SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/12/2011Revised (if Applicable):

Document Number: 5274
SNARF for: New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network
Specific Device Model for Generic Equipment add-on Sensor (ADDON)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Sensor Bus Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The E54 specification describes how different devices can communicate over an industrial communication network like DeviceNet, Profibus, and Safety Bus. The specification is divided in Common Device Models (used by all devices) and Specific Device Models (mass flow controllers, pumps). There are many types of sensors that could be part of a sensor/actuator network (SAN) that might be added to semiconductor manufacturing equipment as an “add-on sensor”, but don’t have, have yet, or a require a specific device model (SDM). To meet the requirements of interoperability and interchangeability however there should be a standard interface available to include additional sensors into the SAN environment

Control data usually provided from the equipment such as rf-power and chamber pressure does often not allow a sufficient characterization of the process in terms of Advanced Process Control (APC), e-diagnostic, or Enhanced Equipment Quality Assurance (EEQA). A SDM could be used to provide a model that would facilitate providing sensor data with appropriate context (e.g., PPID) to support its use in these applications.

Every add-on sensor with the property to be also a generic sensor device, can benefit from even a very basic specific device model. This basic model can establish a level of interoperability and interchangeability that represents an improvement over the Common Device Model (e.g., by specifying the communication of certain context or other characterization data.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: semiconductor industry and
device manufacturing industry for use in semiconductor manufacturing tools,
glass coating,
solar,
metal surface finishing.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
SEMI SAN E54 Subordinate Standard
- New “Specific Device Model” to be implemented for Generic Equipment add-on Sensor (ADDON)

b: Expected result of activity
New Subordinate Standard to an existing Standard or to a new Primary Standard to be developed concurrently with this new Subordinate Standard

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 06/01/2011b. 1st Draft by: 07/01/2011
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/29/2011
e. TC Chapter Approval By:10/26/2011

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Europe SanPro Task Force
North America Information & Control Committee
Japan Information & Control Committee
Taiwan Information & Control Committee
Korea Information & Control Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/13/2011
Recorded in TC Minutes07/13/2011

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on