SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/12/2012Revised (if Applicable):

Document Number: 5467
SNARF for: Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment and other normative S references and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment for fail-safe fault tolerant

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Fail-Safe / Fault-Tolerant
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The definitions and use of the terms ‘fail safe’ and ‘fault tolerant’ in SEMI S2 and other normative S references and SEMI S22 are very subjective, which results in unnecessary expenditure of industry resources as companies strive to make appropriate design and assessment decisions. Furthermore, discussion in the Fail Safe Fault Tolerant interest group indicates there are other topics related to the sections using the terms (e.g., safety interlock criteria) that would benefit from more detailed guidance such as ensuring interlock bypass design accounts for foreseen service and maintenance tasks. Reviewing these issues and balloting changes to S2 and other normative S references and S22 as appropriate will bring an incremental improvement in equipment use safety, particularly regarding maintenance and service tasks.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Safety system (e.g., interlock and EMO) related sections of S2 and other normative S references and S22.

b: Expected result of activity
Revision to an existing Standard/Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/01/2012b. 1st Draft by: 03/01/2013
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/01/2013
e. TC Chapter Approval By:10/01/2013

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
Japan EHS Com. Regarding applicability within S26 and S17.

b. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 14.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology or a copyrighted item(s) is NOT required

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material



NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 15 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
None.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9.. SNARF Approval Dates:
TC Chapter or GCS07/12/2012
Recorded in TC Minutes07/12/2012
Attach Pictures and Files here: