SEMI International Standards
Date Prepared: 06/06/2019
Revised (if Applicable):

Name of Task Force (TF): Global Seismic Protection TF

Global Technical Committee: EH&S
Originating Technical Committee Region: Japan and North America

1. Charter: (State the objective of the proposed TF.)
Development and maintenance of technical criteria related to seismic protection for semiconductor manufacturing and related equipment that are to be included in a SEMI Safety Guideline, and which are foreseen to be adopted as part of a supplier-user purchase agreement.
Support of SEMI hosted programs including, but not limited to, STEPs, Workshops and other educational programs related to seismic protection and with a goal of raising awareness about seismic protection in the semiconductor industry.

2. Scope: (Define the specific activities that the TF will conduct.)
The TF will consider equipment design criteria, facility-equipment interface design criteria, related documentation and manuals, and general information (e.g. regional seismic characteristics and regional seismic-related regulations) with regards to seismic protection for semiconductor manufacturing equipment and similar equipment (e.g., PV manufacturing equipment).
The TF will use above considerations to develop revision proposals for SEMI S2 and S26, or to develop a new safety guideline.
The TF will develop and provide educational materials related to above documents.
The TF will also assist others within the SEMI Standards Program with matters related to earthquake safety.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
- JA and NA TC Chapters of EHS GTC – Parents TC Chapters at inauguration
- TW TC Chapters of EHS GTC and TW Seismic TF – Liaison for the time being but preferably unified to the global TF to be formed under this TFOF

4. Formation Date:(TF formed on)

Task Force formed on: 06/27/2019
Task Force approved by Committee/GCS on: 06/27/2019

Both NA and JA TC Chapters have agreed to merge their respective Seismic Protection TFs into a global TF at their latest TC Chapter meetings. Since TFOF of a Global TF needs the approval of the GCS, this is submitted to the GCS.