SNARF for Doc 6105

SEMI International Standards
Standards New Activity Report Form (SNARF)

Date Prepared: 10/17/2016

Revised (if Applicable):

Document Number: 6105
SNARF for: Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology

Originating Global Technical Committee: Facilities

Originating TC Chapter: North America

Task Force (TF) in which work is to be carried out: SEMI F51 Revision Task Force

Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Sealing technology continues to play an ever-increasing role in high yielding manufacturing processes, yet the microelectronic industry’s sealing requirements are poorly defined. Complicating the issue is that some of the seals being used were actually developed for entirely unrelated industries. Thus, the existing parameters that define good sealing characteristics are very different than those required by microelectronics manufacturing; i.e.: cleanliness, particulation seal life.

There is no industry standard or guidelines on how seals are cleaned and packaged after they have been manufactured. Therefore, SEMI F51 needs to be updated to provide industry guidance on best known methods. Clarifications and other editorial improvements generated from the previous Ratification Ballot (R5080) will be included in this revision as well.

b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This activity will propose revisions to F51 including:

- Considerations for:
• Final Quality Control Inspections
• Cleaning
• Bagging
• Bag Labeling (inner/outer)
• Handling
– During Inspection & Packaging
– At User Site
– Storage Conditions
-Measurement Methods for Seal Cleanliness during Handling and Packaging

The ballot proposal will also include clarifications and other editorial improvements generated from the comments received on the previous Ratification Ballot (R5080). Clarifications will be applied to the terminology (ś 5.2.6, chemical property); considerations for perfluorooctanoic acid (PFOA) (ś 7.1); and chemically assisted & thermal elastomeric degradation (ś 9.3) sections.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones

a. Activity Start: 11/01/2016	b. 1st Draft by: 11/30/2016
c. (Optional) Informational Ballot by:	d. Letter Ballot by: 01/01/2017
e. TC Chapter Approval By:04/04/2017

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Global Gases Committee
Global Liquid Chemicals Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Gases, Liquid Chemicals
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5. Safety Considerations:
The resulting document is expected:

NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

will NOT include reproduced copyrighted material

NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

__________________________________________________________________________
8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 10/18/2016
Member Review End Date: 11/01/2016

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ś 8.2.1)
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9. SNARF Approval Dates:

TC Chapter or GCS	11/08/2016
Recorded in TC Minutes	11/08/2016

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10. SNARF Extension Dates:

TC Chapter Extension Granted on

Extension Expires on

SNARF - Revision to SEMI F51.docx