SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared: 04/19/2012
Revised (if Applicable): 11/25/2016

Name of Task Force (TF): PV Diffusion Furnace Test Methods TF

Global Technical Committee: Photovoltaic
Originating Technical Committee Region: China


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1. Charter: (State the objective of the proposed TF.)
Identify standardization needs and priorities and develop test methods related to diffusion furnaces to help evaluate the performance of heater tubes.
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2. Scope: (Define the specific activities that the TF will conduct.)
1) In-line monitoring of flat temperature zone in horizontal diffusion furnaces;
2) Plasma enhanced chemical vapor deposition equipment.

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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Int’l PV Analytical Test Methods TF
PV Silicon Materials TF

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4. Formation Date:(TF formed on)

Task Force formed on: 05/11/2012
Task Force approved by Committee/GCS on: 05/11/2012

5. Comments
None.