 | | | | | | | |
|---|
 | Automated Test Equipment Committee |
| |
| SNARF | | | | | Doc 5011 - Withdrawal of SEMI G78, Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements | |
| TFOF | | | | | NA ATE 5-Year Review | |
| Compound Semiconductor Materials Committee |
| |
| SNARF | | | | | Doc 4979 - New Standard: Specification for Round, Polished GaN Wafers | |
| SNARF | | | | | Doc 4986 - Revision of SEMI M42-1000, Specification for Compound Semiconductor Epitaxial Wafers | |
| SNARF | | | | | Doc 4988 - Reapproval of SEMI M9-0708, Specifications for Polished Monocrystalline Gallium Arsenide Slices | |
| EH&S Committee |
| |
| SNARF | | | | | Doc 5000 - Creation of an RI related to reliability requirements of interlocks and safety systems | |
| SNARF | | | | | Doc 5001 - Withdrawal of SEMI S9-0307, Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have been moved to SEMI S22 | |
| SNARF | | | | | Doc 5007 - Reaproval of SEMI S3-0306, Safety Guidelines for Process Liquid Heating System | |
| SNARF | | | | | Doc 5008 - Revision to SEMI S12-0309, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination | |
| SNARF | | | | | Doc 5009 - Revisions to SEMI S8-0308, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment (Revisions related to the SESC checklist) | |
| TFOF | | | | | Interlock and Safety Control Systems Reliability Selection | |
| Facilities Committee |
| |
| SNARF | | | | | Doc 5012 - Reapproval of SEMI F82-0304, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5013 - Reapproval of SEMI F83-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5014 - Reapproval of SEMI F84-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5015 - Reapproval of SEMI F85-0304, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5016 - Reapproval of SEMI F86-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5017 - Reapproval of SEMI F87-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5018 - Reapproval of SEMI F88-0304E, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5019 - Reapproval of SEMI F89-0304E, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5020 - Reapproval of SEMI F90-0304E, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5021 - Reapproval of SEMI F91-0304E, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5022 - Reapproval of SEMI F92-0304E, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5023 - Reapproval of SEMI F93-0304E, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5024 - Reapproval of SEMI F94-0304E, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5025 - Reapproval of SEMI F95-0304E, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 5026 - Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components | |
| SNARF | | | | | Doc 5027 - New Subdocument for SEMI F1, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components | |
| TFOF | | | | | 5-year-review TF | |
| Flat Panel Display (FPD) - Mask Committee |
| |
| SNARF | | | | | Doc 5028 - Revision to SEMI D38-0304, Guide for Quality Area of LCD Masks | |
| Flat Panel Display (FPD) - Metrology Committee |
| |
| SNARF | | | | | Doc 4999 - New Standard: Measuring Methods of Reflected Light Properties for Electronic Paper Displays | |
| SNARF | | | | | Doc 5054 - Test Method for Perceptual Motion Blur in LCD | |
| TFOF | | | | | Ambient Color Gamut Task Force | |
| TFOF | | | | | Perceptual Motion Blur | |
| Gases Committee |
| |
| SNARF | | | | | Doc 5044 - Revision to SEMI F32-0709 Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves | |
| Information & Control Committee |
| |
| SNARF | | | | | Doc 4987 - New Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges | |
| SNARF | | | | | Doc 4992 - New Standard: Specific Device Model for Pressure Control Valves | |
| SNARF | | | | | Doc 5002 - New Standard for Common EDA Metadata | |
| SNARF | | | | | Doc 5003 - Revisions to:
* SEMI E125, Specification for Equipment Self Description (EqSD)
* SEMI E128, Specification for XML Message Structures
* SEMI E132, Specification for Equipment Client Authentication and Authorization
* SEMI E134, Specification for Data Collection Management
For reliable messaging for EDA Standards | |
| SNARF | | | | | Doc 5004 - Revision to SEMI E54.4, Standard for Sensor/Actuator Network Communication Specification for DeviceNet. | |
| SNARF | | | | | Doc 5005 - Revision to SEMI E54.13, Standard for Sensor/Actuator Network Communication Specification for EtherNet/IP | |
| SNARF | | | | | Doc 5006 - Revisions to:
* SEMI E142, Specification for Substrate Mapping
* SEMI E142.1, XML Schema for Substrate Mapping
* SEMI E142.2, SECS-II Protocol for Substrate Mapping
* SEMI E142.3, Web Services for Substrate Mapping | |
| Liquid Chemicals Committee |
| |
| SNARF | | | | | Doc 4990 - Revision to SEMI C49-1105, Guideline for Trimethylborate | |
| SNARF | | | | | Doc 4991 - Revision to SEMI C50-1105, Specifications and Guideline for Trimethylphosphite | |
| SNARF | | | | | Doc 4993 - New Standard: Guide for Hafnium Tetrachloride | |
| SNARF | | | | | Doc 4994 - New Standard: Guide for Hafnium t-Butoxide | |
| SNARF | | | | | Doc 4995 - New Standard: Guide for Tetrakis(Dimethlyamino)Titanium | |
| SNARF | | | | | Doc 4996 - New Standard: Guide for Zirconium t-Butoxide | |
| SNARF | | | | | Doc 5064 - Revision to SEMI F66-1101, Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals | |
| MEMS / NEMS Committee |
| |
| SNARF | | | | | Doc 5046 - Revision to SEMI MS5-0310, Test Method For Wafer Bond Strength Measurements Using Micro-Chevron Test Structures | |
| Metrics Committee |
| |
| SNARF | | | | | Doc 5049 - Revision to SEMI E35-0307, Guide to Calculate Cost Of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment | |
| SNARF | | | | | Doc 5050 - Revision to SEMI E140-0305, Guide to Calculate Cost Of Ownership (COO) Metrics for Gas Delivery Systems | |
| SNARF | | | | | Doc 5062 - Reapproval of SEMI E104-0303 - Specification for Integration and Guideline for Calibration of Low-Pressure Particle Monitor
| |
| SNARF | | | | | Doc 5063 - Reapproval of SEMI E141-0705 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology | |
| Micropatterning Committee |
| |
| SNARF | | | | | Doc 5047 - Revision to SEMI P10, Specification of Data Structures for Photomask OrdersRevision to SEMI P10, Specification of Data Structures for Photomask Orders | |
| SNARF | | | | | Doc 5048 - Revision to SEMI P37-1109, Specification for Extreme Ultraviolet Lithography Mask Substrates | |
| Photovoltaic Committee |
| |
| SNARF | | | | | Doc 5010 - Revision to SEMI PV4 Specification for Range of 5th Generation Substrate Sizes for Thin Film Photovoltaic Applications | |
| SNARF | | | | | Doc 5031 - New Standard: Specification For Helium (He), In Cylinders, Xx.Xxx% Quality, Used In Photovoltaic Applications | |
| SNARF | | | | | Doc 5032 - New Standard:Guide for Specifying c-Si Terrestrial Solar Cells | |
| SNARF | | | | | Doc 5033 - New Standard:Specification For Ammonia (Nh3) In Cylinders, Xx.Xxx% Quality, Used In Photovoltaic Applications | |
| SNARF | | | | | Doc 5045 - Revision of SEMI PV1-0709 Test Method for Measuring Trace Elements in Silicon Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry | |
| SNARF | | | | | Doc 5053 - Auxilary Information for Interlaboratory Study Results For Determining the Precision of SEMI PV1 | |
| Physical Interfaces & Carriers Committee |
| |
| SNARF | | | | | Doc 4980 - Revision to SEMI E154-0310, Mechanical Interface Specification for 450mm Load Port | |
| SNARF | | | | | Doc 4981 - Revision to SEMI E158-0710, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (FOUP) and Kinematic Coupling | |
| SNARF | | | | | Doc 4982 - New Standard: Mechanical Interface Specification for 450mm FOSB Load Port | |
| SNARF | | | | | Doc 4983 - Reapproval of SEMI E15.1-0305, Specification for 300 mm Tool Load Port | |
| SNARF | | | | | Doc 4984 - Reapproval of SEMI E57-0600E2, Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers | |
| SNARF | | | | | Doc 4985 - Reapproval of SEMI E63-1104, Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port | |
| TFOF | | | | | International Reticle SMIF Pod and Load Port Interoperability Task Force | |
| Silicon Wafer Committee |
| |
| SNARF | | | | | Doc 4209 - New Standard: Test Method for Quantifying Wafer Edge Geometry Using a Curvature Metric | |
| SNARF | | | | | Doc 5029 - Revision to SEMI M51-0303, Test Method for Characterizing Silicon Wafers by Gate Oxide Integrity | |
| SNARF | | | | | Doc 5030 - Revision to SEMI M60-0306, Test Method for Time Dependent Dielectric Breakdown Characteristics of SI02 Films for Si Wafer Evaluation | |
| SNARF | | | | | Doc 5034 - Revision of SEMI M71-0310 Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI | |
| SNARF | | | | | Doc 5035 - Revision to M62-0309 Specifications for Silicon Epitaxial Wafers | |
| SNARF | | | | | Doc 5036 - Withdrawal of SEMI M34-0299 Guide for Specifying SIMOX Wafers | |
| SNARF | | | | | Doc 5037 - Reapproval of SEMI M44-0305 Guide For Measurement Of Interstitial Oxygen In Silicon | |
| SNARF | | | | | Doc 5038 - Reapproval of SEMI MF26-0305 Test Method For Determining The Orientation Of A Semiconductive Single Crystal | |
| SNARF | | | | | Doc 5039 - Reapproval of SEMI MF928-0305 Test Method For Edge Contour Of Circular Semiconductor Wafers And Rigid Disk Substrates | |
| SNARF | | | | | Doc 5040 - Reapproval of SEMI MF1152-0305 Test Method For Dimensional Notches | |
| SNARF | | | | | Doc 5041 - Reapproval of SEMI MF1239-0305 Test Method For Oxygen Precipitation Characteristics Of Silicon Wafers By Measurement Of Interstitial Oxygen Reduction | |
| SNARF | | | | | Doc 5042 - Reapproval of SEMI MF951-0305 Test Method For Determination Of Radial Interstitial Oxygen Variation In Silicon Wafers | |
| SNARF | | | | | Doc 5043 - Revision of MF1048-1109 Test Method for Measuring the Reflective Total Integrated Scatter | |
| SNARF | | | | | Doc 5051 - Revision to SEMI M1-1109, Specifications for Polished Single Crystal Silicon Wafers | |
| SNARF | | | | | Doc 5052 - Revision to SEMI M59-1110. Terminology for Silicon Technology | |
| Traceability Committee |
| |
| SNARF | | | | | Doc 4924 - Withdrawal of SEMI T6-1104R, Procedure And Format For Reporting Of Test Results By Electronic Data Interchange (EDI) | |