SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 09/21/2020Revised (if Applicable):

Document Number: 6699
SNARF for: Revision of SEMI M13-0706 (reapproved 0318), Specification for Alphanumeric Marking of Silicon Wafers (Subject: adding alphanumeric marking at back surface in addition to front surface.)

Originating Global Technical Committee: Traceability
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: 5 Year Review Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The new revision aims to add the option of having the alphanumeric marking not only on the front surface of the wafer, but also on the back surface of the wafer, including non-polished wafer surface. The update will provide more options available for best fit of companies in the supply chain and demonstrate actual industry practice that also applies the alphanumeric marking on the back surface of the wafer through customer specific requests. For this reason, the title of this document is also updated as “Specification for Alphanumeric Marking of Silicon Wafers with Crystal Properties” in order to better differentiate from SEMI M12. Another key update is to remove notched 150mm wafer from the specification as there is no specification of the wafer in SEMI M1. A few other specifications and considerations taken from SEMI M12 are also added in for better clarity and holistic coverage of the specification.

b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information: Silicon wafer users and suppliers for 200mm and smaller diameter wafer size

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Update of specification title to “Specification for Alphanumeric Marking of Silicon with Crystal Properties” to differentiate from SEMI M12. Also addition of back surface of the wafer as an option to the alphanumeric marking character window location, as well as removal of 150mm notched wafer. Besides that, addition of purpose and terminology definition, as well as considerations for the use of front surface markings captured from SEMI M12 are also included.

- Adding alphanumeric marking at back surface in addition to front surface which defined in current M13.
- Change the document title with removal of front surface as “Specification for Alphanumeric Marking of Silicon Wafers with Crystal Properties”
- Remove 150mm notched wafer because M1 doesn’t specify this wafer.
- Adding terminology from M12 to be same terminology and modify the purpose to be same as M12.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 09/21/2020b. 1st Draft by: 09/30/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 12/01/2020
e. TC Chapter Approval By:02/01/2021

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Silicon Wafer Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Silicon Wafer
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required

NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

7. Comments, Special Circumstances:

8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 10/23/2020
Member Review End Date: 11/6/2020

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)

9. SNARF Approval Dates:
TC Chapter or GCS12/09/2020
Recorded in TC Minutes


10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

Attach Pictures and Files here: