SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared: 10/03/2017
Revised (if Applicable):

Name of Task Force (TF): Japan RF Measurement liaison Task Force

Global Technical Committee: Metrics
Originating Technical Committee Region: Japan


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1. Charter: (State the objective of the proposed TF.)
To host discussions in Japan to support and complement revision and new standard development activities undertaken by the primary TF (the RF Measurement TF under NA Chapter of Metrics GTC)
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2. Scope: (Define the specific activities that the TF will conduct.)
To cover the scope of the RF Measurement Task Force for its revision on existing SEMI RF Standards Suites and new Standards as such become necessary
Standards revisions within the scope include:
- SEMI E113, Specification for Semiconductor Processing Equipment RF Power Delivery Systems
- SEMI E114, Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems
- SEMI E115, Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems
- SEMI E135, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
- SEMI E136-1104, Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
- SEMI E143-0306 (Reapproved 0512) -, Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any Pphase Angle

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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
- Metrics Global Technical Committee
- RF Measurement TF (under NA TC Chapter)

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4. Formation Date:(TF formed on)

Task Force formed on: 10/03/2017
Task Force approved by Committee/GCS on: 10/03/2017

5. Comments
None.