| 5817 | Revision to SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and Weight with title change to: Specification and Guide for Equipment Footprint, Height, and Weight | Failed Technical Review and Returned to TF 04/06/2016 | Region of Action- NA |
| 5817A | Revision to SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and Weight with title change to: Specification and Guide for Equipment Footprint, Height, and Weight | Published 10/28/2016 | Region of Action- NA |
| 5869A | Line Item Revision to SEMI E84-1109, Specification for Enhanced Carrier Handoff Parallel I/O Interface | See Line Items Below | Region of Action- Japan |
5869A
LI - 1 | Add to § R1-2.2 of RELATED INFORMATION 1 | Document Discontinued 04/14/2016 | Region of Action- Japan |
| 5941 | Line Item Revision to Add Related Information 2 to SEMI E111 and References to SEMI E112, E117, E19 | See Line Items Below | Region of Action- NA |
5941
LI - 1 | Add the following Related Information 2 section to SEMI E111. | Failed Technical Review and Returned to TF 07/13/2016 | Region of Action- NA |
5941
LI - 2 | Add the reference to E111 in section 5.1 and Related Information 2 section in SEMI E19. | Failed Technical Review and Returned to TF 07/13/2016 | Region of Action- NA |
5941
LI - 3 | Add the reference to E111 in section 3.1 and Related Information 2 section in SEMI E112. | Failed Technical Review and Returned to TF 07/13/2016 | Region of Action- NA |
5941
LI - 4 | Add the following Related Information 2 section to SEMI E117 | Failed Technical Review and Returned to TF 07/13/2016 | Region of Action- NA |
| 5950 | Reapproval of SEMI E1-1110 Specification for Open Plastic and Metal Wafer Carriers | Published 08/26/2016 | Region of Action- NA |
| 5951 | Reapproval of SEMI E100-1104 (Reapproved 0710) Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles | Failed Technical Review and Returned to TF 04/06/2016 | Region of Action- NA |
| 5952 | Reapproval of SEMI E117-1104 (Reapproved 0710) Specification for Reticle Load Port | Published 08/26/2016 | Region of Action- NA |
| 5953 | Reapproval of SEMI E131-0304 (Reapproved 0310) Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M | Failed Technical Review and Returned to TF 04/06/2016 | Region of Action- NA |
| 5954 | Reapproval of SEMI E15.1-0305 (Reapproved 1110) Specification for 300 mm Tool Load Port | Failed Technical Review and Returned to TF 04/05/2016 | Region of Action- NA |
| 5955 | Line Item Revision of SEMI E63-1104 (Reapproved 1110) Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface with Title Change to: Specification for 300 mm Box Opener/Loader to Tool Standard Mechanical (BOLTS-M) Interface | See Line Items Below | Region of Action- NA |
5955
LI - 1 | Correct title and concomitant text of SEMI E63 | Published 06/30/2016 | Region of Action- NA |
| 5956 | Line Item Revision of SEMI E57-0600 (Reapproved 1110) Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers with Title Change to: Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers | See Line Items Below | Region of Action- NA |
5956
LI - 1 | Correct the title of SEMI E57 | Published 06/30/2016 | Region of Action- NA |
| 5965 | Reapproval of SEMI E15-0698E2 (Reapproved 0310) Specification for Tool Load Port | Published 10/14/2016 | Region of Action- NA |
| 5974 | New Auxiliary Information: 450mm PIC Interoperability | Published 06/28/2017 | Region of Action- Japan |
| 6051 | Line Item Revision to Modify the Nonconforming Title of SEMI E111-1213, Mechanical Specification for a 150 mm Reticle SMIF Pod (Rsp150) Used to Transport and Store a 6 Inch Reticle | See Line Items Below | Region of Action- NA |
6051
LI - 1 | Correct the title of SEMI E111 from “Mechanical Specification for a 150 mm Reticle SMIF Pod (Rsp150) Used to Transport and Store a 6 Inch Reticle” to “Specification for Mechanical Definition of a 150 mm Reticle SMIF Pod (Rsp150) Used to Transport and Store a 6 Inch Reticle” | Failed Technical Review and Returned to TF 11/09/2016 | Region of Action- NA |
| 6051A | Line Item Revisions to SEMI E111-1213, Mechanical Specification for a 150 mm Reticle SMIF Pod (Rsp150) Used to Transport and Store a 6 Inch Reticle | See Line Items Below | Region of Action- NA |
6051A
LI - 1 | Correct the title of SEMI E111 from “Mechanical Specification for a 150 mm Reticle SMIF Pod (Rsp150) Used to Transport and Store a 6 Inch Reticle” to “Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle” | Published 10/20/2017 | Region of Action- NA |
6051A
LI - 2 | Correct definitions to conform to the Style Manual as indicated | Published 10/20/2017 | Region of Action- NA |
| 6052 | Line Item Revision to Modify the Nonconforming Title of SEMI E112-1213, Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles | See Line Items Below | Region of Action- NA |
6052
LI - 1 | Correct the title of SEMI E112 from “Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles” to “Specification for Mechanical Definition of a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles” | Failed Technical Review and Returned to TF 11/09/2016 | Region of Action- NA |
| 6052A | Line Item Revision to SEMI E112-1213, Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles | See Line Items Below | Region of Action- NA |
6052A
LI - 1 | Correct the title of SEMI E112 from “Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles” to “Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles” | Published 10/20/2017 | Region of Action- NA |
6052A
LI - 2 | Correct definitions to conform to the Style Manual as indicated | Published 10/20/2017 | Region of Action- NA |
| 6053 | Line Item Revisions to Modify the Nonconforming Titles of SEMI E19 and SEMI E19.1-E19.4 | See Line Items Below | Region of Action- NA |
6053
LI - 1 | Correct the title of SEMI E19 from “Standard Mechanical Interface (SMIF)” to “Specification for Standard Mechanical Interface (SMIF)” | Published 04/21/2017 | Region of Action- NA |
6053
LI - 2 | Correct the title of SEMI E19.1 from “Standard Mechanical Interface (SMIF), Specification for 100 mm (4 inch) Port” to “Specification for 100 mm (4inch) Port for Standard Mechanical Interface (SMIF)” | Published 04/21/2017 | Region of Action- NA |
6053
LI - 3 | Correct the title of SEMI E19.2 from “Standard Mechanical Interface (SMIF), Specification for 125 mm (5 inch) Port” to “Specification for 125 mm (5 inch) Port for Standard Mechanical Interface (SMIF)” | Published 04/21/2017 | Region of Action- NA |
6053
LI - 4 | Correct the title of SEMI E19.3 from “Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port” to “Specification for 150 mm (6 inch) Port for Standard Mechanical Interface (SMIF)” | Published 04/21/2017 | Region of Action- NA |
6053
LI - 5 | Correct the title of SEMI E19.4 from “200 mm Standard Mechanical Interface (SMIF)” to “Specification for 200 mm Standard Mechanical Interface (SMIF)” | Published 04/21/2017 | Region of Action- NA |
| 6130 | Reapproval of SEMI E84-1109: Specification for Enhanced Carrier Handoff Parallel I/O Interface | Published 12/29/2017 | Region of Action- Japan |
| 6249 | Editorial Changes to E158, E159, E154 | Published 04/30/2018 | Region of Action- NA |
| 6311 | New Standard: Specification for TEM lamella carrier used in Electron Microscopy Workflows | Failed Technical Review and Returned to TF 04/03/2019 | Region of Action- NA |
| 6311A | New Standard: Specification for TEM Lamella Carrier Used in Electron Microscopy Workflows | Published as SEMI E177-0919 09/10/2019 | Region of Action- NA |
| 6444 | Line Item Revision to SEMI E152-0214: “Mechanical Specification of EUV Pod for 150 mm EUVL Reticles” with non-conforming title change to “Specification For Mechanical Features of EUV Pod for 150 mm EUVL Reticles” | See Line Items Below | Region of Action- Japan |
6444
LI - 1 | Document title is changed based on A4-1-4 of procedure manual | Published 06/28/2019 | Region of Action- Japan |
6444
LI - 2 | Editorial change the title in Section 3 | Published 06/28/2019 | Region of Action- Japan |
| 6445 | Line Item Revision to SEMI E154-0814E: “Mechanical Interface Specification for 450 mm Load Port” with non-conforming title change to “Specification for Mechanical Features of 450 mm Load Port” | See Line Items Below | Region of Action- Japan |
6445
LI - 1 | Document title is changed based on A4-1-4 of procedure manual | Published 08/16/2019 | Region of Action- Japan |
| 6446 | Line Item Revision to SEMI E158-0314E: “Mechanical Specification For Fab Wafer Carrier Used To Transport And Store 450 mm Wafers (450 FOUP) and Kinematic Coupling” with non-conforming title change to “Specification For Mechanical Features of Fab Wafer Carrier Used To Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling” | See Line Items Below | Region of Action- Japan |
6446
LI - 1 | Document title is changed based on A4-1-4 of procedure manual | Published 08/02/2019 | Region of Action- Japan |
6446
LI - 2 | Editorial change the title in Section 4 | Published 08/02/2019 | Region of Action- Japan |
| 6447 | Line Item Revision to SEMI E159-0314E: “Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers” with non-conforming title change to “Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 Mm Wafers” | See Line Items Below | Region of Action- Japan |
6447
LI - 1 | Document title is changed based on A4-1-4 of procedure manual | Published 08/16/2019 | Region of Action- Japan |
| 6485 | New Standard - Specification for Panel FOUP For Panel Level Packaging | Failed Technical Review and Returned to TF 09/20/2019 | Region of Action- Japan |
| 6525 | Reapproval of SEMI E166-0814: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard | Published 02/21/2020 | Region of Action- Japan |
| 6617 | New Standard - SPECIFICATION FOR 300mm TAPE FRAME FOUP | Drafting 06/02/2020 | Region of Action- Japan |
| 6618 | New Standard - SPECIFICATION FOR PANEL FOUP FOR PANEL LEVEL PACKAGING | Published as SEMI E181-0321 03/05/2021 | Region of Action- Japan |
| 6619 | New Subordinate Standard – SPECIFICATION FOR PANEL FOUP FOR 510 to 515 mm PANEL SIZE and 12 SLOTS | Published as SEMI E181.1-0321 03/05/2021 | Region of Action- Japan |
| 6620 | New Subordinate Standard – SPECIFICATION FOR PANEL FOUP FOR 510 to 515 mm PANEL SIZE and 6 SLOTS | Published as SEMI E181.2-0321 03/05/2021 | Region of Action- Japan |
| 6621 | New Subordinate Standard – SPECIFICATION FOR PANEL FOUP FOR 600 to 600 mm PANEL SIZE and 12 SLOTS | Published as SEMI E181.3-0321 03/05/2021 | Region of Action- Japan |
| 6622 | New Subordinate Standard – SPECIFICATION FOR PANEL FOUP FOR 600 to 600 mm PANEL SIZE and 6 SLOTS | Published as SEMI E181.4-0321 03/05/2021 | Region of Action- Japan |
| 6684 | New Standard - SPECIFICATION FOR PANEL FOUP LOADPORT FOR PANEL LEVEL PACKAGING | Published as SEMI E182-0621 06/10/2021 | Region of Action- Japan |
| 6685 | New Subordinate Standard - SPECIFICATION FOR PANEL FOUP LOADPORT FOR 510MM-515MM PANEL SIZE | Published as SEMI E182.1-0621 06/10/2021 | Region of Action- Japan |
| 6686 | New Subordinate Standard - SPECIFICATION FOR PANEL FOUP LOADPORT FOR 600MM-600MM PANEL SIZE | Published as SEMI E182.2-0621 06/10/2021 | Region of Action- Japan |
| 6688 | New Standard - SPECIFICATION FOR 300mm TAPE FRAME FOUP LOAD PORT | Published as SEMI E184-1221 12/03/2021 | Region of Action- Japan |
| 6689 | New Standard – SPECIFICATION FOR 300mm TAPE FRAME FOUP | Published as SEMI E185-1221 12/03/2021 | Region of Action- Japan |
| 6750 | Line Item Revision to SEMI E181-0321 - SPECIFICATION FOR PANEL FOUP FOR PANEL LEVEL PACKAGING, SEMI E181.1-0321 - SPECIFICATION FOR PANEL FOUP FOR 510 mm – 515 mm PANEL SIZE and 12 SLOTS, SEMI E181.2-0321 - SPECIFICATION FOR PANEL FOUP FOR 510 mm – 515 mm PANEL SIZE and 6 SLOTS, SEMI E181.3-0321 - SPECIFICATION FOR PANEL FOUP FOR 600 mm – 600 mm PANEL SIZE and 12 SLOTS, and SEMI E181.4-0321 - SPECIFICATION FOR PANEL FOUP FOR 600 mm – 600 mm PANEL SIZE and 6 SLOTS | See Line Items Below | Region of Action- Japan |
6750
LI - 1 |
Extended flange area
Add the new section 14.9 and revise the figure 13, figure 14 and table 1 in E181
Revise the table 1 in E181.1, E181.2, E181.3 and E181.4 | Published 02/04/2022 | Region of Action- Japan |
6750
LI - 2 |
Expansion of Presence area
Revise the section 11.1.1, figure 8 and table 1 in E181 | Published 02/04/2022 | Region of Action- Japan |
6750
LI - 3 |
Exclude “door seal” from y4. | Published 02/04/2022 | Region of Action- Japan |
6750
LI - 4 |
Z15 error correction
Revise the Figure 22 in E181
Revise the table 1 in E181.1, E181.2, E181.3 and E181.4 | Published 02/04/2022 | Region of Action- Japan |
| 6751 | Line Item Revision to SEMI E181.3-0321 - SPECIFICATION FOR PANEL FOUP FOR 600 mm – 600 mm PANEL SIZE and 12 SLOTS | See Line Items Below | Region of Action- Japan |
6751
LI - 1 |
Expansion of conveyor rail tolerances
Correction of y5 tolerances from ± 5 to ± 20 in Table 1 | Published 02/04/2022 | Region of Action- Japan |
6751
LI - 2 |
Correct “y” number
Replacement of y number from y74 and y75 to y76 and y77 in Table 1 | Published 02/04/2022 | Region of Action- Japan |
| 6752 | Line Item Revision to SEMI E181.4-0321 - SPECIFICATION FOR PANEL FOUP FOR 600 mm – 600 mm PANEL SIZE and 6 SLOTS | See Line Items Below | Region of Action- Japan |
6752
LI - 1 |
Expansion of conveyor rail tolerances
Correction of y5 tolerances from ±5 to ±20 in Table 1 | Published 02/04/2022 | Region of Action- Japan |
| 6833 | Reapproval of SEMI E63-0616, Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface | Failed Technical Review and Returned to TF 12/08/2021 | Region of Action- Other |
| 6834 | Reapproval of SEMI E72-1016, Specification and Guide for Equipment Footprint, Height, and Weight | Failed Technical Review and Returned to TF 12/08/2021 | Region of Action- Other |
| 6895 | Line Item Revision to SEMI E185-1221-SPECIFICATION FOR 300 mm TAPE FRAME FOUP | See Line Items Below | Region of Action- Japan |
6895
LI - 1 | Make a change in section 5.2.20 as indicated. | Published 12/09/2022 | Region of Action- Japan |
| 6897 | Revision of E92, Specification For 300 mm Light Weight and Compact Box Opener/Loader To Tool-Interoperability Standard (Bolts/Light) | Published 05/26/2023 | Region of Action- Japan |
| 6898 | Revision to SEMI E181, - SPECIFICATION FOR PANEL FOUP FOR PANEL LEVEL PACKAGING | Published 04/28/2023 | Region of Action- Japan |
| 6899 | Revision to SEMI E181.1, - Specification for Panel FOUP for 510 to 515 mm Panel Size and 12 Slots | Published 04/28/2023 | Region of Action- Japan |
| 6900 | Revision to SEMI E181.2, - Specification for Panel FOUP for 510 to 515 mm Panel Size and 6 Slots | Published 04/28/2023 | Region of Action- Japan |
| 6901 | Revision to SEMI E181.3, - Specification for Panel FOUP for 600 to 600 mm Panel Size and 12 Slots | Published 04/28/2023 | Region of Action- Japan |
| 6902 | Revision to SEMI E181.4, - Specification for Panel FOUP for 600 to 600 mm Panel Size and 6 Slots | Published 04/28/2023 | Region of Action- Japan |
| 6918 | Line-Item Revisions to SEMI E63-0616, Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface | See Line Items Below | Region of Action- NA |
6918
LI - 1 | Replace “must” and “are to” with “shall” where needed in Section 5. | Published 02/17/2023 | Region of Action- NA |
6918
LI - 2 | Divide paragraphs in Section 5 such that each paragraph contains only one Requirement. | Published 02/17/2023 | Region of Action- NA |
6918
LI - 3 | Properly express negative Requirements in Section 5. | Published 02/17/2023 | Region of Action- NA |
| 6936 | Line Item Revision of SEMI E182-0621 - Specification for Panel FOUP Loadport for Panel Level Packaging | See Line Items Below | Region of Action- Japan |
6936
LI - 1 | Optimize the resolution of figures | Published 07/31/2023 | Region of Action- Japan |
6936
LI - 2 | Redefinition of LB and clarification of lower space for Loadport | Published 07/31/2023 | Region of Action- Japan |
6936
LI - 3 | Replace the biased terms | Published 07/31/2023 | Region of Action- Japan |
6936
LI - 4 | Relaxing BOLTS screw position tolerances | Published 07/31/2023 | Region of Action- Japan |
| 7000 | Line Item Revision to SEMI E84-1109, Specification for Enhanced Carrier Handoff Parallel I/O Interface | See Line Items Below | Region of Action- Other |
7000
LI - 1 | Replace “see” with “refer to” throughout | Published 08/04/2023 | Region of Action- Other |
| 7112 |
Line Item Revision to SEMI E181-0423 - SPECIFICATION FOR PANEL FOUP FOR PANEL LEVEL PACKAGING, SEMI E181.1-0423 - SPECIFICATION FOR PANEL FOUP FOR 510 mm – 515 mm PANEL SIZE and 12 SLOTS,
SEMI E181.2-0423 - SPECIFICATION FOR PANEL FOUP FOR 510 mm – 515 mm PANEL SIZE and 6 SLOTS,
SEMI E181.3-0423 - SPECIFICATION FOR PANEL FOUP FOR 600 mm – 600 mm PANEL SIZE and 12 SLOTS, and
SEMI E181.4-0423 - SPECIFICATION FOR PANEL FOUP FOR 600 mm – 600 mm PANEL SIZE and 6 SLOTS
| See Line Items Below | Region of Action- Japan |
7112
LI - 1 | Clarify the area to prevent Panel FOUP from falling from AMHS. | Publication Process Started 02/26/2024 | Region of Action- Japan |
7112
LI - 2 | Modify the panel FOUP internal area considering mass production and that includes changing the definition of first slot height. | Publication Process Started 02/26/2024 | Region of Action- Japan |
7112
LI - 3 | Delete the number of slots information in Figure 24 | Publication Process Started 02/26/2024 | Region of Action- Japan |
| 7113 |
Line Item Revision to SEMI E182-0621 - SPECIFICATION FOR PANEL FOUP LOADPORT FOR PANEL LEVEL PACKAGING, | See Line Items Below | Region of Action- Japan |
7113
LI - 1 | Change the y140 value. | Passed Technical Review - Awaiting Procedural Review 08/31/2023 | Region of Action- Japan |
7113
LI - 2 | EFEM Design Considerations when using automation flange.
Hold-Down devices interference | Passed Technical Review - Awaiting Procedural Review 08/31/2023 | Region of Action- Japan |
| 7170 | Line-Item Revision to SEMI E184 -1221E Specification for 300 mm Tape Frame FOUP Load Port | See Line Items Below | Region of Action- Japan |
7170
LI - 1 | Addition of E185 Tape Frame FOUP to reference section | Drafting 02/13/2024 | Region of Action- Japan |
7170
LI - 2 | Bias term correction and editorial correction | Drafting 02/13/2024 | Region of Action- Japan |
| 7171 | Line-Item Revision to SEMI E185 -1222 Specification for 300 mm Tape Frame FOUP | See Line Items Below | Region of Action- Japan |
7171
LI - 1 | Addition of E184 Loadport standard to reference section | Drafting 02/13/2024 | Region of Action- Japan |
7171
LI - 2 | Correction of z0 calculation mistake | Drafting 02/13/2024 | Region of Action- Japan |
7171
LI - 3 | Correction of EE Exclusion volume | Drafting 02/13/2024 | Region of Action- Japan |
7171
LI - 4 | Bias term correction | Drafting 02/13/2024 | Region of Action- Japan |
| R6445 | Line Item Revision to SEMI E154-0814E: “MECHANICAL INTERFACE SPECIFICATION FOR 450 mm LOAD PORT” with non-conforming title change to “SPECIFICATION FOR MECHANICAL FEATURES OF 450 mm LOAD PORT” | See Line Items Below | Region of Action- Japan |
R6445
LI - 1 | Document title is changed based on A4-1-4 of procedure manual | Published 08/16/2019 | Region of Action- Japan |
| R6447 | Line Item Revision to SEMI E159-0314E: “MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 mm WAFERS” with non-conforming title change to “SPECIFICATION FOR MECHANICAL FEATURES OF MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 mm WAFERS” | See Line Items Below | Region of Action- Japan |
R6447
LI - 1 | Document title is changed based on A4-1-4 of procedure manual | Published 08/16/2019 | Region of Action- Japan |
| R6618 | New Standard - SPECIFICATION FOR PANEL FOUP FOR PANEL LEVEL PACKAGING | Published as SEMI E181-0321 03/05/2021 | Region of Action- Japan |
| R6619 | New Subordinate Standard - SPECIFICATION FOR PANEL FOUP FOR 510MM-515MM PANEL SIZE and 12 SLOTS | Published as SEMI E181.1-0321 03/05/2021 | Region of Action- Japan |
| R6620 | New Subordinate Standard - SPECIFICATION FOR PANEL FOUP FOR 510MM-515MM PANEL SIZE and 6 SLOTS | Published as SEMI E181.2-0321 03/05/2021 | Region of Action- Japan |
| R6621 | New Subordinate Standard - SPECIFICATION FOR PANEL FOUP FOR 600MM-600MM PANEL SIZE and 12 SLOTS | Published as SEMI E181.3-0321 03/05/2021 | Region of Action- Japan |
| R6622 | New Subordinate Standard - SPECIFICATION FOR PANEL FOUP FOR 600MM-600MM PANEL SIZE and 6 SLOTS | Published as SEMI E181.4-0321 03/05/2021 | Region of Action- Japan |
| R6684 | New Standard - SPECIFICATION FOR PANEL FOUP LOADPORT FOR PANEL LEVEL PACKAGING | Published as SEMI E182-0621 06/10/2021 | Region of Action- Japan |
| R6688 | New Standard - SPECIFICATION FOR 300mm TAPE FRAME FOUP LOAD PORT | Published as SEMI E184-1221 12/03/2021 | Region of Action- Japan |
| R6689 | New Standard – SPECIFICATION FOR 300mm TAPE FRAME FOUP | Published as SEMI E185-1221 12/03/2021 | Region of Action- Japan |
| R6897 | Revision of E92, Specification For 300 mm Light Weight and Compact Box Opener/Loader To Tool-Interoperability Standard (Bolts/Light) | Published 05/26/2023 | Region of Action- Japan |