SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 04/06/2023

Revised (if Applicable):

Name of Task Force (TF): S2 Major Revision Task Force

Global Technical Committee: EH&S

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Background: Many of the MESSC members consider the current definitions and guidelines for safety interlock systems inadequate.

Charter: Interlocks Design TF is to prepare, submit, and review responses to ballot(s) to revise (and, perhaps, develop) SEMI Safety Guidelines, as needed to improve clarity and consistency in relation to safety interlock systems.
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2. Scope: (Define the specific activities that the TF will conduct.)
Initially, Interlocks Design TF is to:

- evaluate S2 definitions and guidelines referring to interlocks
- determine and correct real and potential conflicting information
- update technical references
- prepare and submit ballot(s) to revise S2
- review ballot responses and prepare them for adjudication by the TCC
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
None
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4. Formation Date:(TF formed on)

Task Force formed on: 04/06/2023
Task Force approved by Committee/GCS on: 04/06/2023

5. Comments
None.