| 4543 | Revision of SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40% | Drafting 04/08/2009 | Region of Action- NA |
| 4543 | Revision to SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40%, with title change to: Specification and Guides for Ammonium Fluoride 40% | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4543A | Revision to SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40%, with title change to: Specification and Guide for Ammonium Fluoride 40% | Published 02/19/2013 | Region of Action- NA |
| 4543B | Revision to SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40%, with title change to: Specification and Guide for Ammonium Fluoride 40% | Published 02/19/2013 | Region of Action- NA |
| 4544B | Revision of SEMI C24-0301, Specification for n-Butyl Acetate | Drafting 11/09/2009 | Region of Action- NA |
| 4544B | Revision to SEMI C24-0301, Specification for n-Butyl Acetate | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4544C | Revision to SEMI C24-0301, Specification for n-Butyl Acetate | Failed Technical Review and Returned to TF 04/03/2012 | Region of Action- NA |
| 4544D | Revision to SEMI C24-0301, Specification for n-Butyl Acetate | Failed Technical Review and Returned to TF 07/10/2012 | Region of Action- NA |
| 4544E | Revision to SEMI C24-0301, Specification for n-Butyl Acetate | Passed Technical Review - Awaiting Procedural Review 04/02/2013 | Region of Action- NA |
| 4545B | Revision of SEMI C29-0301, Specifications and Guideline for 4.9% Hydrofluoric Acid (10:1 v/v), with title change to: Specifications and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) | Published 10/07/2010 | Region of Action- NA |
| 4546B | Revision to SEMI C30-1101, with title change to Specifications for Hydrogen Peroxide | Published 10/07/2010 | Region of Action- NA |
| 4547B | Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4547C | Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone | Failed Technical Review and Returned to TF 04/03/2012 | Region of Action- NA |
| 4547D | Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone | Failed Technical Review and Returned to TF 07/10/2012 | Region of Action- NA |
| 4547E | Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone | Published 02/19/2013 | Region of Action- NA |
| 4555 | Revision to SEMI F57-0301, Provisional Specification for Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems, with title change to: Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems | Failed Technical Review and Returned to TF 07/12/2011 | Region of Action- NA |
| 4555A | Revision to SEMI F57-0301 With Title Change To: Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems | Published 03/22/2012 | Region of Action- NA |
| 4556 | New Standard:Method For The Determination Of Surface Areas Of Polymer Pellets | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4556A | New Standard: Test Method for the Determination of Surface Areas of Polymer Pellets | Published as SEMI C69-0611 06/03/2011 | Region of Action- NA |
| 4603 | Revisions to SEMI C10-0305, Guide for Determination of Method Detection Limits | Published 10/01/2009 | Region of Action- NA |
| 4676 | New Standard: Guide on Integration of Liquid Chemical Piping for Semiconductor, Flat Panel Display and Solar Cell Manufacturing Applications | Document is Being Redrafted 02/27/2009 | Region of Action- Japan |
| 4676 | New Standard: Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications | Failed Technical Review and Returned to TF 07/22/2009 | Region of Action- Japan |
| 4676A | New Standard: Guide on Integration of Liquid Chemical Piping for Semiconductor, Flat Panel Display and Solar Cell Manufacturing Applications | Published as SEMI F108-0310 01/22/2010 | Region of Action- Japan |
| 4682 | Line Item Revision to SEMI C1-0705, Guide For The Analysis Of Liquid Chemicals | See Line Items Below | Region of Action- NA |
4682
LI - 1 | Add section 4.26.1 | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4682A | Revision to SEMI C1-0705, Guide for the Analysis of Liquid Chemicals | See Line Items Below | Region of Action- NA |
4682A
LI - 1 | Add sections 4.26.1 and 4.26.2 | Published 01/22/2010 | Region of Action- NA |
4682A
LI - 2 | Correction to Section 7.4.4.3 | Published 01/22/2010 | Region of Action- NA |
| 4697 | Reapproval of SEMI F34-0998, Guide for Liquid Chemical Pipe Labeling | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4701B | New Standard: Guide for Hafnium Amides | Failed Procedural Review - Returned to Committee | Region of Action- Europe |
| 4701C | New Standard: Guide for Hafnium Amides | Failed Technical Review and Returned to TF 10/20/2010 | Region of Action- Europe |
| 4701D | New Standard: Guide for Hafnium Amides | Published as SEMI C67-0811 08/12/2011 | Region of Action- Europe |
| 4702B | New Standard: Guide for Zirconium Amides | Failed Procedural Review - Returned to Committee | Region of Action- Europe |
| 4702C | New Standard: Guide for Zirconium Amides | Failed Technical Review and Returned to TF 10/20/2010 | Region of Action- Europe |
| 4702D | New Standard: Guide for Zirconium Amides | Published as SEMI C68-0811 08/12/2011 | Region of Action- Europe |
| 4720 | Revision to SEMI F31-0698, Guide For Bulk Chemical Distribution Systems | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4721 | Reapproval of SEMI F39-0699, Guideline For Chemical Blending Systems | Failed Technical Review and Returned to TF 03/31/2009 | Region of Action- NA |
| 4816 | New Standard: Guide for Propylene-glycol-mono-methyl-ether (PGME), Propylene-glycol-mono-methyl-ether-acetate (PGMEA) and the mixture 70wt% PGME / 30wt% PGMEA | Published as SEMI C72-0811 09/02/2011 | Region of Action- Europe |
| 4849 | Revision to SEMI F7-92 (Reapproved 0299), Test Method to Determine the Tensile Strength of Tube Fitting Connections made of Fluorocarbon Materials | Failed Technical Review and Returned to TF 12/01/2010 | Region of Action- Japan |
| 4909 | Reapproval of SEMI F66-1101, Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals | Failed Technical Review and Returned to TF 04/21/2010 | Region of Action- Japan |
| 4953 | Revision of SEMI F63-0309, Guide for Ultrapure Water Used in Semiconductor Processing | Published 02/28/2011 | Region of Action- NA |
| 4954 | Withdrawal of SEMI C16-0299, Guide for Precision and Data Reporting Practices | Published 10/07/2010 | Region of Action- NA |
| 4955 | Revision to SEMI C39-1105, Specification for Potassium Hydroxide Pellets | Published 09/30/2010 | Region of Action- NA |
| 4956 | Revision to SEMI C40-1105, Specification for Potassium Hydroxide, 45% Solution | Published 09/30/2010 | Region of Action- NA |
| 4957 | Revision to SEMI C41-0705, Specifications and Guidelines for 2-Propanol, with title change to: Specifications for 2-Propanol | Failed Technical Review and Returned to TF 07/13/2010 | Region of Action- NA |
| 4958 | Revision to SEMI C42-1105, Specification for Sodium Hydroxide Pellets | Published 09/30/2010 | Region of Action- NA |
| 4959 | Revision to SEMI C43-1105, Specification for Sodium Hydroxide, 50% Solution | Published 09/30/2010 | Region of Action- NA |
| 4989 | New Standard: Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy | Published as SEMI C78-0113 01/25/2013 | Region of Action- NA |
| 4990 | Revision to SEMI C49-1105, Guideline for Trimethylborate, with title change to: Guide for Trimethylborate | Published 10/07/2010 | Region of Action- NA |
| 4991 | Revision to SEMI C50-1105, Specifications and Guideline for Trimethylphosphite, with title change to: Guide for Trimethylphosphite | Published 10/07/2010 | Region of Action- NA |
| 4993 | New Standard: Guide for Hafnium Chloride | Published as SEMI C73-0811 08/12/2011 | Region of Action- Europe |
| 4994 | New Standard: Guide for Hafnium tert-Butoxide | Published as SEMI C74-0811 08/12/2011 | Region of Action- Europe |
| 4995 | New Standard: Guide for Tetrakis(Dimethlyamino)Titanium | Published as SEMI C75-0811 08/12/2011 | Region of Action- Europe |
| 4996 | New Standard: Guide for Zirconium tert-Butoxide | Published as SEMI C76-0811 08/12/2011 | Region of Action- Europe |
| 5064 | Revision to SEMI F66-1101, Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals | Failed Technical Review and Returned to TF 12/01/2010 | Region of Action- Japan |
| 5064A | Revision to SEMI F66-1101, Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals | Drafting 05/25/2011 | Region of Action- Japan |
| 5067 | New Standard: Test Method for Mono-dispersed Polystyrene Latex (PSL) Challenge Test of Liquid Filter | Failed Technical Review and Returned to TF 10/14/2011 | Region of Action- Japan |
| 5067A | New Standard: Test Method for Mono-dispersed Polystyrene Latex (PSL) Challenge of Liquid Filters | Published as SEMI F110-0712 07/20/2012 | Region of Action- Japan |
| 5134 | Revision to SEMI C28-0306, Specifications for Hydrofluoric Acid | Published 06/24/2011 | Region of Action- NA |
| 5135 | Reapproval of SEMI C32-0306, Specification for Methyl Ethyl Ketone | Published 06/24/2011 | Region of Action- NA |
| 5136 | Reapproval of SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants | Drafting 02/18/2011 | Region of Action- NA |
| 5137 | Reapproval of SEMI C37-0706, Specification for Phosphoric Etchants | Published 06/24/2011 | Region of Action- NA |
| 5188 | New Standard: Guide to Evaluate the Performance of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems | Failed Technical Review and Returned to TF 07/10/2012 | Region of Action- NA |
| 5188A | New Standard: Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems | Published as SEMI C79-0113 01/31/2013 | Region of Action- NA |
| 5189 | Revision to SEMI F104-1107 With Title Change To: Particle Test Method Guide for Evaluation of Components Used In Ultrapure Water and Liquid Chemical Distribution Systems | Published 03/09/2012 | Region of Action- NA |
| 5190 | Revision to SEMI C22-0306, Guideline for Boron Tribromide, with title change to: Guide for Boron Tribromide | Failed Technical Review and Returned to TF 07/12/2011 | Region of Action- NA |
| 5190A | Revision to SEMI C22-0306 With Title Change To: Guide for Boron Tribromide | Published 02/10/2012 | Region of Action- NA |
| 5191 | Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants | Failed Technical Review and Returned to TF 07/12/2011 | Region of Action- NA |
| 5191A | Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants | Failed Technical Review and Returned to TF 04/03/2012 | Region of Action- NA |
| 5191B | Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants | Failed Technical Review and Returned to TF 07/10/2012 | Region of Action- NA |
| 5191C | Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants | Published 01/25/2013 | Region of Action- NA |
| 5192 | Revision to SEMI C38-0306, Guideline for Phosphorus Oxychloride, with title change to: Guide for Phosphorus Oxychloride | Failed Technical Review and Returned to TF 07/12/2011 | Region of Action- NA |
| 5192A | Revision to SEMI C38-0306, With Title Change To: Guide for Phosphorus Oxychloride | Published 02/10/2012 | Region of Action- NA |
| 5193 | Revision to SEMI C46-0306, Guideline for 25% Tetramethylammonium Hydroxide, with title change to: Guide for 25% Tetramethylammonium Hydroxide | Published 08/17/2012 | Region of Action- NA |
| 5225 | New Standard: Test Method for Determining the Counting Efficiency of Liquid-borne Particle Counters for which the Minimum Detectable Particle Size is Smaller than 100 nm | Failed Technical Review and Returned to TF 04/13/2012 | Region of Action- Japan |
| 5225A | New Standard: Test Method for Determining the Counting Efficiency of Liquid-borne Particle Counters for which the Minimum Detectable Particle Size is between 30 nm and 100 nm | Published as SEMI C77-0912 09/28/2012 | Region of Action- Japan |
| 5232 | Reapproval of SEMI C53-0704, Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 And 2] | Published 03/30/2012 | Region of Action- Europe |
| 5297 | New Standard: Test Method for Particle Removal Performance of Liquid Filter Rated 20-50 nm with Liquid-Borne Particle Counter | Passed Technical Review - Awaiting Procedural Review 04/05/2013 | Region of Action- Japan |
| 5298 | Revision of SEMI C25-0306, Specification for Dichloromethane (Methylene Chloride) | Published 03/22/2012 | Region of Action- NA |
| 5299 | Revision of SEMI C26 With Title Change To: Specification and Guide for Hexamethyldisilazane (HMDS) | Failed Technical Review and Returned to TF 10/25/2011 | Region of Action- NA |
| 5299A | Revision of SEMI C26-0306 with title change to: Specification and Guide for Hexamethyldisilazane (HMDS) | Failed Technical Review and Returned to TF 04/03/2012 | Region of Action- NA |
| 5299B | Revision to SEMI C26-0306 with title change to: Specification and Guide for Hexamethyldisilazane (HMDS) | Published 09/19/2012 | Region of Action- NA |
| 5325 | New Standard: Guide For Dimethyl Dimethoxy Silane (DMDMOS) | Drafting 10/18/2012 | Region of Action- Europe |
| 5327 | New Standard: Guide for Monomethyl Silane | Drafting 10/18/2012 | Region of Action- Europe |
| 5328 | New Standard: Guide for Tetrakis(Dimethylamino) Silane (TDMAS) | Published as SEMI C80-0113 01/31/2013 | Region of Action- Europe |
| 5329 | New Standard: Guide For Tris(Dimethylamino) Silane (3DMAS) | Published as SEMI C81-0113 01/31/2013 | Region of Action- Europe |
| 5354 | Revision to SEMI C47-0706, Guideline for Trans 1, 2 Dichloroethylene with title change to: Guide for Trans 1, 2 Dichloroethylene | Published 08/09/2012 | Region of Action- NA |
| 5355 | Revision to SEMI C48-0706, Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade with title change to: Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade | Published 08/17/2012 | Region of Action- NA |
| 5356 | Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes | Failed Technical Review and Returned to TF 04/03/2012 | Region of Action- NA |
| 5356A | Revision of SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes | Failed Technical Review and Returned to TF 07/10/2012 | Region of Action- NA |
| 5356B | Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specification for Xylene | Failed Technical Review and Returned to TF 04/02/2013 | Region of Action- NA |
| 5356C | Revision of SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specification for Xylene | Drafting 04/24/2013 | Region of Action- NA |
| 5371 | New Standard: Test Method for Tensile Strength Applied to Welded Connections Made by PFA Weld Fitting | Passed Technical Review - Awaiting Procedural Review 04/05/2013 | Region of Action- Japan |
| 5415 | Revision to SEMI F63-0211, Guide for Ultrapure Water Used in Semiconductor Processing | Published 03/01/2013 | Region of Action- NA |
| 5459 | Reapproval of SEMI F18-95, Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing | Publication Process Started 12/20/2012 | Region of Action- NA |
| 5479 | Revision to SEMI F31-0698, Guide for Bulk Chemical Distribution Systems | Published 03/29/2013 | Region of Action- NA |
| 5534 | Reapproval of SEMI F8-0998, Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces | Passed Technical Review - Awaiting Procedural Review 04/02/2013 | Region of Action- NA |
| 5548 | Revision to SEMI C36-1107, Specifications for Phosphoric Acid | Failed Technical Review and Returned to TF 04/02/2013 | Region of Action- NA |
| 5548A | Revision to SEMI C36-1107, Specifications for Phosphoric Acid | Drafting 04/24/2013 | Region of Action- NA |