SEMI International Standards
Date Prepared: 05/01/2017
Revised (if Applicable):

Name of Task Force (TF): Sensor Bus Task Force

Global Technical Committee: Information & Control
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
We have several Network Communication Specification (NCS) subordinate documents of E54 Sensor Actuator Network and most of them is getting inconsistent with Specific Device Model (SDM) subordinate documents which have been approved or revised recently. It is expected to maintain such NCS documents for the purpose of improving consistency. Mission of proposing task force is to maintain existing E54 related standard documents originated in Japan region or transferred from the other regions.
2. Scope: (Define the specific activities that the TF will conduct.)
Major activity of this task force is maintaining the documents, educational work and providing chances of discussion for the future, about sensor actuator network for semiconductor manufacturing.
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Sensor Bus TF, NA
4. Formation Date:(TF formed on)

Task Force formed on: 06/08/2017
Task Force approved by Committee/GCS on: 06/08/2017