SEMI International Standards
SEMI New Activity Report Forms (SNARFs)
& SEMI Task Force Organization Forms (TFOFs)

Below you will find the TFOFs of all the task forces actively working in each region. The TFOF contains the charter and purpose of each task force.

The SNARFs that are listed under each task force are the individual activities of the task force. While the majority of these activities lead to the creation or revision of a standard, there are some activities which are focused on exploring and expanding the program.

If you have any further questions on a specific activity, contact your local Standards staff. A listing of global SEMI Standards staff can be found on the contact information page.

Blank forms
TFOF (DOC 115K) (Feb 2020)
SNARF (DOC 133K) (Nov 2021)

The listing of SNARFs and TFOFs below are sorted by Global Technical Committee, and then by the region that approved the TFOF.

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Show details for 3D Packaging and Integration3D Packaging and Integration
Show details for Automated Test EquipmentAutomated Test Equipment
Show details for Automation TechnologyAutomation Technology
Show details for Compound Semiconductor MaterialsCompound Semiconductor Materials
Show details for EH&SEH&S
Show details for FacilitiesFacilities
Show details for Flat Panel Display (FPD) - Materials & ComponentsFlat Panel Display (FPD) - Materials & Components
Show details for Flat Panel Display (FPD) - MetrologyFlat Panel Display (FPD) - Metrology
Show details for Flexible Hybrid Electronics (FHE)Flexible Hybrid Electronics (FHE)
Hide details for GasesGases
Show details for EuropeEurope
Hide details for North AmericaNorth America
Show details for Filters and Purifiers Task ForceFilters and Purifiers Task Force
Show details for Gases Specification Task ForceGases Specification Task Force
Show details for Heater Jacket Task ForceHeater Jacket Task Force
Show details for Mass Flow Controller Task ForceMass Flow Controller Task Force
Show details for Materials of Construction of Gas Delivery Systems Task ForceMaterials of Construction of Gas Delivery Systems Task Force
Hide details for NA Gases CommitteeNA Gases Committee
6747 Line Item to Replace Designation Letter from C to F for SEMI C88-0815, Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems, SEMI C91-115, Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components, and SEMI C92-0216, Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution
6813 Reapproval of SEMI F28-1103 (Reapproved 0815), Test Method for Measuring Particle Generation from Process Panels
6814 Reapproval of SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters
6815 Reapproval of SEMI F59-0302 (Reapproved 0613), Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves
6816 Reapproval of SEMI F67-1101 (Reapproved 0713), Test Method for Determining Inert Gas Purifier Capacity
6817 Reapproval of SEMI F68-1101 (Reapproved 0713), Test Method for Determining Purifier Efficiency
6874 Reapproval of SEMI F79-0914, Guide for Gas Compatibility with Silicon Used in Gas Distribution Components
6875 Reapproval of SEMI F105-0914, Guide for Metallic Material Compatibility in Gas Distribution Systems
6876 Reapproval of SEMI F60-1214, Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components
6877 Reapproval of SEMI F73-1214, Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components
6878 Reapproval of SEMI E77-1104 (Reapproved 0815), Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases
6879 Reapproval of SEMI F77-0915, Test Method for Electrochemical Critical Pitting Temperature Testing of Stainless Steel Surfaces Used in Corrosive Gas Systems
6880 Reapproval of SEMI E80-0299 (Reapproved 0915), Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)
6881 Reapproval of SEMI C3.34-0116, Specification for Disilane (Si2H6) in Cylinders, 97% Quality
6882 Reapproval of SEMI C3.12-0116, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
Show details for Pressure Measurement Task ForcePressure Measurement Task Force
Show details for Surface Mount Sandwich Component Dimensions Task ForceSurface Mount Sandwich Component Dimensions Task Force
Show details for HB-LEDHB-LED
Show details for Information & ControlInformation & Control
Show details for Liquid ChemicalsLiquid Chemicals
Show details for MEMS / NEMSMEMS / NEMS
Show details for MetricsMetrics
Show details for MicropatterningMicropatterning
Show details for PhotovoltaicPhotovoltaic
Show details for Photovoltaic (PV) - MaterialsPhotovoltaic (PV) - Materials
Show details for Physical Interfaces & CarriersPhysical Interfaces & Carriers
Show details for Silicon WaferSilicon Wafer
Show details for TraceabilityTraceability

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