SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5628
SNARF for: Line item Revision to SEMI E158-0912, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling


Line Item Revision to SEMI E159-0912, Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: Correction of table 1 in 450FOUP.
It will fix the wrong formula on Center of Gravity in the APPENDIX3 of E159 and E158.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The following changes are to be balloted as a single Letter Ballot:
1. Correction of table 1 in 450FOUP
z26 :  (>17)  →  (<17)
z45 :  (388)   →  (<390)

2. Fix the formula in A3-1.6 of 450FOUP and MAC.
F1 Ly0 = F2 (Ly - Ly0) + F3 (Ly - Ly0)
F1 Ly0 = F2 Ly – F2 Ly0 + F3 Ly – F2 Ly0
(F1 + F2 + F3) Ly0 = (F2 – F3) Ly
Ly0 = Ly (F2 – F3) / (F1 + F2 + F3)

F1 Ly0 = F2 (Ly - Ly0) + F3 (Ly - Ly0)
F1 Ly0 = F2 Ly – F2 Ly0 + F3 Ly – F3 Ly0
(F1 + F2 + F3) Ly0 = (F2 + F3) Ly
Ly0 = Ly (F2 + F3) / (F1 + F2 + F3)

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/26/2013b. 1st Draft by: 07/09/2013
c. Preballot by: d. Technical Ballot by: 08/15/2013
e. Committee Approval By:10/30/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, there is no alternative to the use of patented technology or copyrighted item(s)
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: Shoji: Existing IP

Approval: Activity approved by Committee/GCS on July 10, 2013