SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 01/25/2023Revised (if Applicable):

Document Number: 7018
SNARF for: Line Item Revision to SEMI E87-0921, Specification For Carrier Management (CMS) and E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: Advanced Backend Factory Integration Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Backend packaging and testing manufacturing continues to grow. Advanced backend factories show strong demand for more advanced automation control and data collection. Some factories have started to adopt GEM300 standards. However, there are several issues when adopting E87(SPECIFICATION FOR CARRIER MANAGEMENT) including:

1. Most Backend tools do not have standard Load Port with a carrier tag reader and carrier slot map scanning mechanism. This makes it difficult to follow existing E87 Carrier ID and Slot map verification scenarios.

2. Most Backend manufacturing line are mixed lines, which means both 200mm and 300mm wafer Carriers are expected to be processed on same tool and sometimes on the same load port. The different size carrier may result in the Carrier ID and Slot Map are read and verified in different ways.

3. Some backend equipment use carriers that are not wafer containers, but instead might be a tape and reel, a carrier of trays or even a carrier of carriers (nested carriers). The E87 slot map and content map structures are invalid for some containers.

4. There is no published standard or guideline for Backend factories to adopt E87 for backend tools. Ballot 6840 is in development to provide guidelines and standardization to for backend equipment to implement E87 as well as other GEM standards.

5. Some factories use non-standard scenarios, including S2F41 and S3F17 for carrier management. Need a standard way to use S3F17 to cover Slot map verification scenarios for backend tools without slot map scanning mechanism installed.



b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information: Backend factories

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Investigate how to support equipment that cannot verify the slot map (for example, no slot map scanning hardware is installed). Items to consider include but are not limited to:

1. Allow a way for the host or equipment to provide the slot map to use (so corresponding substrates in the carrier are created).

2. Support configuration settings to indicate that the slot map is not read and will not be verified against the information provided by the Host.

3. Investigate whether or not existing E87 services (ProceedWithCarrier, CarrierNotification, Bind, etc) need to be expanded to support new information. Expand them if this is found to be necessary.

4. Adding new related roundtrip scenarios to Related Information 1 – Carrier Object ID when the equipment does not have the hardware to scan a carrier’s slot map.

Investigate updating Related Information 1 – Carrier Object ID to clarify use scenarios, including but not limited to adding new related roundtrip scenarios when the equipment does not have the hardware to read a carrier ID.

Allow for carriers that are not wafer containers, such a tape and reel, tray container or a container of tray containers (nested carriers).

Any other changes to address features or defects, or issues with the Style Guide raised by Task Force members during the development and review of the proposed changes related to these line-item topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations.

Note:
1. Proposed changes will maintain backward compatibility with 300mm front end E87 implementations
2. Any work done in this ballot will be coordinated with ballot 6840.


b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/23/2022b. 1st Draft by: 09/01/2022
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/01/2023
e. TC Chapter Approval By:12/20/2024

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Advanced Backend Factory Integration TF North America.
Advanced Backend Factory Integration TF Korea;
Backend Factory Integration TF Taiwan;
Backend Factory Integration TF Japan.


GEM300 TF North America.
GEM300 TF Korea;
GEM300 TF Taiwan;
GEM300 TF Japan.


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):
None

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS02/03/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on