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| 3D Packaging and Integration |
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| Automated Test Equipment |
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| Automation Technology |
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| Compound Semiconductor Materials |
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| EH&S |
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| Facilities |
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| Flat Panel Display (FPD) - Materials & Components |
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| Flat Panel Display (FPD) - Metrology |
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| Flexible Hybrid Electronics (FHE) |
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| FPD - Metrology |
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| Gases |
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| HB-LED |
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| Information & Control |
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| China |
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| Japan |
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| Korea |
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| North America |
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| Advanced Backend Factory Integration |
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| Diagnostic Data Acquisition Task Force NA |
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| | | 7174 | | Line Item Revision to SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures | |
| | | 7175 | | Line Item Revision to SEMI E132-0923 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0923 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) | |
| | | 7176 | | Line Item Revision to SEMI E134-0923 Specification for Data Collection Management and SEMI E134.2-0923 Specification for Protocol Buffers of Data Collection Management | |
| | | 7178 | | Revision to SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata | |
| | | 7179 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Generic Model for Communication and Control of Manufacturing Equipment (GEM) to
SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata | |
| | | 7180 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Processing Management to SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata | |
| | | 7181 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Carrier Management (CMS) to SEMI E164-0414 (0721), Specification for EDA Common Metadata | |
| | | 7182 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Substrate Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata | |
| | | 7183 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Control Job Management to SEMI E164-0414 (0721), Specification for EDA Common Metadata | |
| | | 7184 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Equipment Performance Tracker to SEMI E164-0414 (0721), Specification for EDA Common Metadata | |
| | | 7185 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Time Synchronization and Definition of the TS-Clock Object to SEMI E164-0414 (0721), Specification for EDA Common Metadata | |
| | | 7186 | | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Module Process Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata | |
| | | 7191 | | Line Item Revision to SEMI E179-0623 Specification for Protocol Buffers Common Components | |
| | | 7227 | | Line Item Revision to SEMI E125-0923 Specification for Equipment Self Description (EqSD) and SEMI E125.2-0923 Specification for Protocol Buffers for Equipment Self Description (EqSD) | |
| | | 7228 | | Line Item Revision to SEMI E134-0923 Specification for Data Collection Management and SEMI E134.2-0923 Specification for Protocol Buffers of Data Collection Management | |
| | | 7229 | | Line Item Revision to SEMI 179-0623 Specification for Protocol Buffers Common Components | |
| | | TFOF | | Diagnostic Data Acquisition Task Force NA | |
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| Energy Saving Equipment Communication Task Force |
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| Equipment Data Publication (EDP) Task Force |
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| Fab & Equipment Computer and Device Security (CDS) Task Force |
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| GEM 300 Task Force |
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| Graphical User Interfaces (GUI) Task Force |
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| NA Information and Control Committee |
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| Process Control System NA |
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| Sensor Bus Task Force |
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| Taiwan |
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| Liquid Chemicals |
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| MEMS / NEMS |
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| Metrics |
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| Micropatterning |
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| Photovoltaic |
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| Photovoltaic (PV) - Materials |
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| Physical Interfaces & Carriers |
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| Silicon Wafer |
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| Traceability |
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