SEMI International Standards
New Task Forces and Activities


Below you will find a list of recently created Standards task forces and new activities. Please click on a particular task force or document, for more information.

Hide details for 3DS-IC Committee3DS-IC Committee
SNARF Doc 6175 - New Standard, Guide on Measurements of Openings and Vias in Glass
SNARF Doc 6179 - Reapproval of SEMI 3D1-0912, Terminology for Through Silicon via Geometrical Metrology
Hide details for Assembly & Packaging CommitteeAssembly & Packaging Committee
SNARF Doc 6148 - Line Item Revision to SEMI G18-96 (Reapproved 0811) “Standard for Integrated Circuit Leadframe Material Used in the Production of Etched Leadframes” with non-conforming title change to “Specification for Integrated Circuit Leadframe Material Used in the Production of Etched Leadframes”
SNARF Doc 6149 - Line Item Revision to SEMI G38-0996 (Reapproved 0811) “Test Method for Still- and Forced-Air Junction-to-Ambient Thermal Resistance Measurements of Integrated Circuit Packages”
SNARF Doc 6150 - Line Item Revision to SEMI G56-93 (Reapproved 0811) “Test Method for Measurement of Silver Plating Thickness”
SNARF Doc 6151 - Line Item Revision to SEMI G65-96 (Reapproved 0811) “Test Method for Evaluation of Leadframe Materials Used for L-Leaded (Gull Wing Type) Packages”
SNARF Doc 6152 - Line Item Revision to SEMI G93-0412: “Measurement Method for Solder Sphere Size for Ball Grid Array Package” with non-conforming title change to “Test Method for Solder Sphere Size for Ball Grid Array Package”
SNARF Doc 6153 - Reapproval of SEMI G90-0811: Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes
SNARF Doc 6154 - Line Item Revision to SEMI G10-96 (Reapproved 0811): “Standard Method for Mechanical Measurement of Plastic Package Leadframes” with non-conforming title change to “Test Method for Mechanical Measurement of Plastic Package Leadframes”
SNARF Doc 6155 - Line Item Revision to SEMI G62-95 (Reapproved 0811) “Test Method for Silver Plating Quality”
SNARF Doc 6156 - Line Item Revision to SEMI G70-0996 (Reapproved 0811) “Standard for Equipment and Leadframe Fixtures for Measurement of Plastic Package Leadframes” with non-conforming title change to “Specification for Equipment and Leadframe Fixtures for Measurement of Plastic Package Leadframes”
SNARF Doc 6157 - Reapproval of SEMI G23-0996 (Reapproved 0811): Test Method of Inductance for Internal Traces of Semiconductor Packages
SNARF Doc 6158 - Reapproval of SEMI G42-0996 (Reapproved 0811): Specification for Thermal Test Board Standardization for Measuring Junction-to-Ambient Thermal Resistance of Semiconductor Packages
SNARF Doc 6159 - Reapproval of SEMI G59-94 (Reapproved 0811): Test Method for Measurement of Ionic Contamination on Leadframe Interleafing and the Contamination Transferred from the Interleafing to the Leadframes
SNARF Doc 6160 - Reapproval of SEMI G60-94 (Reapproved 0811): Test Method for the Measurement of Electrostatic Properties of Semiconductor Leadframe Interleafing Materials
SNARF Doc 6161 - Reapproval of SEMI G66-96 (Reapproved 0811): Test Method for the Measurement of Water Absorption Characteristics for Semiconductor Plastic Molding Compounds
SNARF Doc 6162 - Reapproval of SEMI G67-0996 (Reapproved 0811): Test Method for the Measurement of Particle Generation from Sheet Materials
SNARF Doc 6163 - Reapproval of SEMI G68-0996 (Reapproved 0811): Test Method for Junction-to-Case Thermal Resistance Measurements in Air Environment for Semiconductor Packages
SNARF Doc 6164 - Reapproval of SEMI G69-0996 (Reapproved 0811): Test Method for Measurement of Adhesive Strength Between Leadframes and Molding Compounds
SNARF Doc 6165 - Reapproval of SEMI G71-0996 (Reapproved 0811): Specification for Barcode Marking of Intermediate Containers for Packaging Materials
SNARF Doc 6166 - Reapproval of SEMI G89-0211: Specification for Leadframe Strip Size
SNARF Doc 6167 - Line Item Revision to SEMI G73-0997 (Reapproved 0811) “Test Method for Pull Strength for Wire Bonding”
Hide details for EH&S CommitteeEH&S Committee
SNARF Doc 6171 - Line Item revision for chemical exposure improvements to SEMI S2
SNARF Doc 6172 - Line item revision to SEMI S14-1016: Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment to correct nonconforming title
TFOF Anchorage
TFOF S3 Revision
Hide details for Gases CommitteeGases Committee
SNARF Doc 6178 - Line Item Revision to Correct the Title of SEMI F37-0299 (Reapproved 0611), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
SNARF Doc 6180 - Reapproval of SEMI F64-0701 (Reapproved 1111), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers
SNARF Doc 6181 - Reapproval of SEMI F76-0303 (Reapproved 1110), Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas
SNARF Doc 6182 - Reapproval of SEMI C9.1-0212, Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
SNARF Doc 6186 - Reapproval of SEMI C3.58-1011, Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
SNARF Doc 6188 - Reapproval of SEMI F54-1000 (Reapproved 1110), Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters
Hide details for HB-LED CommitteeHB-LED Committee
SNARF Doc 6192 - New Standard: Specification for Dry Etching Patterned Sapphire Substrate (DPSS)
Hide details for Information & Control CommitteeInformation & Control Committee
SNARF Doc 6174 - Line Item Revision to SEMI E54.9, Specification for Sensor/Actuator Network Communication Specification for Modbus/TCP over TCP/IP
SNARF Doc 6183 -
Reapproval of SEMI E82-1106 (Reapproved 0612), Specification for Interbay/Intrabay AMHS SEM (IBSEM)
SNARF Doc 6185 - Line Item Revision to SEMI E4-0699 (Reapproved 0612), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) to correct nonconforming title to: Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SNARF Doc 6187 - Reapproval of SEMI E88-0307 (Reapproved 0612), Specification for AMHS Storage SEM (Stocker SEM)
SNARF Doc 6189 - Line Item Revision to SEMI E170-mmyy: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS), SEMI E170.1-mmyy: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM and SEMI E5-mmyy: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)
Hide details for Liquid Chemicals CommitteeLiquid Chemicals Committee
SNARF Doc 6173 - Line Item Revision to SEMI C30-1110, Specifications for Hydrogen Peroxide, to correct nonconforming title to: Specification for Hydrogen Peroxide
SNARF Doc 6190 - Line-item Revision to SEMI C45-0309E, Specification and Guideline for Tetraethylorthosilicate (TEOS) with title change to: Specification and Guide for Tetraethylorthosilicate (TEOS)
SNARF Doc 6195 - Revision to SEMI F104-0312, Particle Test Method for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems, with title change to correct nonconforming title.
SNARF Doc 6196 - Reapproval of SEMI C77-0912, Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm
SNARF Doc 6197 - Reapproval of SEMI F110-0712, Test Method for Mono-Dispersed Polystyrene Latex (PSL) Challenge of Liquid Filters
Hide details for MEMS / NEMS CommitteeMEMS / NEMS Committee
SNARF Doc 5267 - New Standard, Specification for Microfluidic Port and Pitch Dimensions
SNARF Doc 6176 - Reapproval of SEMI MS1-0307 (Reapproved 0812), Guide to Specifying Wafer-Wafer Bonding Alignment Target
SNARF Doc 6177 - Reapproval of SEMI MS10-0912, Test Method to Measure Fluid Permeation Through MEMS Packaging Materials
Hide details for Metrics CommitteeMetrics Committee
SNARF Doc 6144 - Line-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
SNARF Doc 6145 - Line-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
SNARF Doc 6146 - Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
SNARF Doc 6184 - Revision to SEMI E135, Test Method for RF Generators to Determine Transient Response
TFOF RF Measurements
Hide details for Photovoltaic CommitteePhotovoltaic Committee
SNARF Doc 6191 - New Standard: Guide for the Design of Testing and Sorting Equipment for Crystalline Silicon Solar Cells
TFOF Testing Equipment Task Force
Hide details for Photovoltaic (PV) - Materials CommitteePhotovoltaic (PV) - Materials Committee
SNARF Doc 6193 - New Standard: Specification for Trichlorosilane Used in Polysilicon Production
SNARF Doc 6194 - New Standard: Test Method for Determination of Hydrogen in PV Polysilicon by Inert Gas Fusion Infrared Absorption Method
Hide details for Silicon Wafer CommitteeSilicon Wafer Committee
SNARF Doc 5915 - Line Item Revision to SEMI M1-1016, Addition to Related Information: Illustration of Flatness Metrics for Silicon Wafers
SNARF Doc 6168 - Line Item revision to add new Related Information about area (sector) exclusions for the ERO-related standards M67-1015: Test Method For Determining Wafer Near-Edge Geometry From A Measured Thickness Data Array Using The ESFQR, ESFQD AND ESBIR Metrics and M68-1015 Test Method For Determining Wafer Near-Edge Geometry From A Measured Height Data Array Using A Curvature Metric, ZDD
SNARF Doc 6169 - Line Item Revision to MF1390-1014: Test Method For Measuring Bow And Warp On Silicon Wafer By Automated Noncontact Scanning to add Bow Bestfit metric
SNARF Doc 6170 - Line item Revision to SEMI M49 “Guide For Specifying Geometry Measurement Systems For Silicon Wafers For The 130 nm TO 16 nm Technology Generations


If you have any questions concerning a specifc task force or document, please contact a SEMI Standards staff nearest you.