5596 | New Standard: Guide To Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment | Drafting 05/16/2016 | Region of Action- NA |
5596 | New Standard: Guide To Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment | Drafting 01/13/2017 | Region of Action- NA |
5596A | New Standard: Guide To Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment | Published as SEMI E176-1017 10/13/2017 | Region of Action- NA |
5819A | Reapproval of SEMI E114-0302E (Reapproved 0309) - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems | Published 06/30/2016 | Region of Action- NA |
5820A | Reapproval of SEMI E115-0302E (Reapproved 0309) - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems | Published 08/26/2016 | Region of Action- NA |
6017 | Line-item Revision to SEMI E33-1012 Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) | See Line Items Below | Region of Action- NA |
6017 LI - 1 | To update the referenced EC Directive in section 4.2 and Related Information 3. | Published 02/10/2017 | Region of Action- NA |
6115 | Reapproval for SEMI E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items within Specially Designated Areas | Published 12/29/2017 | Region of Action- NA |
6144 | Line-item Revisions to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems | See Line Items Below | Region of Action- NA |
6144 LI - 1 | Clarify that the accompanying spreadsheet is of the Various Materials type of Supplementary Materials. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6144 LI - 2 | Add clarification on the different types of COO values calculated. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6144 LI - 3 | Add missing Reporting Results section. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6144 LI - 4 | Miscellaneous minor technical and/or editorial changes needed. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6144A | Line-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems | See Line Items Below | Region of Action- NA |
6144A LI - 1 |
Clarify that the accompanying spreadsheet is of the Various Materials type of Supplementary Materials | Published 06/15/2018 | Region of Action- NA |
6144A LI - 2 | Add clarification on the different types of COO values calculated. | Published 06/15/2018 | Region of Action- NA |
6144A LI - 3 | Add missing Reporting Results section. | Published 06/15/2018 | Region of Action- NA |
6144A LI - 4 | Miscellaneous minor technical and/or editorial changes needed. | Published 06/15/2018 | Region of Action- NA |
6145 | Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6145 LI - 1 | Standardize terminology (e.g., measurement system, measurement system analysis [MSA]) to harmonize with SEMI E89. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6145 LI - 2 | Implement required changes due to the major revision and scope change implemented in referenced SEMI S16. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6145 LI - 3 | Add clarification on the ‘good unit equivalents (GUE) per year’ term. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6145 LI - 4 | Update the Related Documents section. | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6145 LI - 5 | Miscellaneous minor technical and/or editorial changes needed.
Justification: | Failed Technical Review and Returned to TF 07/12/2017 | Region of Action- NA |
6145A | Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6145A LI - 1 | Standardize terminology (e.g., measurement system, measurement system analysis [MSA]) to harmonize with SEMI E89. | Published 06/15/2018 | Region of Action- NA |
6145A LI - 2 | Line-Item 2: Implement required changes due to the major revision and scope change implemented in referenced SEMI S16. | Published 06/15/2018 | Region of Action- NA |
6145A LI - 3 | Add clarification on the ‘good unit equivalents (GUE) per year’ term. | Published 06/15/2018 | Region of Action- NA |
6145A LI - 4 | Update the Related Documents section. | Published 06/15/2018 | Region of Action- NA |
6145A LI - 5 | Miscellaneous minor technical and/or editorial changes needed. | Published 06/15/2018 | Region of Action- NA |
6146 | Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems | See Line Items Below | Region of Action- NA |
6146 LI - 1 | Change definition and calculation of cost footprint (CF) to cost footprint rectangle area (Acf). | Drafting 05/23/2017 | Region of Action- NA |
6146 LI - 2 | Provide additional guidance for calculating/estimating throughput per SEMI E79. | Drafting 05/23/2017 | Region of Action- NA |
6146 LI - 3 | Provide additional guidance for calculating/estimating utilization and uptime metrics per SEMI E10. | Drafting 05/23/2017 | Region of Action- NA |
6146 LI - 4 | Clarify what types of engineering should be included. | Drafting 05/23/2017 | Region of Action- NA |
6146 LI - 5 | Clarify the difference between initial training vs. ongoing training and clarify what training-related costs are included. | Drafting 05/23/2017 | Region of Action- NA |
6146 LI - 6 | Update the definitions of ‘consumable material’ and ‘consumable part’ to match the ones in referenced SEMI E10. | Drafting 05/23/2017 | Region of Action- NA |
6146 LI - 7 | Revise and harmonize the SEMI E35 Cost Elements Section 9 with the SEMI E140 Definitions worksheet. | Drafting 05/23/2017 | Region of Action- NA |
6146 LI - 8 | Miscellaneous minor technical and/or editorial changes needed. | Drafting 05/23/2017 | Region of Action- NA |
6146A | Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems | See Line Items Below | Region of Action- NA |
6146A LI - 1 | Change definition and calculation of cost footprint (CF) to cost footprint rectangle area (Acf) | Published 06/15/2018 | Region of Action- NA |
6146A LI - 2 | Provide additional guidance for calculating/estimating throughput per SEMI E79. | Published 06/15/2018 | Region of Action- NA |
6146A LI - 3 | Provide additional guidance for calculating/estimating utilization and uptime metrics per SEMI E10. | Published 06/15/2018 | Region of Action- NA |
6146A LI - 4 | Clarify what types of engineering should be included. | Published 06/15/2018 | Region of Action- NA |
6146A LI - 5 | Clarify the difference between initial training vs. ongoing training and clarify what training-related costs are included. | Published 06/15/2018 | Region of Action- NA |
6146A LI - 6 | Update the definitions of ‘consumable material’ and ‘consumable part’ to match the ones in referenced SEMI E10. | Published 06/15/2018 | Region of Action- NA |
6146A LI - 7 | Revise and harmonize the SEMI E35 Cost Elements Section 9 with the SEMI E140 Definitions worksheet. | Published 06/15/2018 | Region of Action- NA |
6146A LI - 8 | Miscellaneous minor technical and/or editorial changes needed. | Published 06/15/2018 | Region of Action- NA |
6184 | Revision to SEMI E135, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment | Published 09/28/2018 | Region of Action- NA |
6241 | Reapproval of SEMI E113-0306 (Reapproved 0512), Specification for Semiconductor Processing Equipment RF Power Delivery Systems | Published 05/25/2018 | Region of Action- NA |
6242 | Reapproval of SEMI E136-1104 (Reapproved 0512), Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems | Published 05/25/2018 | Region of Action- NA |
6243 | Reapproval of SEMI E143-0306 (Reapproved 0512), Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at Any Phase Angle | Published 05/25/2018 | Region of Action- NA |
6400 | Record of Editorial Change by TC and approved by ISC A&R for SEMI E33-0217, Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) | Published 10/19/2018 | Region of Action- NA |
6467 | Line-Item Revision to SEMI E129-0912, Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility | See Line Items Below | Region of Action- NA |
6467 LI - 1 | Update ITRS references | Published 02/10/2022 | Region of Action- NA |
6467 LI - 2 | Update referenced documents and remove obsolete or outdated documents | Published 02/10/2022 | Region of Action- NA |
6467 LI - 3 | Editorial and minor technical changes | Published 02/10/2022 | Region of Action- NA |
6468 | Line-Item Revision to SEMI E78-0912, Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment | See Line Items Below | Region of Action- NA |
6468 LI - 1 | Update ITRS references | Published 02/10/2022 | Region of Action- NA |
6468 LI - 2 | Update referenced documents and remove obsolete or outdated documents | Published 02/10/2022 | Region of Action- NA |
6468 LI - 3 | Editorial and minor technical changes | Published 02/10/2022 | Region of Action- NA |
6472 | New Standard: Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing | Published as SEMI E180-1219 12/13/2019 | Region of Action- NA |
6508 | Reapproval to SEMI E43-0813: Guide for Electrostatic Measurements on Objects and Surfaces | Published 10/18/2019 | Region of Action- NA |
6550 | Revision to SEMI E113-0306 (Reapproved 0518), "Specification for Semiconductor Processing Equipment RF Power Delivery Systems" with title change to "Specification for RF Power Delivery Systems Used in Semiconductor Processing Equipment" | Failed Technical Review and Returned to TF 12/12/2019 | Region of Action- Japan |
6550A | Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems | Passed Technical Review - Awaiting Procedural Review 12/13/2023 | Region of Action- Japan |
6567 | Reapproval to SEMI E149-0314: Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment | Drafting 07/24/2019 | Region of Action- NA |
6568 | Reapproval to SEMI E150-0314: Guide for Equipment Training Best Practices | Drafting 07/25/2019 | Region of Action- NA |
6569 | Reapproval to SEMI E165-0813: Guide for a Comprehensive Equipment Training System when Dedicated Training Equipment is not Available | Drafting 07/24/2019 | Region of Action- NA |
6578 | Revision to SEMI E10-0814E: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization | Drafting 10/25/2019 | Region of Action- NA |
6578 | Revision to SEMI E10-0814E: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization | Failed Technical Review and Returned to TF 09/04/2020 | Region of Action- NA |
6579 | Revision to SEMI E79-0814E: Specification for Definition and Measurement of Equipment Productivity | Drafting 10/25/2019 | Region of Action- NA |
6579 | Revision to SEMI E79-0814E: Specification for Definition and Measurement of Equipment Productivity | Failed Technical Review and Returned to TF 09/04/2020 | Region of Action- NA |
6599 | Line Item Revision to SEMI E180-1219, Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing. | See Line Items Below | Region of Action- NA |
6599 LI - 1 | SEMI E180 - To clarify what is discarded after the extraction solution is collected | Published 12/18/2020 | Region of Action- NA |
6676 | Revision to SEMI E136-1104 (Reapproved 0512)
TEST METHOD FOR DETERMINING THE OUTPUT POWER OF RF
GENERATORS USED IN SEMICONDUCTOR PROCESSING
EQUIPMENT RF POWER DELIVERY SYSTEMS | Published 01/28/2022 | Region of Action- NA |
6678 | Revision to SEMI E10-0814E: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization | Published 02/26/2021 | Region of Action- NA |
6679 | Revision to SEMI E79-0814E: Specification for Definition and Measurement of Equipment Productivity | Published 02/26/2021 | Region of Action- NA |
6785 | LINE ITEM REVISIONS TO SEMI E10-0221: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization | See Line Items Below | Region of Action- NA |
6785 LI - 1 | Add the advanced concepts of predictive maintenance | Published 04/29/2022 | Region of Action- NA |
6785 LI - 2 | Add additional guidance for calculating the metrics for an automated material handling system (AMHS) | Published 04/29/2022 | Region of Action- NA |
6785 LI - 3 | Add additional guidance in Appendix 2 for calculating the reliability growth and degradation | Published 04/29/2022 | Region of Action- NA |
6785 LI - 4 | Update definition of ‘consumable part’ | Published 04/29/2022 | Region of Action- NA |
6785 LI - 5 | Update definition of ‘failure’ to address safety errors. | Published 04/29/2022 | Region of Action- NA |
6785 LI - 6 | Clarification on initiation of equipment state transitions | Published 04/29/2022 | Region of Action- NA |
6785 LI - 7 | Clarification on use of the Productive (PRD) equipment state | Published 04/29/2022 | Region of Action- NA |
6785 LI - 8 | Implement miscellaneous minor technical and editorial changes as needed | Published 04/29/2022 | Region of Action- NA |
6786 | LINE ITEM REVISIONS TO SEMI E79-0221: Specification for Definition and Measurement of Equipment Productivity | See Line Items Below | Region of Action- NA |
6786 LI - 1 | Harmonize ‘consumable part” term and definition with SEMI E10 | Published 04/29/2022 | Region of Action- NA |
6786 LI - 2 | Implement editorial and minor technical changes as needed (e.g., to comply with Style Manual, Regulations, and/or Procedure Manual | Published 04/29/2022 | Region of Action- NA |
6838 | Reapproval of SEMI E114-0302E (Reapproved 0616), Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems | Published 09/29/2023 | Region of Action- NA |
6839 | Reapproval of SEMI E115-0302E (Reapproved 0816), Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems | Published 09/29/2023 | Region of Action- NA |
6841 | Line-item Revisions to SEMI E35-0618 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment | See Line Items Below | Region of Action- NA |
6841 LI - 1 | Update terms and/or definitions with SEMI E10 and E79 | Published 10/14/2022 | Region of Action- NA |
6841 LI - 2 | Update the definition of equipment yield (EY) | Published 10/14/2022 | Region of Action- NA |
6841 LI - 3 | Miscellaneous, minor, technical and editorial changes | Published 10/14/2022 | Region of Action- NA |
6842 | Line-item Revisions to SEMI E140-0618 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems | See Line Items Below | Region of Action- NA |
6842 LI - 1 | Update terms and/or definitions with SEMI E10 and E79 | Published 10/14/2022 | Region of Action- NA |
6842 LI - 2 | Update the definition of equipment yield (EY) | Published 10/14/2022 | Region of Action- NA |
6842 LI - 3 | Miscellaneous, minor, technical and editorial changes | Published 10/14/2022 | Region of Action- NA |
6894 | Line Item Revision to E33-0217E, Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) and E176-1017, Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment | See Line Items Below | Region of Action- NA |
6894 LI - 1 | Move Appendix 1 from SEMI E33 to E176 | Drafting 02/10/2024 | Region of Action- NA |
6894 LI - 2 | Update References and Other Editorial Changes | Drafting 02/10/2024 | Region of Action- NA |
6931 | New Standard: Test Method for Measuring Organics Contamination Through Thermal Desorption or Solvent Extraction Gas Chromatography Mass Spectrometry of Critical Chamber Components Used in Semiconductor Wafer Processing and Inspection | Failed Technical Review and Returned to TF 11/09/2023 | Region of Action- NA |
6971 | Revision of SEMI E163-0212 (Reapproved 1217) With Title Change To:
Guide for the Handling of Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas | Failed Technical Review and Returned to TF 10/26/2022 | Region of Action- NA |
7056 | Reapproval of SEMI E168-0915, Specification for Product Time Measurement | Published 09/29/2023 | Region of Action- NA |
7057 | Reapproval of SEMI E168.1-1114, Specification for Product Time Measurement in GEM 300 Production Equipment | Published 09/29/2023 | Region of Action- NA |
7058 | Reapproval of SEMI E168.2-0915, Specification for Product Time Measurement for Material Control Systems | Published 09/29/2023 | Region of Action- NA |
7059 | Reapproval of SEMI E168.3-0915, Specification for Product Time Measurement for Transport | Published 09/29/2023 | Region of Action- NA |
7129 | New Standard: Test Method for Measuring Particles and Contamination by A Liquid Particle Counter of Critical Chamber Components Used in Semiconductor Wafer Processing and Inspection | Failed Technical Review and Returned to TF 11/09/2023 | Region of Action- NA |
7129A | New Standard: Test Method for Liquid Particle Counter Measuring Particles Contamination of Critical Chamber Components and Coupons | Drafting 01/18/2024 | Region of Action- NA |
7130 | New Standard: Test Method for Measuring Surface Contamination by Particle Concentration Through Replacement Substrate and Optical Metrology of Critical Chamber Components Used in Semiconductor Wafer Processing and Inspection | Failed Technical Review and Returned to TF 11/09/2023 | Region of Action- NA |
7130A | New Standard: Test Method for Measuring Surface Contamination by Particle Concentration Through Replacement Substrate and Optical Metrology of Critical Chamber Components Used in Semiconductor Wafer Processing and Inspection | Drafting 01/12/2024 | Region of Action- NA |
7131 | Reapproval of SEMI E135-0918, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment | Published 03/15/2024 | Region of Action- NA |
7132 | Reapproval of SEMI E143-0306 (Reapproved 0518), Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle | Published 03/15/2024 | Region of Action- NA |
R5596A | New Standard: Guide To Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment | Published as SEMI E176-1017 10/13/2017 | Region of Action- NA |
R6184 | Revision to SEMI E135-0704, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment | Published 09/28/2018 | Region of Action- NA |
R6472 | New Standard: Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing | Published as SEMI E180-1219 12/13/2019 | Region of Action- NA |