SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5540
SNARF for: Line Item Revision to SEMI M1-1013, Specification for Polished Single Crystal Silicon Wafers (Addition to Appendices 1 and 3: Illustration of Flatness and Shape Metrics for Silicon Wafers)

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: International Advanced Wafer Geometry Task Force

1. Rationale: SEMI M1 specifies wafer flatness and shape according to many different metrics. It also provides decision trees for flatness and shape metrics, but it does not illustrate the definitions of these metrics, which makes it difficult for newcomers to the field – such as groups attempting to specify other kind of wafers (HB-LED, 3D-IC) - to understand the specifics of the metrics. Figures added to SEMI M1 Appendix 1 (Flatness Decision Tree) and Appendix 3(Shape Decision Tree) illustrating these metrics would be beneficial for the industry and would help understanding the differences between the various flatness and shape metrics..
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
- Develop figures illustrating the flatness and shape metrics for Si wafers
- Define metrics if necessary
- Add figures and metrics to Appendices 1 and 3

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 01/01/2013b. 1st Draft by: 07/01/2013
c. Preballot by: d. Technical Ballot by: 01/01/2015
e. Committee Approval By:07/01/2015

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on November 4, 2014