SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 05/07/2020Revised (if Applicable):

Document Number: 6649
SNARF for: Line item revisions to SEMI E133-1218: Specification for Automated Process Control Systems Interface, and SEMI E133.1-0318: Specification for XML Messaging for Process Control System (PCS)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Process Control System NA Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
E133 Standard provides documentation for fundamental PCS analysis engines such as run-to-run (R2R) control and fault detection (FD) to communicate, and for extended PCS applications such as Virtual Metrology (VM) that can involve many PCS analysis engines working together, and could itself be an analysis engine. Reactive, predictive and prescriptive maintenance are extended PCS applications that also can involve many PCS analysis engines working together. The definition of these optimized maintenance capabilities, their minimum requirements, and the interaction of PCS analysis engines to support their operation should be defined in this standard. This will standardize the interaction of PCS compliant modules in a reactive/predictive/prescriptive maintenance system, thereby improving interoperability and impacting ROI.

Unscheduled downtime of equipment and subpar equipment health due to non-optimal maintenance scheduling are sources of lost productivity, waste, low yield, and unnecessary cost in semiconductor manufacturing. The current state-of-the-art of automated maintenance systems in today’s fabs includes a combination of time-based, count (e.g., wafer)-based, and event-based triggering of maintenance events, with isolated predictive maintenance solutions beginning to appear. The IEEE International Roadmap for Devices and Systems (IRDS, and other publications across industries generally indicate that, as shown below, there is a general desire to move from reactive to predictive to prescriptive capabilities in operations, including maintenance, however there will always be a need for reactive and predictive capabilities to augment prescriptive capabilities. In other words, while a prescriptive solution is desirable for maintenance avoidance, there will always be failure modes for which there is no prescription (and thus prediction is the optimal solution) and additionally those that cannot even be predicted (for which a reactive solution might be the best choice).

b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Primarily OEMs, factories, and software solution providers (e.g., semiconductor, PV, FPD, MEMS)

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This SNARF proposes line item revisions to E133 and possibly E133.1 to provide specification for Reactive, Predictive, and/or Prescriptive Maintenance which we are collectively calling “optimized maintenance” for purposes of this SNARF.

This ballot will propose line item changes to the PCS standard to specify optimized maintenance applications. These changes may include the following specifications:
o Definitions and baseline requirements and capabilities for reactive, predictive and prescriptive maintenance applications; this could include choosing different terminology for these maintenance capabilities. This activity will be coordinated with the Equipment RAMP Metrics Task Force who is also looking at definitions.
o Interface data structure of and services supported by these applications.
o Baseline minimal behavior requirements of these applications (e.g., to support the services).
o PCS analysis engine interaction to support these maintenance applications.
o An application note addition to the standard describing PCS analysis engine interaction to support an example implementation of one or more of these applications.
o Enhancements to the PCS XML specification to support these applications.
Address minor editorial changes and technical errors identified during ballot creation.

b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2020b. 1st Draft by: 11/01/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/01/2021
e. TC Chapter Approval By:11/01/2021

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):
IEEE International Roadmap for Devices and Systems (IRDS,

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required

NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

7. Comments, Special Circumstances:

8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)

9. SNARF Approval Dates:
TC Chapter or GCS04/20/2020
Recorded in TC Minutes


10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

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