SEMI International Standards
Task Force Organization Form (TFOF)

Task Force Name: Seismic Protection Task Force

Global Technical Committee: EH&S
Originating Technical Committee Region: Japan

1. Charter:

This task force considers technical criteria of seismic protection necessary as a SEMI Safety Guideline that suppliers and users discuss and agree upon.

2. Scope:
Consider design criteria, facility design criteria and documentations of seismic protection for semiconductor manufacturing equipment and similar equipment (e.g., PV manufacturing equipment). Use result of this to develop the revision document for SEMI S2 and S26 or a new safety guideline.

3. Formal linkages with Task Forces in other Regions:
Taiwan EHS Committee
NA EHS Committee

4. Approval:
Task Force formed on: 04/19/2012