-1116 11/30/2016	Region of Action- Japan
R5821C	NEW STANDARD: SPECIFICATION FOR SUBSYSTEM ENERGY SAVING MODE COMMUNICATION (SESMC)	Published as SEMI E175-1116 11/18/2016	Region of Action- NA
R6089	Line Item Revision to "SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM”, “SEMI E170-0416: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)” and "SEMI E5-0813: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)” with title change	See Line Items Below	Region of Action- Japan
R6089 LI - 1	Revise the Message Mapping in SEMI E170.1 with some Parameter Changes in SEMI E170, and Add SECS message definitions in SEMI E5.	Published 08/01/2017	Region of Action- Japan
R6114C	Line Item Revision to SEMI E5-1217: SEMI Equipment Communications Standard 2 Message Content (SECS-II)	Published 02/28/2019	Region of Action- NA
R6335A	Line-Item Revision to SEMI E134: Specification for Data Collection Management	Published 03/29/2019	Region of Action- NA
R6348B	Revision to E30-0418: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)	Published 05/08/2020	Region of Action- NA
R6375	Revision to: ‘SEMI E170-1217: Specification for Secured Foundation of Recipe Management System (SFORMS)’, and ‘SEMI E170.1-1217: Specification for SECS-II Protocol for Secured Foundation of Recipe Management System’	Published 04/19/2019	Region of Action- Japan
R6506C	New Standard: Specification for Cybersecurity of Fab Equipment	Published as SEMI E187-0122 01/13/2022	Region of Action- Taiwan
R6552B	Line Item Revision to SEMI E5-0219: Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)	Published 08/27/2021	Region of Action- NA
R6718A	Revision to SEMI E125-0414, SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD)	Published 04/20/2022	Region of Action- NA
R6924A	New Standard: Specification for Equipment Management of Consumables and Durables (EMCD)	Passed Technical Review - Awaiting Procedural Review 11/08/2023	Region of Action- NA
R6925A	New Subordinate Standard: Specification for SECS-II Protocol for Equipment Management of Consumables and Durables (EMCD)	Passed Technical Review - Awaiting Procedural Review 11/08/2023	Region of Action- NA
R7002	Revision to SEMI E132-0922 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0422e Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)	Published 09/29/2023	Region of Action- NA
R7018	Line Item Revision to SEMI E87-0921, Specification For Carrier Management (CMS) and E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)	Drafting 10/24/2023	Region of Action- Other
R7018 LI - 1	changes to the following sections as shown	Passed Technical Review - Awaiting Procedural Review 10/24/2023	Region of Action- Other
R7116	Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)	See Line Items Below	Region of Action- NA
R7116 LI - 1	E87, E87.1 Technical Improvements and Clarifications	Passed Technical Review - Awaiting Procedural Review 11/28/2023	Region of Action- NA
R7117	Line Item Revision to SEMI E90-0921, Specification for Substrate Tracking and SEMI E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking	See Line Items Below	Region of Action- NA
R7117 LI - 1	Well-Known Names for E90	Approved - Awaiting Publication Processing 11/28/2023	Region of Action- NA

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