SNARF for Doc 3440
SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 08/22/2001Revised (if Applicable): 11/13/2003

Document Number: 3440
SNARF for: New Standard: Test Method for Pressure Transducers Used in Gas Delivery Systems

Originating Global Technical Committee: Gases
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Pressure Measurement Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
· There are currently no standardized test methods or specifications for pressure measurement devices (transducers and gauges) used in semiconductor process equipment and facilities distribution systems. There are documents from ASME and ISA that can be readily adapted for use in this industry that will allow the users of these devices to clearly and competitively analyze the performance characteristics from the different manufacturers. The rated accuracy needs to be clearly defined as well as the design characteristics of these critical components. This activity is similar to those already underway in the Facilities Committee for MFCs, valves, and regulators.
· Additionally, the Facilities Committee has addressed the physical dimensions and interfaces of pressure transducers in the Gas Box Components Task Force as well as the Surface Mount Task Force, the envelope dimensions for pressure gauges has not been address and could be an additional activity for this task force.


b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
· The activity would form a task force of knowledgeable industry leaders who would review existing documents and data in order to develop a series of industry specific standards related to pressure measurement devices (transducers and gauges).
· The first document(s) would establish standard test methods for the pressure measurement devices used in the semiconductor industry.
· Once consensus is achieved on test methods performance specification can be developed for these components.
· Additional consideration could include development of specifications or guides for the dimensions and connections of pressure gauges.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/06/99b. 1st Draft by: 10/01/2003
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/02/2003
e. TC Chapter Approval By:09/02/2003

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
·
SEMI/Japan - Facilities Committee
SEMI/Japan – Gas System Components Subcommittee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Published as SEMI F113-1116

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS08/22/2001
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on