SEMI International Standards
New Task Forces and Activities


Below you will find a list of recently created Standards task forces and new activities. Please click on a particular task force or document, for more information.

Hide details for Assembly & Packaging CommitteeAssembly & Packaging Committee
SNARF Doc 5878 - Line Item Revision to SEMI G20-96: SPECIFICATION FOR LEAD FINISHES FOR PLASTIC PACKAGES
SNARF Doc 5879 - Line Item Revision to SEMI G21-94: SPECIFICATION FOR PLATING INTEGRATED CIRCUIT LEADFRAMES
SNARF Doc 5880 - Line Item Revision to SEMI G41-87: SPECIFICATION FOR DUAL STRIP SOIC LEADFRAME
SNARF Doc 5881 - Reapproval of SEMI G83-0912: SPECIFICATION FOR BAR CODE MARKING OF PRODUCT PACKAGES
Hide details for Compound Semiconductor Materials CommitteeCompound Semiconductor Materials Committee
SNARF Doc 5882 - Line Item Revision to SEMI M10-1296, Standard Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide Wafers with title change to: Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide Wafers
Correct nonconforming title per Procedure Manual, Appendix 4
SNARF Doc 5883 - Line Item Revision to SEMI M42-0211, Specification for Compound Semiconductor Epitaxial Wafers
Move DIN standard reference from 'Referenced Standards and Documents' section to a new 'Related Documents' section.
SNARF Doc 5884 - Line Item Revision to SEMI M65-0306E2, Specifications for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers with title change to: Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers
Correct nonconforming title per Procedure Manual, Appendix 4
SNARF Doc 5885 - Line Item Revision to SEMI M75-0812, Specifications for Polished Monocrystalline Gallium Antimonide Wafers with title change to: Specification for Polished Monocrystalline Gallium Antimonide Wafers
Correct nonconforming title per Procedure Manual, Appendix 4
SNARF Doc 5886 - Line Item Revisions to:
- SEMI M9-0914, Specifications for Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Polished Monocrystalline Gallium Arsenide Wafers
- SEMI M9.1-0813, Standard for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications
- SEMI M9.2-0813, Standard for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications
- SEMI M9.5-0813, Standard for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications
- SEMI M9.6-0813, Standard for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers
Correct nonconforming titles per Procedure Manual, Appendix 4
SNARF Doc 5887 - Revision to SEMI M63-0306, Guideline: Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction with title change to: Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction
Major revision to correct nonconforming title per Procedure Manual, Appendix 4
Hide details for EH&S CommitteeEH&S Committee
SNARF Doc 5871 - Line Item Revision to SEMI S8 to add reference to a manual material-handling guide in SEMI-S8, Appendix 2, Lifting, Strength, and Materials Handling.
SNARF Doc 5873 - Line Item Revisions to SEMI E34-1110, Safety Guideline for Mass Flow Device Removal and Shipment
SNARF Doc 5874 - Revision to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SNARF Doc 5875 - Revision to S26-0415: Environmental, Health, and Safety Guideline for FPD Manufacturing System (Line Item Revision)
SNARF Doc 5891 - Revision to SEMI S27, Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports
SNARF Doc 5892 - Revisions to SEMI S5-0310, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves
TFOF Device Removal and Shipment TF
TFOF Flow Limitation TF
TFOF S27 Revision TF
TFOF SDRCM(S Documents REG-PG-SM Conformance Maintenance) TF
Hide details for Gases CommitteeGases Committee
SNARF Doc 5876 - New Standard - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used In Corrosive Gas Systems by Use of a Ferric Chloride Solution
Hide details for Information & Control CommitteeInformation & Control Committee
SNARF Doc 5829 - Line Item Revision to SEMI E171-0515 “Specification for Predictive Carrier Logistics (PCL)” and SEMI E171.1-0515 “Specification for SECS-II Protocol for Predictive Carrier Logistics (PCL)”
SNARF Doc 5844 - Line Item Revision to SEMI E54 Primary Standard and Subordinate Standards to correct nonconforming titles
SNARF Doc 5872 - Line Item Revisions to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)
SNARF Doc 5888 - Revision to SEMI E170-mm15 (SEMI Doc. #5828): SPECIFICATION FOR PRODUCTION RECIPE CACHE (PRC) and SEMI E170.1-mm15 (SEMI Doc. #5828): SPECIFICATION FOR SECS-II PROTOCOL FOR PRODUCTION RECIPE CACHE
SNARF Doc 5912 - Line Item Revisions to:
- SEMI E142.1 -0211, XML Schema for Substrate Mapping
- SEMI E142.2-0211, SECS II Protocol for Substrate Mapping
- SEMI E142.3-0211, Web Services for Substrate Mapping
To correct nonconforming titles
SNARF Doc 5913 - Reapproval for SEMI E157-0611, Specification for Module Process Tracking
SNARF Doc 5914 - Reapproval for SEMI E54.3-0698 (Reapproved 1110), Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
Hide details for Liquid Chemicals CommitteeLiquid Chemicals Committee
TFOF E49.2 / E49.7 Review/Rewrite
TFOF E49.4 / E49.5 Evaluation
Hide details for MEMS / NEMS CommitteeMEMS / NEMS Committee
SNARF Doc 5870 - Line item revision to SEMI MS4-1113, Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance with title change to: Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance
Hide details for Micropatterning CommitteeMicropatterning Committee
SNARF Doc 5906 - Line Item Revision to SEMI P39, OASIS (TM) - Open Artwork System Interchange Standard to correct nonconforming title
SNARF Doc 5907 - Line Item Revision to SEMI P5-0704, Specification for Pellicles to include material for EUV pellicle
SNARF Doc 5908 - Reapproval for SEMI P40, Specification for Mounting Requirements for Extreme Ultraviolet Lithography Masks
SNARF Doc 5909 - Reapproval for SEMI P48, Specification of Fiducial Marks for EUV Mask Blank
Hide details for Photovoltaic (PV) - Materials CommitteePhotovoltaic (PV) - Materials Committee
SNARF Doc 5860 - Line Item of SEMI PV11-1110 SPECIFICATIONS FOR HYDROFLUORIC ACID, USED IN PHOTOVOLTAIC APPLICATIONS
SNARF Doc 5861 - Line Item Revision of SEMI PV12-1110 SPECIFICATIONS FOR PHOSPHORIC ACID USED IN PHOTOVOLTAIC APPLICATIONS
SNARF Doc 5862 - Reapproval of SEMI PV3-0310 GUIDE FOR HIGH PURITY WATER USED IN PHOTOVOLTAIC CELL PROCESSING
SNARF Doc 5863 - Reapproval of SEMI PV5-1110 GUIDE FOR OXYGEN (O2), BULK, USED IN PHOTOVOLTAIC APPLICATIONS
SNARF Doc 5864 - Reapproval of SEMI PV6-1110 GUIDE FOR ARGON (Ar), BULK, USED IN PHOTOVOLTAIC APPLICATIONS
SNARF Doc 5865 - Reapproval of SEMI PV7-1110 GUIDE FOR HYDROGEN (H2), BULK, USED IN PHOTOVOLTAIC APPLICATIONS
SNARF Doc 5866 - Reapproval of SEMI PV8-1110 GUIDE FOR NITROGEN (N2), BULK, USED IN PHOTOVOLTAIC APPLICATIONS
SNARF Doc 5889 - New Standard: Test Method on cell level for potential-induced degradation susceptibility of solar cells and module encapsulation materials
SNARF Doc 5894 - Line Item Revision to SEMI PV10, Test Method for Instrumental Neutron Activation Analysis (INAA) of Silicon
SNARF Doc 5895 - Line Item Revision of SEMI PV16-0611 Specifications for Nitric Acid, Used in Photovoltaic Applications
SNARF Doc 5896 - Line Item Revision to SEMI PV20-1011 Specifications for Hydrochloric Acid, Used in Photovoltaic Applications
SNARF Doc 5897 - Line Item Revision to SEMI PV27-1011 Specifications for Ammonium Hydroxide, Used in Photovoltaic Applications
SNARF Doc 5898 - Line Item Revision to SEMI PV28-0212 Test Methods for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge
SNARF Doc 5899 - Line Item Revision to SEMI PV30-0212 Specifications for 2-Propanol, Used in Photovoltaic Applications
SNARF Doc 5900 - Line Item Revision to SEMI PV33-0212 Specifications for Sulfuric Acid, Used in Photovoltaic Applications
SNARF Doc 5901 - Line Item Revision to SEMI PV36-0912 Specifications for Hydrogen Peroxide, Used in Photovoltaic Applications
SNARF Doc 5902 - Reapproval of SEMI PV1-0211   Test Method for Measuring Trace Elements in Silicon Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry
SNARF Doc 5903 - Reapproval of SEMI PV9-0611  Test Method for Excess Charge Carrier Decay in PV Silicon Materials by Non-Contact Measurements of Microwave Reflectance After a Short Illumination Pulse
SNARF Doc 5904 - Reapproval of SEMI PV14-0211  Guide for Phosphorus Oxychloride, Used in Photovoltaic Applications
SNARF Doc 5905 - Reapproval of SEMI PV15-0211  Guide for Defining Conditions for Angle Resolved Light Scatter Measurements to Monitor the Surface Roughness and Texture of PV Materials
TFOF PV Material Degradation Task Force
Hide details for Physical Interfaces & Carriers CommitteePhysical Interfaces & Carriers Committee
SNARF Doc 5867 - Line item revision to SEMI E21-94 (Reapproved 0309), Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard with title change to: Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport
SNARF Doc 5868 - Line item revision to SEMI E22-0697 (Reapproved 0309), Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard with title change to: Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume
SNARF Doc 5869 - Line Item Revision to SEMI E84-1109, Specification for Enhanced Carrier Handoff Parallel I/O Interface
Hide details for Silicon Wafer CommitteeSilicon Wafer Committee
SNARF Doc 5804 - Revision of SEMI M53-0310, Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodisperse Reference Spheres on Unpatterned Semiconductor Wafer Surfaces
SNARF Doc 5805 - Revision of SEMI M50-0310, Test Method for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method
SNARF Doc 5845 - Reapproval of SEMI M16-1110 - Specification for Polycrystalline Silicon
SNARF Doc 5846 - Reapproval of SEMI M17-1110 - Guide for a Universal Wafer Grid
SNARF Doc 5847 - Reapproval of SEMI M66-1110 Test Method to Extract Effective Work Function in Oxide and High-K Gate Stacks Using the MIS Flat Band Voltage-Insulator Thickness Technique
SNARF Doc 5848 - Reapproval of SEMI MF1153-1110 - Test Method for Characterization of Metal-Oxide Silicon (MOS) Structures by Capacitance-Voltage Measurements
SNARF Doc 5849 - Line Item Revision of SEMI MF1389-1110 - Test Methods for Photoluminescence Analysis of Single Crystal Silicon for III-V Impurities
SNARF Doc 5850 - Reapproval of SEMI MF1529-1110 - Test Method for Sheet Resistance Uniformity Evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure
SNARF Doc 5851 - Reapproval of SEMI MF1618-1110 - Practice for Determination of Uniformity of Thin Films on Silicon Wafers
SNARF Doc 5852 - Reapproval of SEMI MF1725-1110 - Practice for Analysis of Crystallographic Perfection of Silicon Ingots
SNARF Doc 5853 - Reapproval of SEMI MF1726-1110 - Practice for Analysis of Crystallographic Perfection of Silicon Wafers
SNARF Doc 5854 - Reapproval of SEMI MF1727-1110 - Practice for Detection of Oxidation Induced Defects in Polished Silicon Wafers
SNARF Doc 5855 - REAPPROVAL OF SEMI MF1771-1110 TEST METHOD FOR EVALUATING GATE OXIDE INTEGRITY BY VOLTAGE RAMP TECHNIQUE
SNARF Doc 5856 - Reapproval of SEMI MF1809-1110 - Guide for Selection and Use of Etching Solutions to Delineate Structural Defects in Silicon
SNARF Doc 5857 - Withrawal of SEMI MF2166-1110 - Practices for Monitoring Non-Contact Dielectric Characterization Systems Through Use of Special Reference Wafers
SNARF Doc 5858 - Reapproval of SEMI MF1810-1110 - Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers
SNARF Doc 5859 - Line Item Revision of SEMI MF1811-0310, Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
SNARF Doc 5877 - Revision to SEMI M80-0514, Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers with title change to:
Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers
SNARF Doc 5893 - Revision of SEMI M1-0215 Specifications for Polished Single Crystal Silicon Wafers
SNARF Doc 5910 - Line Item Revision of SEMI M57-0515, Specifications for Silicon Annealed Wafers
SNARF Doc 5911 - Line Item Revision of SEMI M62-0515, Specifications for Silicon Epitaxial Wafers
SNARF Doc 5915 - Line Item Revision to SEMI M1-0215, Addition to Related Information : Illustration of Flatness and Shape Metrics for Silicon Wafers
Hide details for Traceability CommitteeTraceability Committee
SNARF Doc 5890 - Revision to SEMI T7-0415 Specification for back surface marking of double-side polished wafers with a two-dimensional matrix code symbol


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