SEMI International Standards
New Task Forces and Activities


Below you will find a list of recently created Standards task forces and new activities. Please click on a particular task force or document, for more information.

Hide details for 3DS-IC Committee3DS-IC Committee
SNARF Doc 5976 - NEW STANDARD: Terminology for 3DS-IC Technology
Hide details for Compound Semiconductor Materials CommitteeCompound Semiconductor Materials Committee
SNARF Doc 6015 - Line Item Revision SEMI M81-0611 - Guide to Defects Found in Monocrystalline Silicon Carbide Substrates (5 year review)
Hide details for EH&S CommitteeEH&S Committee
SNARF Doc 5996 - Line Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
Hide details for Flat Panel Display (FPD) - Materials & Components CommitteeFlat Panel Display (FPD) - Materials & Components Committee
SNARF Doc 6006 - New Standard: Test method for measurements of dimension of films for FPD – contour
matching method
SNARF Doc 6010 - Reapproval of SEMI D34-0710, Test Method for FPD Polarizing Films
SNARF Doc 6011 - Reapproval of SEMI D38-0211, Guide for Quality Area of LCD Masks
SNARF Doc 6012 - Reapproval of SEMI D39-0704 (Reapproved 0710), Specification for Markers on FPD Polarizing
SNARF Doc 6013 - Reapproval of SEMI D6-0211, Specification for Liquid Crystal Display (LCD) Mask Substrates
SNARF Doc 6014 - Revision to SEMI D60-0710: Test Method of Surface Scratch Resistance for FPD Polarizing
Film and Its Materials
Hide details for Gases CommitteeGases Committee
SNARF Doc 5997 - Line Item Revision to SEMI C3-0413, Specifications for Gases
SNARF Doc 5998 - Line Item Revision to SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen
SNARF Doc 5999 - Line Item Revision to SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
SNARF Doc 6000 - Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon
SNARF Doc 6001 - Line Item Revision to SEMI C58-1213, Specifications for Hydrogen
SNARF Doc 6002 - Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen
SNARF Doc 6003 - Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)
SNARF Doc 6004 - Line Item Revision to SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6)
Hide details for HB-LED CommitteeHB-LED Committee
SNARF Doc 5016 - Line Item Revision to SEMI HB3-1113, Mechanical Interface Specification for 150 mm HB-LED Load Port
SNARF Doc 5984 - New Standard: Guide for Biscyclopentadienylmagnesium (Cp2Mg) for HB-LED Manufacturing
SNARF Doc 5985 - New Standard: Guide for Triethylgallium (TEGa) for HB-LED Manufacturing
SNARF Doc 5986 - New Standard: Guide for Trimethylaluminum (TMAl) for HB-LED Manufacturing
SNARF Doc 5987 - New Standard: Guide for Trimethylgallium (TMGa) for HB-LED Manufacturing
SNARF Doc 5988 - New Standard: Guide for Trimethylindium (TMIn) for HB-LED Manufacturing
Hide details for Information & Control CommitteeInformation & Control Committee
SNARF Doc 6005 - Line Item Revision to SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SNARF Doc 6008 - New Auxiliary Information: Equipment Data Acquisition (EDA) Freeze Version Overview
SNARF Doc 6009 - Line Item Revision to Specifications E132, E132.1
Hide details for Liquid Chemicals CommitteeLiquid Chemicals Committee
SNARF Doc 5992 - Revision to SEMI F41-0699, Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
Hide details for MEMS / NEMS CommitteeMEMS / NEMS Committee
SNARF Doc 6007 - New Standard: Specification for a Test Pattern for Deep Reactive Ion Etching (DRIE) Process Characterization
SNARF Doc 6018 - New Standard: Specification for Silicon Substrates used in fabrication of MEMS Devices
TFOF MEMS Substrate TF
Hide details for Metrics CommitteeMetrics Committee
SNARF Doc 6017 - Line-item Revision to SEMI E33-1012 Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
Hide details for Photovoltaic CommitteePhotovoltaic Committee
SNARF Doc 5979 - New Standard: Specification of indoor lighting simulator requirements for emerging PV
SNARF Doc 5980 - New Standard: Test method of current-voltage (I-V) measurement in indoor lighting for DSC and OPV
SNARF Doc 5982 - New Standard: Specification for Crystalline Silicon Photovoltaic Module Dimensions
SNARF Doc 5983 - New Standard: Test Method for In-line Sheet Resistance Inspection
Hide details for Photovoltaic (PV) - Materials CommitteePhotovoltaic (PV) - Materials Committee
SNARF Doc 6016 - New Standard: Test Method for Exposure Durability of PV Cells to Acetic Acid Vapor
Hide details for Silicon Wafer CommitteeSilicon Wafer Committee
SNARF Doc 5989 - Revision of SEMI M62-0515, Specifications for Silicon Epitaxial Wafers
SNARF Doc 5990 - Revision of SEMI MF1811-xx1y GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA
SNARF Doc 5993 - Line Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers
SNARF Doc 5994 - Line Item Revision to SEMI M50, Test Methods for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method (Fix title for conformance)
SNARF Doc 5995 - Line Item Revision of SEMI MF1048-1111 TEST METHOD FOR MEASURING REFLECTIVE TOTAL INTEGRATED SCATTER


If you have any questions concerning a specifc task force or document, please contact a SEMI Standards staff nearest you.