SEMI International Standards
New Task Forces and Activities


Below you will find a list of recently created Standards task forces and new activities. Please click on a particular task force or document, for more information.

Hide details for 3D Packaging and Integration Committee3D Packaging and Integration Committee
SNARF Doc 6332 - New Standard, Specification for Panel Substrate Characteristics for Fan-Out Panel Level Packaging (FO-PLP) Applications
SNARF Doc 6352 - Line Item Revision to SEMI G64-96 (Reapproved 0811) "Specification for Full-Plated Integrated Circuit Leadframes (Au, Ag, Cu, Ni, Pd/Ni, Pd)"
SNARF Doc 6353 - Reapproval of SEMI G94-0113: Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer
Hide details for EH&S CommitteeEH&S Committee
SNARF Doc 6354 - Line Item Revision to SEMI S2-1016b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment 
 
SNARF Doc 6366 - Line Item Revision to S2 for Anchorage (Revision to Delay revision section)
SNARF Doc 6372 - Line Item Revision SEMI S2-1016b Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revision to Delayed Revision on Seismic)
TFOF S2 Korean High Pressure Gas Safety Task Force
Hide details for Flat Panel Display (FPD) - Metrology CommitteeFlat Panel Display (FPD) - Metrology Committee
SNARF Doc 6351 - New Standard, Specification for Viewing Angle of Flat Panel Displays
Hide details for Gases CommitteeGases Committee
SNARF Doc 6339 - Replacement of SEMI C6.2: Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas, C6.3: Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas, C6.4: Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.5: Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.6: Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, and C6.7: Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders, into one single document as a New Standard, Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinders
SNARF Doc 6340 - Revision to SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers, with title change to Test Method for Evaluating the Electromagnetic Susceptibility of Mass Flow Controllers
SNARF Doc 6341 - Revision to SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers
SNARF Doc 6342 - Revision to SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers
Hide details for HB-LED CommitteeHB-LED Committee
SNARF Doc 6370 - New Standard: Specification for Susceptors for HB-LED MOCVD Equipment Communication Interface
SNARF Doc 6371 - New Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire
TFOF HB-LED Equipment Communication Interface
Hide details for Information & Control CommitteeInformation & Control Committee
SNARF Doc 6330 - Line Item Revisions to E54.17 Specification of Sensor Actuator Network for A-Link
SNARF Doc 6331 - Line Item Revisions to E54.19 Specification of Sensor Actuator Network for MECHATROLINK
SNARF Doc 6343 - Line-Item Revision to SEMI E138: Specification for XML Semiconductor Common Components
SNARF Doc 6344 - New Standard – Specification for Protocol Buffer Semiconductor Common Components
SNARF Doc 6345 - Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for
Equipment Self Description (EqSD) to SEMI E125-0414, Specification for Equipment Self Description
(EqSD)
SNARF Doc 6346 - Revision to Add a New Subordinate Standard: Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) to SEMI E132-1015, Specification for Equipment Client Authentication and Authorization
SNARF Doc 6347 - Revision to Add a New Subordinate Standard: Specification for Protocol Buffers of Data
Collection Management to SEMI E134-0414, Specification for Data Collection Management
SNARF Doc 6348 - Revision to E30: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SNARF Doc 6349 - Revision to E37.1: High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS OR HSMS-SSS)
SNARF Doc 6350 - Revision to E37: High-Speed SECS Message Services (HSMS) Generic Services
Hide details for Liquid Chemicals CommitteeLiquid Chemicals Committee
SNARF Doc 6316 - Revision of SEMI C79-0113, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
SNARF Doc 6318 - Revision of SEMI F63-1016, Guide for Ultrapure Water Used in Semiconductor Processing
Hide details for Metrics CommitteeMetrics Committee
SNARF Doc 6364 - Line Item Revision to SEMI E129-0912, Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility
SNARF Doc 6365 - Line Item Revision to SEMI E78-0912, Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment
Hide details for Silicon Wafer CommitteeSilicon Wafer Committee
SNARF Doc 6359 - Line Item Revision Of SEMI MF1527-0412 Guide For Application Of Certified Reference Materials And Reference Wafers For Calibration And Control Of Instruments For Measuring Resistivity Of Silicon
SNARF Doc 6362 - Line Item Revision of SEMI M53-0216 Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodispere Reference Spheres on Unpatterned Semiconductor Wafer Surfaces
SNARF Doc 6363 - Revision of SEMI M52-0214 GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 nm TO 11 nm TECHNOLOGY GENERATIONS


If you have any questions concerning a specifc task force or document, please contact a SEMI Standards staff nearest you.