SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5625
SNARF for: Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Non-Ionizing Radiation

Originating Global Technical Committee: EH&S
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: S2 Non-Ionizing Radiation Task Force

1. Rationale: Administrative SNARF – This SNARF is to continue the efforts of the S2 Non-Ionizing Radiation Task Force as all line items in the last ballot were approved.

The primary task left is to add some material to RI7 to better explain the rationale for the new levels that were introduced from the recent set of revisions to the optical radiation criteria.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Related Information 7 will be updated as it is the rationale for the recently revised criteria.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 04/01/2013b. 1st Draft by:
c. Preballot by: d. Technical Ballot by: 08/29/2013
e. Committee Approval By:10/28/2013

Safety Considerations:
The resulting document is expected to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 11, 2013