SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 10/16/2002

Revised (if Applicable):

Name of Task Force (TF): Equipment Cost of Ownership Task Force

Global Technical Committee: Metrics

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Review and update equipment cost of ownership documents
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2. Scope: (Define the specific activities that the TF will conduct.)
Review of current cost of ownership documents E35 and E35.1 – including the manditory 5 year review of E35.1.

Extend to metrology and inspection equipment types.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
International COO Model for Wafer Metrology Equipment TF, Silicon Wafer Committee
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4. Formation Date:(TF formed on)

Task Force formed on: 10/16/2002
Task Force approved by Committee/GCS on:

5. Comments
None.