SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5632
SNARF for: Specification for Signal Tower for 450mm AMHS

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: 450 mm AMHS Task Force

1. Rationale: This document is to propose standardized signal tower specifications for AMHS devices to be delivered to 450mm fabs.
 For 300mm fabs, different device makers (DMs) have different signal tower specifications for AMHS devices. Sometimes, even one DM has different specifications per fab. Basically, discussions to fix specifications have been required on a case-by-case basis.

 DMs occasionally provide their signal tower specifications as common specifications. Most of them are prepared for production devices and not applicable to AMHS devices.

 To avoid the above situation, the standard signal tower specifications as the following pages is proposed for 450mm and larger fabs. Meeting the specifications will help to reduce costs (by saving meeting time and costs for customization) and causes of bugs (by improving reliability with standard software utilization).

Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Display colors of a light tower (signal tower) for AMHS and meaning of each color.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/06/2013b. 1st Draft by: 09/01/2013
c. Preballot by: d. Technical Ballot by: 10/01/2013
e. Committee Approval By:12/01/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on June 6, 2013