SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 11/13/2020

Revised (if Applicable): 06/15/2021

Name of Task Force (TF): SiC Epitaxial Wafer liaison TF

Global Technical Committee: Compound Semiconductor Materials

Originating Technical Committee Region: Japan

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1. Charter: (State the objective of the proposed TF.)
Discussions will be held in Japan to support and complement Silicon Carbide Epitaxial Wafer revision and new standards development activities in other regions.
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2. Scope: (Define the specific activities that the TF will conduct.)
To cover the scope of the SiC Epitaxial Wafer Task Force for its on existing SEMI Silicon Carbide Standards and new Standards as such become necessary.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
China “SiC Epitaxial Wafer Task Force”
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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on:

5. Comments
None.