SEMI International Standards
Document Status Report

This page provides a the status of documents being worked on by various Task Forces in the SEMI International Standards program.

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Physical Interfaces & Carriers

4371ARevision to SEMI E85, Specification for Physical AMHS Stocker to Interbay Transport System InteroperabilityPublished 10/02/2008Region of Action- NA
4466BNew Standard: Mechanical Specification of EUV Pod for 150 mm EUVL ReticlesPublished as SEMI E152-0709 06/01/2009Region of Action- NA
4559Revision to SEMI E100-1104 SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 mm RETICLESSee Line Items Below Region of Action- Japan
4570New Standard: Preliminary Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 Foup) and Kinematic CouplingFailed Technical Review and Returned to TF 04/01/2009Region of Action- NA
4570ANew Standard: Preliminary Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 Foup) and Kinematic CouplingFailed Technical Review and Returned to TF 07/16/2009Region of Action- NA
4570BNew Standard: Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic CouplingPublished as SEMI E158-0710 05/20/2010Region of Action- NA
4598Revision to SEMI E84, Specification for Enhanced Carrier Handoff Parallel I/O InterfaceFailed Technical Review and Returned to TF 04/01/2009Region of Action- Other
4598ARevision to SEMI E84-1107, Specification for Enhanced Carrier Handoff Parallel I/O InterfacePublished 10/01/2009Region of Action- Other
4599New Standard: Mechanical Interface Specification for 450 mm Load PortFailed Technical Review and Returned to TF 04/01/2009Region of Action- NA
4599ANew Standard: Mechanical Interface Specification for 450 mm Load PortFailed Technical Review and Returned to TF 07/16/2009Region of Action- NA
4599BNew Standard: Mechanical Interface Specification for 450 mm Load PortPublished as SEMI E154-0310 02/11/2010Region of Action- NA
4641Revision to SEMI E1 with Title Change to: Specification for Open Plastic and Metal Wafer Carriers (Consolidation of SEMI E1, Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers, SEMI E1.1, Standard for 3 inch Plastic and Metal Wafer Carriers, General Usage, SEMI E1.2, Standard for 100 mm Plastic and Metal Wafer Carriers, General Usage, SEMI E1.3, Standard for 125 mm Plastic and Metal Wafer Carriers, General Usage, SEMI E1.4, Standard for 125 mm Plastic and Metal Wafer Carriers, Auto Transport Usage, and SEMI E1.5, Standard for 150 mm Plastic and Metal Wafer Carriers, General Usage, into a Single Document)Published 02/01/2010Region of Action- NA
4688BNew Standard: Mechanical Specification for 450mm AMHS Stocker to Transport InterfacePublished as SEMI E156-0710 06/03/2010Region of Action- NA
4705Reapproval of SEMI E110, Guide for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load PortsPublished 05/29/2009Region of Action- Japan
4706Reapproval of SEMI E19.4, 200 mm Standard Mechanical Interface (SMIF)Published 05/29/2009Region of Action- Japan
4707Reapproval of SEM E92, Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (BOLTS/LIGHT)Published 05/29/2009Region of Action- Japan
4770ANew Standard: Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm WafersPublished as SEMI E159-0611 06/17/2011Region of Action- NA
4778Withdrawal for SEMI E106, Overview Guide to SEMI Standards for Physical Interfaces and Carriers for 300 mm WafersDrafting 11/02/2009Region of Action- NA
4779Reapproval of SEMI E15, Specification for Tool Load PortPublished 01/25/2010Region of Action- NA
4780Reapproval of SEMI E131, Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using BOLTS-MPublished 01/25/2010Region of Action- NA
4818FOUP/Load Port Interoperability ReportAuxiliary Information Published 06/10/2010Region of Action- Japan
4835Reapproval of SEMI E23-1104, Specification for Cassette Transfer Parallel I/O InterfacePublished 06/03/2010Region of Action- NA
4836Withdrawal of SEMI E24-92, Cluster Tool Module Interface: Isolation Valve Interlocks StandardPublished 05/14/2010Region of Action- NA
4837Reapproval of SEMI E100-1104, Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm ReticlesPublished 06/03/2010Region of Action- NA
4838Reapproval of SEMI E101-1104, Guide for EFEM Functional Structure ModelPublished 06/03/2010Region of Action- NA
4839Withdrawal of SEMI E106-1104, Overview Guide to SEMI Standards for Physical Interfaces and Carriers for 300 mm WafersPublished 05/14/2010Region of Action- NA
4843Withdrawal of SEMI E103, Mechanical Specification for a 300 mm Single-Wafer Box System That Emulates a FOUPPublished 09/30/2010Region of Action- Europe
4850Reapproval of SEMI E117-1104, Specification for Reticle Load PortPublished 06/03/2010Region of Action- NA
4967Revision to SEMI E1-0310, Specification for Open Plastic and Metal Wafer CarriersPublished 10/07/2010Region of Action- NA
4980Revision to SEMI E154-0310, Mechanical Interface Specification for 450mm Load PortSee Line Items Below Region of Action- NA
4980
LI - 1
Change y374 thickness; add E158 to Referenced StandardsPublished 10/25/2010Region of Action- NA
4980
LI - 2
Correct dimension text in table to match dimensions in figuresPublished 10/25/2010Region of Action- NA
4980
LI - 3
Add section 7.7 (load port numbering)Published 10/25/2010Region of Action- NA
4980
LI - 4
Revise section R1-8Published 10/25/2010Region of Action- NA
4980
LI - 5
Add text describing that a user defined front panel must allow OHV clearancePublished 10/25/2010Region of Action- NA
4981Revision to SEMI E158-0710, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic CouplingSee Line Items Below Region of Action- NA
4981
LI - 1
Correct minor errorsPublished 10/25/2010Region of Action- NA
4981
LI - 2
Change carrier depth and minor correctionsPublished 10/25/2010Region of Action- NA
4981
LI - 3
Add sense areas for OHT and Carrier DoorPublished 10/25/2010Region of Action- NA
4981
LI - 4
Add definitionsPublished 10/25/2010Region of Action- NA
4981
LI - 5
Remove Related Information paragraph R2-5Published 10/25/2010Region of Action- NA
4982New Standard: Mechanical Interface Specification for 450mm FOSB Load PortPublished as SEMI E162-1111 12/02/2011Region of Action- NA
4983Reapproval of SEMI E15.1-0305, Specification for 300 mm Tool Load Port Published 10/07/2010Region of Action- NA
4984Reapproval of SEMI E57-0600E2, Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers Published 10/07/2010Region of Action- NA
4985Reapproval of SEMI E63-1104, Mechanical Specification for 300mm Box Opener/Loader to Tool Standard (BOLTS-M) InterfacePublished 10/07/2010Region of Action- NA
5069New Standard: Specification for 450 mm Wafer Shipping SystemFailed Technical Review and Returned to TF 07/10/2013Region of Action- NA
5108New Auxiliary Document: 450mm SEMI Standards OverviewAuxiliary Information Published 12/28/2011Region of Action- Japan
5205Revision to SEMI E154-1110, Mechanical Interface Specification for 450 mm Load PortPublished 06/18/2012Region of Action- Japan
5254Reapproval of SEMI E1.9-1106E, Mechanical Specification for Cassettes Used to Transport and Store 300 mm WafersPublished 05/30/2012Region of Action- NA
5255Withdrawal of SEMI E7-91 (Reapproved 1104), Specification for Electrical Interfaces for the U.S. OnlyPublished 03/30/2012Region of Action- NA
5256Reapproval of SEMI E47-0301 (Reapproved 1106), Specification for 150 mm/200 mm Pod HandlesPublished 05/30/2012Region of Action- NA
5257Reapproval of SEMI E47.1-1106, Mechanical Specification for FOUPS Used to Transport and Store 300 mm WafersPublished 05/30/2012Region of Action- NA
5258Reapproval of SEMI E62-1106, Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)Published 05/14/2012Region of Action- NA
5259Reapproval of SEMI E64-1105, Specification for 300 mm Cart to SEMI E15.1 Docking Interface PortPublished 05/14/2012Region of Action- NA
5260Reapproval of SEMI E119-0706, Mechanical Specification for Reduced-Pitch Front-Opening Box for Interfactory Transport of 300 mm WafersPublished 05/14/2012Region of Action- NA
5262Revision to SEMI E152-0709, Mechanical Specification of EUV Pod for 150 mm EUVL ReticlesFailed Technical Review and Returned to TF 10/26/2011Region of Action- NA
5262ALine Items Revision to SEMI E152-0709, Mechanical Specification of EUV Pod for 150 mm EUVL ReticlesSee Line Items Below Region of Action- NA
5262A
LI - 1
Define Two Rear Purge Port AreasPublished 02/28/2014Region of Action- NA
5262A
LI - 2
Define Two Front Purge Port AreasPublished 02/28/2014Region of Action- NA
5262A
LI - 3
Increase Maximum Component Masses and Define z23 for EUV Pod Specific OHT Flange HeightPublished 02/28/2014Region of Action- NA
5262A
LI - 4
Define KC Pin Height z22 and Correct z15 ValuePublished 02/28/2014Region of Action- NA
5262A
LI - 5
Define z21 for EUV Pod Latching PositionPublished 02/28/2014Region of Action- NA
5262A
LI - 6
Define RFID Terminology and Clarify RFID LocationPublished 02/28/2014Region of Action- NA
5262A
LI - 7
Define Eight (8) Outer Carrier Info Pad ConfigurationsPublished 02/28/2014Region of Action- NA
5262A
LI - 8
Correct Values of x4, y5Published 02/28/2014Region of Action- NA
5262A
LI - 9
Redefining x1 and y1 to Clarify Reticle Position within Inner PodPublished 02/28/2014Region of Action- NA
5263Revisions to SEMI E158-1110, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling, and SEMI E159-0611, Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450mm WafersSee Line Items Below Region of Action- NA
5263
LI - 1
SEMI E158 (450 FOUP) – Text edits to clarify descriptions and to match existing figuresPublished 03/22/2012Region of Action- NA
5263
LI - 2
SEMI E158 (450 FOUP) – Modify shape of Carrier Frame Pin Hole to address tolerance conflicts between pin hole and load port pin diametersPublished 03/22/2012Region of Action- NA
5263
LI - 3
SEMI E159 (450 MAC) – Insert definition in Section 5.2Published 03/22/2012Region of Action- NA
5263
LI - 4
SEMI E159 (450 MAC) – Enhance the text description of the bounds of the COG volume to match Figure 6Published 03/22/2012Region of Action- NA
5263
LI - 5
SEMI E159 (450 MAC) – Minor correctionsPublished 03/22/2012Region of Action- NA
5263
LI - 6
SEMI E159 (450 MAC) – Text edits to clarify descriptions and to match existing figuresPublished 03/22/2012Region of Action- NA
5263
LI - 7
SEMI E159 (450 MAC) - Modify shape of Carrier Frame Pin Hole to address tolerance conflicts between pin hole and loadport pin diametersPublished 03/22/2012Region of Action- NA
5264Revision to SEMI E144-0306, Provisonal Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment with title change to: Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling EquipmentPublished 03/30/2012Region of Action- NA
5363Removal of SEMI E31-0093, Specification for Electrical Interface, Japan OnlyPublished 07/20/2012Region of Action- Japan
5364Revision to SEMI E162-1111, Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load PortPublished 09/26/2012Region of Action- Japan
5413Revision of SEMI E19-0309, Standard Mechanical Interface (SMIF)Published 09/26/2012Region of Action- NA
5414Revision of SEMI E19.4-0998E, 200 mm Standard Mechanical Interface (SMIF)Published 09/26/2012Region of Action- NA
5461Reapproval of SEMI E73-0301 (Reapproved 0307), Specification for Vacuum Pump Interfaces - Dry PumpsPublished 04/26/2013Region of Action- NA
5462Reapproval of SEMI E74-0301 (Reapproved 0307), Specification for Vacuum Pump Interfaces - Turbomolecular PumpsPublished 04/26/2013Region of Action- NA
5463Revision to SEMI E83-1106, Specification for 300 mm PGV Mechanical Docking Flange with title change to: Specification for PGV Mechanical Docking FlangePublished 04/26/2013Region of Action- NA
5464Revision to SEMI E154-0612, Mechanical Interface Specification for 450 mm Load PortPublished 07/03/2013Region of Action- NA
5465Line Item Revision to SEMI E111-1106, Mechanical Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch ReticleSee Line Items Below Region of Action- NA
5465
LI - 1
Addition of Related Information 1, Sensors for Reticle SMIF Pod (RSP150) DetectionPublished 12/20/2013Region of Action- NA
5466Line Item Revision to SEMI E112-1106, Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch ReticlesSee Line Items Below Region of Action- NA
5466
LI - 1
Addition of Related Information 1, Sensors for Multiple Reticle SMIF Pod (MRSP150) DetectionPublished 12/20/2013Region of Action- NA
5488New Standard: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport StandardFailed Technical Review and Returned to TF 12/07/2012Region of Action- Japan
5488ANew Standard: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport StandardPublished as SEMI E166-0513 05/24/2013Region of Action- Japan
5489Reapproval of SEMI E85-1108, Specification for Physical AMHS Stocker to Interbay Transport System InteroperabilityPublished 05/24/2013Region of Action- Japan
5523Removal of SEMI E7-91 (Withdrawn 0312), Specification for Electrical Interfaces for the U.S. OnlyPublished 09/27/2013Region of Action- NA
5524Revisions to SEMI E156-0710, Mechanical Specification for 450 mm AMHS Stocker to Transport Interface, with title change to MECHANICAL INTEFACE SPECIFICATION FOR 450 mm AMHS STOCKER TO TRANSPORT EQUIPMENT Failed Technical Review and Returned to TF 12/04/2014Region of Action- Japan
5557Revision to SEMI AUX023-1211, Overview Guide to SEMI Standards for 450mm WafersAuxiliary Information Published 11/20/2013Region of Action- NA
5584Line Item Revision to SEMI E19-0912, Standard Mechanical Interface (SMIF)See Line Items Below Region of Action- NA
5584
LI - 1
Addition of Related Information 1, Sensors for Reticle SMIF Pod (RSP150) DetectionPublished 12/20/2013Region of Action- NA
5585Line Item Revision to SEMI E19.3-0309, Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) PortSee Line Items Below Region of Action- NA
5585
LI - 1
Addition of Related Information 1, Sensors for Reticle SMIF Pod (RSP150) DetectionPublished 12/20/2013Region of Action- NA
5626Line Item Revisions to SEMI E154-0713, Mechanical Interface Specification for 450 mm Load Port AND to SEMI E166-0513, Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard for addition of EFEM PocketSee Line Items Below Region of Action- NA
5626
LI - 1
New section 11 in the E154 for EFEM Lower Robot Volume, Add the related information in the E154 & E166Published 08/29/2014Region of Action- NA
5626
LI - 2
Correction the z105 of table1 in E154Published 08/29/2014Region of Action- NA
5628Line Item Revisions to SEMI E158-0912, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling and SEMI E159-0312, Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm WafersSee Line Items Below Region of Action- NA
5628
LI - 1
Correct the Formula of Paragraph A3-1.6 in Appendix 3 (Method for Measuring Carrier Center of Gravity) of SEMI E158-0912 (450 FOUP) and SEMI E159-0912 (MAC)Published 03/28/2014Region of Action- NA
5628
LI - 2
Correction of Table 1 in SEMI E158-0912 (450 FOUP)Published 03/28/2014Region of Action- NA
5676Line Item Revisions to SEMI E83-0413, Specification for PGV Mechanical Docking FlangeSee Line Items Below Region of Action- NA
5676
LI - 1
Line Item 1: Revision to R1-1.10Published 07/17/2014Region of Action- NA
5690Revision to SEMI AUX023-1113, Overview Guide to SEMI Standards for 450 mm WafersAuxiliary Information Published 06/27/2014Region of Action- Japan
5711Reapproval of SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and WeightFailed Technical Review and Returned to TF 07/09/2014Region of Action- NA
5758Revision to SEMI AUX023-0614, Overview Guide to SEMI Standards for 450 mm WafersPassed Technical Review - Awaiting Procedural Review 11/05/2014Region of Action- NA
5759Line Item Revisions to SEMI E83-0714, Specification for PGV Mechanical Docking FlangeSee Line Items Below Region of Action- NA
5759
LI - 1
Delete Note 1 and Add Reference to SEMI G95Passed Technical Review - Awaiting Procedural Review 11/05/2014Region of Action- NA
5759
LI - 2
Add the Reach (d16) Number for G95 (LP for Tape Frame Cassettes) to Table 1Passed Technical Review - Awaiting Procedural Review 11/05/2014Region of Action- NA
5777Reapproval of SEMI E92-0302E, Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (Bolts/Light)Passed Technical Review - Awaiting Procedural Review 12/04/2014Region of Action- Japan