| 4371A | Revision to SEMI E85, Specification for Physical AMHS Stocker to Interbay Transport System Interoperability | Published 10/02/2008 | Region of Action- NA |
| 4466B | New Standard: Mechanical Specification of EUV Pod for 150 mm EUVL Reticles | Published as SEMI E152-0709 06/01/2009 | Region of Action- NA |
| 4559 | Revision to SEMI E100-1104 SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 mm RETICLES | See Line Items Below | Region of Action- Japan |
| 4570 | New Standard: Preliminary Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 Foup) and Kinematic Coupling | Failed Technical Review and Returned to TF 04/01/2009 | Region of Action- NA |
| 4570A | New Standard: Preliminary Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 Foup) and Kinematic Coupling | Failed Technical Review and Returned to TF 07/16/2009 | Region of Action- NA |
| 4570B | New Standard: Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling | Published as SEMI E158-0710 05/20/2010 | Region of Action- NA |
| 4598 | Revision to SEMI E84, Specification for Enhanced Carrier Handoff Parallel I/O Interface | Failed Technical Review and Returned to TF 04/01/2009 | Region of Action- Other |
| 4598A | Revision to SEMI E84-1107, Specification for Enhanced Carrier Handoff Parallel I/O Interface | Published 10/01/2009 | Region of Action- Other |
| 4599 | New Standard: Mechanical Interface Specification for 450 mm Load Port | Failed Technical Review and Returned to TF 04/01/2009 | Region of Action- NA |
| 4599A | New Standard: Mechanical Interface Specification for 450 mm Load Port | Failed Technical Review and Returned to TF 07/16/2009 | Region of Action- NA |
| 4599B | New Standard: Mechanical Interface Specification for 450 mm Load Port | Published as SEMI E154-0310 02/11/2010 | Region of Action- NA |
| 4641 | Revision to SEMI E1 with Title Change to: Specification for Open Plastic and Metal Wafer Carriers
(Consolidation of SEMI E1, Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers, SEMI E1.1, Standard for 3 inch Plastic and Metal Wafer Carriers, General Usage, SEMI E1.2, Standard for 100 mm Plastic and Metal Wafer Carriers, General Usage, SEMI E1.3, Standard for 125 mm Plastic and Metal Wafer Carriers, General Usage, SEMI E1.4, Standard for 125 mm Plastic and Metal Wafer Carriers, Auto Transport Usage, and SEMI E1.5, Standard for 150 mm Plastic and Metal Wafer Carriers, General Usage, into a Single Document) | Published 02/01/2010 | Region of Action- NA |
| 4688B | New Standard: Mechanical Specification for 450mm AMHS Stocker to Transport Interface | Published as SEMI E156-0710 06/03/2010 | Region of Action- NA |
| 4705 | Reapproval of SEMI E110, Guide for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports | Published 05/29/2009 | Region of Action- Japan |
| 4706 | Reapproval of SEMI E19.4, 200 mm Standard Mechanical Interface (SMIF) | Published 05/29/2009 | Region of Action- Japan |
| 4707 | Reapproval of SEM E92, Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (BOLTS/LIGHT) | Published 05/29/2009 | Region of Action- Japan |
| 4770A | New Standard: Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers | Published as SEMI E159-0611 06/17/2011 | Region of Action- NA |
| 4778 | Withdrawal for SEMI E106, Overview Guide to SEMI Standards for Physical Interfaces and Carriers for 300 mm Wafers | Drafting 11/02/2009 | Region of Action- NA |
| 4779 | Reapproval of SEMI E15, Specification for Tool Load Port | Published 01/25/2010 | Region of Action- NA |
| 4780 | Reapproval of SEMI E131, Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using BOLTS-M | Published 01/25/2010 | Region of Action- NA |
| 4818 | FOUP/Load Port Interoperability Report | Auxiliary Information Published 06/10/2010 | Region of Action- Japan |
| 4835 | Reapproval of SEMI E23-1104, Specification for Cassette Transfer Parallel I/O Interface | Published 06/03/2010 | Region of Action- NA |
| 4836 | Withdrawal of SEMI E24-92, Cluster Tool Module Interface: Isolation Valve Interlocks Standard | Published 05/14/2010 | Region of Action- NA |
| 4837 | Reapproval of SEMI E100-1104, Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles | Published 06/03/2010 | Region of Action- NA |
| 4838 | Reapproval of SEMI E101-1104, Guide for EFEM Functional Structure Model | Published 06/03/2010 | Region of Action- NA |
| 4839 | Withdrawal of SEMI E106-1104, Overview Guide to SEMI Standards for Physical Interfaces and Carriers for 300 mm Wafers | Published 05/14/2010 | Region of Action- NA |
| 4843 | Withdrawal of SEMI E103, Mechanical Specification for a 300 mm Single-Wafer Box System That Emulates a FOUP | Published 09/30/2010 | Region of Action- Europe |
| 4850 | Reapproval of SEMI E117-1104, Specification for Reticle Load Port | Published 06/03/2010 | Region of Action- NA |
| 4967 | Revision to SEMI E1-0310, Specification for Open Plastic and Metal Wafer Carriers | Published 10/07/2010 | Region of Action- NA |
| 4980 | Revision to SEMI E154-0310, Mechanical Interface Specification for 450mm Load Port | See Line Items Below | Region of Action- NA |
4980
LI - 1 | Change y374 thickness; add E158 to Referenced Standards | Published 10/25/2010 | Region of Action- NA |
4980
LI - 2 | Correct dimension text in table to match dimensions in figures | Published 10/25/2010 | Region of Action- NA |
4980
LI - 3 | Add section 7.7 (load port numbering) | Published 10/25/2010 | Region of Action- NA |
4980
LI - 4 | Revise section R1-8 | Published 10/25/2010 | Region of Action- NA |
4980
LI - 5 | Add text describing that a user defined front panel must allow OHV clearance | Published 10/25/2010 | Region of Action- NA |
| 4981 | Revision to SEMI E158-0710, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling | See Line Items Below | Region of Action- NA |
4981
LI - 1 | Correct minor errors | Published 10/25/2010 | Region of Action- NA |
4981
LI - 2 | Change carrier depth and minor corrections | Published 10/25/2010 | Region of Action- NA |
4981
LI - 3 | Add sense areas for OHT and Carrier Door | Published 10/25/2010 | Region of Action- NA |
4981
LI - 4 | Add definitions | Published 10/25/2010 | Region of Action- NA |
4981
LI - 5 | Remove Related Information paragraph R2-5 | Published 10/25/2010 | Region of Action- NA |
| 4982 | New Standard: Mechanical Interface Specification for 450mm FOSB Load Port | Published as SEMI E162-1111 12/02/2011 | Region of Action- NA |
| 4983 | Reapproval of SEMI E15.1-0305, Specification for 300 mm Tool Load Port | Published 10/07/2010 | Region of Action- NA |
| 4984 | Reapproval of SEMI E57-0600E2, Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers | Published 10/07/2010 | Region of Action- NA |
| 4985 | Reapproval of SEMI E63-1104, Mechanical Specification for 300mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface | Published 10/07/2010 | Region of Action- NA |
| 5069 | New Standard: Specification for 450 mm Wafer Shipping System | Drafting 05/29/2013 | Region of Action- NA |
| 5108 | New Auxiliary Document: 450mm SEMI Standards Overview | Auxiliary Information Published 12/28/2011 | Region of Action- Japan |
| 5205 | Revision to SEMI E154-1110, Mechanical Interface Specification for 450 mm Load Port | Published 06/18/2012 | Region of Action- Japan |
| 5254 | Reapproval of SEMI E1.9-1106E, Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers | Published 05/30/2012 | Region of Action- NA |
| 5255 | Withdrawal of SEMI E7-91 (Reapproved 1104), Specification for Electrical Interfaces for the U.S. Only | Published 03/30/2012 | Region of Action- NA |
| 5256 | Reapproval of SEMI E47-0301 (Reapproved 1106), Specification for 150 mm/200 mm Pod Handles | Published 05/30/2012 | Region of Action- NA |
| 5257 | Reapproval of SEMI E47.1-1106, Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers | Published 05/30/2012 | Region of Action- NA |
| 5258 | Reapproval of SEMI E62-1106, Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) | Published 05/14/2012 | Region of Action- NA |
| 5259 | Reapproval of SEMI E64-1105, Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port | Published 05/14/2012 | Region of Action- NA |
| 5260 | Reapproval of SEMI E119-0706, Mechanical Specification for Reduced-Pitch Front-Opening Box for Interfactory Transport of 300 mm Wafers | Published 05/14/2012 | Region of Action- NA |
| 5262 | Revision to SEMI E152-0709, Mechanical Specification of EUV Pod for 150 mm EUVL Reticles | Failed Technical Review and Returned to TF 10/26/2011 | Region of Action- NA |
| 5262A | Line Items Revision to SEMI E152-0709, Mechanical Specification of EUV Pod for 150 mm EUVL Reticles | See Line Items Below | Region of Action- NA |
5262A
LI - 1 | Define Two Rear Purge Port Areas | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 2 | Define Two Front Purge Port Areas | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 3 | Increase Maximum Component Masses and Define z23 for EUV Pod Specific OHT Flange Height | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 4 | Define KC Pin Height z22 and Correct z15 Value | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 5 | Define z21 for EUV Pod Latching Position | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 6 | Define RFID Terminology and Clarify RFID Location | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 7 | Define Eight (8) Outer Carrier Info Pad Configurations | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 8 | Correct Values of x4, y5 | Drafting 05/28/2013 | Region of Action- NA |
5262A
LI - 9 | Redefining x1 and y1 to Clarify Reticle Position within Inner Pod | Drafting 05/28/2013 | Region of Action- NA |
| 5263 | Revisions to SEMI E158-1110, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling, and SEMI E159-0611, Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450mm Wafers | See Line Items Below | Region of Action- NA |
5263
LI - 1 | SEMI E158 (450 FOUP) – Text edits to clarify descriptions and to match existing figures | Published 03/22/2012 | Region of Action- NA |
5263
LI - 2 | SEMI E158 (450 FOUP) – Modify shape of Carrier Frame Pin Hole to address tolerance conflicts between pin hole and load port pin diameters | Published 03/22/2012 | Region of Action- NA |
5263
LI - 3 | SEMI E159 (450 MAC) – Insert definition in Section 5.2 | Published 03/22/2012 | Region of Action- NA |
5263
LI - 4 | SEMI E159 (450 MAC) – Enhance the text description of the bounds of the COG volume to match Figure 6 | Published 03/22/2012 | Region of Action- NA |
5263
LI - 5 | SEMI E159 (450 MAC) – Minor corrections | Published 03/22/2012 | Region of Action- NA |
5263
LI - 6 | SEMI E159 (450 MAC) – Text edits to clarify descriptions and to match existing figures | Published 03/22/2012 | Region of Action- NA |
5263
LI - 7 | SEMI E159 (450 MAC) - Modify shape of Carrier Frame Pin Hole to address tolerance conflicts between pin hole and loadport pin diameters | Published 03/22/2012 | Region of Action- NA |
| 5264 | Revision to SEMI E144-0306, Provisonal Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment with title change to: Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment | Published 03/30/2012 | Region of Action- NA |
| 5363 | Removal of SEMI E31-0093, Specification for Electrical Interface, Japan Only | Published 07/20/2012 | Region of Action- Japan |
| 5364 | Revision to SEMI E162-1111, Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port | Published 09/26/2012 | Region of Action- Japan |
| 5413 | Revision of SEMI E19-0309, Standard Mechanical Interface (SMIF) | Published 09/26/2012 | Region of Action- NA |
| 5414 | Revision of SEMI E19.4-0998E, 200 mm Standard Mechanical Interface (SMIF) | Published 09/26/2012 | Region of Action- NA |
| 5461 | Reapproval of SEMI E73-0301 (Reapproved 0307), Specification for Vacuum Pump Interfaces - Dry Pumps | Published 04/26/2013 | Region of Action- NA |
| 5462 | Reapproval of SEMI E74-0301 (Reapproved 0307), Specification for Vacuum Pump Interfaces - Turbomolecular Pumps | Published 04/26/2013 | Region of Action- NA |
| 5463 | Revision to SEMI E83-1106, Specification for 300 mm PGV Mechanical Docking Flange with title change to: Specification for PGV Mechanical Docking Flange | Published 04/26/2013 | Region of Action- NA |
| 5464 | Revision to SEMI E154-0612, Mechanical Interface Specification for 450 mm Load Port | Passed Technical Review - Awaiting Procedural Review 04/03/2013 | Region of Action- NA |
| 5465 | Line Item Revision to SEMI E111-1106, Mechanical Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle | See Line Items Below | Region of Action- NA |
5465
LI - 1 | Addition of Related Information 1, Sensors for Reticle SMIF Pod (RSP150) Detection | Drafting 05/28/2013 | Region of Action- NA |
| 5466 | Line Item Revision to SEMI E112-1106, Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles | See Line Items Below | Region of Action- NA |
5466
LI - 1 | Addition of Related Information 1, Sensors for Multiple Reticle SMIF Pod (MRSP150) Detection | Drafting 05/28/2013 | Region of Action- NA |
| 5488 | New Standard: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard | Failed Technical Review and Returned to TF 12/07/2012 | Region of Action- Japan |
| 5488A | New Standard: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard | Published as SEMI E166-0513 05/24/2013 | Region of Action- Japan |
| 5489 | Reapproval of SEMI E85-1108, Specification for Physical AMHS Stocker to Interbay Transport System Interoperability | Published 05/24/2013 | Region of Action- Japan |
| 5523 | Removal of SEMI E7-91 (Withdrawn 0312), Specification for Electrical Interfaces for the U.S. Only | Passed Technical Review - Awaiting Procedural Review 04/03/2013 | Region of Action- NA |
| 5584 | Line Item Revision to SEMI E19-0912, Standard Mechanical Interface (SMIF) | See Line Items Below | Region of Action- NA |
5584
LI - 1 | Addition of Related Information 1, Sensors for Reticle SMIF Pod (RSP150) Detection | Drafting 05/28/2013 | Region of Action- NA |
| 5585 | Line Item Revision to SEMI E19.3-0309, Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port | See Line Items Below | Region of Action- NA |
5585
LI - 1 | Addition of Related Information 1, Sensors for Reticle SMIF Pod (RSP150) Detection | Drafting 05/28/2013 | Region of Action- NA |