SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/22/2019Revised (if Applicable):

Document Number: 6576
SNARF for: Line Item Revision to SEMI F63-0918, Guide for Ultrapure Water Used in Semiconductor Processing

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ultra Pure Water Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

2019 revision of SEMI F63 will provide alignment between SEMI and IRDS specifications for the UPW quality for the advanced semiconductor facilities. According to the definitions of 2010 revision, the F63 guide is supposed to be updated every two years to keep up the pace of ITRS (IRDS) development. This 2019 effort will incorporate recent findings/information of UPW ITRS (IRDS).



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: UPW system suppliers and end users

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

Line item ballot to incorporate UPW IRDS 2019 findings/information specific to UPW quality


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 08/01/2019b. 1st Draft by: 09/01/2019
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/01/2019
e. TC Chapter Approval By:11/01/2019

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
UPW IRDS Group, Yield Enhancement (US and Europe, working with coordination with group in Asia)

b. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

UPW IRDS committee has developed an extensive amount of information that will be valuable in supporting F63 update. This takes into account involvement of the key end users participating in the IRDS development. UPW IRDS also supports the need of having UPW specification development outside of the IRDS effort. IRDS defines the needs of future technologies, instead of specifying design criteria for current plants.

UPW IRDS group supports this guide development, following the timelines of the revision update every 2 years. 2019 update is expected to be significant, based on the change in IRDS since 2017.



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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS04/02/2019
Recorded in TC Minutes04/02/2019

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on


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