SEMI International Standards
Standards New Activity Report Form (SNARF)
Revised (if Applicable):
Revision to SEMI S3-1211 (Reapproved 1017)E SAFETY GUIDELINE FOR PROCESS LIQUID HEATING SYSTEMS
Originating Global Technical Committee:
Originating TC Chapter:
Task Force (TF) in which work is to be carried out:
S3 Revision Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Subsequent to the last re-approval of SEMI S3, the task force has been investigating and considering various areas of revision of S3, including expansion of the scope to include heating systems for other phases. A previous SNARF (6209) to prepare a ballot was approved, but expired as the task force continued to work on the technical details. The task force has completed sufficient work to propose this new SNARF to prepare for a “major” revision of SEMI S3.
b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information:
Companies that make or incorporate process chemical heating systems.
c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible
Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Revision of section15 of S2 as determined as appropriate to align with S3 changes.
Revision of SEMI S3 including:
1. Heating of chemicals obtained as solids, liquids, gases, or combinations thereof
2. Heating of chemicals obtained as liquids or solids that contact substrates as liquids, gases, or combinations thereof
3. Heating of chemicals used directly for processing and for such purposes as in situ chamber cleaning and seasoning
4. Heating to maintain the temperature of piping and other components to manage the risks resulting from condensation (upstream and downstream of process chamber) (including feedback to address loss of heating, such as in effluent lines)
5. Corrosion, including by novel process chemicals
6. Chemical reactions used for, or incidentally resulting in, heating
7. Use of heaters for energetic materials
b: Expected result of activity
Major revision to an existing Standard or Safety Guideline
For a new Subordinate Standard, identify the Primary Standard here:
For Standards, identify the Standard Subtype below:
3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start:
b. 1st Draft by:
c. (Optional) Informational Ballot by:
d. Letter Ballot by:
e. TC Chapter Approval By:
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):
will not be issued
Identify the recipient global technical committee(s):
5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline
to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the
for special procedures to be followed.
NOT to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is still technically sound and complete.
6. Intellectual Property Considerations:
For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines
the use of patented technology is NOT required.
If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)
The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required
the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’
: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of
§ 16 must be followed.
will incorporate Copyrighted Item’
: A copyright release letter must be obtained from the copyright owner prior to publication.
7. Comments, Special Circumstances:
TC Member Review:
took place between (put dates below) before approval by the GCS, or
Member Review Start Date;
Member Review End Date:
‘TC Member Review’ is required by the
for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to
9. SNARF Approval Dates:
TC Chapter or GCS
Recorded in TC Minutes
10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on