SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/07/2018Revised (if Applicable): 12/01/2020

Document Number: 6467
SNARF for: Line-Item Revision to SEMI E129-0912, Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility

Originating Global Technical Committee: Metrics
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: ESD/ESC Task Force- N.A
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
E129 is due for its mandatory 5-year review. It is desirable that E129 harmonize as closely as possible with the recommendations of the IRDS (former ITRS) that is issued annually. This line-item ballot will update E129 to harmonize with the most recent version of the publicly available IRDS report.

Referenced documents will be updated to latest version, and obsolete or outdated documents will be removed.

This change will support more effective factory negotiations and purchase agreements between the designers, suppliers, and the purchaser/user, by eliminating confusion as to applying the E129 document.

Another line item will be included for any editorial changes needed to comply with the latest version of the Style Manual, Regulations, and/or Procedure Manual.



b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This ballot of the proposed document will have 3 line items.
1) Tables as referenced from IRDS throughout the document in development will be updated.
2) Referenced documents will be updated to latest version, and obsolete or outdated documents will be removed.
3) Editorial changes will be implemented as needed to comply with Style Manual, Regulations, and or Procedure Manual.


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/07/2018b. 1st Draft by: 08/28/2018
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/11/2021
e. TC Chapter Approval By:04/01/2021

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/02/2020
Recorded in TC Minutes01/07/2021

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

Attach Pictures and Files here:

Original SNARF Approval Dates:
TC Chapter or GCS11/07/2018
Recorded in TC Minutes11/07/2018