SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 02/13/2023Revised (if Applicable):

Document Number: 7069
SNARF for: Revision to Add a New Subordinate Standard: Specification for Common Data for Etch Components to Specification for Equipment Data Publication

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Equipment Data Publication (EDP) Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
There is a wide selection of data that can be collected from equipment and subcomponents through existing SEMI Standards interfaces (e.g., SECS/GEM, EDA/Interface A, SensorBus, etc.), industry standards interfaces (e.g., OPC, MQTT, etc.) and custom interfaces.

Currently, there is little consistency on what information the equipment or subcomponent provides, so each equipment user needs to spend time and effort to understand what data can be accessed from a particular component before it is collected, and determine if that data be sufficient for their needs (e.g., what does that data represent, what format is it reported, what is the data frequency of that content, etc.)

Defining a minimal set of data that can be acquired from the equipment and subcomponent would significantly support data collection and offline analysis efforts (e.g. analysis such as early excursion detection and prevention). This would speed up the integration process and set expectations for both the equipment user and the equipment supplier on what content data is available.

When a component implements the EDP Specification, the minimal set of data defined in EDP standards for that component are always accessible by the equipment user (i.e., that data can be consumed by the equipment user through a well-defined interface). There will be other content data that the equipment supplier exposes to the equipment user in addition to the EDP data. Equipment supplier confidential data is not specified as EDP data.

Note – This ballot development will be done concurrently with ballot development to create a new Primary Standard - Revision to Add a New Standard: Specification for Equipment Data Publication.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone implementing providing data from etch components through software interfaces

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This proposal suggests to create a new Subordinate Standard to define specific content that an Etch component reports, using the infrastructure defined in the Primary Standard. (I.e. Tables and columns defined in the Primary Standard outlining attributes are populated with data content specific to Etch Components).

• Define what Etch content data should be defined as the required minimal set of data, and how will that Etch content data be organized.

o As part of this investigation, the Task Force will determine if content can be specified at a higher category level (by defining descriptive categories with detailed examples), rather than specifying content at a parametric level.
o For example, RF parameters between the different equipment suppliers will not be named the same. Going to the parametric level could quickly become outdated as the underlying technology evolves and new parameters are defined.

• Investigate if additional attributes/configuration specific to accessing the content data through SEMI Standard interfaces should be defined for this component. (e.g. if the content is accessed through EDA / Interface A, how should the content data be represented in SEMI E125). If such requirements are defined in the Subordinate standard, they will be optional requirements.

Note – if the content information accessed through the SEMI Standard interface does not need to be standardized, nothing is added to the subordinate standard. For example, the Variable ID (VID) number assigned to the parameters accessed through the SECS/GEM interface will be unique to each implementation and will not be standardized. There will not be any SECS/GEM configuration information included in the Subordinate Standard.

Note - This Standard will not specify the specific data structure of the EDP content data to be reported.(e.g. the standard may say Parameter X is an array, but it will not specify it as an array of 5 float values.)The specific transfer mechanism used to access the EDP content data will define how the data is structured when it is transferred.


b: Expected result of activity
New Subordinate Standard to an existing Standard or to a new Primary Standard to be developed concurrently with this new Subordinate Standard

For a new Subordinate Standard, identify the Primary Standard here:
Specification for Equipment Data Publication



For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2023b. 1st Draft by: 06/01/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/01/2023
e. TC Chapter Approval By:12/01/2023

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
I&C Global Technical Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s).

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 3/10/2023
Member Review End Date: 3/24/2023

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS05/09/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on