SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5467
SNARF for: Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment and other normative S references and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment for fail-safe fault tolerant

Originating Global Technical Committee: EH&S
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Fail-Safe / Fault-Tolerant

1. Rationale: The definitions and use of the terms ‘fail safe’ and ‘fault tolerant’ in SEMI S2 and other normative S references and SEMI S22 are very subjective, which results in unnecessary expenditure of industry resources as companies strive to make appropriate design and assessment decisions. Furthermore, discussion in the Fail Safe Fault Tolerant interest group indicates there are other topics related to the sections using the terms (e.g., safety interlock criteria) that would benefit from more detailed guidance such as ensuring interlock bypass design accounts for foreseen service and maintenance tasks. Reviewing these issues and balloting changes to S2 and other normative S references and S22 as appropriate will bring an incremental improvement in equipment use safety, particularly regarding maintenance and service tasks.
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Safety system (e.g., interlock and EMO) related sections of S2 and other normative S references and S22.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/01/2012b. 1st Draft by: 03/01/2013
c. Preballot by: d. Technical Ballot by: 07/01/2013
e. Committee Approval By:10/01/2013

Safety Considerations:
The resulting document is expected to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 12, 2012