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 | 3DS-IC Committee |
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| SNARF | | | | | Doc 5588 - Line Item Revision to SEMI 3D2-0113, Specification for Glass Carrier Wafers for 3DS-IC Applications | |
| Assembly & Packaging Committee |
| |
| TFOF | | | | | Thin Chip (Die) Bending Strength Measurement Taskforce | |
| Compound Semiconductor Materials Committee |
| |
| SNARF | | | | | Doc 5544 - Revision of SEMI M9.1-96E (Reapproved 0308), Standard for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications | |
| SNARF | | | | | Doc 5545 - Revision of SEMI M9.2-96E (Reapproved 0308), Standard for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications | |
| SNARF | | | | | Doc 5546 - Revision of SEMI M9.5-96E (Reapproved 0308), Standard for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications | |
| SNARF | | | | | Doc 5547 - Revision of SEMI M9.6-95E (Reapproved 0308), Standard for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers | |
| SNARF | | | | | Doc 5593 - Line Item Revision to SEMI M9.7-0708, Specification for Round 150 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers (Notched) | |
| EH&S Committee |
| |
| SNARF | | | | | Doc 5522 - Reapproval of SEMI S6-0707E, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment | |
| SNARF | | | | | Doc 5590 - Reapproval of SEMI S14-0309, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment | |
| SNARF | | | | | Doc 5591 - Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed revisions related to fire code criteria | |
| Facilities Committee |
| |
| SNARF | | | | | Doc 5570 - Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix | |
| SNARF | | | | | Doc 5572 - Reapproval of SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation | |
| SNARF | | | | | Doc 5575 - Reapproval of SEMI E70-1103, Guide for Tool Accommodation Process | |
| SNARF | | | | | Doc 5576 - Reapproval of SEMI E76-0299, Guide for 300 mm Process Equipment Points of Connection to Facility Services | |
| SNARF | | | | | Doc 5579 - Reapproval of SEMI F49-0200 (Reapproved 1108), Guide for Semiconductor Factory Systems Voltage Sag Immunity | |
| SNARF | | | | | Doc 5580 - Reapproval of SEMI F50-0200 (Reapproved 1108), Guide for Electric Utility Voltage Sag Performance for Semiconductor Factories | |
| Flat Panel Display (FPD) - Materials & Components Committee |
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| SNARF | | | | | Doc 5550 - New Standard: Guide for Dimensional Measurement of Plastic Films | |
| SNARF | | | | | Doc 5551 - New Standard: Measurement Method of Water Vapor Transmission Rate for Plastic Films and Sheets with High Barrier Properties for Electronic Devices | |
| SNARF | | | | | Doc 5552 - Reapproval of SEMI D13-0708, Terminology for FPD Color Filter Assemblies | |
| SNARF | | | | | Doc 5553 - Reapproval of SEMI D29-1101, Test Method for Heat Resistance in Flat Panel Display (FPD) Color Filters | |
| SNARF | | | | | Doc 5554 - Reapproval of SEMI D30-0707, Test Method for Light Resistance in Flat Panle Display (FPD) Color Filters | |
| SNARF | | | | | Doc 5555 - Revision to SEMI D50-0707, Test Method for Surface Hardness of FPD Polarizing Film | |
| Flat Panel Display (FPD) - Metrology Committee |
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| TFOF | | | | | Color Assessment | |
| Gases Committee |
| |
| SNARF | | | | | Doc 5568 - Reapproval of SEMI C14-95 (Reapproved 0309), Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges | |
| SNARF | | | | | Doc 5569 - Reapproval of SEMI E12-0303 (Reapproved 0309), Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers | |
| SNARF | | | | | Doc 5571 - Reapproval of SEMI E56-0309, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers | |
| SNARF | | | | | Doc 5573 - Reapproval of SEMI E68-0997 (Reapproved 0309), Test Method for Determining Warm-Up Time of Mass Flow Controllers | |
| SNARF | | | | | Doc 5574 - Reapproval of SEMI E69-0298 (Reapproved 0309), Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers | |
| SNARF | | | | | Doc 5577 - Reapproval of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution Systems | |
| SNARF | | | | | Doc 5578 - Reapproval of SEMI F36-0299 (Reapproved 1104), Guide for Dimensions and Connections of Gas Distribution Components | |
| SNARF | | | | | Doc 5595 - New Standard: Guide for the Development of Dimensional Standards for “Sandwich” Surface Mount Components | |
| TFOF | | | | | Surface Mount Sandwich Component Dimensions Task Force | |
| Information & Control Committee |
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| SNARF | | | | | Doc 5411 - New Standard: Specification for Equipment Energy Saving Mode Communications (EESM) | |
| SNARF | | | | | Doc 5549 - Revision to SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) | |
| SNARF | | | | | Doc 5589 - Revisions to:
- SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM),
- SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM),
- SEMI E82, Specification for Interbay/Intrabay AMHS SEM (IBSEM),
- SEMI E88, Specification for AMHS Storage SEM (Stocker SEM),
- SEMI E91, Specification for Prober Specific Equipment Model (PSEM),
- SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM), and
- SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM) | |
| MEMS / NEMS Committee |
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| SNARF | | | | | Doc 5586 - Line Item Revision to SEMI MS2-0212, Test Method for Step Height Measurements of Thin Films | |
| SNARF | | | | | Doc 5587 - Line Items Revisions to SEMI MS4-0212, Standard Test Method for Young’s Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance | |
| Metrics Committee |
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| SNARF | | | | | Doc 5592 - New Standard: Specification for Measurement of Product Time in Semiconductor Manufacturing | |
| SNARF | | | | | Doc 5596 - New Standard: Guide for Semiconductor Manufacturing Facilities
Electromagnetic Compatibility (EMC) | |
| SNARF | | | | | Doc 5597 - Revision to SEMI E149-0708, Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment | |
| SNARF | | | | | Doc 5598 - Revision to SEMI E150-1107, Guide for Equipment Training Best Practices | |
| Micropatterning Committee |
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| SNARF | | | | | Doc 5561 - Revision of SEMI P10-1112, Specification of Data Structures for Photomask Orders | |
| Photovoltaic Committee |
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| SNARF | | | | | Doc 5563 - New Standard: Specification for Framing Tape for PV Modules | |
| SNARF | | | | | Doc 5564 - New Standard: Test Method for the Measurement of Chlorine in Silicon by Ion Chromatography | |
| Photovoltaic (PV) - Automation Committee |
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| SNARF | | | | | Doc 5566 - Line Item Revision to SEMI PV002-00-0709E Guide for PV Equipment Communication Interfaces (PVECI), modify requirement [PV02-RQ-00007-00] to allow implementation of new namelist requests instead of required documentation. | |
| Photovoltaic (PV) - Materials Committee |
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| SNARF | | | | | Doc 5562 - Line Item Revision to SEMI PV42, Test Method for In-Line Measurement of Waviness on PV Silicon Wafers by a Light Sectioning Technique Using Multiple Line Segments | |
| SNARF | | | | | Doc 5565 - Line Item Revision to PV42, Test Method for In-Line Measurement of Waviness on PV Silicon Wafers by a Light Sectioning Technique Using Multiple Line Segments | |
| SNARF | | | | | Doc 5567 - New Auxiliary Document: Interlaboratory Study for PVxx, Test Method for the Measurement of Elemental Impurity Concentrations in Silicon Feedstock for Silicon Solar Cells By Bulk Digestion, Inductively Coupled-Plasma Mass Spectrometry | |
| Physical Interfaces & Carriers Committee |
| |
| SNARF | | | | | Doc 5465 - Revision to SEMI E111-1106, Mechanical Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle | |
| SNARF | | | | | Doc 5466 - Revision to SEMI E112-1106, Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles | |
| SNARF | | | | | Doc 5584 - Revision to SEMI E19-0912, Standard Mechanical Interface (SMIF) | |
| SNARF | | | | | Doc 5585 - Revision to SEMI E19.3-0309, Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port | |
| Silicon Wafer Committee |
| |
| SNARF | | | | | Doc 5500 - New Standard: Specification for Polished Single Crystal Silicon Wafers for GaN-on-Silicon Applications | |
| SNARF | | | | | Doc 5543 - Revision to SEMI M1, Specifications for Polished Single Crystal Silicon Wafers | |
| SNARF | | | | | Doc 5558 - Revision of SEMI MF928-0305 (Reapproved 0211), Test Methods for Edge Contour of Circular Wafers and Rigid Disk Substrates | |
| SNARF | | | | | Doc 5559 - New Auxiliary Information: Interlaboratory Evaluation of Nondestructive Method for Measuring the Edge Contour of Silicon Wafers | |
| SNARF | | | | | Doc 5583 - Revision of SEMI M57-0413, Guide for Specifying Silicon Annealed Wafers | |
| Traceability Committee |
| |
| SNARF | | | | | Doc 5581 - Reapproval of SEMI T3-0302 (Reapproved 1108), Specification for Wafer Box Labels | |
| SNARF | | | | | Doc 5582 - Reapproval of SEMI T4-0301 (Reapproved 0307), Specification for 150 mm and 200 mm Pod Identification Dimensions | |
| SNARF | | | | | Doc 5594 - New Standard: Guide for Smart Label for PV Traceability | |