SEMI International Standards
Standards New Activity Report Form (SNARF)
Revised (if Applicable):
New Standard: Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS)
Originating Global Technical Committee:
Automated Test Equipment
Originating TC Chapter:
Task Force (TF) in which work is to be carried out:
Tester Event Messaging for Semiconductors (TEMS)
Note: If a new task force is needed, also submit a task force organization form (TFOF)
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
There is an evolving class of services in the automated test equipment (ATE) domain that are used for both overall equipment efficiency (OEE) and yield operations. These server-client based services currently require unique data implementation per ATE vendor and application tool; this is because test equipment and test operations utilize a diverse range of data formats, specifications, and interface requirements. These services are being driven by the need for real-time, or near real-time, data analysis for product quality, test yield, OEE etc.
These diverse range of formats create a significant service and application engineering costs for ATE vendors, OSAT companies, IDM test operations, software providers, and handler equipment manufactures. This standard has been developed as an easy to implement method to communicate state and data to such services, and therefore reduce the burden on all participants in these systems - ATE vendors, tool vendors, integrated device makers (IDM’s) and outsourced assembly & test (OSAT’s).
This specification aims to define an ATE data messaging system based on standard communication protocols between a Test Cell host and a server. The specification is designed to co-exist with current implementations of the different communication methods and allow for easy implementation of client-server-based functionality services for ATE operations.
Subordinate specifications will be developed to provide protocols implementations for this primary standard.
b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:
ATE users and equipment manufacturers
c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible
Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The standard will be focused on ATE data and events messaging, using Rich Interactive Test Database (RITdb) entity types, where applicable, as the standard data format, and control requirements.
It will coexist with other test communication interfaces such as those involving handlers, probers, test instrumentation, and other systems covered by existing standards (e.g., SEMI E30, E4, E5, STDF, etc.).
b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)
For a new Subordinate Standard, identify the Primary Standard here:
For Standards, identify the Standard Subtype below:
3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start:
b. 1st Draft by:
c. (Optional) Informational Ballot by:
d. Letter Ballot by:
e. TC Chapter Approval By:
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (see Procedure Manual § 7):
will be issued – identify the recipient global technical committee(s):
Identify the recipient global technical committee(s):
Automation Technology, Information & Control
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline
to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the
for special procedures to be followed.
NOT to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is still technically sound and complete.
6. Intellectual Property Considerations:
For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines
the use of patented technology is NOT required.
If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required
the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’
: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of
§ 16 must be followed.
will incorporate Copyrighted Item’
: A copyright release letter must be obtained from the copyright owner prior to publication.
7. Comments, Special Circumstances:
TC Member Review:
took place between (put dates below) before approval by the GCS, or
Member Review Start Date;
Member Review End Date:
‘TC Member Review’ is required by the
for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See
9. SNARF Approval Dates:
TC Chapter or GCS
Recorded in TC Minutes
10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
Attach Pictures and Files here: