SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/10/2022Revised (if Applicable):

Document Number: 6981
SNARF for: Line Item Revision to S8-0218, Safety Guideline for Ergonomics Engineering of
Semiconductor Manufacturing Equipment


Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ergonomics Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
There are areas within the current SEMI S8 document that need clarification or expansion. Areas of focus for this effort are listed below. Some of these items are in SNARF #6309 and #6943.
1. Limit “service” tasks to “replaceable” components
2. Verify whether a list of documentation items needs to be added to Section 7 of the main body of the document to Appendix A SESC checklist and create a list if appropriate (remnant from SNARF #6309). This will help ensure these items are included in SEMI S8 assessment reports based on SEMI S2 Section 16.2: Provisions for Conformance.

3. Update terminology section including:
a. Add “emergency controls”
b. Add standing and seated postures (from SESC Section 10)
c. Harmonize frequency-of-use definitions (frequent, infrequent, very infrequent)
d. Remove any unnecessary definitions

4. Change cleanroom glove strength discounting factors from 15% to 10% in appropriate instances

5. Add staffing and machine use expectations for frequency determinations

6. Provide material handling assessment guidance
a. Add instructions for performing assessments and evaluating risk
b. Add psychophysical data
c. Change wafer cassette rotation device sections 5.1-5.2

7. Modify whole body clearance dimensions as follows:
a. Add dimensions for lying down on side
b. Add information about “ergonomic access considerations”

8. Modify hand controls section as follows:
a. Remove Appendix 1, Section 9 NOTE 1 referring to section 7
b. Add note explaining that a single “use” is an activity where the user maintains the same general body position
c. Change very infrequently used controls section
d. Add toe clearance criteria for frequently used controls



b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information: Companies that manufacture equipment with features that do not meet new guideline criteria.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. Limit “service” tasks to “replaceable” components
2. Verify whether a list of documentation items needs to be added to Section 7 of the main body of the document to Appendix A SESC checklist and create a list if appropriate (remnant from SNARF #6309). This will help ensure these items are included in SEMI S8 assessment reports based on SEMI S2 Section 16.2: Provisions for Conformance.
3. Update terminology section including:
a. Add “emergency controls”
b. Add standing and seated postures (from SESC Section 10)
c. Harmonize frequency-of-use definitions (frequent, infrequent, very infrequent)
d. Remove any unnecessary definitions

4. Change cleanroom glove strength discounting factors from 15% to 10% in all instances

5. Add staffing and machine use expectations for frequency determinations

6. Provide material handling assessment guidance
a. Add instructions for performing assessments and evaluating risk
b. Add psychophysical data
c. Change wafer cassette rotation device sections 5.1-5.2

7. Modify whole body clearance dimensions as follows:
a. Add dimensions for lying down on side
b. Add information about “ergonomic access considerations”

8. Modify hand controls section as follows:
a. Remove Appendix 1, Section 9 NOTE 1 referring to section 7
b. Add note explaining that a single “use” is an activity where the user maintains the same general body position
c. Change very infrequently used controls section
d. Add toe clearance criteria for frequently used controls

9. Edits to conform with SEMI Standards Style Manual — July 29, 2022 (for example, changing “see” to “refer to”)
Edits to document sections that are impacted by the above changes (for example numbering, formatting and terminology)


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/01/2022b. 1st Draft by: 01/01/2022
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/01/2022
e. TC Chapter Approval By:04/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Physical Interfaces & Carriers
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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/10/2022
Recorded in TC Minutes11/10/2022

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on